CN103094324B - 沟槽型绝缘栅双极型晶体管及其制备方法 - Google Patents
沟槽型绝缘栅双极型晶体管及其制备方法 Download PDFInfo
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- CN103094324B CN103094324B CN201110349631.0A CN201110349631A CN103094324B CN 103094324 B CN103094324 B CN 103094324B CN 201110349631 A CN201110349631 A CN 201110349631A CN 103094324 B CN103094324 B CN 103094324B
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- 238000002360 preparation method Methods 0.000 title claims abstract description 27
- 238000005468 ion implantation Methods 0.000 claims abstract description 36
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- 238000005530 etching Methods 0.000 claims description 26
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- 239000004065 semiconductor Substances 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 14
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- 238000007254 oxidation reaction Methods 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 8
- 150000002500 ions Chemical class 0.000 claims description 6
- 229910052785 arsenic Inorganic materials 0.000 claims description 5
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 5
- 238000009279 wet oxidation reaction Methods 0.000 claims description 5
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- 238000009413 insulation Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 22
- 238000010586 diagram Methods 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 6
- 239000005380 borophosphosilicate glass Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
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- 239000012535 impurity Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- OKZIUSOJQLYFSE-UHFFFAOYSA-N difluoroboron Chemical compound F[B]F OKZIUSOJQLYFSE-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
- H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
- H01L29/66333—Vertical insulated gate bipolar transistors
- H01L29/6634—Vertical insulated gate bipolar transistors with a recess formed by etching in the source/emitter contact region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (22)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110349631.0A CN103094324B (zh) | 2011-11-08 | 2011-11-08 | 沟槽型绝缘栅双极型晶体管及其制备方法 |
PCT/CN2012/083411 WO2013067888A1 (zh) | 2011-11-08 | 2012-10-24 | 沟槽型绝缘栅双极型晶体管及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110349631.0A CN103094324B (zh) | 2011-11-08 | 2011-11-08 | 沟槽型绝缘栅双极型晶体管及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN103094324A CN103094324A (zh) | 2013-05-08 |
CN103094324B true CN103094324B (zh) | 2016-03-23 |
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Family Applications (1)
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CN201110349631.0A Active CN103094324B (zh) | 2011-11-08 | 2011-11-08 | 沟槽型绝缘栅双极型晶体管及其制备方法 |
Country Status (2)
Country | Link |
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CN (1) | CN103094324B (zh) |
WO (1) | WO2013067888A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112103187A (zh) * | 2020-09-22 | 2020-12-18 | 深圳市芯电元科技有限公司 | 一种提高沟槽mosfet元胞密度的工艺方法及沟槽mosfet结构 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104241356B (zh) * | 2013-06-17 | 2017-05-24 | 北大方正集团有限公司 | 一种dmos器件及其制作方法 |
CN104347397B (zh) | 2013-07-23 | 2018-02-06 | 无锡华润上华科技有限公司 | 注入增强型绝缘栅双极型晶体管的制造方法 |
WO2017193321A1 (zh) * | 2016-05-12 | 2017-11-16 | 中山港科半导体科技有限公司 | 绝缘栅双极晶体管结构 |
CN108292677B (zh) | 2016-09-17 | 2020-09-29 | 电子科技大学 | 一种具有体内场板的折叠型终端 |
CN106876453A (zh) * | 2017-01-04 | 2017-06-20 | 上海华虹宏力半导体制造有限公司 | 沟槽栅igbt及制作方法 |
CN114023821B (zh) * | 2021-10-20 | 2024-01-19 | 上海华虹宏力半导体制造有限公司 | 超级结器件及其制造方法 |
CN114551589B (zh) * | 2022-04-26 | 2022-09-09 | 安建科技(深圳)有限公司 | 一种功率半导体器件及其制备方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1722461A (zh) * | 2004-07-16 | 2006-01-18 | 三洋电机株式会社 | 半导体装置 |
Family Cites Families (8)
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JP4371521B2 (ja) * | 2000-03-06 | 2009-11-25 | 株式会社東芝 | 電力用半導体素子およびその製造方法 |
JP2002110978A (ja) * | 2000-10-02 | 2002-04-12 | Toshiba Corp | 電力用半導体素子 |
JP3764343B2 (ja) * | 2001-02-28 | 2006-04-05 | 株式会社東芝 | 半導体装置の製造方法 |
JP4225711B2 (ja) * | 2001-06-29 | 2009-02-18 | 株式会社東芝 | 半導体素子及びその製造方法 |
JP2003273354A (ja) * | 2002-03-18 | 2003-09-26 | Fuji Electric Co Ltd | 半導体装置およびその製造方法 |
US7416948B2 (en) * | 2003-12-30 | 2008-08-26 | Fairchild Semiconductor Corporation | Trench FET with improved body to gate alignment |
JP4091921B2 (ja) * | 2004-02-16 | 2008-05-28 | 松下電器産業株式会社 | 半導体装置及びその製造方法 |
US8278702B2 (en) * | 2008-09-16 | 2012-10-02 | Fairchild Semiconductor Corporation | High density trench field effect transistor |
-
2011
- 2011-11-08 CN CN201110349631.0A patent/CN103094324B/zh active Active
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2012
- 2012-10-24 WO PCT/CN2012/083411 patent/WO2013067888A1/zh active Application Filing
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1722461A (zh) * | 2004-07-16 | 2006-01-18 | 三洋电机株式会社 | 半导体装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112103187A (zh) * | 2020-09-22 | 2020-12-18 | 深圳市芯电元科技有限公司 | 一种提高沟槽mosfet元胞密度的工艺方法及沟槽mosfet结构 |
CN112103187B (zh) * | 2020-09-22 | 2021-12-07 | 深圳市芯电元科技有限公司 | 一种提高沟槽mosfet元胞密度的工艺方法及沟槽mosfet结构 |
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CN103094324A (zh) | 2013-05-08 |
WO2013067888A1 (zh) | 2013-05-16 |
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