CN103155191B - 层叠型压电致动器以及压电振动装置 - Google Patents

层叠型压电致动器以及压电振动装置 Download PDF

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Publication number
CN103155191B
CN103155191B CN201180046820.9A CN201180046820A CN103155191B CN 103155191 B CN103155191 B CN 103155191B CN 201180046820 A CN201180046820 A CN 201180046820A CN 103155191 B CN103155191 B CN 103155191B
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internal electrode
layer
ceramic
sintered bodies
electrode
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CN201180046820.9A
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Chinese (zh)
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CN103155191A (zh
Inventor
进藤智
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201180046820.9A 2010-11-01 2011-10-24 层叠型压电致动器以及压电振动装置 Active CN103155191B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010-245447 2010-11-01
JP2010245447 2010-11-01
PCT/JP2011/074391 WO2012060236A1 (ja) 2010-11-01 2011-10-24 積層型圧電アクチュエータ及び圧電振動装置

Publications (2)

Publication Number Publication Date
CN103155191A CN103155191A (zh) 2013-06-12
CN103155191B true CN103155191B (zh) 2016-01-20

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CN201180046820.9A Active CN103155191B (zh) 2010-11-01 2011-10-24 层叠型压电致动器以及压电振动装置

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JP (1) JP5403170B2 (ja)
CN (1) CN103155191B (ja)
WO (1) WO2012060236A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015060132A1 (ja) * 2013-10-22 2015-04-30 株式会社村田製作所 積層セラミック構造体及びその製造方法並びに圧電アクチュエータ
CN106576208B (zh) * 2014-07-30 2019-06-11 京瓷株式会社 压电元件、音响产生器、音响产生装置、电子设备
CN107547005A (zh) * 2017-09-14 2018-01-05 苏州迈客荣自动化技术有限公司 一种新型压电陶瓷致动器
CN107947628A (zh) * 2017-11-14 2018-04-20 歌尔股份有限公司 多层压电陶瓷振动元件
JP7092182B2 (ja) * 2020-12-25 2022-06-28 Tdk株式会社 圧電アクチュエータ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6448698B1 (en) * 1999-05-12 2002-09-10 Matsushita Electric Industrial Co., Ltd. Laminated piezoelectric transformer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06312505A (ja) * 1992-12-17 1994-11-08 Seiko Epson Corp 積層型圧電変位素子及びそれを用いたインクジェット記録ヘッド
JPH0730165A (ja) * 1993-07-12 1995-01-31 Murata Mfg Co Ltd 積層型圧電体素子
JP3511981B2 (ja) * 2000-06-12 2004-03-29 セイコーエプソン株式会社 圧電振動子ユニット、及び、これを用いたインクジェット式記録ヘッド
JP4655493B2 (ja) * 2004-03-26 2011-03-23 株式会社村田製作所 圧電素子、圧電アクチュエータ並びに圧電素子及び圧電アクチュエータの製造方法
WO2007012654A1 (de) * 2005-07-26 2007-02-01 Siemens Aktiengesellschaft Momolithischer piezoaktor mit drehung der polarisationsrichtung im übergangsbereich sowie verwendung des piezoaktors
JP5270578B2 (ja) * 2007-12-26 2013-08-21 京セラ株式会社 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム
JP5409772B2 (ja) * 2009-03-25 2014-02-05 京セラ株式会社 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6448698B1 (en) * 1999-05-12 2002-09-10 Matsushita Electric Industrial Co., Ltd. Laminated piezoelectric transformer

Also Published As

Publication number Publication date
JP5403170B2 (ja) 2014-01-29
JPWO2012060236A1 (ja) 2014-05-12
WO2012060236A1 (ja) 2012-05-10
CN103155191A (zh) 2013-06-12

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