CN103388172A - 一种快速判断电镀添加剂性能的方法 - Google Patents
一种快速判断电镀添加剂性能的方法 Download PDFInfo
- Publication number
- CN103388172A CN103388172A CN2013103073137A CN201310307313A CN103388172A CN 103388172 A CN103388172 A CN 103388172A CN 2013103073137 A CN2013103073137 A CN 2013103073137A CN 201310307313 A CN201310307313 A CN 201310307313A CN 103388172 A CN103388172 A CN 103388172A
- Authority
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- China
- Prior art keywords
- electroplating
- additive
- cathode plate
- mother liquor
- copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009713 electroplating Methods 0.000 title claims abstract description 87
- 239000000654 additive Substances 0.000 title claims abstract description 48
- 230000000996 additive effect Effects 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims abstract description 36
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052802 copper Inorganic materials 0.000 claims abstract description 8
- 239000010949 copper Substances 0.000 claims abstract description 8
- 238000007747 plating Methods 0.000 claims description 30
- 229910001369 Brass Inorganic materials 0.000 claims description 18
- 239000010951 brass Substances 0.000 claims description 18
- 239000012452 mother liquor Substances 0.000 claims description 15
- 239000003795 chemical substances by application Substances 0.000 claims description 12
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 9
- 239000008367 deionised water Substances 0.000 claims description 9
- 239000000243 solution Substances 0.000 claims description 8
- RIRXDDRGHVUXNJ-UHFFFAOYSA-N [Cu].[P] Chemical compound [Cu].[P] RIRXDDRGHVUXNJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000007864 aqueous solution Substances 0.000 claims description 6
- 238000005282 brightening Methods 0.000 claims description 6
- 229910021641 deionized water Inorganic materials 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 241000370738 Chlorion Species 0.000 claims description 3
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 3
- 229910001431 copper ion Inorganic materials 0.000 claims description 3
- 239000003112 inhibitor Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- DAJSVUQLFFJUSX-UHFFFAOYSA-M sodium;dodecane-1-sulfonate Chemical compound [Na+].CCCCCCCCCCCCS([O-])(=O)=O DAJSVUQLFFJUSX-UHFFFAOYSA-M 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 239000001117 sulphuric acid Substances 0.000 claims description 3
- 235000011149 sulphuric acid Nutrition 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 4
- 239000002253 acid Substances 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- TZBAVQKIEKDGFH-UHFFFAOYSA-N n-[2-(diethylamino)ethyl]-1-benzothiophene-2-carboxamide;hydrochloride Chemical compound [Cl-].C1=CC=C2SC(C(=O)NCC[NH+](CC)CC)=CC2=C1 TZBAVQKIEKDGFH-UHFFFAOYSA-N 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- 229920002582 Polyethylene Glycol 600 Polymers 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 229960003511 macrogol Drugs 0.000 description 5
- 229940057847 polyethylene glycol 600 Drugs 0.000 description 5
- 238000011160 research Methods 0.000 description 5
- 206010021703 Indifference Diseases 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000002688 persistence Effects 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- -1 polydithio-dipropyl Polymers 0.000 description 1
- 229940057838 polyethylene glycol 4000 Drugs 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
Abstract
Description
Claims (5)
Priority Applications (1)
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CN201310307313.7A CN103388172B (zh) | 2013-07-22 | 2013-07-22 | 一种快速判断电镀添加剂性能的方法 |
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CN201310307313.7A CN103388172B (zh) | 2013-07-22 | 2013-07-22 | 一种快速判断电镀添加剂性能的方法 |
Publications (2)
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CN103388172A true CN103388172A (zh) | 2013-11-13 |
CN103388172B CN103388172B (zh) | 2016-06-22 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI680294B (zh) * | 2014-03-11 | 2019-12-21 | 日商凸版印刷股份有限公司 | 電鍍銅液分析裝置及電鍍銅液分析方法 |
CN111999369A (zh) * | 2020-08-18 | 2020-11-27 | 九江德福科技股份有限公司 | 一种锂电铜箔添加剂电化学性能分析方法 |
CN113311032A (zh) * | 2020-02-27 | 2021-08-27 | 芯恩(青岛)集成电路有限公司 | Ecp填充监测设备及监测方法 |
CN114858897A (zh) * | 2021-12-28 | 2022-08-05 | 麦德美科技(苏州)有限公司 | 半导体的酸性镀铜工艺整平剂的分析方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0462943A1 (en) * | 1990-06-20 | 1991-12-27 | Permelec Electrode Ltd. | Method of copper plating |
JP2001152398A (ja) * | 1999-08-05 | 2001-06-05 | Fujitsu Ltd | 電気めっき方法、めっき液評価方法、めっき装置、半導体装置の製造方法 |
CN1564941A (zh) * | 2001-10-01 | 2005-01-12 | G·恰雷特 | 一种用于分析酸性铜电镀液中三种有机添加剂的改进方法 |
US20050121314A1 (en) * | 2000-03-22 | 2005-06-09 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Electrolytic plating method and device for a wiring board |
US20070261963A1 (en) * | 2006-02-02 | 2007-11-15 | Advanced Technology Materials, Inc. | Simultaneous inorganic, organic and byproduct analysis in electrochemical deposition solutions |
CN101418459A (zh) * | 2008-10-27 | 2009-04-29 | 江苏佳成机械有限公司 | 黄铜线材的镀铜工艺 |
CN102492968A (zh) * | 2011-12-28 | 2012-06-13 | 尼尔金属(苏州)有限公司 | 在黄铜基材上镀铜的方法 |
CN202415725U (zh) * | 2011-12-28 | 2012-09-05 | 尼尔金属(苏州)有限公司 | 用于在黄铜基材上镀铜的系统 |
CN103014823A (zh) * | 2013-01-05 | 2013-04-03 | 江苏物联网研究发展中心 | 改进铜电沉积的添加剂效果快速判定方法 |
-
2013
- 2013-07-22 CN CN201310307313.7A patent/CN103388172B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0462943A1 (en) * | 1990-06-20 | 1991-12-27 | Permelec Electrode Ltd. | Method of copper plating |
JP2001152398A (ja) * | 1999-08-05 | 2001-06-05 | Fujitsu Ltd | 電気めっき方法、めっき液評価方法、めっき装置、半導体装置の製造方法 |
US20050121314A1 (en) * | 2000-03-22 | 2005-06-09 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Electrolytic plating method and device for a wiring board |
CN1564941A (zh) * | 2001-10-01 | 2005-01-12 | G·恰雷特 | 一种用于分析酸性铜电镀液中三种有机添加剂的改进方法 |
US20070261963A1 (en) * | 2006-02-02 | 2007-11-15 | Advanced Technology Materials, Inc. | Simultaneous inorganic, organic and byproduct analysis in electrochemical deposition solutions |
CN101418459A (zh) * | 2008-10-27 | 2009-04-29 | 江苏佳成机械有限公司 | 黄铜线材的镀铜工艺 |
CN102492968A (zh) * | 2011-12-28 | 2012-06-13 | 尼尔金属(苏州)有限公司 | 在黄铜基材上镀铜的方法 |
CN202415725U (zh) * | 2011-12-28 | 2012-09-05 | 尼尔金属(苏州)有限公司 | 用于在黄铜基材上镀铜的系统 |
CN103014823A (zh) * | 2013-01-05 | 2013-04-03 | 江苏物联网研究发展中心 | 改进铜电沉积的添加剂效果快速判定方法 |
Non-Patent Citations (1)
Title |
---|
张允诚等: "《电镀手册》", 31 January 2007, article "电镀手册", pages: 198 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI680294B (zh) * | 2014-03-11 | 2019-12-21 | 日商凸版印刷股份有限公司 | 電鍍銅液分析裝置及電鍍銅液分析方法 |
CN113311032A (zh) * | 2020-02-27 | 2021-08-27 | 芯恩(青岛)集成电路有限公司 | Ecp填充监测设备及监测方法 |
CN111999369A (zh) * | 2020-08-18 | 2020-11-27 | 九江德福科技股份有限公司 | 一种锂电铜箔添加剂电化学性能分析方法 |
CN114858897A (zh) * | 2021-12-28 | 2022-08-05 | 麦德美科技(苏州)有限公司 | 半导体的酸性镀铜工艺整平剂的分析方法 |
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CN103388172B (zh) | 2016-06-22 |
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Address after: 215000 East Side of Chang'an Road, Wujiang Economic and Technological Development Zone, Suzhou City, Jiangsu Province (Science and Technology Pioneering Park) Patentee after: Meiyouke (Suzhou) Semiconductor Materials Co.,Ltd. Country or region after: China Address before: 215200, 1st Floor, 9th Floor, No. 2358 Chang'an Road, Science and Technology Entrepreneurship Park, Wujiang Economic and Technological Development Zone, Suzhou City, Jiangsu Province Patentee before: SUZHOU SHINHAO MATERIALS LLC Country or region before: China |