CN103137048B - 具有多个探头单元的阵列检测装置 - Google Patents

具有多个探头单元的阵列检测装置 Download PDF

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Publication number
CN103137048B
CN103137048B CN201210105165.6A CN201210105165A CN103137048B CN 103137048 B CN103137048 B CN 103137048B CN 201210105165 A CN201210105165 A CN 201210105165A CN 103137048 B CN103137048 B CN 103137048B
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CN
China
Prior art keywords
glass
contact unit
probe
detection device
array detection
Prior art date
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Active
Application number
CN201210105165.6A
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English (en)
Chinese (zh)
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CN103137048A (zh
Inventor
金钟纹
柳尚燦
朴俊植
金忍洙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YU ELECTRONIC SYSTEM CO Ltd
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YU ELECTRONIC SYSTEM CO Ltd
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Publication of CN103137048A publication Critical patent/CN103137048A/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2844—Fault-finding or characterising using test interfaces, e.g. adapters, test boxes, switches, PIN drivers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
CN201210105165.6A 2011-11-23 2012-04-11 具有多个探头单元的阵列检测装置 Active CN103137048B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110122749A KR101286250B1 (ko) 2011-11-23 2011-11-23 다수의 헤드 유니트를 갖는 어레이 테스트 장치
KR10-2011-0122749 2011-11-23

Publications (2)

Publication Number Publication Date
CN103137048A CN103137048A (zh) 2013-06-05
CN103137048B true CN103137048B (zh) 2015-10-21

Family

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CN201210105165.6A Active CN103137048B (zh) 2011-11-23 2012-04-11 具有多个探头单元的阵列检测装置

Country Status (3)

Country Link
KR (1) KR101286250B1 (ko)
CN (1) CN103137048B (ko)
TW (1) TWI491896B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017096949A (ja) * 2015-11-24 2017-06-01 フォトン・ダイナミクス・インコーポレーテッド セル接触プロービングパッドを使用して平面パネル型表示装置を電気的に検査するためのシステムおよび方法
CN108074511A (zh) * 2016-11-09 2018-05-25 永友Dsp有限公司 显示面板检测用探针单元的夹紧装置
CN108732497B (zh) * 2018-05-22 2024-04-26 默拓（苏州）机电科技有限公司 一种直线电机的安装测试设备
CN108831359B (zh) * 2018-06-22 2020-08-11 惠科股份有限公司 显示面板及其显示装置
CN109324253B (zh) * 2018-09-30 2024-03-08 江西合力泰科技有限公司 一种装pin脚后玻璃的检测装置及方法
KR102097456B1 (ko) * 2019-07-01 2020-04-07 우리마이크론(주) 디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치
KR102097455B1 (ko) * 2019-07-01 2020-04-07 우리마이크론(주) 디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101308193A (zh) * 2007-05-15 2008-11-19 东京毅力科创株式会社 探测装置
CN101385137A (zh) * 2006-02-16 2009-03-11 飞而康公司 空间变换器及其制造方法以及具有此空间变换器的探针板
CN201429965Y (zh) * 2009-07-02 2010-03-24 北京京东方光电科技有限公司 液晶面板的线路检测装置和设备
CN102053400A (zh) * 2009-10-27 2011-05-11 塔工程有限公司 阵列基板检测装置及方法
CN102072991A (zh) * 2009-11-20 2011-05-25 塔工程有限公司 具有探针棒更换单元的阵列测试装置
CN102117588A (zh) * 2009-12-31 2011-07-06 塔工程有限公司 阵列测试装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007090465A1 (en) * 2006-02-08 2007-08-16 Verigy (Singapore) Pte. Ltd. Testing devices under test by an automatic test apparatus having a multisite probe card
JP5426161B2 (ja) * 2006-06-08 2014-02-26 日本発條株式会社 プローブカード
KR20090026638A (ko) * 2007-09-10 2009-03-13 주식회사 프로텍 오토 프로브 유니트

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101385137A (zh) * 2006-02-16 2009-03-11 飞而康公司 空间变换器及其制造方法以及具有此空间变换器的探针板
CN101308193A (zh) * 2007-05-15 2008-11-19 东京毅力科创株式会社 探测装置
CN201429965Y (zh) * 2009-07-02 2010-03-24 北京京东方光电科技有限公司 液晶面板的线路检测装置和设备
CN102053400A (zh) * 2009-10-27 2011-05-11 塔工程有限公司 阵列基板检测装置及方法
CN102072991A (zh) * 2009-11-20 2011-05-25 塔工程有限公司 具有探针棒更换单元的阵列测试装置
CN102117588A (zh) * 2009-12-31 2011-07-06 塔工程有限公司 阵列测试装置

Also Published As

Publication number Publication date
TWI491896B (zh) 2015-07-11
TW201321777A (zh) 2013-06-01
CN103137048A (zh) 2013-06-05
KR101286250B1 (ko) 2013-07-12
KR20130057033A (ko) 2013-05-31

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