CN103137667B - 具有双金属硅化物的射频ldmos器件的制造方法 - Google Patents
具有双金属硅化物的射频ldmos器件的制造方法 Download PDFInfo
- Publication number
- CN103137667B CN103137667B CN201110396915.5A CN201110396915A CN103137667B CN 103137667 B CN103137667 B CN 103137667B CN 201110396915 A CN201110396915 A CN 201110396915A CN 103137667 B CN103137667 B CN 103137667B
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- China
- Prior art keywords
- heavy doping
- type
- type heavy
- titanium silicide
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 title claims abstract description 22
- 229910021332 silicide Inorganic materials 0.000 title claims abstract description 22
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 229910021341 titanium silicide Inorganic materials 0.000 claims abstract description 50
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 29
- 229920005591 polysilicon Polymers 0.000 claims abstract description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 8
- 239000010703 silicon Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 48
- 230000004888 barrier function Effects 0.000 claims description 29
- 239000000377 silicon dioxide Substances 0.000 claims description 23
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 11
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 11
- 239000010936 titanium Substances 0.000 claims description 11
- 238000001039 wet etching Methods 0.000 claims description 11
- 238000004151 rapid thermal annealing Methods 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000005468 ion implantation Methods 0.000 claims description 6
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 description 2
- WNUPENMBHHEARK-UHFFFAOYSA-N silicon tungsten Chemical compound [Si].[W] WNUPENMBHHEARK-UHFFFAOYSA-N 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7835—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1041—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface
- H01L29/1045—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface the doping structure being parallel to the channel length, e.g. DMOS like
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110396915.5A CN103137667B (zh) | 2011-12-02 | 2011-12-02 | 具有双金属硅化物的射频ldmos器件的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110396915.5A CN103137667B (zh) | 2011-12-02 | 2011-12-02 | 具有双金属硅化物的射频ldmos器件的制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103137667A CN103137667A (zh) | 2013-06-05 |
CN103137667B true CN103137667B (zh) | 2015-10-14 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201110396915.5A Active CN103137667B (zh) | 2011-12-02 | 2011-12-02 | 具有双金属硅化物的射频ldmos器件的制造方法 |
Country Status (1)
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CN (1) | CN103137667B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104282569A (zh) * | 2013-07-05 | 2015-01-14 | 上海华虹宏力半导体制造有限公司 | Rfldmos的制作工艺方法 |
CN104425589B (zh) * | 2013-08-20 | 2017-08-08 | 上海华虹宏力半导体制造有限公司 | 射频ldmos器件及其制造方法 |
CN104425588B (zh) * | 2013-08-20 | 2017-06-06 | 上海华虹宏力半导体制造有限公司 | Rfldmos器件及其制造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6376320B1 (en) * | 2000-11-15 | 2002-04-23 | Advanced Micro Devices, Inc. | Method for forming field effect transistor with silicides of different thickness and of different materials for the source/drain and the gate |
CN1722369A (zh) * | 2004-07-16 | 2006-01-18 | 台湾积体电路制造股份有限公司 | 金属硅化栅极及其形成方法 |
JP2007060797A (ja) * | 2005-08-24 | 2007-03-08 | Toshiba Mitsubishi-Electric Industrial System Corp | 発電機保護リレー装置 |
CN101673762A (zh) * | 2008-09-09 | 2010-03-17 | 上海华虹Nec电子有限公司 | Ldmos晶体管结构和制备方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7262476B2 (en) * | 2004-11-30 | 2007-08-28 | Agere Systems Inc. | Semiconductor device having improved power density |
US20090267145A1 (en) * | 2008-04-23 | 2009-10-29 | Ciclon Semiconductor Device Corp. | Mosfet device having dual interlevel dielectric thickness and method of making same |
-
2011
- 2011-12-02 CN CN201110396915.5A patent/CN103137667B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6376320B1 (en) * | 2000-11-15 | 2002-04-23 | Advanced Micro Devices, Inc. | Method for forming field effect transistor with silicides of different thickness and of different materials for the source/drain and the gate |
CN1722369A (zh) * | 2004-07-16 | 2006-01-18 | 台湾积体电路制造股份有限公司 | 金属硅化栅极及其形成方法 |
JP2007060797A (ja) * | 2005-08-24 | 2007-03-08 | Toshiba Mitsubishi-Electric Industrial System Corp | 発電機保護リレー装置 |
CN101673762A (zh) * | 2008-09-09 | 2010-03-17 | 上海华虹Nec电子有限公司 | Ldmos晶体管结构和制备方法 |
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CN103137667A (zh) | 2013-06-05 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140116 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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TA01 | Transfer of patent application right |
Effective date of registration: 20140116 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Applicant before: Shanghai Huahong NEC Electronics Co., Ltd. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant |