CN103223760A - Bonding apparatus and bonding method - Google Patents
Bonding apparatus and bonding method Download PDFInfo
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- CN103223760A CN103223760A CN2013100323624A CN201310032362A CN103223760A CN 103223760 A CN103223760 A CN 103223760A CN 2013100323624 A CN2013100323624 A CN 2013100323624A CN 201310032362 A CN201310032362 A CN 201310032362A CN 103223760 A CN103223760 A CN 103223760A
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- mentioned
- upper table
- rotation roller
- substrate
- flex plate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B41/00—Arrangements for controlling or monitoring lamination processes; Safety arrangements
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
Abstract
The invention provides a bonding apparatuse for reducing defect and warping of laminating plate after bonding and a bonding method. The bonding device (10) is used for bonding a plate shaped component (2) and a flexible plate (3), wherein, the device comprises: an upper working table (20) for absorbing a plate shaped component; a lower working table quippped below the upper working table (20) for carrying the flexbile plate (3); a rotating roller (50) which contacts the lower surface of the flexible plate (3) supported by the lower working table (40) and flexibly deforms the flexible plate (3) by dead weight; a pressing part (50) for pressing the flexible plate (3) to the plate shaped component (2) absorbed by the upper working table (20) by the rotating roller (50); a moving mechanism (70) for moving the rotating roller (50) and the pressing part (60) relative to the upper working table (20).
Description
Technical field
The present invention relates to a kind of sticker and method of attaching.
Background technology
Along with slimming, the lightweight of electronic devices such as display floater, solar cell, thin-film secondary battery, require to be used for the substrate thin plateization of electronic device.If the substrate attenuation, therefore the processing variation of substrate then is difficult to form the functional layer (for example thin film transistor (TFT), colour filter) of used for electronic device on substrate.
Therefore, proposed a kind of adhesive substrate and stiffener and make plywood, on the substrate of this plywood, form after the functional layer method (for example, with reference to patent documentation 1) that substrate and stiffener are peeled off.In patent documentation 1, use the vacuum stamping machine for the stickup between substrate and the stiffener.
In addition, as the method for adhesive substrate and thin slice, proposed a kind of utilize adsorbent from the top supporting substrates and utilize the method (for example, with reference to patent documentation 2) of a plurality of suckers flatly from the below supporting sheet.In the method, use the rotation roller that lifts thin slice from the below and be crimped on substrate.Along with moving of rotation roller, a plurality of suckers order is according to the rules removed absorption, and keeps out of the way downwards.
Patent documentation 1: the spy of Japan opens the 2007-326358 communique
Patent documentation 2: the spy of Japan opens the 2009-040617 communique
In the method for attaching that patent documentation 1 is put down in writing, because substrate and stiffener are pasted together abreast, so under the lower situation of vacuum, between substrate and stiffener, have nipped bubble sometimes and become defective.
In addition, in the method for attaching that patent documentation 2 is put down in writing, owing to utilize a plurality of suckers of two-dimensional discrete configuration to adsorb thin slice, therefore put under the influence of absorption affinity of thin slice in the part, thin slice is pasted with flat substrate mutually with the state of distortion.Because thin slice is desired to return original shape after stickup, so the warpage of plywood is bigger.
Summary of the invention
The present invention makes in view of the above problems, and its purpose is to provide a kind of can reduce the defective of the plywood after the stickup, the sticker and the method for attaching of warpage.
In order to address the above problem, the sticker of a technical scheme of the present invention is used to paste tabular component and flex plate, and wherein, this sticker has:
Upper table, it is used to adsorb above-mentioned tabular component;
Lower table, it is configured in the below of this upper table, for above-mentioned flex plate mounting;
The rotation roller, its lower surface with the above-mentioned flex plate that is supported by this lower table contacts, and utilizes deadweight to make above-mentioned flex plate deflection deformation;
The press section, it will utilize the above-mentioned flex plate that deflection deformation has taken place this rotation roller to press on the tabular component that is adsorbed by above-mentioned upper table; And
Travel mechanism, it makes above-mentioned rotation roller and above-mentioned press section relatively move with respect to above-mentioned upper table.
In addition, the method for attaching of another technical scheme of the present invention is used to paste tabular component and flex plate, and wherein, this method of attaching comprises following operation:
Utilize upper table to adsorb above-mentioned tabular component and with the operation of above-mentioned flex plate mounting on the lower table of the below that is configured in above-mentioned upper table; And
The operation that the rotation roller is relatively moved with respect to above-mentioned upper table, this rotation roller contacts with the lower surface of the above-mentioned flex plate that is supported by above-mentioned lower table and under the state that makes above-mentioned flex plate deflection deformation is conducted oneself with dignity in utilization above-mentioned flex plate is pressed on the above-mentioned tabular component that is adsorbed by above-mentioned upper table.
Adopt the present invention, can provide a kind of and can reduce the defective of the plywood after the stickup, the sticker and the method for attaching of warpage.
Description of drawings
Fig. 1 is the cutaway view that expression utilizes the plywood that the sticker of one embodiment of the present invention makes.
Fig. 2 is the cutaway view that the electronic device of plywood manufacturing is used in expression.
Fig. 3 is the III-III cutaway view of Fig. 4 of the sticker of expression one embodiment of the present invention.
Fig. 4 is the IV-IV cutaway view of Fig. 3.
Fig. 5 is the V-V cutaway view of Fig. 3.
Fig. 6 is the VI-VI cutaway view of Fig. 7 of action of conveying mechanism of the sticker of expression one embodiment of the present invention.
Fig. 7 is the VII-VII cutaway view of Fig. 6.
Fig. 8 is the VIII-VIII cutaway view of Fig. 6.
Fig. 9 is the figure (1) of the action of the sticker in expression one embodiment.
Figure 10 is the figure (2) of the action of the sticker in expression one embodiment.
Figure 11 is the figure of the action of the sticker in expression the 1st variation.
Figure 12 is the figure of the action of the sticker in expression the 2nd variation.
Figure 13 is the figure (1) of the action of the sticker in expression the 3rd variation.
Figure 14 is the figure (2) of the action of the sticker in expression the 3rd variation.
The specific embodiment
Below, be used to implement mode of the present invention with reference to description of drawings.In each accompanying drawing,, and omit explanation to same or the corresponding same or corresponding Reference numeral of structure mark.
The sticker of present embodiment is in order to be pasted together substrate and stiffener corresponding to the thin plateization of the substrate that is used for electronic device.On utilizing the reinforced substrate of stiffener, form after the functional layer, peel off substrate and stiffener, produce electronic device with substrate and functional layer.Stiffener does not become the part of electronic device.
At this, electronic device is meant electronic components such as display floater, solar cell, thin-film secondary battery.Display floater comprises liquid crystal panel (LCD), plasma panel (PDP), organic EL panel (OLED).
(plywood)
Fig. 1 is the cutaway view that expression utilizes the plywood that the sticker of one embodiment of the present invention makes.The stiffener 3 that plywood 1 comprises substrate 2 and is used for substrate 2 is strengthened.
(substrate)
Form the functional layer (for example conductive layer) of regulation in the manufacturing process of electronic device midway, at substrate 2.
Glass as glass substrate is not particularly limited, and for example enumerates alkali-free glass, borosilicate glass, soda-lime glass, high silica glass, other are oxide based glass of main component etc. with the silica.As oxide based glass, the content that is preferably based on the silica of oxide conversion is the glass of 40 quality %～90 quality %.
As the glass of glass substrate, preferably adopt to be suitable for the kind of electronic device, the glass of its manufacturing process.For example preferably, the glass substrate used of liquid crystal panel is made of the glass that does not contain alkali metal component in fact (alkali-free glass).Like this, the glass of suitably selecting glass substrate according to the kind and the manufacturing process thereof of applied electronic device.
The resin of resin substrate both can be a crystalline resin, can be non-crystalline resin also, was not particularly limited.
As crystalline resin, for example enumerate polyamide, polyacetals, polybutylene terephthalate (PBT), PETG, PEN or syndiotactic polytyrene etc. as thermoplastic resin, in thermosetting resin, polyphenylene sulfide, polyether-ether-ketone, liquid crystal polymer, fluororesin or polyethers nitrile etc. have been enumerated.
As non-crystalline resin, Merlon, Noryl, poly-cyclohexene or the polynorbornene for example enumerated as thermoplastic resin are resin etc., in thermosetting resin, polysulfones, polyether sulfone, polyarylate, polyamidoimide, PEI or TPI have been enumerated.
As the resin of resin substrate, preferred especially amorphism and thermoplastic resin.
The thickness of substrate 2 is set according to the kind of substrate 2.For example, under the situation that is glass substrate, and below the preferred 0.7mm, more preferably below the 0.3mm, below the further preferred 0.1mm for the lightweight of electronic device, thin plateization.Be under the situation below the 0.3mm, can giving glass substrate good flexible.Be under the situation below the 0.1mm, glass substrate can be being batched and be the roller shape.In addition, for reason such as the processing easy to manufacture, glass substrate of glass substrate is easy and the thickness of glass substrate is preferably more than the 0.03mm.
(stiffener)
In order to suppress warpage that stiffener 3 causes by variations in temperature, to peel off and the less stiffener of absolute value of linear expansion coefficient difference between preferred and the substrate 2.At substrate 2 is under the situation of glass substrate, and preferred stiffener 3 contains glass plate.The glass of preferred this glass plate is the kind same with the glassy phase of glass substrate.
Stiffener 3 has support plate 4 and the resin bed 5 that is formed on the support plate 4.Under the effect that acts on Van der Waals force between resin bed 5 and the substrate 2 etc., resin bed 5 combines in the mode that can peel off with substrate 2.
In addition, the stiffener 3 of present embodiment is made of support plate 4 and resin bed 5, but also can only be made of support plate 4.Under the effect that acts on Van der Waals force between support plate 4 and the substrate 2 etc., support plate 4 combines in the mode that can peel off with substrate 2.Also can be formed with inorganic thin film on the surface of support plate 4 so that as the glass plate of support plate 4 with at high temperature not bonding as the glass substrate of substrate 2.In addition, different zone of surface roughness etc. also can be set by surface and on the interface between support plate 4 and the substrate 2, be provided with the different zone of adhesion at support plate 4.
In addition, the stiffener 3 of present embodiment is made of support plate 4 and resin bed 5, but support plate 4 also can be for a plurality of.Similarly resin bed 5 also can be for a plurality of.
(support plate)
Support plate 4 supports, strengthens via 5 pairs of substrates 2 of resin bed.Support plate 4 prevents distortion, scuffing, breakage of the substrate 2 in the manufacturing process of electronic device etc.
Support plate 4 for example is glass plate, ceramic wafer, resin plate, semiconductor board or metallic plate etc.The kind of support plate 4 waits according to the kind of the kind of electronic device, substrate 2 and selects.If support plate 4 is an identical type with substrate 2, then can reduces the warpage that causes by variations in temperature, peel off.
Poor (absolute value) of the average coefficient of linear expansion between support plate 4 and the substrate 2 suitably set according to the size shape of substrate 2 etc., but preference is as being 35 * 10
-7/ ℃ below.At this, " average coefficient of linear expansion " is meant 50 ℃～300 ℃ the interior average coefficient of linear expansion (Japanese JIS R3102) of temperature range.
The thickness of support plate 4 for example is below the 0.7mm.In addition, for substrate 2 is strengthened the thickness of support plate 4 is preferably more than the 0.4mm.The thickness of support plate 4 both can be thicker than the thickness of substrate 2, also can be than the thin thickness of substrate 2.
Preferably, the profile of support plate 4 profile with resin bed 5 as shown in Figure 1 is identical or bigger than the profile of resin bed 5, so that support plate 4 can support resin bed 5 integral body.
(resin bed)
The resin of resin bed 5 is not particularly limited.For example, acrylic resin, vistanex, polyurethane resin, polyimide resin, silicones, polyimides silicones etc. have been enumerated as the resin of resin bed 5.Also can mix and use several resins.Wherein, based on the viewpoint of hear resistance, fissility, preferred silicones, polyimides silicones.
The thickness of resin bed 5 is not particularly limited, but preferred 1 μ m～50 μ m, more preferably 4 μ m～20 μ m.Be made as more than the 1 μ m by thickness, thereby under the situation of having sneaked into bubble, foreign matter between resin bed 5 and the substrate 2, resin bed 5 can be out of shape to absorb the thickness of bubble, foreign matter resin bed 5.On the other hand,, then can shorten the formation time of resin bed 5, and then, be economical therefore owing to do not use the resin of required above resin bed 5 if the thickness of resin bed 5 is below the 50 μ m.
Preferably, the profile of resin bed 5 profile with substrate 2 as shown in Figure 1 is identical or bigger than the profile of substrate 2, so that tight contact substrate 2 integral body of resin bed 5.
In addition, resin bed 5 also can constitute by more than two-layer.In this case, " thickness of resin bed " is meant the aggregate thickness of all resin beds.
In addition, resin bed 5 by situation about constituting more than two-layer under, the kind that forms the resin of each layer also can be different.
(duplexer)
Fig. 2 is the cutaway view that the duplexer of plywood manufacturing is used in expression.
For example, duplexer 6 has stiffener 3A, substrate 2A, liquid crystal layer 7, the substrate 2B that comprises support plate 4A and resin bed 5A successively and comprises support plate 4B and the stiffener 3B of resin bed 5B.This duplexer 6 is midway being made in the manufacturing process of LCD.The face of liquid crystal layer 7 sides on a substrate 2A is formed with not shown thin film transistor (TFT) (TFT), and the face of liquid crystal layer 7 sides on another substrate 2B is formed with not shown colour filter (CF).
After having peeled off stiffener 3A, 3B, Polarizer, backlight etc. are installed, obtain LCD as product.Use stripping off device described later to peel off stiffener 3A, 3B.
In addition, in the present embodiment, peeling off after forming liquid crystal layer 7 of stiffener 3A, 3B carried out, but also can carry out after forming TFT, CF and before forming liquid crystal layer 7.
(sticker)
Fig. 3 is the III-III cutaway view of Fig. 4 of the sticker of expression one embodiment of the present invention.Fig. 4 is the IV-IV cutaway view of Fig. 3, and Fig. 5 is the V-V cutaway view of Fig. 3.Fig. 6 is the VI-VI cutaway view of Fig. 7 of action of conveying mechanism of the sticker of expression one embodiment of the present invention.Fig. 7 is the VII-VII cutaway view of Fig. 6, and Fig. 8 is the VIII-VIII cutaway view of Fig. 6.Fig. 9～Figure 10 is the figure of the action (method of attaching) of the sticker in expression one embodiment.In addition, in Fig. 3～Figure 12, in order to be easy to observe accompanying drawing, omit the diagram of the included resin bed 5 of stiffener 3.In addition, in Fig. 3, Fig. 4, Fig. 6, Fig. 7 and Fig. 9～Figure 12, for convenience of explanation, omit the diagram of restriction portion 80.In addition, because the internal structure of various cylinder main bodys described later is common structures, therefore omit diagram.
As Fig. 3～shown in Figure 5, sticker 10 is to be used to paste as the substrate 2 of tabular component and device as the stiffener 3 of flex plate.Sticker 10 has the upper table 20 that is used to adsorb substrate 2 and the below that is configured in upper table 20, for the lower table 40 of stiffener 3 mountings.In addition, substrate 2 also can be opposite with the configuration of stiffener 3, also can be substrate 2 mountings in lower table 40, stiffener 3 is adsorbed by upper table 20.
As Fig. 6～shown in Figure 9, sticker 10 has the conveying mechanism 11 with respect to upper table 20 and lower table 40 handing-over substrates 2 and stiffener 3.Conveying mechanism 11 has the retaining member 12 that is used to keep substrate 2 or stiffener 3.As shown in Figure 7, retaining member 12 has a plurality of arms 13 that are separated with the compartment of terrain arrangement in the horizontal direction and a plurality of suckers 14 of being located at each arm 13.
As Fig. 9 and shown in Figure 10, sticker 10 have rotation roller 50 and as the press section by cylinder pressure 60, this rotation roller 50 contacts with lower surface by the stiffener 3 of lower table 40 supporting, utilization is conducted oneself with dignity and is made flex plate 3 deflection deformations; Should by cylinder pressure 60 will utilize rotate roller 50 and the stiffener 3 of deflection deformation by being pressed in the substrate 2 that is adsorbed on upper table 20.By cylinder pressure 60 by constituting by cylinder pressure main body 61 with the mode self-pressing cylinder main body that can stretch 61 outstanding bars 62.Be fixed with can be the supporting frame 63 that roller 50 is rotated in center free rotation mode supporting on the top of bar 62 with the central shaft of rotation roller 50.
As Fig. 3 and shown in Figure 6, sticker 10 has the travel mechanism 70 that makes rotation roller 50 and relatively move with respect to upper table 20 by cylinder pressure 60.Travel mechanism 70 has two guide rail Gd being laid on the frame Fr, the glide base Sb that can move along guide rail Gd and is used to drive the drive division 71(of glide base Sb with reference to Fig. 3).Drive division 71 is mobile with motor 72 with will move with rotatablely moving of motor 72 and be converted to rectilinear motion and the ball-screw 73 that transmits to glide base Sb etc. constitutes by what for example be fixed in frame Fr.On glide base Sb, be fixed with by cylinder pressure 60.Move and can be servomotor with motor 72, by motor body portion 74 be used to detect the rotation amount of motor body portion 74 and the encoder portion 75 of direction of rotation constitutes.If move with motor 72 rotations, then glide base Sb moves along the length direction (being left and right directions in Fig. 3, Fig. 6, Fig. 9, Figure 10) of guide rail Gd, relatively moves with respect to upper table 20 by cylinder pressure 60 and rotation roller 50.Move with motor 72 and be fed control, so that become the target location with respect to the relative position of upper table 20 by cylinder pressure 60 grades according to the testing result of encoder portion 75.
Shown in Fig. 3 waits, upper table 20 absorption substrates 2 and from top supporting substrates 2.Upper table 20 by the adsorption plate 21 that is used to adsorb substrate 2, be formed with the main frame 24 of the groove 23 that a plurality of adsorption holes 22 of making breakthrough form be formed in adsorption plate 21 are connected and the stiffener 26 that main frame 24 is strengthened constitutes.The groove 23 that is formed at main frame 24 is connected with source of suction such as vavuum pumps.If source of suction work then is depressurized in the adsorption hole 22, substrate 2 is fixed in upper table 20.The a plurality of cylinders 25 of main frame 24 supportings.Each cylinder 25 has cylinder main body 27 that is fixed in main frame 24 and the bar of giving prominence to from cylinder main body 27 in the mode that can stretch 28.The a plurality of bars hole breakthrough form corresponding with a plurality of bar 28 is formed in adsorption plate 21 and main frame 24.Cylinder 25 also can be fixed in stiffener 26.
As Fig. 4 and shown in Figure 7, upper table 20 is connected with switching mechanism 30, and this switching mechanism 30 makes upper table 20 counter-rotating, and the direction of the adsorption plane of the absorption substrate 2 of upper table 20 is being switched up and down.Switching mechanism 30 has a plurality of (for example two) the upper table supporting member 31 and the elevating mechanism 32 that makes a plurality of upper table supporting member 31 liftings that supports upper table 20 in the mode that can rotate.Be provided with the rotation motor 33 that makes upper table 20 rotations at a upper table supporting member 31.Elevating mechanism 32 is made of with motor 35 etc. a plurality of elevating levers 34 that are connected with a plurality of upper table supporting members 31, the lifting that makes a plurality of elevating lever 34 liftings.Upper table 20 can move up and down with respect to frame Fr by means of elevating mechanism 32.
Upper table 20 after rising to assigned position by means of elevating mechanism 32, reverses with motor 33 by means of rotation from conveying mechanism 11 reception substrates 2 time as shown in Figure 7, and the adsorption plane of upper table 20 becomes level up.Carry the substrate 2 that keeps by retaining member 12 to the top of adsorption plane, remove the absorption that the sucker 14 by each retaining member 12 carries out.Bar 28 elongations of a plurality of cylinders 25 are also outstanding from the adsorption plane of upper table 20, lift substrate 2 from retaining member 12.Then, extract retaining member 12 from the gap that is formed between substrate 2 and the upper table 20.Afterwards, the bar 28 of a plurality of cylinders 25 shrinks and the adsorption plane that submerges, and substrate 2 is positioned on the adsorption plane, and substrate 2 is adsorbed on upper table 20.Then, rotation makes upper table 20 counter-rotatings with motor 33, and the adsorption plane of upper table 20 becomes level down.At last, elevating mechanism 32 makes upper table 20 drop to assigned position.In the present embodiment and since with substrate 2 mountings on the adsorption plane of upper table 20, and flatly supporting substrates 2 after substrate 2 is adsorbed, can prevent that therefore substrate 2 is out of shape, and can reduce the residual stress of plywood 1.In addition,, therefore on retaining member 12, exist under the situation of foreign matters such as dust, can prevent that foreign matter from entering between substrate 2 and the stiffener 3 because retaining member 12 does not contact with the face of the side that contacts with stiffener 3 of substrate 2.
The align member 15 that relative position when as shown in Figure 4 and Figure 5, sticker 10 also has adhesive substrate 2 with stiffener 3, upper table 20 and lower table 40 positions.Align member 15 for example is fixed in frame Fr, contacts by the lower surface with upper table 20, thereby the relative position of upper table 20 with lower table 40 positioned.At this moment, the mounting surface almost parallel for stiffener 3 mountings of the adsorption plane of upper table 20 and lower table 40 is better.
In addition, as long as align member 15 can be flexible along the direction that interval G changes, structure can be varied.For example, align member 15 also can and make rotatablely moving of turning motor be converted into straight-line ball-screw etc. by turning motor to constitute.Turning motor is according to controlled 90 FEEDBACK CONTROL of the testing result of position sensor IS, so that distance L becomes setting.
Lower table 40 can relatively move better with respect to upper table 20 with rotation roller 50 with by cylinder pressure 60.Lower table 40 for example is fixed in glide base Sb, can go up in the direction parallel with the adsorption plane of upper table 20 (being left and right directions in Fig. 3, Fig. 6, Fig. 9, Figure 10) and move.
Lower table 40 support stiffener 3 in the mode that can slide so that lower table 40 when relatively moving with respect to upper table 20, be adsorbed in the substrate 2 of upper table 20 and can not misplace by the position between the stiffener 3 of lower table 40 supporting.Lower table 40 for reduce and stiffener 3 between coefficient of friction and have lower table main body 42 and be fixed in resin bed 41 on the lower table main body 42, mounting stiffener 3 on resin bed 41.Because the mounting surface of lower table 40 is formed by resin, therefore compare with situation about forming by metal, pottery, can reduce the friction between lower table 40 and the stiffener 3.Ultra High Molecular Weight Polyethylene), ABS resin etc. as resin, be not particularly limited, but for example use the UPE(ultra high molecular polyethylene:.Resin also can form plate, film or overlay film.
As Fig. 3 and shown in Figure 6, be lower table main body 42 in detail at lower table 40() and glide base Sb between be folded with separator 43.Dispose lifter plate 44 in the space that forms by separator 43, be used for guiding up and down lifter plate 44 guiding piece 45, be used to drive the telescoping cylinder 46 of lifter plate 44.As shown in Figure 6, telescoping cylinder 46 has cylinder main body 47 that is fixed in glide base Sb and the bar of giving prominence to from cylinder main body 47 in the mode that can stretch 48.Be fixed with lifter plate 44 on the top of bar 48, be separated with two-dimensionally on lifter plate 44 that the compartment of terrain is outstanding to be provided with a plurality of lifter pins 49.The a plurality of pin-and-holes corresponding with a plurality of lifter pin 49 run through and are formed at lower table 40.
When lower table 40 when conveying mechanism 11 receives stiffeners 3, carry the stiffener 3 that keeps by retaining member 12 to the top of lower table 40 as shown in Figure 6, remove the absorption that the sucker 14 by each retaining member 12 carries out.Bar 48 elongations of telescoping cylinder 46, lifter plate 44 rises.The lifter pin 49 outstanding from the mounting surface of lower table 40 lifts stiffener 3 from retaining member 12.Then, pull out retaining member 12 from the gap that is formed between stiffener 3 and the lower table 40.Afterwards, the bar 48 of telescoping cylinder 46 shrinks, and lifter plate 44 descends.Its result, the submerge mounting surface of level of lower table 40 of lifter pin 49, stiffener 3 by mounting on lower table 40.
As Fig. 9 and shown in Figure 10, rotation roller 50 contacts with the lower surface of the stiffener 3 that is supported by lower table 40, makes stiffener 3 because of the deadweight deflection deformation.In order to suppress the damage of stiffener 3, rotation roller 50 is made of with the sheet rubber that is fixed in the outer peripheral face of roller main body for example metal roller main body, utilizes sheet rubber to contact with the lower surface of stiffener 3.
Below the rotation roller 50 or tiltedly, as Fig. 9 and shown in Figure 10, in order to reduce the deflection of rotation roller 50, the backing roll 55 that is provided with supporting rotation roller 50 is better.Backing roll 55 contacts with the outer peripheral face of rotation roller 50, can be with 50 rotations of rotation roller.
As Fig. 4 and shown in Figure 7, it is can be that the center rotates freely with the central shaft of backing roll 55 that backing roll 55 is supported frame 63 supportings.Backing roll 55 is separated with the compartment of terrain and arranges a plurality of and the formation row on the direction parallel with the rotating shaft of rotation roller 50.In order to reduce the deflection of backing roll 55, be provided with the axle support 57 of the axial region 56 of each backing roll 55 of supporting each other at backing roll 55.Axle support 57 is fixed in supporting frame 63, can being the axial region 56 that the center free rotation mode supports each backing roll 55 with the central shaft of axial region 56.In addition, axle support 57 also can support the axial region 56 of each backing roll 55 in the mode that can not rotate, in this case, it is better to be equipped with bearing with the main part of each backing roll 55 with respect to axial region 56 free rotation mode in the main part of each backing roll 55.A plurality of backing rolls 55 both can rotate integratedly, also can rotate individually.
Backing roll 55 respectively is provided with 1 row in the moving direction both sides of rotation roller 50 (being the left and right sides in Fig. 3, Fig. 6, Fig. 9, Figure 10) respectively, and is better from oblique below supporting rotation roller 50.Can suppress to rotate the distortion do not expected of roller 50 to moving direction.
As shown in Figure 4, the supporting frame 63 with free rotation mode supporting rotation roller 50 and backing roll 55 can move up and down along the guiding piece 64 that is fixed in glide base Sb.Between supporting frame 63 and glide base Sb, set be used for top supporting frame 63 by cylinder pressure 60.
To push and be crimped on the substrate 2 that adsorbs by upper table 2 by means of the stiffener 3 of rotation roller 50 deflection deformations by cylinder pressure 60.As shown in Figure 3, be configured between two lower tables 40 by rotation roller 50 with by the crimping unit that cylinder pressure 60 constitutes.
As shown in Figure 5, sticker 10 can also have the restriction portion 80 that is moved upward of restriction upper table 20, so that upper table 20 can not float from align member 15 under the effect by the pressing force of cylinder pressure 60.In addition, under the very heavy situation of upper table 20, also portion 80 without limits.
If upper table 20 contacts with align member 15, then clamping cylinder 81 makes axial region 83 withdrawals on the basis that makes axial region 83 rotations that are supported on cylinder main body 82 in the mode that can rotate, utilizes arm 84 that upper table 20 is pressed on align member 15.
Then, according to Fig. 9～Figure 10, the action (method of attaching) of the sticker of said structure is described.The exercises of sticker are to carry out under the control of control part 90.
As shown in Figure 9, rotation roller 50 makes stiffener 3 deflection deformations of mounting in lower table 40 adhesive substrate 2 cylinder 60 jack-up upward that is pressed during with stiffener 3, from the below stiffener 3 is pushed and be crimped on the substrate 2 by upper table 20 absorption.Because it is pasted mutually with substrate 2, therefore between substrate 2 and stiffener 3, be difficult to the bubble of nipping, can reduce the defective of plywood 1.At this moment, mounting surface (upper surface) almost parallel of adsorption plane of upper table 20 (lower surface) and lower table 40.
Under this state, as shown in figure 10, rotation roller 50 relatively moves with respect to upper table 20 by means of travel mechanism 70, and substrate 2 is pasted mutually with stiffener 3.Rotation roller 50 moves to right-hand among the figure, and after the right half part of the right half part of having pasted substrate 2 and stiffener 3, the left in figure moves, the left-half of the left-half of adhesive substrate 2 and stiffener 3.The mode that rotation roller 50 can not misplace with substrate 2 and position between the stiffener 3 contacts with the lower surface of stiffener 3 on one side and rotates on one side.
At this moment, as shown in figure 10, lower table 40 can relatively move with respect to upper table 20 with rotation roller 50.Because the rotating shaft of rotation roller 50 and the interval W on the moving direction between the lower table 40 can not enlarge, therefore can reduce the deflection deformation of the stiffener 3 between rotation roller 50 and the lower table 40.Lower table 40 supports stiffener 3 in the mode that can slide so that the position between substrate 2 and the stiffener 3 can not misplace.
Like this, adopt present embodiment, when adhesive substrate 2 is made plywood 1 with stiffener 3, owing to do not adsorb fixedly stiffener 3, therefore stiffener 3 and substrate 2 can be under the strain less state of stiffener 3, pasted, the warpage of the plywood 1 after the stickup can be reduced.Both comprise under the situation of glass plate more obvious this effect at substrate 2 and stiffener 3.For example, under the situation of sticking glass plate and the rigidity resin plate lower than the rigidity of glass plate, because the rigidity of resin plate is lower than the rigidity of glass plate, therefore produce the situation of strain and profiling glass plate with respect to the resin plate after pasting, glass plate does not almost produce strain, therefore be easy to become tabular, plywood is difficult for warpage.On the other hand, under sticking glass plate situation each other, paste the back and produce strain at both glass plates, a side is difficult to profiling the opposing party, the easy warpage of plywood.
In addition, the lower table 40 of present embodiment moves with rotation roller 50 grades during with stiffener 3 at adhesive substrate 2, but also can move separately with rotation roller 50, can also not move.As long as rotation roller 50 moves, just can adhesive substrate 2 and stiffener 3.
In addition, as shown in Figure 9, when beginning to paste, in the upper end of rotation roller 50, stiffener 3 deflection deformations are that the curved shape of projection upward is better.Because substrate 2 is pasted together smoothly with stiffener 3, therefore can suppress substrate 2, stiffener 3 breakages.
In addition, in example shown in Figure 9, when beginning to paste, rotation roller 50 is configured in apart from the position of the both sides of the edge equidistance of stiffener 3, but as shown in figure 11, also can be configured near the lateral edges of stiffener 3.
More than, one embodiment of the present invention has been described, but the present invention is not limited to above-mentioned embodiment, can carry out various distortion, change.
For example, the sticker 10 of above-mentioned embodiment is used for being manufactured on the plywood 1 that the manufacturing process of LCD uses, but the purposes of sticker 10 can be varied.
In addition, in the above-described embodiment, when adhesive substrate 2 and stiffener 3, the adsorption plane of upper table 20 is parallel with the mounting surface of lower table 40, but also can tilt.In addition, the mounting surface of the adsorption plane of upper table 20, lower table 40 also can be inclined relative to horizontal.
In addition, as shown in figure 12, in order to reduce the friction between lower table 40 and the stiffener 3, the gas squit hole 40a that is formed with gas jet upward in the mounting surface of lower table 40 is better.Gas squit hole 40a is separated with the compartment of terrain two-dimensionally and is arranged.A plurality of gas squit hole 40a are connected with gas supply source GS via pipe arrangement.Gas supply source GS under the control of control part 90 to gas squit hole 40a supply gas.
In addition, as shown in figure 13, elevating lever 34 runs through upper table supporting member 31, and the bottom that is fixed on elevating lever 34 from the supporting member 36 of below supporting upper table supporting member 31 is better.Elevating lever 34 descends from state shown in Figure 13, after upper table 20 is supported in align member 15, when elevating lever 34 continued to descend, supporting member 36 left upper table supporting member 31 as shown in figure 14, kept the depth of parallelism between upper table 20 and the lower table 40.
On the other hand, if elevating lever 34 rises under state shown in Figure 14, then supporting member 36 lifts upper table supporting member 31 as shown in figure 13, and upper table 20 rises and leaves align member 15.Lower surface at upper table supporting member 31 is fixed with the retainer piece 37 of bearing supporting member 36.The top 36a of supporting member 36 is the shape to upper process, and the bottom 37a of retainer piece 37 is the upwards shape of depression.The top 36a of supporting member 36 and the bottom 37a of retainer piece 37 are respectively better along axially the advancing upward of elevating lever 34, shape that radius is more little more, for example can be to have downcut shape, truncated cone shape or the cone shape that the part of ball forms.When elevating lever 34 rose, the position on the horizontal direction of supporting member 36 and retainer piece 37 determined that upper table 20 is determined with respect to the position in the horizontal direction of frame Fr, therefore substrate 2 can be positioned in the assigned position of upper table 20.
In addition, retainer piece 37 forms independently with upper table supporting member 31, but also can form the part of upper table supporting member 31.
In addition, the top 36a of supporting member 36 also can be opposite with the concavo-convex of bottom 37a of retainer piece 37.Also can be that the top 36a of supporting member 36 is the shape to lower recess, the bottom 37a of retainer piece 37 be the shape to lower process.In this case, the bottom 37a of the top 36a of supporting member 36 and retainer piece 37 is respectively better along axially the advancing downwards of elevating lever 34, shape that radius is more little more.
In addition, as Figure 13 and shown in Figure 14, it is better in the mounting portion 29 of align member 15 to be fixed with mounting at the lower surface of upper table 20.The bottom 29a of mounting portion 29 is upwards the shape of depression (more along the shape that vertical direction is advanced upward, radius is more little, for example having downcut shape, truncated cone shape or cone shape that the part of ball forms).The bight chamfering on the top of align member 15 (being the top 19a of the head 19 of bolt 17 in detail), be shape to upper process (, for example having downcut shape, truncated cone shape or cone shape that the part of ball forms) more along the shape that vertical direction is advanced upward, radius is more little.Mounting portion 29 is directed to assigned position by the head 19 of bolt 17, thereby upper table 20 is determined with respect to the position in the horizontal direction of frame Fr.Therefore, determine that by the substrate 2 and the position of the stiffener 3 that supports by lower table 40 of upper table 20 absorption therefore can align the outward flange of substrate 2 and the outward flange of stiffener 3.
In addition, mounting portion 29 forms independently with upper table 20, but also can form the part of upper table 20.
In addition, the bottom 29a of mounting portion 29 also can be opposite with the concavo-convex of top 19a of align member 15.
The application is based on the application of the Japan special permission application 2012-014509 that filed an application on January 26th, 2012, and its content is introduced into as reference at this.
Description of reference numerals
1, plywood; 2, substrate (tabular component); 3, stiffener (flex plate); 6, duplexer; 7, liquid crystal layer; 10, sticker; 20, upper table; 30, switching mechanism; 40, lower table; 40a, gas squit hole; 41, resin bed; 42, lower table main body; 50, rotation roller; 55, backing roll; 56, axial region; 57, axle support; 60, press cylinder pressure (press section); 70, travel mechanism.
Claims (19)
1. a sticker is used to paste tabular component and flex plate, wherein, has:
Upper table, it is used to adsorb above-mentioned tabular component;
Lower table, it is configured in the below of this upper table, for above-mentioned flex plate mounting;
The rotation roller, its lower surface with the above-mentioned flex plate that is supported by this lower table contacts, and utilizes deadweight to make above-mentioned flex plate deflection deformation;
The press section, it will utilize the above-mentioned flex plate that deflection deformation has taken place this rotation roller to press on the tabular component that is adsorbed by above-mentioned upper table; And
Travel mechanism, it makes above-mentioned rotation roller and above-mentioned press section relatively move with respect to above-mentioned upper table.
2. sticker according to claim 1, wherein,
Above-mentioned travel mechanism makes above-mentioned lower table relatively move with respect to above-mentioned upper table with above-mentioned rotation roller and above-mentioned press section.
3. sticker according to claim 2, wherein,
The face of the above-mentioned flex plate mounting of the confession of above-mentioned lower table is formed by resin.
4. according to claim 2 or 3 described stickers, wherein,
Face in the above-mentioned flex plate mounting of the confession of above-mentioned lower table is formed with the gas squit hole of gas jet upward.
5. according to each described sticker in the claim 1 to 4, wherein, also have from the below or the oblique backing roll of the above-mentioned rotation roller of below supporting.
6. sticker according to claim 5, wherein,
Above-mentioned backing roll with the direction of the axially parallel of above-mentioned rotation roller on be separated with the compartment of terrain dispose a plurality of,
Be equipped with the axle support of the axial region of each backing roll of supporting each other at above-mentioned backing roll.
7. according to claim 5 or 6 described stickers, wherein,
Above-mentioned backing roll is provided in the moving direction both sides of above-mentioned rotation roller respectively, supports above-mentioned rotation roller from oblique below.
8. according to each described sticker in the claim 1 to 7, wherein,
Also have make the counter-rotating of above-mentioned upper table, with the switching mechanism that between facing upward or downward, is switching of the face of the above-mentioned tabular component of absorption of above-mentioned upper table.
9. according to each described sticker in the claim 1 to 8, wherein,
Also have the align member that relative position when pasting above-mentioned tabular component and above-mentioned flex plate, above-mentioned upper table and above-mentioned lower table positions,
Flexible on the direction that this align member can change at the interval between above-mentioned upper table and the above-mentioned lower table.
10. according to each described sticker in the claim 2 to 4, wherein,
Also have the control part that is used to control above-mentioned travel mechanism,
This control part is controlled above-mentioned travel mechanism, and the mounting position of above-mentioned flex plate on above-mentioned lower table adjusted.
11. a method of attaching is used to paste tabular component and flex plate, wherein, comprises following operation:
Utilize upper table to adsorb above-mentioned tabular component and with the operation of above-mentioned flex plate mounting on the lower table of the below that is configured in above-mentioned upper table; And
Make the operation that relatively moves with respect to above-mentioned upper table of rotation roller, this rotation roller contacts with lower surface by the above-mentioned flex plate of above-mentioned lower table supporting and makes above-mentioned flex plate take place under the state of deflection deformation above-mentioned flex plate to be pressed on the above-mentioned tabular component that is adsorbed by above-mentioned upper table utilizing to conduct oneself with dignity.
12. method of attaching according to claim 11, wherein,
Above-mentioned lower table is relatively moved with respect to above-mentioned upper table with above-mentioned rotation roller.
13. method of attaching according to claim 12, wherein,
The face of the above-mentioned flex plate mounting of the confession of above-mentioned lower table is formed by resin.
14. according to claim 12 or 13 described method of attaching, wherein,
Face in the above-mentioned flex plate mounting of the confession of above-mentioned lower table is formed with the gas squit hole of gas jet upward.
15. according to each described method of attaching in the claim 11 to 14, wherein,
Be equipped with the backing roll that supports above-mentioned rotation roller below the above-mentioned rotation roller or tiltedly.
16. method of attaching according to claim 15, wherein,
Above-mentioned backing roll with the direction of the axially parallel of above-mentioned rotation roller on be separated with the compartment of terrain dispose a plurality of,
Be equipped with the axle support of the axial region of each backing roll of supporting each other at above-mentioned backing roll.
17. according to claim 15 or 16 described method of attaching, wherein,
Above-mentioned backing roll is provided in the moving direction both sides of above-mentioned rotation roller respectively, supports above-mentioned rotation roller from oblique below.
18. according to each described method of attaching in the claim 11 to 17, wherein,
Have following operation: make above-mentioned upper table the above-mentioned tabular component of absorption adsorption plane up, after being positioned in above-mentioned tabular component on this adsorption plane, utilize above-mentioned upper table to adsorb above-mentioned tabular component, then, make the counter-rotating of above-mentioned upper table and the adsorption plane that makes above-mentioned upper table down.
19. according to each described method of attaching in the claim 11 to 18, wherein,
Above-mentioned tabular component and above-mentioned flex plate comprise glass plate respectively.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-014509 | 2012-01-26 | ||
| JP2012014509A JP5821664B2 (en) | 2012-01-26 | 2012-01-26 | Bonding apparatus and bonding method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103223760A true CN103223760A (en) | 2013-07-31 |
| CN103223760B CN103223760B (en) | 2016-04-27 |
Family
ID=48834515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310032362.4A Active CN103223760B (en) | 2012-01-26 | 2013-01-28 | Sticker and method of attaching |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5821664B2 (en) |
| KR (1) | KR101996090B1 (en) |
| CN (1) | CN103223760B (en) |
| TW (1) | TW201334961A (en) |
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| CN104669762A (en) * | 2015-03-24 | 2015-06-03 | 京东方科技集团股份有限公司 | Vacuum laminating device |
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| CN107414979A (en) * | 2017-08-01 | 2017-12-01 | 合肥英源新材料科技有限公司 | A kind of manufacture method of the Multifunctional plate pressing of sheet material laminator |
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| CN104625997B (en) * | 2013-11-12 | 2017-06-30 | 珠海格力电器股份有限公司 | Positioning tool |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN103223760B (en) | 2016-04-27 |
| JP5821664B2 (en) | 2015-11-24 |
| KR101996090B1 (en) | 2019-07-03 |
| TWI561376B (en) | 2016-12-11 |
| KR20130086985A (en) | 2013-08-05 |
| TW201334961A (en) | 2013-09-01 |
| JP2013155053A (en) | 2013-08-15 |
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