CN103098207A - 具有热管理的堆叠半导体芯片设备 - Google Patents
具有热管理的堆叠半导体芯片设备 Download PDFInfo
- Publication number
- CN103098207A CN103098207A CN2011800435900A CN201180043590A CN103098207A CN 103098207 A CN103098207 A CN 103098207A CN 2011800435900 A CN2011800435900 A CN 2011800435900A CN 201180043590 A CN201180043590 A CN 201180043590A CN 103098207 A CN103098207 A CN 103098207A
- Authority
- CN
- China
- Prior art keywords
- semiconductor chip
- circuit board
- thermal management
- management device
- aperture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
- H01L25/0652—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00 the devices being arranged next and on each other, i.e. mixed assemblies
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/14—Structural association of two or more printed circuits
- H05K1/141—One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L2023/4037—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by thermal path or place of attachment of heatsink
- H01L2023/4062—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by thermal path or place of attachment of heatsink heatsink to or through board or cabinet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
- H01L2224/1401—Structure
- H01L2224/1403—Bump connectors having different sizes, e.g. different diameters, heights or widths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
- H01L2224/141—Disposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
- H01L2224/141—Disposition
- H01L2224/1418—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/14181—On opposite sides of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/17—Structure, shape, material or disposition of the bump connectors after the connecting process of a plurality of bump connectors
- H01L2224/1701—Structure
- H01L2224/1703—Bump connectors having different sizes, e.g. different diameters, heights or widths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8119—Arrangement of the bump connectors prior to mounting
- H01L2224/81192—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92222—Sequential connecting processes the first connecting process involving a bump connector
- H01L2224/92225—Sequential connecting processes the first connecting process involving a bump connector the second connecting process involving a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06513—Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06517—Bump or bump-like direct electrical connections from device to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/0652—Bump or bump-like direct electrical connections from substrate to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06572—Auxiliary carrier between devices, the carrier having an electrical connection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
- H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06589—Thermal management, e.g. cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15151—Shape the die mounting substrate comprising an aperture, e.g. for underfilling, outgassing, window type wire connections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
- H01L2924/15321—Connection portion the connection portion being formed on the die mounting surface of the substrate being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
- H05K1/0203—Cooling of mounted components
- H05K1/0204—Cooling of mounted components using means for thermal conduction connection in the thickness direction of the substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/181—Printed circuits structurally associated with non-printed electric components associated with surface mounted components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/09072—Hole or recess under component or special relationship between hole and component
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/10378—Interposers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/10416—Metallic blocks or heatsinks completely inserted in a PCB
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10431—Details of mounted components
- H05K2201/10507—Involving several components
- H05K2201/10515—Stacked components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10431—Details of mounted components
- H05K2201/1056—Metal over component, i.e. metal plate over component mounted on or embedded in PCB
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/889,590 | 2010-09-24 | ||
| US12/889,590 US8472190B2 (en) | 2010-09-24 | 2010-09-24 | Stacked semiconductor chip device with thermal management |
| PCT/US2011/052466 WO2012040271A1 (en) | 2010-09-24 | 2011-09-21 | Stacked semiconductor chip device with thermal management |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103098207A true CN103098207A (zh) | 2013-05-08 |
Family
ID=44741715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011800435900A Pending CN103098207A (zh) | 2010-09-24 | 2011-09-21 | 具有热管理的堆叠半导体芯片设备 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8472190B2 (enExample) |
| EP (1) | EP2619795A1 (enExample) |
| JP (1) | JP2013538012A (enExample) |
| KR (1) | KR20130102052A (enExample) |
| CN (1) | CN103098207A (enExample) |
| WO (1) | WO2012040271A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109075158A (zh) * | 2016-04-12 | 2018-12-21 | Mbda法国公司 | 设有多个互连的电子功能件的电子系统 |
| CN110214373A (zh) * | 2017-02-28 | 2019-09-06 | 华为技术有限公司 | 光电混合封装组件 |
Families Citing this family (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7762822B2 (en) | 2005-04-27 | 2010-07-27 | Aehr Test Systems | Apparatus for testing electronic devices |
| US7800382B2 (en) | 2007-12-19 | 2010-09-21 | AEHR Test Ststems | System for testing an integrated circuit of a device and its method of use |
| US8030957B2 (en) | 2009-03-25 | 2011-10-04 | Aehr Test Systems | System for testing an integrated circuit of a device and its method of use |
| CN202276549U (zh) * | 2011-09-26 | 2012-06-13 | 番禺得意精密电子工业有限公司 | 电连接组件 |
| JP5167516B1 (ja) * | 2011-11-30 | 2013-03-21 | 株式会社フジクラ | 部品内蔵基板及びその製造方法並びに部品内蔵基板実装体 |
| US20130181359A1 (en) | 2012-01-13 | 2013-07-18 | TW Semiconductor Manufacturing Company, Ltd. | Methods and Apparatus for Thinner Package on Package Structures |
| TWI508249B (zh) | 2012-04-02 | 2015-11-11 | 矽品精密工業股份有限公司 | 封裝件、半導體封裝結構及其製法 |
| US20130308274A1 (en) * | 2012-05-21 | 2013-11-21 | Triquint Semiconductor, Inc. | Thermal spreader having graduated thermal expansion parameters |
| US9209106B2 (en) | 2012-06-21 | 2015-12-08 | Ati Technologies Ulc | Thermal management circuit board for stacked semiconductor chip device |
| US9006908B2 (en) * | 2012-08-01 | 2015-04-14 | Marvell Israel (M.I.S.L) Ltd. | Integrated circuit interposer and method of manufacturing the same |
| US9196575B1 (en) * | 2013-02-04 | 2015-11-24 | Altera Corporation | Integrated circuit package with cavity in substrate |
| US9318464B2 (en) * | 2013-05-21 | 2016-04-19 | Advanced Micro Devices, Inc. | Variable temperature solders for multi-chip module packaging and repackaging |
| US9653443B2 (en) * | 2014-02-14 | 2017-05-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Thermal performance structure for semiconductor packages and method of forming same |
| US9269700B2 (en) * | 2014-03-31 | 2016-02-23 | Micron Technology, Inc. | Stacked semiconductor die assemblies with improved thermal performance and associated systems and methods |
| US9391029B2 (en) * | 2014-06-12 | 2016-07-12 | Kabushiki Kaisha Toshiba | Electronic device |
| US10192846B2 (en) | 2014-11-05 | 2019-01-29 | Infineon Technologies Austria Ag | Method of inserting an electronic component into a slot in a circuit board |
| US10064287B2 (en) * | 2014-11-05 | 2018-08-28 | Infineon Technologies Austria Ag | System and method of providing a semiconductor carrier and redistribution structure |
| US10553557B2 (en) | 2014-11-05 | 2020-02-04 | Infineon Technologies Austria Ag | Electronic component, system and method |
| KR101640341B1 (ko) * | 2015-02-04 | 2016-07-15 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 |
| US9996120B1 (en) * | 2015-05-22 | 2018-06-12 | EMC IP Holding Company LLC | PCB module for increased connectivity |
| US9589920B2 (en) * | 2015-07-01 | 2017-03-07 | Zhuhai Advanced Chip Carriers & Electronic Substrate Solutions Technologies Co. Ltd. | Chip package |
| US9779940B2 (en) * | 2015-07-01 | 2017-10-03 | Zhuahai Advanced Chip Carriers & Electronic Substrate Solutions Technologies Co. Ltd. | Chip package |
| DE102015220676A1 (de) * | 2015-10-22 | 2017-04-27 | Zf Friedrichshafen Ag | Leiterplatte und Anordnung mit einer Leiterplatte |
| WO2017108121A1 (en) * | 2015-12-23 | 2017-06-29 | Intel IP Corporation | Semiconductor die package with more than one hanging die |
| TWI729056B (zh) | 2016-01-08 | 2021-06-01 | 美商艾爾測試系統 | 測試器設備及測試微電子裝置的方法 |
| US10121766B2 (en) * | 2016-06-30 | 2018-11-06 | Micron Technology, Inc. | Package-on-package semiconductor device assemblies including one or more windows and related methods and packages |
| KR102123252B1 (ko) * | 2016-08-31 | 2020-06-16 | 가부시키가이샤 무라타 세이사쿠쇼 | 회로모듈 및 그 제조 방법 |
| US10797039B2 (en) * | 2016-12-07 | 2020-10-06 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming a 3D interposer system-in-package module |
| US10062634B2 (en) * | 2016-12-21 | 2018-08-28 | Micron Technology, Inc. | Semiconductor die assembly having heat spreader that extends through underlying interposer and related technology |
| KR20250126856A (ko) * | 2017-03-03 | 2025-08-25 | 에어 테스트 시스템즈 | 카트리지, 테스트 피스 및 하나 이상의 전자 디바이스들을 테스팅하는 방법 |
| US9899305B1 (en) * | 2017-04-28 | 2018-02-20 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor package structure |
| US10269678B1 (en) | 2017-12-05 | 2019-04-23 | Nxp Usa, Inc. | Microelectronic components having integrated heat dissipation posts, systems including the same, and methods for the fabrication thereof |
| US11101145B2 (en) * | 2018-08-14 | 2021-08-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device with dummy micro bumps between stacking dies to improve flowability of underfill material |
| US11152333B2 (en) * | 2018-10-19 | 2021-10-19 | Micron Technology, Inc. | Semiconductor device packages with enhanced heat management and related systems |
| US10973114B2 (en) | 2018-10-29 | 2021-04-06 | L3 Technologies, Inc. | Indium-based interface structures, apparatus, and methods for forming the same |
| US11553616B2 (en) * | 2018-12-07 | 2023-01-10 | Delta Electronics, Inc. | Module with power device |
| CN116634659A (zh) * | 2018-12-07 | 2023-08-22 | 台达电子工业股份有限公司 | 电源模块 |
| US10943880B2 (en) | 2019-05-16 | 2021-03-09 | Advanced Micro Devices, Inc. | Semiconductor chip with reduced pitch conductive pillars |
| KR102377811B1 (ko) | 2019-08-09 | 2022-03-22 | 삼성전기주식회사 | 전자 소자 모듈 및 그 제조 방법 |
| WO2021212426A1 (en) * | 2020-04-23 | 2021-10-28 | Hongfujin Precision Industry(Wuhan)Co., Ltd. | Stacked circuit boards |
| US20210391301A1 (en) * | 2020-06-10 | 2021-12-16 | Intel Corporation | High speed memory system integration |
| KR102812686B1 (ko) * | 2020-06-22 | 2025-05-27 | 엘지이노텍 주식회사 | 통신 모듈 |
| US11769752B2 (en) * | 2020-07-24 | 2023-09-26 | Micron Technology, Inc. | Stacked semiconductor die assemblies with substrate heat sinks and associated systems and methods |
| JP7510817B2 (ja) * | 2020-08-25 | 2024-07-04 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
| EP4517349A3 (en) | 2020-10-07 | 2025-06-04 | AEHR Test Systems | Electronics tester |
| US20220197806A1 (en) * | 2020-12-23 | 2022-06-23 | Intel Corporation | High speed memory system integration |
| US11625079B2 (en) * | 2020-12-23 | 2023-04-11 | Quanta Computer Inc. | Staggered arrangement graphite heat sink for liquid cooling cold plate |
| JP7447785B2 (ja) * | 2020-12-25 | 2024-03-12 | 株式会社デンソー | 電子装置 |
| US12262514B2 (en) * | 2021-04-08 | 2025-03-25 | International Business Machines Corporation | Heat sinks with beyond-board fins |
| KR20230031713A (ko) | 2021-08-27 | 2023-03-07 | 삼성전자주식회사 | 반도체 패키지 |
| CN116053232A (zh) * | 2022-12-20 | 2023-05-02 | 成都海光集成电路设计有限公司 | 一种电子封装、电子封装的制作方法及电子设备 |
| US20240353634A1 (en) * | 2023-04-20 | 2024-10-24 | Ciena Corporation | Managing relative thermal drift of carrier-mounted integrated circuits |
| US20250372585A1 (en) * | 2023-06-09 | 2025-12-04 | Advanced Micro Devices, Inc. | Integrated system in package |
| US20250096051A1 (en) * | 2023-09-20 | 2025-03-20 | Qualcomm Incorporated | Package comprising a substrate with cavity, and an integrated device located in the cavity of the substrate |
| DE102023131472A1 (de) * | 2023-11-13 | 2025-05-15 | Rolls-Royce Deutschland Ltd & Co Kg | Leiterplattenanordnung |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5567654A (en) * | 1994-09-28 | 1996-10-22 | International Business Machines Corporation | Method and workpiece for connecting a thin layer to a monolithic electronic module's surface and associated module packaging |
| US5821762A (en) * | 1994-02-28 | 1998-10-13 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device, production method therefor, method for testing semiconductor elements, test substrate for the method and method for producing the test substrate |
| US6501164B1 (en) * | 2001-06-26 | 2002-12-31 | Siliconware Precision Industries Co., Ltd. | Multi-chip semiconductor package with heat dissipating structure |
| JP2004207566A (ja) * | 2002-12-26 | 2004-07-22 | Seiko Instruments Inc | 半導体装置、表示装置、及び、その製造方法 |
| US20040217485A1 (en) * | 2003-05-02 | 2004-11-04 | Advanced Semiconductor Engineering Inc. | Stacked flip chip package |
| CN1734756A (zh) * | 2004-08-11 | 2006-02-15 | 索尼株式会社 | 电子回路装置 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5856911A (en) * | 1996-11-12 | 1999-01-05 | National Semiconductor Corporation | Attachment assembly for integrated circuits |
| US6060777A (en) * | 1998-07-21 | 2000-05-09 | Intel Corporation | Underside heat slug for ball grid array packages |
| US6853070B2 (en) * | 2001-02-15 | 2005-02-08 | Broadcom Corporation | Die-down ball grid array package with die-attached heat spreader and method for making the same |
| TW502406B (en) * | 2001-08-01 | 2002-09-11 | Siliconware Precision Industries Co Ltd | Ultra-thin package having stacked die |
| US6580611B1 (en) * | 2001-12-21 | 2003-06-17 | Intel Corporation | Dual-sided heat removal system |
| US6712621B2 (en) * | 2002-01-23 | 2004-03-30 | High Connection Density, Inc. | Thermally enhanced interposer and method |
| US6861750B2 (en) * | 2002-02-01 | 2005-03-01 | Broadcom Corporation | Ball grid array package with multiple interposers |
| US6858932B2 (en) * | 2002-02-07 | 2005-02-22 | Freescale Semiconductor, Inc. | Packaged semiconductor device and method of formation |
| US6906415B2 (en) | 2002-06-27 | 2005-06-14 | Micron Technology, Inc. | Semiconductor device assemblies and packages including multiple semiconductor devices and methods |
| US7122906B2 (en) | 2004-01-29 | 2006-10-17 | Micron Technology, Inc. | Die-wafer package and method of fabricating same |
| JP2007123457A (ja) * | 2005-10-27 | 2007-05-17 | Nec Electronics Corp | 半導体モジュール |
| US7903425B2 (en) * | 2006-06-27 | 2011-03-08 | Lenovo (Singapore) Pte. Ltd. | Integrated circuit chip thermal solution |
| US7646093B2 (en) * | 2006-12-20 | 2010-01-12 | Intel Corporation | Thermal management of dies on a secondary side of a package |
| US20100181594A1 (en) * | 2008-03-25 | 2010-07-22 | Lin Charles W C | Semiconductor chip assembly with post/base heat spreader and cavity over post |
-
2010
- 2010-09-24 US US12/889,590 patent/US8472190B2/en active Active
-
2011
- 2011-09-21 CN CN2011800435900A patent/CN103098207A/zh active Pending
- 2011-09-21 EP EP11764639.8A patent/EP2619795A1/en not_active Withdrawn
- 2011-09-21 JP JP2013530242A patent/JP2013538012A/ja active Pending
- 2011-09-21 WO PCT/US2011/052466 patent/WO2012040271A1/en not_active Ceased
- 2011-09-21 KR KR1020137007014A patent/KR20130102052A/ko not_active Ceased
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5821762A (en) * | 1994-02-28 | 1998-10-13 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device, production method therefor, method for testing semiconductor elements, test substrate for the method and method for producing the test substrate |
| US5567654A (en) * | 1994-09-28 | 1996-10-22 | International Business Machines Corporation | Method and workpiece for connecting a thin layer to a monolithic electronic module's surface and associated module packaging |
| US6501164B1 (en) * | 2001-06-26 | 2002-12-31 | Siliconware Precision Industries Co., Ltd. | Multi-chip semiconductor package with heat dissipating structure |
| JP2004207566A (ja) * | 2002-12-26 | 2004-07-22 | Seiko Instruments Inc | 半導体装置、表示装置、及び、その製造方法 |
| US20040217485A1 (en) * | 2003-05-02 | 2004-11-04 | Advanced Semiconductor Engineering Inc. | Stacked flip chip package |
| CN1734756A (zh) * | 2004-08-11 | 2006-02-15 | 索尼株式会社 | 电子回路装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109075158A (zh) * | 2016-04-12 | 2018-12-21 | Mbda法国公司 | 设有多个互连的电子功能件的电子系统 |
| CN109075158B (zh) * | 2016-04-12 | 2023-05-23 | Mbda法国公司 | 设有多个互连的电子功能件的电子系统 |
| CN110214373A (zh) * | 2017-02-28 | 2019-09-06 | 华为技术有限公司 | 光电混合封装组件 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012040271A1 (en) | 2012-03-29 |
| US20120075807A1 (en) | 2012-03-29 |
| US8472190B2 (en) | 2013-06-25 |
| EP2619795A1 (en) | 2013-07-31 |
| KR20130102052A (ko) | 2013-09-16 |
| JP2013538012A (ja) | 2013-10-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103098207A (zh) | 具有热管理的堆叠半导体芯片设备 | |
| US8378471B2 (en) | Semiconductor chip bump connection apparatus and method | |
| KR100772604B1 (ko) | 집적화된 전자 칩 및 상호접속 디바이스와 그 제조프로세스 | |
| JP5224845B2 (ja) | 半導体装置の製造方法及び半導体装置 | |
| US6906417B2 (en) | Ball grid array utilizing solder balls having a core material covered by a metal layer | |
| TWI483357B (zh) | 封裝結構 | |
| US8704353B2 (en) | Thermal management of stacked semiconductor chips with electrically non-functional interconnects | |
| US10211160B2 (en) | Microelectronic assembly with redistribution structure formed on carrier | |
| CN102326247B (zh) | 用于集成电路的面对面(f2f)复合式结构 | |
| JP2008263197A (ja) | 半導体チップを有する回路基板アセンブリ、これを利用する電気アセンブリ、及びこれを利用する情報処理システム | |
| JP2015082576A (ja) | 電子装置、電子機器及び電子装置の製造方法 | |
| CN114144875A (zh) | 具有顶侧存储器模块的ic封装 | |
| JPH07170098A (ja) | 電子部品の実装構造および実装方法 | |
| US20070246817A1 (en) | Solder ball assembly for a semiconductor device and method of fabricating same | |
| US8546187B2 (en) | Electronic part and method of manufacturing the same | |
| TW201104767A (en) | Semiconductor package with NSMD type solder mask and method for manufacturing the same | |
| JP3847602B2 (ja) | 積層型半導体装置及びその製造方法並びに半導体装置搭載マザーボード及び半導体装置搭載マザーボードの製造方法 | |
| JP2003069181A (ja) | 電子機器装置及びその製造方法 | |
| CN107170715B (zh) | 半导体封装结构及其制作方法 | |
| JP5923943B2 (ja) | 半導体装置及び電子装置 | |
| TWI527177B (zh) | 晶片構件與晶片封裝體 | |
| TWI290814B (en) | Method for repairing metal protection layers on electrical connecting pads of circuit boards | |
| WO2016203927A1 (ja) | 複合型半導体装置およびその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130508 |