CN103222191A - 宽带声耦合薄膜baw滤波器 - Google Patents

宽带声耦合薄膜baw滤波器 Download PDF

Info

Publication number
CN103222191A
CN103222191A CN2011800498577A CN201180049857A CN103222191A CN 103222191 A CN103222191 A CN 103222191A CN 2011800498577 A CN2011800498577 A CN 2011800498577A CN 201180049857 A CN201180049857 A CN 201180049857A CN 103222191 A CN103222191 A CN 103222191A
Authority
CN
China
Prior art keywords
frequency
filter
electrode
mode
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011800498577A
Other languages
English (en)
Chinese (zh)
Inventor
约翰娜·麦陶斯
托马斯·彭萨拉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VTT Technical Research Centre of Finland Ltd
Original Assignee
VTT Technical Research Centre of Finland Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VTT Technical Research Centre of Finland Ltd filed Critical VTT Technical Research Centre of Finland Ltd
Priority to CN201810521377.XA priority Critical patent/CN108988819A/zh
Publication of CN103222191A publication Critical patent/CN103222191A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/547—Notch filters, e.g. notch BAW or thin film resonator filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN2011800498577A 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器 Pending CN103222191A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810521377.XA CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US39295510P 2010-10-14 2010-10-14
US61/392,955 2010-10-14
FI20106063A FI20106063L (fi) 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
FI20106063 2010-10-14
PCT/FI2011/050891 WO2012049372A1 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film baw filter

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201810521377.XA Division CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器

Publications (1)

Publication Number Publication Date
CN103222191A true CN103222191A (zh) 2013-07-24

Family

ID=43064221

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2011800498577A Pending CN103222191A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器
CN201810521377.XA Pending CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201810521377.XA Pending CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器

Country Status (6)

Country Link
US (4) US9893712B2 (enExample)
EP (1) EP2628246B1 (enExample)
JP (1) JP5926735B2 (enExample)
CN (2) CN103222191A (enExample)
FI (1) FI20106063L (enExample)
WO (1) WO2012049372A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110931922A (zh) * 2019-11-25 2020-03-27 武汉大学 一种基于压电双模态谐振器的双通带滤波器

Families Citing this family (84)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI20106063L (fi) 2010-10-14 2012-06-08 Valtion Teknillinen Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
FI124732B (en) * 2011-11-11 2014-12-31 Teknologian Tutkimuskeskus Vtt Lateral connected bulk wave filter with improved passband characteristics
US20140127857A1 (en) * 2012-11-07 2014-05-08 Taiwan Semiconductor Manufacturing Company, Ltd. Carrier Wafers, Methods of Manufacture Thereof, and Packaging Methods
DE102012111889B9 (de) * 2012-12-06 2014-09-04 Epcos Ag Elektroakustischer Wandler
CN103929148B (zh) * 2013-01-11 2017-09-19 中兴通讯股份有限公司 一种低插损压电声波带通滤波器及实现方法
US9281800B2 (en) 2014-01-24 2016-03-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Resonator filter device having narrow pass-band
US20160079958A1 (en) * 2014-05-30 2016-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising vertically extended acoustic cavity
US10084425B2 (en) 2015-05-29 2018-09-25 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having comprising a plurality of connection-side contacts
US10840266B2 (en) * 2016-02-16 2020-11-17 Sharp Kabushiki Kaisha Scanning antenna
US11228299B2 (en) * 2017-02-02 2022-01-18 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator with insertion film, filter, and multiplexer
US11032011B2 (en) * 2017-04-06 2021-06-08 Arizona Board Of Regents On Behalf Of The University Of Arizona Systems and methods for a quantum-analogue computer
JP7037336B2 (ja) * 2017-11-16 2022-03-16 太陽誘電株式会社 弾性波デバイスおよびその製造方法、フィルタ並びにマルチプレクサ
US11996827B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with periodic etched holes
US10601392B2 (en) 2018-06-15 2020-03-24 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator
US12088281B2 (en) 2021-02-03 2024-09-10 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multi-mark interdigital transducer
US11146232B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Transversely-excited film bulk acoustic resonator with reduced spurious modes
US12237826B2 (en) 2018-06-15 2025-02-25 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US10790802B2 (en) 2018-06-15 2020-09-29 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
US12040779B2 (en) 2020-04-20 2024-07-16 Murata Manufacturing Co., Ltd. Small transversely-excited film bulk acoustic resonators with enhanced Q-factor
US10911023B2 (en) 2018-06-15 2021-02-02 Resonant Inc. Transversely-excited film bulk acoustic resonator with etch-stop layer
US11323089B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer
US11323090B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator using Y-X-cut lithium niobate for high power applications
US11206009B2 (en) 2019-08-28 2021-12-21 Resonant Inc. Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch
US11509279B2 (en) 2020-07-18 2022-11-22 Resonant Inc. Acoustic resonators and filters with reduced temperature coefficient of frequency
US11936358B2 (en) 2020-11-11 2024-03-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with low thermal impedance
US10637438B2 (en) 2018-06-15 2020-04-28 Resonant Inc. Transversely-excited film bulk acoustic resonators for high power applications
US11929731B2 (en) 2018-02-18 2024-03-12 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode mark, and pitch
US11870423B2 (en) 2018-06-15 2024-01-09 Murata Manufacturing Co., Ltd. Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
US11323095B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Rotation in XY plane to suppress spurious modes in XBAR devices
US10797675B2 (en) 2018-06-15 2020-10-06 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate
US12132464B2 (en) 2018-06-15 2024-10-29 Murata Manufacturing Co., Ltd. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US10826462B2 (en) 2018-06-15 2020-11-03 Resonant Inc. Transversely-excited film bulk acoustic resonators with molybdenum conductors
US12184261B2 (en) 2018-06-15 2024-12-31 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with a cavity having round end zones
US11901878B2 (en) 2018-06-15 2024-02-13 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer
US10868510B2 (en) 2018-06-15 2020-12-15 Resonant Inc. Transversely-excited film bulk acoustic resonator with half-lambda dielectric layer
US12149227B2 (en) 2018-06-15 2024-11-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US11146238B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Film bulk acoustic resonator fabrication method
US12224732B2 (en) 2018-06-15 2025-02-11 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands
US11876498B2 (en) 2018-06-15 2024-01-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
US12095441B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
US12009798B2 (en) 2018-06-15 2024-06-11 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes
US12191837B2 (en) 2018-06-15 2025-01-07 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic device
US12081187B2 (en) 2018-06-15 2024-09-03 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator
US10985728B2 (en) 2018-06-15 2021-04-20 Resonant Inc. Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
US12237827B2 (en) 2018-06-15 2025-02-25 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic filters with multiple piezoelectric plate thicknesses
US12119805B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub
US11888463B2 (en) 2018-06-15 2024-01-30 Murata Manufacturing Co., Ltd. Multi-port filter using transversely-excited film bulk acoustic resonators
US12119808B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US10998882B2 (en) 2018-06-15 2021-05-04 Resonant Inc. XBAR resonators with non-rectangular diaphragms
US11323091B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with diaphragm support pedestals
US12301212B2 (en) 2018-06-15 2025-05-13 Murata Manufacturing Co., Ltd. XBAR resonators with non-rectangular diaphragms
US11909381B2 (en) 2018-06-15 2024-02-20 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US11967945B2 (en) 2018-06-15 2024-04-23 Murata Manufacturing Co., Ltd. Transversly-excited film bulk acoustic resonators and filters
US11264966B2 (en) 2018-06-15 2022-03-01 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
US11374549B2 (en) 2018-06-15 2022-06-28 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US11996822B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Wide bandwidth time division duplex transceiver
US12212306B2 (en) 2018-06-15 2025-01-28 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
US11349450B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
US12040781B2 (en) 2018-06-15 2024-07-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US10992284B2 (en) 2018-06-15 2021-04-27 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
US11646714B2 (en) * 2018-07-10 2023-05-09 Texas Instruments Incorporated Laterally vibrating bulk acoustic wave resonator
US10547281B1 (en) * 2018-07-13 2020-01-28 Qualcomm Incorporated Source impedance tuning circuit for a receive path
CN109167638A (zh) * 2018-07-18 2019-01-08 黑龙江工商学院 深海通信网络节点设备和深海通信网络系统
US10790801B2 (en) 2018-09-07 2020-09-29 Vtt Technical Research Centre Of Finland Ltd Loaded resonators for adjusting frequency response of acoustic wave resonators
US10630256B2 (en) 2018-09-07 2020-04-21 Vtt Technical Research Centre Of Finland Ltd Two-stage lateral bulk acoustic wave filter
US10756696B2 (en) * 2018-09-10 2020-08-25 Vtt Technical Research Centre Of Finland Ltd Lateral bulk acoustic wave filter
CN118573147A (zh) * 2018-10-31 2024-08-30 株式会社村田制作所 固态装配型横向激励的薄膜体声波谐振器
US11146241B2 (en) 2019-02-08 2021-10-12 Vtt Technical Research Centre Of Finland Ltd Low loss acoustic device
JP2022525465A (ja) 2019-04-05 2022-05-16 レゾナント インコーポレイテッド 横方向に励起されたフィルムバルク音響共振器パッケージ及び方法
US11088670B2 (en) * 2019-09-11 2021-08-10 Vtt Technical Research Centre Of Finland Ltd Loaded series resonators for adjusting frequency response of acoustic wave resonators
TWI772896B (zh) * 2019-09-18 2022-08-01 法商佛雷克恩股份有限公司 聲波裝置的換能器結構
US11223341B2 (en) 2019-10-22 2022-01-11 Vtt Technical Research Centre Of Finland Ltd Suppressing parasitic sidebands in lateral bulk acoustic wave resonators
CN111010123B (zh) * 2019-10-23 2021-06-01 诺思(天津)微系统有限责任公司 电极具有空隙层和凸起结构的体声波谐振器、滤波器及电子设备
US11552614B2 (en) 2019-12-03 2023-01-10 Skyworks Solutions, Inc. Laterally excited bulk wave device with acoustic mirrors
CN111917392A (zh) * 2020-04-14 2020-11-10 诺思(天津)微系统有限责任公司 压电滤波器及其带外抑制改善方法、多工器、通信设备
US12278617B2 (en) 2020-04-20 2025-04-15 Murata Manufacturing Co., Ltd. High Q solidly-mounted transversely-excited film bulk acoustic resonators
US12341493B2 (en) 2020-04-20 2025-06-24 Murata Manufacturing Co., Ltd. Low loss transversely-excited film bulk acoustic resonators and filters
WO2022061618A1 (zh) * 2020-09-23 2022-03-31 华为技术有限公司 谐振器及其制备方法、滤波器、电子设备
US12255617B2 (en) 2020-11-11 2025-03-18 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic resonators with low thermal impedance
US12003226B2 (en) 2020-11-11 2024-06-04 Murata Manufacturing Co., Ltd Transversely-excited film bulk acoustic resonator with low thermal impedance
US20230107728A1 (en) * 2021-10-04 2023-04-06 Skyworks Solutions, Inc. Stacked acoustic wave device assembly
CN114124024A (zh) * 2021-12-01 2022-03-01 苏州敏芯微电子技术股份有限公司 一种体声波谐振器及其制造方法
US12301211B2 (en) * 2022-09-09 2025-05-13 Rf360 Singapore Pte. Ltd. Microacoustic filter with a cavity stack
CN116781033B (zh) * 2023-06-08 2025-04-08 中国科学院上海微系统与信息技术研究所 一种高频声波谐振器及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060091978A1 (en) * 2004-11-03 2006-05-04 Kun Wang Acoustically coupled thin-film resonators
US20080051039A1 (en) * 2006-08-25 2008-02-28 Matsushita Electric Industrial Co., Ltd. Film bulkacoustic wave resonator and method for manufacturing the same
CN101185241A (zh) * 2005-05-27 2008-05-21 Nxp股份有限公司 体声波共振器器件

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3564463A (en) * 1966-04-11 1971-02-16 Bell Telephone Labor Inc Monolithic piezoelectric filter having mass loaded electrodes for resonation regions acoustically coupled together
US3944951A (en) * 1974-11-21 1976-03-16 Bell Telephone Laboratories, Incorporated Monolithic crystal filter
JPS5545284A (en) * 1978-09-27 1980-03-29 Toyo Commun Equip Co Ltd Slip wave crystal vibration device
JPH11112281A (ja) * 1997-10-06 1999-04-23 Kyocera Corp 振動子
JP3303772B2 (ja) * 1998-04-20 2002-07-22 株式会社村田製作所 圧電体素子
GB0014630D0 (en) * 2000-06-16 2000-08-09 Koninkl Philips Electronics Nv Bulk accoustic wave filter
GB0014963D0 (en) * 2000-06-20 2000-08-09 Koninkl Philips Electronics Nv A bulk acoustic wave device
US6670866B2 (en) * 2002-01-09 2003-12-30 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers
ATE449457T1 (de) * 2003-10-06 2009-12-15 Nxp Bv Dünnfilm-körper-oberflächenwellenfilter des leitertyps
KR101130145B1 (ko) * 2003-10-06 2012-03-28 엔엑스피 비 브이 공진기 구조체, 필터, 공진기 구조체의 제조 방법과 이들을사용하는 송/수신기
CN101278479B (zh) * 2005-09-30 2011-04-13 Nxp股份有限公司 薄膜体声波（baw）谐振器或相关改进
WO2007060557A1 (en) * 2005-11-25 2007-05-31 Nxp B.V. Bulk acoustic wave resonator device
DE102005061344A1 (de) * 2005-12-21 2007-06-28 Epcos Ag Mit akustischen Volumenwellen arbeitender Resonator
US7847656B2 (en) 2006-07-27 2010-12-07 Georgia Tech Research Corporation Monolithic thin-film piezoelectric filters
JP2008079294A (ja) * 2006-08-25 2008-04-03 Matsushita Electric Ind Co Ltd 薄膜弾性波共振器およびその製造方法
JP2008206139A (ja) * 2007-01-25 2008-09-04 Matsushita Electric Ind Co Ltd 二重モード圧電フィルタ、その製造方法、およびそれを用いた高周波回路部品および通信機器
US8258894B2 (en) * 2007-05-31 2012-09-04 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Coupled resonator filter with a filter section
US8810108B2 (en) * 2010-09-09 2014-08-19 Georgia Tech Research Corporation Multi-mode bulk-acoustic-wave resonators
FI20106063L (fi) * 2010-10-14 2012-06-08 Valtion Teknillinen Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060091978A1 (en) * 2004-11-03 2006-05-04 Kun Wang Acoustically coupled thin-film resonators
CN101185241A (zh) * 2005-05-27 2008-05-21 Nxp股份有限公司 体声波共振器器件
US20080051039A1 (en) * 2006-08-25 2008-02-28 Matsushita Electric Industrial Co., Ltd. Film bulkacoustic wave resonator and method for manufacturing the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOHANNA MELTAUS等: "Laterally coupled solidly mounted BAW resonators at 1.9 GHz", 《IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM 2009》 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110931922A (zh) * 2019-11-25 2020-03-27 武汉大学 一种基于压电双模态谐振器的双通带滤波器

Also Published As

Publication number Publication date
CN108988819A (zh) 2018-12-11
US11374551B2 (en) 2022-06-28
US9893712B2 (en) 2018-02-13
US20130278356A1 (en) 2013-10-24
EP2628246A1 (en) 2013-08-21
JP2013539946A (ja) 2013-10-28
US10778186B2 (en) 2020-09-15
US20220407500A1 (en) 2022-12-22
FI20106063A7 (fi) 2012-06-08
FI20106063L (fi) 2012-06-08
EP2628246B1 (en) 2023-05-10
US12191843B2 (en) 2025-01-07
JP5926735B2 (ja) 2016-05-25
WO2012049372A1 (en) 2012-04-19
FI20106063A0 (fi) 2010-10-14
US20180212589A1 (en) 2018-07-26
EP2628246A4 (en) 2014-06-18
US20210058066A1 (en) 2021-02-25

Similar Documents

Publication Publication Date Title
CN103222191A (zh) 宽带声耦合薄膜baw滤波器
CN102870325B (zh) 宽带声耦合薄膜baw滤波器
CN104205632B (zh) 具有改进的通带特性的横向耦合式体声波滤波器
US6710677B2 (en) Band reject filters
CN1110896C (zh) 声表面波滤波器
JP4680727B2 (ja) 共振器型フィルタ
CN114503433B (zh) 用于调整声波谐振器的频率响应的加载串联谐振器
CN111342806A (zh) 具有兰姆波谐振器的压电滤波器、双工器和电子设备
KR20050044293A (ko) 압전공진기, 압전공진기의 제조방법, 및 압전공진기를사용하는 필터, 듀플렉서, 및 통신장치
CN114938217A (zh) 一种声表面波滤波器及多工器
CN1722614A (zh) 一种声表面波双工器
CN118748546A (zh) 一种体声波滤波器
JPWO2003096533A1 (ja) 弾性表面波素子、弾性表面波装置及び分波器
Komatsu et al. Design of narrow bandwidth ladder-type filters with sharp transition bands using mutually connected resonator elements
JP2006129057A (ja) 弾性表面波装置
JPH04253414A (ja) 弾性表面波共振器複合形フィルタを用いた分波器
JP2005160057A (ja) 圧電共振器、その製造方法、それを用いたフィルタ、共用器、および通信機器
JPH10270982A (ja) 弾性表面波フィルタ
JP2008085885A (ja) 複合弾性表面波装置
JPH10270981A (ja) 弾性表面波フィルタ
JP2006279602A (ja) 分波器
JP2004128928A (ja) 弾性表面波フィルタ装置、通信装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Address after: Finland heisbourg

Applicant after: Finnish National Technical Research Center joint-stock company

Address before: Finland heisbourg

Applicant before: Teknologian Tutkimuskeskus VTT

COR Change of bibliographic data
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20130724