JP2014129189A - Production method of glass laminate - Google Patents

Production method of glass laminate Download PDF

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JP2014129189A
JP2014129189A JP2012287406A JP2012287406A JP2014129189A JP 2014129189 A JP2014129189 A JP 2014129189A JP 2012287406 A JP2012287406 A JP 2012287406A JP 2012287406 A JP2012287406 A JP 2012287406A JP 2014129189 A JP2014129189 A JP 2014129189A
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glass
glass plate
plate
mating
mating surface
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JP6041137B2 (en
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Yasuhiro Matsumoto
保弘 松本
Hisahiro Uemura
弥浩 植村
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Nippon Electric Glass Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To prevent lowering of quality of a flat glass by that generation of a warpage of a glass laminate is avoided when producing a glass laminate.SOLUTION: A production method of a glass laminate is that in respective a glass film GF and a support glass GS, surface roughnesses Ra of mating surfaces that become surfaces that contact mutually are made at most 2.0nm, both mating surfaces are surface-contacted, thereby the glass film GF and the support glass GS are superimposed to produce a glass laminate G, and when both mating surfaces are surface-contacted, the support glass GS in which flexural rigidity is large in the glass film GF and the support glass GS is performed by elastic deformation to a bow shape, thereby the mating surface in the support glass GS is bowed to a convex surface.

Description

本発明は、二つのガラス板体を重ね合わせることにより、ガラス積層体を製造するガラス積層体の製造方法に関する。   The present invention relates to a glass laminate manufacturing method for manufacturing a glass laminate by superimposing two glass plates.

薄肉の板ガラスに製造関連処理を施すに際しては、その取り扱いを容易なものとすることを目的として、板ガラスと、この板ガラスを支持する支持ガラスとを重ね合わせたガラス積層体が使用されている(特許文献1参照)。このガラス積層体を用いて製造関連処理を実行する場合には、以下に示すような利点がある。   When manufacturing-related processing is performed on a thin plate glass, a glass laminate is used in which a plate glass and a supporting glass supporting the plate glass are layered for the purpose of facilitating the handling (patent) Reference 1). When manufacturing-related processing is performed using this glass laminate, there are the following advantages.

例えば、薄肉の板ガラスを使用する代表的な製品であるフラットパネルディスプレイの製造工程において、板ガラスに対し、透明導電膜等の膜付け処理を実施する際に、薄肉の板ガラス特有の可撓性に富んだ性質を一時的に排除できること、及び重ね合わされた板ガラスと支持ガラスとの間に適度な密着力が作用することから、パターンニングの位置ずれが生じにくい。   For example, in the manufacturing process of flat panel display, which is a typical product that uses thin plate glass, when film processing such as transparent conductive film is applied to plate glass, it has rich flexibility unique to thin plate glass. Since the property can be temporarily excluded and an appropriate adhesion force acts between the laminated glass sheet and the supporting glass, the patterning is not easily displaced.

さらに、板ガラスと支持ガラスとの間に密着力を生み出すために、接着剤等の貼付を必要としないことから、製造関連処理を施した後の板ガラスを各種デバイスに組み込むにあたって、容易に支持ガラスから剥離させることが可能となると共に、接着剤の残存等に起因する汚染が全くない板ガラスが得られる。   Furthermore, in order to create adhesion between the plate glass and the support glass, it is not necessary to attach an adhesive or the like. Therefore, when incorporating the plate glass after manufacturing-related processing into various devices, it is easy to use it from the support glass. It is possible to obtain a plate glass that can be peeled off and has no contamination due to the remaining adhesive or the like.

特開2011−183792号公報JP 2011-183792 A

しかしながら、このように有用なガラス積層体においても、未だ解決すべき問題が存在している。すなわち、支持ガラス上への板ガラスの重ね合わせ作業が完了した後に、ガラス積層体が、図4に示すように、反りを有する状態となる場合がある。   However, there are still problems to be solved in such a useful glass laminate. That is, after the stacking operation of the plate glass on the supporting glass is completed, the glass laminate may be warped as shown in FIG.

そして、ガラス積層体Gにこのような反りが生じると、搬送ロボットの吸着エラーや、搬送コンベアでのスリップ、蛇行等が生じる。そのため、支持ガラスG1に支持された板ガラスG2に対し、適切な製造関連処理を行うことができず、製品として使用する剥離後の板ガラスG2の品質が低下するという問題があった。   And when such a curvature arises in the glass laminated body G, the adsorption | suction error of a conveyance robot, the slip by a conveyance conveyor, meandering, etc. will arise. For this reason, there has been a problem that an appropriate manufacturing-related process cannot be performed on the plate glass G2 supported by the support glass G1, and the quality of the peeled plate glass G2 used as a product is deteriorated.

そこで、このような問題を解決するため、支持ガラスG1上に板ガラスG2を重ね合わせる際に、当該板ガラスG2を、ローラー等を使用して平坦な状態へと矯正しながら重ね合わせる試みがなされてきたが、このような対策を実施した場合であっても、ガラス積層体Gの反りが解消されないばかりでなく、さらに助長されてしまう結果を招いていた。   Therefore, in order to solve such a problem, when the sheet glass G2 is superimposed on the support glass G1, attempts have been made to superimpose the sheet glass G2 while correcting it to a flat state using a roller or the like. However, even when such measures are implemented, not only the warp of the glass laminate G is not eliminated, but also the result is further promoted.

なお、このような問題は、板ガラスと支持ガラスとを重ね合わせた場合にのみ生じているものではなく、板ガラスとガラス積層体とを重ね合わせた場合、ガラス積層体同士を重ね合わせた場合のように、板ガラスをその構成要素とするものを重ね合わせてガラス積層体を製造するような際にも、同様に生じることがある。   In addition, such a problem does not arise only when the plate glass and the supporting glass are overlapped, but when the plate glass and the glass laminate are overlapped, the glass laminates are overlapped with each other. In addition, when a glass laminate is produced by superimposing plate glass as its constituent elements, it may occur in the same manner.

上記事情に鑑みなされた本発明は、ガラス積層体を製造する際に、ガラス積層体における反りの発生を回避することで、これから剥離させて得られる板ガラスの品質の低下を防止することを技術的課題とする。   This invention made | formed in view of the said situation is technical in preventing the fall of the quality of the plate glass obtained by peeling from this by avoiding generation | occurrence | production of the curvature in a glass laminated body, when manufacturing a glass laminated body. Let it be an issue.

上記課題を解決するために創案された本発明は、平板状をなす二つのガラス板体の各々において、相互に接触する側の面となる合わせ面の表面粗さRaを2.0nm以下とし、その両合わせ面を面接触させることにより、前記二つのガラス板体を重ね合わせたガラス積層体を製造するガラス積層体の製造方法であって、前記両合わせ面を面接触させる際に、前記二つのガラス板体のうち、曲げ剛性が大きい方のガラス板体を湾曲状に弾性変形させることで、該ガラス板体における合わせ面を凸曲面に湾曲させることに特徴付けられる。ここで、「ガラス板体」とは、板ガラスのみならず、板ガラスをその構成要素とするもの、例えば、二枚以上の板ガラスを重ね合わせたガラス積層体をも含む。   The present invention created in order to solve the above-mentioned problems, in each of the two glass plate bodies having a flat plate shape, the surface roughness Ra of the mating surface to be a surface in contact with each other is 2.0 nm or less, A method for producing a glass laminate in which the two mating surfaces are brought into surface contact with each other to produce a glass laminate in which the two glass plates are superposed. Of the two glass plates, the glass plate having the larger bending rigidity is elastically deformed into a curved shape, whereby the mating surface of the glass plate is curved into a convex curved surface. Here, the “glass plate” includes not only the plate glass but also a plate glass as its constituent element, for example, a glass laminate in which two or more plate glasses are stacked.

二つのガラス板体を重ね合わせた場合には、表面粗さRaが2.0nm以下とされた各々の合わせ面の面接触によって両合わせ面間に密着力が生じる。このように、接着剤等を使用することなく両合わせ面間に生じる密着力は、水素結合に起因しているものと考えられている。加えて、この両合わせ面間においては、一方のガラス板体が他方のガラス板体を引きつける力と、他方のガラス板体が一方のガラス板体を引きつける力とが等しいものと考えられている。以上の観点から、二つのガラス板体の双方を平坦な状態で重ね合わせた場合、ガラス積層体に反りが発生するか否かは、二つのガラス板体間の曲げ変形のしやすさ、すなわち、曲げ剛性に差異があるか否かに支配されていると考えられる。そして、二つのガラス板体の曲げ剛性間に差異がある場合には、双方が平坦な状態の下で重ね合わせた二つのガラス板体のうち、曲げ剛性が小さい方のガラス板体における合わせ面が凸曲面へと湾曲すると共に、曲げ剛性が大きい方のガラス板体における合わせ面が凹曲面へと湾曲することが判明している。これらのことから、曲げ剛性が大きい方のガラス板体を、予め該ガラス板体における合わせ面が凸曲面となるように弾性変形により湾曲させた後に、二つのガラス板体を重ね合わせると、両ガラス板体間の曲げ剛性の差異が見かけ上解消され、双方が略平坦で反りのないガラス積層体を製造することができた。ここで、二つのガラス板体を重ね合わせて両者の合わせ面を面接触させる際には、曲げ剛性が大きい方のガラス板体を弾性変形により湾曲させた状態から弾性変形を解除していくことにより平板状に近づけていくに連れて、両者の面接触領域を徐々に広げていくようにしてもよく、或いは曲げ剛性が大きい方のガラス板体を弾性変形により湾曲させた状態を維持して、両者の面接触領域を徐々に広げていくようにしてもよい。そして、反りのないガラス積層体が製造された後においては、このガラス積層体から剥離させて得られる板ガラスにも、反りが発生してないことが確認され、製品として問題なく使用することが可能であった。以上のことから、このような方法によれば、ガラス板体を重ね合わせてガラス積層体を製造する際に、ガラス積層体における反りの発生を回避できるため、これから剥離させて得られる板ガラスの品質の低下を防止することが可能となる。なお、凸曲面の形状としては、球面(略球面を含む)、楕円面(略楕円面を含む)、円筒面(略円筒面を含む)等とすることができる。   When two glass plates are overlapped, an adhesion force is generated between the mating surfaces by surface contact of the mating surfaces having a surface roughness Ra of 2.0 nm or less. Thus, it is considered that the adhesion force generated between the mating surfaces without using an adhesive or the like is caused by hydrogen bonding. In addition, between the two mating surfaces, it is considered that the force of one glass plate attracting the other glass plate is equal to the force of the other glass plate attracting the one glass plate. . From the above viewpoint, when both of the two glass plates are stacked in a flat state, whether or not the glass laminate is warped is determined by the ease of bending deformation between the two glass plates, that is, It is considered that it is governed by whether there is a difference in bending rigidity. And when there is a difference between the bending stiffnesses of the two glass plates, the mating surface in the glass plate with the smaller bending stiffness among the two glass plates stacked under a flat condition. Is curved to a convex curved surface, and the mating surface of the glass plate having the larger bending rigidity is curved to a concave curved surface. From these facts, when the glass plate having the larger bending rigidity is curved in advance by elastic deformation so that the mating surface of the glass plate becomes a convex curved surface, the two glass plates are overlapped. The difference in bending rigidity between the glass plates was apparently eliminated, and a glass laminate that was substantially flat and free from warping could be produced. Here, when two glass plates are overlapped and the mating surfaces of both are brought into surface contact, the elastic deformation is released from the state in which the glass plate having the larger bending rigidity is bent by elastic deformation. As the plate becomes closer to a flat plate shape, the surface contact area between the two may be gradually widened, or the glass plate having the larger bending rigidity is kept curved by elastic deformation. The surface contact area between the two may be gradually expanded. And, after the glass laminate without warp is manufactured, it is confirmed that the plate glass obtained by peeling from this glass laminate does not warp and can be used as a product without any problems. Met. From the above, according to such a method, when a glass laminate is produced by overlapping glass plates, it is possible to avoid the occurrence of warpage in the glass laminate, and thus the quality of the plate glass obtained by peeling from the glass laminate. It is possible to prevent a decrease in the above. The shape of the convex curved surface may be a spherical surface (including a substantially spherical surface), an elliptical surface (including a substantially elliptical surface), a cylindrical surface (including a substantially cylindrical surface), or the like.

上記の方法において、前記二つのガラス板体のうち、曲げ剛性が小さい方のガラス板体における板厚が200μm以下であり、曲げ剛性が大きい方のガラス板体における板厚が300μm以上で、且つ1.1mm以下であることが好ましい。   In the above method, of the two glass plates, the thickness of the glass plate having the smaller bending rigidity is 200 μm or less, the thickness of the glass plate having the larger bending stiffness is 300 μm or more, and It is preferable that it is 1.1 mm or less.

このように、曲げ剛性が小さい方のガラス板体の板厚が200μm以下であり、曲げ剛性が大きい方のガラス板体の板厚が300μm以上で、且つ1.1mm以下であった場合、上述の効果をより好適に得ることができる。   Thus, when the plate thickness of the glass plate with the smaller bending rigidity is 200 μm or less, and the plate thickness of the glass plate with the larger bending stiffness is 300 μm or more and 1.1 mm or less, The effect of can be acquired more suitably.

上記の方法において、前記二つのガラス板体が、同じ材質で形成されていることが好ましい。   In the above method, the two glass plates are preferably formed of the same material.

このようにすれば、二つのガラス板体のサイズ(縦横の寸法)が同一である場合には、曲げ剛性の大きい方のガラス板体が、曲げ剛性の小さい方のガラス板体よりも、板厚が厚くなるため、板厚が厚い方のガラス板体を湾曲状に弾性変形させればよいことになる。   In this way, when the size (vertical and horizontal dimensions) of the two glass plates is the same, the glass plate having the larger bending rigidity is more plate-like than the glass plate having the smaller bending stiffness. Since the thickness is increased, it is only necessary to elastically deform the glass plate having the larger thickness in a curved shape.

上記の方法において、前記二つのガラス板体のうち、曲げ剛性が小さい方のガラス板体を、平面上に載置すると共に、曲げ剛性が大きい方のガラス板体を、前記曲げ剛性が小さい方のガラス板体から上方に離間した位置で弾性変形可能に支持した後、曲げ剛性が大きい方のガラス板体における合わせ面を下方に向かって凸曲面に湾曲させることで、両合わせ面を面接触させてもよい。ここで、「支持」とは、曲げ剛性が大きい方のガラス板体を下方から支えて支持する場合のみならず、上方から吊り下げて支持する場合等をも含む。   In the above method, of the two glass plates, the glass plate having the smaller bending rigidity is placed on a plane, and the glass plate having the larger bending rigidity is placed on the one having the smaller bending rigidity. After supporting the glass plate body so as to be elastically deformable at a position spaced apart from the glass plate body, the mating surface of the glass plate body having the larger bending rigidity is curved downward into a convex curved surface, thereby bringing the two mating surfaces into surface contact. You may let them. Here, the term “support” includes not only the case where the glass plate having the higher bending rigidity is supported and supported from below, but also the case where the glass plate is supported by being suspended from above.

このようにすれば、曲げ剛性が大きい方のガラス板体における合わせ面は、下方に向かって凸に湾曲した状態で、曲げ剛性が小さい方のガラス板体における合わせ面に面接触するため、両ガラス板体の双方が、略平坦で反りのないガラス積層体を製造することができる。   In this way, the mating surface of the glass plate having the larger bending rigidity is in a convexly curved downward direction and is in surface contact with the mating surface of the glass plate having the smaller bending rigidity. Both glass plate bodies can be manufactured to be a glass laminate that is substantially flat and has no warpage.

上記の方法において、前記二つのガラス板体のうち、曲げ剛性が大きい方のガラス板体を、該ガラス板体を吸着する吸引孔を有する凸曲面上に載置し、且つ、該ガラス板体を吸着することにより、その合わせ面を上方に向かって凸曲面となるように湾曲させた後、曲げ剛性が小さい方のガラス板体における合わせ面と、曲げ剛性が大きい方のガラス板体における合わせ面とを面接触させてもよい。   In the above method, of the two glass plates, the glass plate having the larger bending rigidity is placed on a convex curved surface having a suction hole for adsorbing the glass plate, and the glass plate By adsorbing, the curved surface of the mating surface is curved upward to form a convex curved surface, and then the mating surface of the glass plate body with the smaller bending rigidity and the mating surface of the glass plate body with the larger bending rigidity. The surface may be brought into surface contact.

このようにすれば、凸曲面上に載置され、吸引孔に吸着された曲げ剛性が大きい方のガラス板体における合わせ面は、凸曲面の形状に倣って変形することで、上方に向かって凸に湾曲する。その後に、当該ガラス板体における合わせ面と、曲げ剛性が小さい方のガラス板体における合わせ面とを面接触させれば、両ガラス板体の双方が、略平坦で反りのないガラス積層体を製造することができる。この場合、二つのガラス板体を重ね合わせて両者の合わせ面を面接触させる際には、曲げ剛性が大きい方のガラス板体を吸着力により湾曲させた状態から吸着力を低減させていくことにより平板状に近づけていくに連れて、両者の面接触領域を徐々に広げていくようにしてもよく、或いは曲げ剛性が大きい方のガラス板体を吸着力により湾曲させた状態を維持して、両者の面接触領域を徐々に広げていくようにしてもよい。   In this way, the mating surface of the glass plate having the larger bending rigidity placed on the convex curved surface and adsorbed to the suction hole is deformed following the shape of the convex curved surface, and thus upwards Curves convexly. After that, if the mating surface of the glass plate and the mating surface of the glass plate having the smaller bending rigidity are brought into surface contact, both glass plates are substantially flat and have no warpage. Can be manufactured. In this case, when the two glass plates are overlapped and the mating surfaces of the two are brought into surface contact, the adsorption force is reduced from the state in which the glass plate having the larger bending rigidity is bent by the adsorption force. As the plate becomes closer to a flat plate shape, the surface contact area between the two may be gradually expanded, or the glass plate body having the larger bending rigidity is kept curved by the adsorption force. The surface contact area between the two may be gradually expanded.

上記の方法において、曲げ剛性が大きい方のガラス板体の合わせ面は、四辺の中央部が突出する凸曲面に湾曲しており、該合わせ面の前記中央部と、曲げ剛性が小さい方のガラス板体における合わせ面との接触部を起点に、前記両合わせ面を面接触させてもよい。   In the above method, the mating surface of the glass plate having the larger bending stiffness is curved into a convex curved surface projecting from the center of the four sides, and the glass having the smaller bending stiffness is formed on the center of the mating surface. The two mating surfaces may be brought into surface contact from the contact portion of the plate body with the mating surface.

このような方法によれば、両ガラス板体が最初に接触した四辺の中央部を起点に、両ガラス板体が重ね合わせられた部位が同心円状に広がっていくため、重ね合わせの進行に伴い、両ガラス板体間に介在する空気を排除することができる。その結果、この空気に起因して、完成したガラス積層体に皺ができる等の不具合の発生を回避することが可能となる。   According to such a method, since the part where both glass plates are overlapped spreads concentrically starting from the central part of the four sides where both glass plates first contacted, The air intervening between the two glass plates can be eliminated. As a result, it is possible to avoid the occurrence of defects such as wrinkles on the completed glass laminate due to the air.

上記の方法において、曲げ剛性が大きい方のガラス板体の合わせ面は、一辺と平行な直線状の中央部が突出する凸曲面に湾曲しており、該合わせ面の前記直線状の中央部と、曲げ剛性が小さい方のガラス板体の合わせ面との接触部を起点に、前記両合わせ面を面接触させてもよい。   In the above method, the mating surface of the glass plate having the larger bending rigidity is curved into a convex curved surface protruding from a linear central portion parallel to one side, and the linear central portion of the mating surface is The both mating surfaces may be brought into surface contact with each other starting from a contact portion with the mating surface of the glass plate having the smaller bending rigidity.

このような方法によれば、両ガラス板体が最初に接触した直線状の中央部を起点に、両ガラス板体が重ね合わせられた部位が、直線状の中央部と平行で、且つ当該直線状の中央部から離間する方向に広がっていくため、重ね合わせの進行に伴い、両ガラス板体間に介在する空気を排除することができる。その結果、この空気に起因して、完成したガラス積層体に皺ができる等の不具合の発生を回避することが可能となる。   According to such a method, the portion where the two glass plates are overlapped starting from the straight central portion where both glass plates first contact each other is parallel to the straight central portion and the straight line. Since it spreads in the direction away from the center of the shape, air intervening between the two glass plates can be eliminated as the overlapping progresses. As a result, it is possible to avoid the occurrence of defects such as wrinkles on the completed glass laminate due to the air.

以上のように、本発明によれば、ガラス積層体を製造する際に、ガラス積層体における反りの発生を回避できるため、これから剥離させて得られる板ガラスの品質の低下を防止することが可能となる。   As described above, according to the present invention, when the glass laminate is manufactured, it is possible to avoid the occurrence of warpage in the glass laminate, and thus it is possible to prevent the deterioration of the quality of the plate glass obtained by peeling from the glass laminate. Become.

本発明の第一実施形態に係るガラス積層体の製造方法、及びこれに用いる製造設備を示す図である。It is a figure which shows the manufacturing method of the glass laminated body which concerns on 1st embodiment of this invention, and the manufacturing equipment used for this. 本発明の第二実施形態に係るガラス積層体の製造方法、及びこれに用いる製造設備を示す図である。It is a figure which shows the manufacturing method of the glass laminated body which concerns on 2nd embodiment of this invention, and the manufacturing equipment used for this. 本発明の第三実施形態に係るガラス積層体の製造方法、及びこれに用いる製造設備を示す図である。It is a figure which shows the manufacturing method of the glass laminated body which concerns on 3rd embodiment of this invention, and the manufacturing equipment used for this. 従来の方法により製造されたガラス積層体を示す縦断側面図である。It is a vertical side view which shows the glass laminated body manufactured by the conventional method.

以下、本発明の実施形態に係るガラス積層体の製造方法について、添付の図面を参照して説明する。なお、以下の各実施形態においては、二つのガラス板体としてガラスフィルムと支持ガラスとを使用し、これらを重ね合わせてガラス積層体を製造する場合を例に挙げて説明するが、後述のように、本発明に係るガラス積層体の製造方法は、このような態様に限定されるものではない。   Hereinafter, the manufacturing method of the glass laminated body which concerns on embodiment of this invention is demonstrated with reference to attached drawing. In each of the following embodiments, a glass film and a supporting glass are used as two glass plates, and a case where a glass laminate is produced by superimposing them is described as an example. Moreover, the manufacturing method of the glass laminated body which concerns on this invention is not limited to such an aspect.

図1(a)は、本発明の第一実施形態に係るガラス積層体の製造方法に用いる製造設備を示す図である。同図に示すように、この設備は、ガラスフィルムGFが載置される作業台としての定盤1と、定盤1上に配置されて支持ガラスGSを下方から支持する4つの支持部材2とを備えている。定盤1は、ガラスフィルムGFが載置される載置面1aを有しており、この載置面1aは、水平面と平行な平面に形成されている。支持部材2は、その各々が定盤1上において、ガラスフィルムGFよりも外周側に配置されており、支持ガラスGSにおける四隅のコーナー部を下方から支持している。なお、両ガラスGF,GSの材質としては、ソーダライムガラス、無アルカリガラス等の様々な材質のガラスを使用することが可能であるが、強度、耐久性の観点から無アルカリガラスを使用することが好ましい。   Fig.1 (a) is a figure which shows the manufacturing equipment used for the manufacturing method of the glass laminated body which concerns on 1st embodiment of this invention. As shown in the figure, this equipment includes a surface plate 1 as a work table on which the glass film GF is placed, and four support members 2 arranged on the surface plate 1 and supporting the support glass GS from below. It has. The surface plate 1 has a placement surface 1a on which the glass film GF is placed, and the placement surface 1a is formed in a plane parallel to the horizontal plane. Each of the support members 2 is arranged on the outer surface side of the glass film GF on the surface plate 1, and supports the corner portions of the four corners of the support glass GS from below. As the material of both glasses GF and GS, various materials such as soda lime glass and alkali-free glass can be used, but alkali-free glass should be used from the viewpoint of strength and durability. Is preferred.

両ガラスGF,GSは、可撓性を有すると共に、矩形に形成されている。また、両ガラスGF,GSは、同じ材質で構成され、略等しいヤング率(縦弾性係数)を有している。ここで、支持ガラスGSは、ガラスフィルムGFに対して、断面二次モーメントが大きくなっているため、ヤング率と断面二次モーメントとの積で算出される曲げ剛性もまた、支持ガラスGSの方が大きくなっている。なお、両ガラスGF,GSの断面二次モーメントの値は、両ガラスGF,GSの断面形状、及びこの断面の寸法によって決定される。   Both glasses GF and GS are flexible and formed in a rectangular shape. Moreover, both glass GF and GS are comprised with the same material, and have substantially equal Young's modulus (longitudinal elastic modulus). Here, since the supporting glass GS has a larger second moment of section with respect to the glass film GF, the bending rigidity calculated by the product of the Young's modulus and the second moment of section is also larger than that of the supporting glass GS. Is getting bigger. In addition, the value of the cross-sectional secondary moment of both glass GF and GS is determined by the cross-sectional shape of both glass GF and GS, and the dimension of this cross section.

さらに、両ガラスGF,GSの各々において、これらを重ね合わせた際に、相互に接触する側の面となる合わせ面は、その表面粗さRa(算術平均粗さ)が2.0nm以下とされている。この表面粗さRaの制御は、例えば、両ガラスGF,GSに対する研磨加工の有無、或いは、ケミカルエッチングを施すにあたり、エッチング液の濃度、液温度、処理時間の調整等を実施することでなされる。なお、合わせ面の表面粗さRaの値は、1.0nm以下であることがより好ましく、さらに好ましくは、0.5nm以下であり、最も好ましくは、0.2nm以下である。また、両ガラスGF,GSの厚みとしては、ガラスフィルムGFが200μm以下、支持ガラスGSが300μm以上で、且つ1.1mm以下であって、ガラスフィルムGFよりも支持ガラスGSの方が厚く設定されている。   Furthermore, in each of the glasses GF and GS, when they are superposed, the mating surface that is the surface that contacts each other has a surface roughness Ra (arithmetic mean roughness) of 2.0 nm or less. ing. The control of the surface roughness Ra is performed, for example, by adjusting the concentration of the etching solution, the solution temperature, and the processing time when performing the polishing process on both the glasses GF and GS or performing chemical etching. . In addition, the value of the surface roughness Ra of the mating surface is more preferably 1.0 nm or less, further preferably 0.5 nm or less, and most preferably 0.2 nm or less. Further, the thicknesses of both the glasses GF and GS are set such that the glass film GF is 200 μm or less, the support glass GS is 300 μm or more and 1.1 mm or less, and the support glass GS is thicker than the glass film GF. ing.

以下、上記の設備を用いたガラス積層体の製造方法について説明する。   Hereinafter, the manufacturing method of the glass laminated body using said equipment is demonstrated.

図1(a)に示すように、支持部材2により下方から支持された支持ガラスGSは、可撓性を有しているため、同図に白抜き矢印で示すように、支持ガラスGSの四辺の中央部に対する上方からの押圧力の作用、或いは、自重によって、その合わせ面が下方に向かって凸に湾曲し、球面(略球面)を呈する。そして、この状態で支持ガラスGSの合わせ面における四辺の中央部を、ガラスフィルムGFにおける合わせ面に接触させる。   As shown in FIG. 1 (a), the support glass GS supported from below by the support member 2 has flexibility, so that the four sides of the support glass GS are shown in FIG. Due to the action of the pressing force from above on the central portion of the lens, or due to its own weight, the mating surface is convexly curved downward and presents a spherical surface (substantially spherical surface). And in this state, the center part of the four sides in the mating surface of the support glass GS is brought into contact with the mating surface in the glass film GF.

その後、支持部材2を取り除き、支持ガラスGSの支持を解除すれば、最初に接触した支持ガラスGSの四辺の中央部を起点として、同心円上に両ガラスGF,GSが重ね合わせられた部位(面接触領域)が広がっていくと共に、両ガラスGF,GSにおける合わせ面の表面粗さRaが2.0nm以下とされていることで、これらが密着する。このようにして、図1(b)に示すように、ガラス積層体Gが完成する。   After that, if the support member 2 is removed and the support of the support glass GS is released, the portion (surface) where the two glasses GF and GS are superposed on the concentric circle starting from the central part of the four sides of the support glass GS that first contacted. As the contact area) increases and the surface roughness Ra of the mating surfaces in both glasses GF and GS is 2.0 nm or less, they are in close contact with each other. In this way, the glass laminate G is completed as shown in FIG.

このとき、重ね合わせの進行に伴って、両ガラスGF,GS間に介在する空気を排除することができる。その結果、この空気に起因して、完成したガラス積層体Gに皺ができる等の不具合の発生を回避することが可能となる。   At this time, the air intervening between both glasses GF and GS can be eliminated as the superposition proceeds. As a result, it is possible to avoid the occurrence of defects such as wrinkles on the finished glass laminate G due to the air.

なお、支持ガラスGSの合わせ面における四辺の中央部を、ガラスフィルムGFに接触させた際に、ガラスフィルムGFが、定盤1の載置面1aから浮き上がって支持ガラスGSと重ね合わせられ、ガラス積層体Gが完成する場合もある。この場合においては、支持部材2を取り除き、支持ガラスGSの支持を解除する必要はない。   When the central portions of the four sides of the mating surface of the support glass GS are brought into contact with the glass film GF, the glass film GF is lifted from the mounting surface 1a of the surface plate 1 and is superposed on the support glass GS. The laminated body G may be completed. In this case, it is not necessary to remove the support member 2 and release the support of the support glass GS.

このような製造方法によれば、両ガラスGF,GS間の曲げ剛性の差異が見かけ上解消され、双方が略平坦で反りのないガラス積層体Gを製造することができる。   According to such a manufacturing method, the difference in bending rigidity between the glasses GF and GS is apparently eliminated, and a glass laminate G that is substantially flat and has no warpage can be manufactured.

上述のような効果が得られるのは、以下の理由によるものと考えられる。すなわち、両ガラスGF,GS間には密着力が作用しており、この密着力は、水素結合に起因しているものと想定されている。また、この密着力によって、ガラスフィルムGFが支持ガラスGSを引きつける力と、支持ガラスGSがガラスフィルムGFを引きつける力とが等しいものと想定されている。   The reason why the above-described effect can be obtained is considered to be as follows. That is, an adhesion force acts between both glasses GF and GS, and this adhesion force is assumed to be caused by hydrogen bonding. Moreover, it is assumed that the force with which the glass film GF attracts the support glass GS and the force with which the support glass GS attracts the glass film GF are equal due to this adhesion force.

このため、両ガラスGF,GSの双方を平坦な状態で重ね合わせた場合、ガラス積層体Gに反りが発生するか否かは、両ガラスGF,GS間の曲げ変形のしやすさ、すなわち、曲げ剛性に差異があるか否かに支配されていると考えられる。   For this reason, when both the glasses GF and GS are overlapped in a flat state, whether or not the glass laminate G warps is determined by the ease of bending deformation between the glasses GF, GS, that is, It is thought that it is governed by whether there is a difference in flexural rigidity.

そして、支持ガラスGSの曲げ剛性がガラスフィルムGFよりも曲げ剛性が高い場合には、双方が平坦な状態の下で重ね合わせた両ガラスGF,GSのうち、曲げ剛性が小さいガラスフィルムGFにおける合わせ面が凸曲面へと湾曲すると共に、曲げ剛性が大きい支持ガラスGSにおける合わせ面が凹曲面へと湾曲することが判明している。   And when the bending rigidity of the support glass GS is higher than that of the glass film GF, the glass glass GF having the lower bending rigidity among the both glasses GF and GS stacked under a flat state. It has been found that the surface is curved into a convex curved surface, and the mating surface of the support glass GS having a high bending rigidity is curved into a concave curved surface.

これらのことから、曲げ剛性が大きい支持ガラスGSを予め湾曲状に弾性変形させ、支持ガラスGSにおける合わせ面が凸曲面となるように湾曲させた上で、両ガラスGF,GSを重ね合わせれば、両ガラスGF,GS間の曲げ剛性の差異が見かけ上解消されるためと考えられる。   From these facts, if the supporting glass GS having a large bending rigidity is elastically deformed in a curved shape in advance and curved so that the mating surface in the supporting glass GS is a convex curved surface, the two glasses GF and GS are overlapped. This is probably because the difference in bending rigidity between the glasses GF and GS is apparently eliminated.

以下、本発明の他の実施形態に係るガラス積層体の製造方法ついて説明する。なお、以下の第二、第三実施形態について説明するための各図において、上記の第一実施形態に係るガラス積層体の製造方法に用いた製造設備の構成要素と同一な形状、又は機能を有する構成要素については、同一の符号を付すことにより重複する説明を省略する。   Hereinafter, the manufacturing method of the glass laminated body which concerns on other embodiment of this invention is demonstrated. In addition, in each figure for demonstrating the following 2nd, 3rd embodiment, the shape or function same as the component of the manufacturing equipment used for the manufacturing method of the glass laminated body which concerns on said 1st embodiment is shown. About the component which has, the overlapping description is abbreviate | omitted by attaching | subjecting the same code | symbol.

図2(a)は、本発明の第二実施形態に係るガラス積層体の製造方法に用いる製造設備を示す図である。この設備が、上記の第一実施形態に係るガラス積層体の製造方法に用いた製造設備と相違している点は、支持部材2に代わって、支持ガラスGSを吸着する吸着パッド3と、吸着パッド3を吊り下げる可撓性吊り部材としての紐4とを備えている点である。   Fig.2 (a) is a figure which shows the manufacturing equipment used for the manufacturing method of the glass laminated body which concerns on 2nd embodiment of this invention. The difference between this equipment and the production equipment used in the method for producing a glass laminate according to the first embodiment is that, instead of the support member 2, the suction pad 3 for sucking the support glass GS, and the suction It is a point provided with the string 4 as a flexible suspension member which suspends the pad 3. FIG.

吸着パッド3は、図外の吸引装置(例えば、真空ポンプ)と、図示省略の吸引パイプを経由して接続されると共に、支持ガラスGSとの当接部には、吸引孔(例えば、多数の吸引孔)が形成されている。そして、吸引装置によって発生した負圧で、支持ガラスGSにおける四隅のコーナー部のそれぞれを吸着することで、支持ガラスGSを吊り下げて支持するように構成されている。紐4は、支持ガラスGSにおける中央部の鉛直上方から四つ股に分かれて張られており、その各々が吸着パッド3と繋がれている。   The suction pad 3 is connected to a suction device (for example, a vacuum pump) (not shown) via a suction pipe (not shown), and a suction hole (for example, a number of suction holes) is formed in a contact portion with the support glass GS. (Suction hole) is formed. The supporting glass GS is suspended and supported by adsorbing each of the four corners of the supporting glass GS with the negative pressure generated by the suction device. The string 4 is stretched by being divided into four forks from vertically above the central portion of the support glass GS, each of which is connected to the suction pad 3.

以下、上記の設備を用いたガラス積層体の製造方法の作用について説明する。   Hereinafter, the effect | action of the manufacturing method of the glass laminated body using said installation is demonstrated.

図2(a)に示すように、吸着パッド3に吸着されることにより、吊り下げ支持された支持ガラスGSは、可撓性を有しているため、同図に白抜き矢印で示すように、支持ガラスGSの四辺の中央部に対する上方からの押圧力の作用、或いは、自重によって、その合わせ面が下方に向かって凸に湾曲し、球面(略球面)を呈する。そして、この状態で支持ガラスGSの合わせ面における四辺の中央部を、ガラスフィルムGFにおける合わせ面に接触させる。   As shown in FIG. 2A, the support glass GS suspended and supported by being sucked by the suction pad 3 is flexible, and therefore, as shown by a white arrow in the figure. By the action of the pressing force from above on the central part of the four sides of the support glass GS, or due to its own weight, the mating surface is convexly curved downward and presents a spherical surface (substantially spherical surface). And in this state, the center part of the four sides in the mating surface of the support glass GS is brought into contact with the mating surface in the glass film GF.

その後、吸着パッド3による支持ガラスGSの吸着を解除すれば、最初に接触した支持ガラスGSの四辺の中央部を起点として、同心円上に両ガラスGF,GSが重ね合わせられた部位(面接触領域)が広がっていくと共に、両ガラスGF,GSにおける合わせ面の表面粗さRaが2.0nm以下とされていることで、これらが密着する。このようにして、図2(b)に示すように、ガラス積層体Gが完成する。   Thereafter, if the suction of the support glass GS by the suction pad 3 is canceled, the part (surface contact area) where the two glasses GF and GS are superposed on the concentric circles starting from the central part of the four sides of the support glass GS that first contacts. ) Spreads and the surface roughness Ra of the mating surfaces in both glasses GF and GS is 2.0 nm or less, so that they are in close contact with each other. In this way, the glass laminate G is completed as shown in FIG.

このような製造方法によっても、両ガラスGF,GS間の曲げ剛性の差異が見かけ上解消され、双方が略平坦で反りのないガラス積層体Gを製造することができる。さらに、重ね合わせの進行に伴って、両ガラスGF,GS間に介在する空気を排除することができる。その結果、この空気に起因して、完成したガラス積層体Gに皺ができる等の不具合の発生を回避することが可能となる。   Also by such a manufacturing method, the difference in bending rigidity between the two glasses GF and GS is apparently eliminated, and a glass laminate G that is substantially flat and has no warpage can be manufactured. Furthermore, the air intervening between the two glasses GF and GS can be eliminated with the progress of superposition. As a result, it is possible to avoid the occurrence of defects such as wrinkles on the finished glass laminate G due to the air.

図3(a)は、本発明の第三実施形態に係るガラス積層体の製造方法に用いる製造設備を示す図である。この設備が、上記の第一実施形態に係るガラス積層体の製造方法に用いた製造設備と相違している点は、支持部材2が取り除かれている点と、定盤1上にガラスフィルムGFではなく、支持ガラスGSが載置される点と、定盤1の載置面1aが上方に向かって凸に湾曲すると共に、支持ガラスGSを吸着する多数の吸引孔5を備えている点である。定盤1の載置面1aは、上方に凸な球面を呈している。また、載置面1aに備えられた吸引孔5は、図外の吸引装置と接続されると共に、載置面1aの全面に亘って形成されている。   Fig.3 (a) is a figure which shows the manufacturing equipment used for the manufacturing method of the glass laminated body which concerns on 3rd embodiment of this invention. The difference between this facility and the manufacturing facility used in the method for manufacturing a glass laminate according to the first embodiment is that the support member 2 is removed and the glass film GF is placed on the surface plate 1. Instead, the support glass GS is mounted, and the mounting surface 1a of the surface plate 1 is curved upward and has a large number of suction holes 5 for adsorbing the support glass GS. is there. The mounting surface 1a of the surface plate 1 has an upwardly convex spherical surface. Further, the suction hole 5 provided in the mounting surface 1a is connected to a suction device (not shown) and is formed over the entire surface of the mounting surface 1a.

以下、上記の設備を用いたガラス積層体の製造方法の作用について説明する。   Hereinafter, the effect | action of the manufacturing method of the glass laminated body using said installation is demonstrated.

図3(a)に示すように、載置面1aに載置された支持ガラスGSは、可撓性を有しているため、吸引孔5の吸着によって、載置面1aの形状に倣って変形し、その合わせ面が上方に向かって凸に湾曲した状態で球面(略球面)を呈する。この状態の下で、同図に白抜き矢印で示すように、ガラスフィルムGFの合わせ面における四辺の中央部と、支持ガラスGSにおける合わせ面とを接触させる。   As shown in FIG. 3A, since the support glass GS placed on the placement surface 1a has flexibility, the suction glass 5 follows the shape of the placement surface 1a due to the suction of the suction holes 5. Deformed and presents a spherical surface (substantially spherical surface) with the mating surface curved convexly upward. Under this state, as shown by the white arrow in the same figure, the center part of the four sides in the mating surface of the glass film GF and the mating surface in the support glass GS are brought into contact.

その後、多数の吸引孔5による支持ガラスGSの吸着を解除すれば、最初に接触した支持ガラスGSの四辺の中央部を起点として、同心円上に両ガラスGF,GSが重ね合わせられた部位が広がっていくと共に、両ガラスGF,GSにおける合わせ面の表面粗さRaが2.0nm以下とされていることにより、これらが密着する。このようにして、図3(b)に示すように、ガラス積層体Gが完成する。   Thereafter, if the adsorption of the supporting glass GS by the numerous suction holes 5 is canceled, the portion where the two glasses GF and GS are superimposed on the concentric circles starts from the central part of the four sides of the supporting glass GS that first contacts. At the same time, the surface roughness Ra of the mating surfaces of both the glasses GF and GS is set to 2.0 nm or less, so that they are in close contact with each other. In this way, the glass laminate G is completed as shown in FIG.

このような製造方法によっても、上述の第一、及び第二実施形態に係るガラス積層体の製造方法と同様の作用効果を得ることが可能となる。   Also by such a manufacturing method, it becomes possible to acquire the same effect as the manufacturing method of the glass laminated body which concerns on the above-mentioned 1st and 2nd embodiment.

ここで、本発明に係るガラス積層体の製造方法は、上記の各実施形態で説明した態様に限定されるものではない。上記の各実施形態においては、支持ガラスにおける合わせ面を球面(略球面)に湾曲させる態様となっているが、合わせ面を他の凸曲面形状に湾曲させてもよい。このような凸曲面の形状としては、楕円面(略楕円面)、円筒面(略円筒面)等が挙げられる。このような態様を実現する製造設備の構成の一例を挙げる。   Here, the manufacturing method of the glass laminated body which concerns on this invention is not limited to the aspect demonstrated by said each embodiment. In each of the above embodiments, the mating surface of the support glass is curved into a spherical surface (substantially spherical), but the mating surface may be curved into another convex curved surface shape. Examples of the shape of such a convex curved surface include an elliptical surface (substantially elliptical surface) and a cylindrical surface (substantially cylindrical surface). An example of the structure of the manufacturing equipment which implement | achieves such an aspect is given.

例えば、支持ガラスにおける合わせ面を円筒面(略円筒面)に湾曲させる場合、上記の第一実施形態に係る製造設備において、支持部材を長手状のものに変更し、この長手状の支持部材を二つ用いて、支持ガラスにおける互いに平行な二辺の縁部を、それぞれ下方から支持させたものが考えられる。このような設備を用い、上方から支持ガラスの上記二辺と平行な直線状の中央部に対する押圧力を作用させるか或いは自重によって、支持ガラスにおける合わせ面を下方に向かって凸な円筒面(略円筒面)に湾曲させることができる。そして、この合わせ面と、定盤上に載置されたガラスフィルムにおける合わせ面とを接触させれば、ガラス積層体が完成する。   For example, when the mating surface in the support glass is curved to a cylindrical surface (substantially cylindrical surface), in the manufacturing facility according to the first embodiment, the support member is changed to a longitudinal one, and the longitudinal support member is It is conceivable that two edges of the supporting glass that are parallel to each other are supported from below by using two. Using such an equipment, a cylindrical surface (substantially a convex surface facing the mating surface of the support glass by applying a pressing force to the linear central portion parallel to the two sides of the support glass from above or by its own weight. (Cylindrical surface). And if this mating surface and the mating surface in the glass film mounted on the surface plate are made to contact, a glass laminated body will be completed.

なお、このような態様によってガラス積層体を製造した場合には、支持ガラスの合わせ面における上記二辺と平行な直線状の中央部が、最初にガラスフィルムと接触すると共に、この直線状の中央部を起点として、該直線状の中央部と平行で、且つ該直線状の中央部から離間する方向に、ガラスフィルムと支持ガラスとが重ね合わされた部位(面接触領域)が広がっていく。   In addition, when a glass laminated body is manufactured according to such an embodiment, the linear central portion parallel to the two sides on the mating surface of the supporting glass first comes into contact with the glass film, and the linear central portion The part (surface contact area) where the glass film and the supporting glass are overlapped spreads in a direction parallel to the linear central part and away from the linear central part.

また、支持ガラスにおける合わせ面を楕円面(略楕円面)に湾曲させる場合には、上記の第一実施形態に係る製造設備において、支持ガラスの一辺と平行な方向の支持部材間の距離と、該一辺と直交する方向の支持部材間の距離とを異ならせたものが考えられる。このような設備を用い、上方から支持ガラスの四辺の中央部を押圧するか、或いは、自重によって、支持ガラスにおける合わせ面を下方に向かって凸な楕円面(略楕円面)に湾曲させることができる。そして、この合わせ面と、定盤上に載置されたガラスフィルムの合わせ面とを接触させれば、ガラス積層体が完成する。   Further, when the mating surface in the support glass is curved into an elliptical surface (substantially elliptical surface), in the manufacturing facility according to the first embodiment, the distance between the support members in the direction parallel to one side of the support glass, One in which the distance between the support members in the direction orthogonal to the one side is different can be considered. Using such equipment, pressing the center part of the four sides of the supporting glass from above, or curving the mating surface of the supporting glass into an elliptical surface that is convex downward (substantially elliptical surface) by its own weight. it can. And if this mating surface and the mating surface of the glass film mounted on the surface plate are made to contact, a glass laminated body will be completed.

加えて、上記の各実施形態では、同じ材質で構成されたガラスフィルムと支持ガラスとを重ね合わせてガラス積層体を製造する態様となっているが、異なる材質で構成された両ガラス(例えば、無アルカリガラスとソーダライムガラス等)を重ね合わせてガラス積層体を製造する態様としてもよい。さらに、上記の各実施形態では、支持ガラス、或いは、ガラスフィルムの合わせ面における中央部または直線状の中央部を、他方のガラスの合わせ面に接触させてガラス積層体を製造する態様となっているが、接触させる部位は、必ずしも中央部、又は、直線状の中央部でなくともよい。   In addition, in each of the above embodiments, a glass laminate is manufactured by superimposing a glass film and a supporting glass made of the same material, but both glasses made of different materials (for example, It is good also as an aspect which piles up alkali-free glass and soda-lime glass, etc.), and manufactures a glass laminated body. Furthermore, in each said embodiment, it becomes an aspect which manufactures a glass laminated body by making the center part or linear center part in the mating surface of support glass or a glass film contact the mating surface of the other glass. However, the portion to be contacted is not necessarily the central portion or the linear central portion.

また、上記の各実施形態では、支持部材、吸着パッド、或いは、吸引孔を有する載置面を備えた定盤を用いて、支持ガラスにおける合わせ面を球面(略球面)に湾曲させる態様となっているが、アームの先端が二股に分かれたロボットアームを用いて、支持ガラスにおける合わせ面を湾曲させる態様としてもよい。この場合、二股に分かれた部位の各々で支持ガラスの互いに平行な二辺を下方から支持する態様として、その合わせ面が下方に向かって凸な円筒面(略円筒面)に湾曲する。そして、この合わせ面と、定盤上に載置されたガラスフィルムにおける合わせ面とを接触させれば、ガラス積層体が完成する。   Further, in each of the above embodiments, the support glass, the suction pad, or the surface plate provided with the mounting surface having the suction holes is used to bend the mating surface of the support glass into a spherical surface (substantially spherical surface). However, it is good also as an aspect which curves the mating surface in support glass using the robot arm by which the front-end | tip of the arm was divided into two forks. In this case, as a mode in which two parallel sides of the supporting glass are supported from below at each of the two parts divided into two forks, the mating surface is curved into a cylindrical surface (substantially cylindrical surface) convex downward. And if this mating surface and the mating surface in the glass film mounted on the surface plate are made to contact, a glass laminated body will be completed.

さらには、上記の各実施形態においては、二つのガラス板体として、ガラスフィルムと支持ガラスとを重ね合わせてガラス積層体を製造する態様となっているが、二つのガラス板体として、板ガラスとガラス積層体、或いは、二つのガラス積層体を用い、これらを重ね合わせてガラス積層体を製造する態様としてもよい。   Furthermore, in each of the above embodiments, as two glass plates, a glass laminate is manufactured by superimposing a glass film and a supporting glass, but as two glass plates, a plate glass and It is good also as an aspect which uses a glass laminated body or two glass laminated bodies, and superimposes these and manufactures a glass laminated body.

本発明の効果を検証するため、下記の7つ(実施例1〜4、比較例1〜3)の各製造条件下でガラスフィルムと支持ガラスとを重ね合わせてガラス積層体を製造し、完成したガラス積層体における反りの大きさを測定することで、その良否を判定した。以下にガラス積層体の製造条件を示す。   In order to verify the effect of the present invention, a glass laminate is manufactured by superposing a glass film and a supporting glass under the following seven manufacturing conditions (Examples 1 to 4 and Comparative Examples 1 to 3). The quality of the warp was determined by measuring the size of warpage in the laminated glass. The manufacturing conditions of a glass laminated body are shown below.

ガラスフィルム、及び支持ガラスとして、日本電気硝子社製の無アルカリガラス(製品名:OA−10G)を使用した。これらをオーバーフローダウンドロー法によって成形した後、成形されたガラスに対する研磨加工の有無、或いは、ケミカルエッチングを施すにあたり、エッチング液の濃度、液温度、処理時間の調整により、ガラスフィルム、及び支持ガラスにおける合わせ面の表面粗さRaを制御した。   Non-alkali glass (product name: OA-10G) manufactured by Nippon Electric Glass Co., Ltd. was used as the glass film and supporting glass. After these are molded by the overflow down draw method, the presence or absence of polishing processing on the molded glass, or the chemical etching, the concentration of the etchant, the temperature of the solution, the adjustment of the processing time, in the glass film and support glass The surface roughness Ra of the mating surfaces was controlled.

表面粗さRaの測定には、SII社製、走査型プローブ顕微鏡(NanoNaviII/
S−image)を使用して、JISR1683:2007原子間力顕微鏡によるファインセラミックス薄膜の表面粗さ測定方法を準用して測定した。ただし、測定点は、ガラスフィルム、及び支持ガラスの各々におけるコーナー部1点と、中央部1点との2点で測定を行い、その平均値をガラスフィルム、支持ガラスの表面粗さRaとした。
For the measurement of the surface roughness Ra, a scanning probe microscope (NanoNaviII /
S-image) was measured by applying the method for measuring the surface roughness of a fine ceramic thin film using a JIS R1683: 2007 atomic force microscope. However, the measurement points were measured at two points of one corner portion and one central portion in each of the glass film and the supporting glass, and the average value was defined as the surface roughness Ra of the glass film and the supporting glass. .

ガラスフィルム、及び支持ガラスとの双方を洗浄し、乾燥させた後、ガラスフィルムを支持ガラス上に重ね合わせてガラス積層体を製造した。ここで、実施例1,3,4においては、上記の第三実施形態と同様の態様により、支持ガラスの合わせ面が球面(略球面)となるように湾曲させた状態で、ガラスフィルムと接触させて重ね合わせた。また、実施例2の実施態様は、実施例1,3,4の実施態様において、支持ガラスを吸着する定盤における載置面の形状を球面から円筒面に変更したものである。さらに、比較例1〜3においては、ガラスフィルム、及び支持ガラスとの双方を平坦な状態で接触させて重ね合わせた。   Both the glass film and the supporting glass were washed and dried, and then the glass film was superposed on the supporting glass to produce a glass laminate. Here, in Examples 1, 3, and 4, in contact with the glass film in a state in which the mating surface of the supporting glass is curved so as to be a spherical surface (substantially spherical surface) in the same manner as in the third embodiment. And superimposed. In the embodiment of Example 2, the shape of the mounting surface on the surface plate that adsorbs the supporting glass is changed from the spherical surface to the cylindrical surface in the embodiments of Examples 1, 3, and 4. Furthermore, in Comparative Examples 1-3, both the glass film and the supporting glass were brought into contact in a flat state and overlapped.

その後、各製造条件の下で完成したガラス積層体を定盤上に載置し、シックネスゲージを使用して、ガラス積層体における四隅のコーナー部と、ガラス積層体の輪郭を形成する四辺における中点との計八点における反りの大きさを変形量(ガラス積層体が載置された定盤の載置面から支持ガラスの下面までの距離)として測定した。そして、八点のうち、最大の変形量が、液晶用パネルとして使用される板ガラスにおいて、許容される600μm以下の変形に抑制されているか否かを基準として、良否を判定した。   After that, the glass laminate completed under each manufacturing condition is placed on a surface plate, and using a thickness gauge, the corners of the four corners of the glass laminate and the four sides forming the outline of the glass laminate are arranged. The amount of warpage at a total of eight points was measured as the amount of deformation (distance from the mounting surface of the surface plate on which the glass laminate was placed to the lower surface of the supporting glass). And the quality was determined based on whether or not the maximum deformation amount among the eight points was suppressed to an allowable deformation of 600 μm or less in the plate glass used as the liquid crystal panel.

以下の表に実施例、及び比較例に使用したガラスフィルム、及び支持ガラスの寸法、表面粗さ、測定された最大変形量を示す。なお、ガラスフィルムと支持ガラスとの寸法は、板の厚みを除いて同一である。

Figure 2014129189
The following table | surface shows the dimension of the glass film used for the Example and the comparative example, and support glass, surface roughness, and the largest deformation amount measured. In addition, the dimension of a glass film and support glass is the same except the thickness of a board.
Figure 2014129189

上記の表から、ガラスフィルム、及び支持ガラスのサイズ、厚みの違いによらず、実施例においては、液晶用パネルとして使用される板ガラスにおいて、許容される600μmよりも小さい変形に反りを抑制することができた。一方、比較例では、そのいずれにおいても、反りの大きさを600μm以下に抑制することが不可能であった。   From the above table, regardless of the difference in the size and thickness of the glass film and the supporting glass, in the example, in the plate glass used as the liquid crystal panel, the warpage is suppressed to a deformation smaller than the allowable 600 μm. I was able to. On the other hand, in any of the comparative examples, it was impossible to suppress the warpage to 600 μm or less.

以上のことから、本発明によれば、曲げ剛性が大きい方のガラス板体を、予め湾曲状に弾性変形させ、当該ガラス板体における合わせ面が凸曲面となるように湾曲させた状態下で、二つのガラス板体を重ね合わせれば、両ガラス板体間の曲げ剛性の差異が見かけ上解消され、双方が略平坦で反りのないガラス積層体を製造することができるものと推認される。   From the above, according to the present invention, the glass plate having the larger bending rigidity is elastically deformed in a curved shape in advance, and is curved so that the mating surface of the glass plate is a convex curved surface. If the two glass plates are superposed, the difference in bending rigidity between the two glass plates is apparently eliminated, and it is presumed that a glass laminate that is substantially flat and free of warpage can be produced.

1 定盤
1a 載置面
2 支持部材
3 吸着パッド
4 紐
5 吸引孔
G ガラス積層体
GF ガラスフィルム
GS 支持ガラス
DESCRIPTION OF SYMBOLS 1 Surface plate 1a Mounting surface 2 Support member 3 Suction pad 4 String 5 Suction hole G Glass laminated body GF Glass film GS Support glass

Claims (7)

平板状をなす二つのガラス板体の各々において、相互に接触する側の面となる合わせ面の表面粗さRaを2.0nm以下とし、その両合わせ面を面接触させることにより、前記二つのガラス板体を重ね合わせたガラス積層体を製造するガラス積層体の製造方法であって、
前記両合わせ面を面接触させる際に、前記二つのガラス板体のうち、曲げ剛性が大きい方のガラス板体を湾曲状に弾性変形させることで、該ガラス板体における合わせ面を凸曲面に湾曲させることを特徴とするガラス積層体の製造方法。
In each of the two glass plates having a flat plate shape, the surface roughness Ra of the mating surface to be a surface in contact with each other is set to 2.0 nm or less, and the two mating surfaces are brought into surface contact with each other. It is a manufacturing method of a glass laminate for producing a glass laminate in which glass plates are stacked,
When the two mating surfaces are brought into surface contact, the mating surface of the glass plate body is formed into a convex curved surface by elastically deforming the glass plate body having the larger bending rigidity out of the two glass plate bodies. A method for producing a glass laminate, which is curved.
前記二つのガラス板体のうち、曲げ剛性が小さい方のガラス板体における板厚が200μm以下であり、曲げ剛性が大きい方のガラス板体における板厚が300μm以上で、且つ1.1mm以下であることを特徴とする請求項1に記載のガラス積層体の製造方法。   Of the two glass plates, the thickness of the glass plate having the smaller bending rigidity is 200 μm or less, and the thickness of the glass plate having the larger bending stiffness is 300 μm or more and 1.1 mm or less. The manufacturing method of the glass laminated body of Claim 1 characterized by the above-mentioned. 前記二つのガラス板体が、同じ材質で形成されていることを特徴とする請求項1又は2に記載のガラス積層体の製造方法。   The method for producing a glass laminate according to claim 1 or 2, wherein the two glass plates are made of the same material. 前記二つのガラス板体のうち、曲げ剛性が小さい方のガラス板体を、平面上に載置すると共に、曲げ剛性が大きい方のガラス板体を、前記曲げ剛性が小さい方のガラス板体から上方に離間した位置で弾性変形可能に支持した後、
曲げ剛性が大きい方のガラス板体における合わせ面を下方に向かって凸曲面に湾曲させることで、両合わせ面を面接触させることを特徴とする請求項1〜3のいずれかに記載のガラス積層体の製造方法。
Of the two glass plates, the glass plate having the smaller bending stiffness is placed on a plane, and the glass plate having the larger bending stiffness is placed from the glass plate having the smaller bending stiffness. After supporting the elastically deformable at a position spaced upward,
The glass laminate according to any one of claims 1 to 3, wherein both the mating surfaces are brought into surface contact by curving the mating surfaces of the glass plate having the larger bending rigidity downward into a convex curved surface. Body manufacturing method.
前記二つのガラス板体のうち、曲げ剛性が大きい方のガラス板体を、該ガラス板体を吸着する吸引孔を有する凸曲面上に載置し、且つ、該ガラス板体を吸着することにより、その合わせ面を上方に向かって凸曲面となるように湾曲させた後、
曲げ剛性が小さい方のガラス板体における合わせ面と、曲げ剛性が大きい方のガラス板体における合わせ面とを面接触させることを特徴とする請求項1〜3のいずれかに記載のガラス積層体の製造方法。
Of the two glass plates, the glass plate having the larger bending rigidity is placed on a convex curved surface having a suction hole for adsorbing the glass plate, and the glass plate is adsorbed. , After curving the mating surface upward to form a convex curved surface,
The glass laminated body according to any one of claims 1 to 3, wherein a mating surface in a glass plate having a smaller bending rigidity is brought into surface contact with a mating surface in a glass plate having a larger bending rigidity. Manufacturing method.
曲げ剛性が大きい方のガラス板体の合わせ面は、四辺の中央部が突出する凸曲面に湾曲しており、該合わせ面の前記中央部と、曲げ剛性が小さい方のガラス板体における合わせ面との接触部を起点に、前記両合わせ面を面接触させることを特徴とする請求項1〜5のいずれかに記載のガラス積層体の製造方法。   The mating surface of the glass plate having the larger bending stiffness is curved into a convex curved surface projecting from the center of the four sides, and the mating surface of the glass plate having the smaller bending stiffness and the central portion of the mating surface. The method for producing a glass laminate according to any one of claims 1 to 5, wherein the two mating surfaces are brought into surface contact with each other as a starting point. 曲げ剛性が大きい方のガラス板体の合わせ面は、一辺と平行な直線状の中央部が突出する凸曲面に湾曲しており、該合わせ面の前記直線状の中央部と、曲げ剛性が小さい方のガラス板体の合わせ面との接触部を起点に、前記両合わせ面を面接触させることを特徴とする請求項1〜5のいずれかに記載のガラス積層体の製造方法。   The mating surface of the glass plate having the larger bending rigidity is curved into a convex curved surface projecting from a linear central portion parallel to one side, and the bending stiffness is small with respect to the linear central portion of the mating surface. The method for producing a glass laminate according to any one of claims 1 to 5, wherein the two mating surfaces are brought into surface contact starting from a contact portion with the mating surface of the other glass plate.
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