CN102788798B - 贴合板状体检查装置与方法 - Google Patents

贴合板状体检查装置与方法 Download PDF

Info

Publication number
CN102788798B
CN102788798B CN201210151151.8A CN201210151151A CN102788798B CN 102788798 B CN102788798 B CN 102788798B CN 201210151151 A CN201210151151 A CN 201210151151A CN 102788798 B CN102788798 B CN 102788798B
Authority
CN
China
Prior art keywords
plate
shaped body
line sensor
sensor camera
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210151151.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN102788798A (zh
Inventor
林义典
若叶博之
井筒纪
关胜利
小野洋子
权藤隆德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Engineering Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Engineering Works Co Ltd filed Critical Shibaura Engineering Works Co Ltd
Publication of CN102788798A publication Critical patent/CN102788798A/zh
Application granted granted Critical
Publication of CN102788798B publication Critical patent/CN102788798B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN201210151151.8A 2011-05-16 2012-05-15 贴合板状体检查装置与方法 Expired - Fee Related CN102788798B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011109951A JP5791101B2 (ja) 2011-05-16 2011-05-16 貼り合せ板状体検査装置及び方法
JP2011-109951 2011-05-16

Publications (2)

Publication Number Publication Date
CN102788798A CN102788798A (zh) 2012-11-21
CN102788798B true CN102788798B (zh) 2015-06-03

Family

ID=47154262

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210151151.8A Expired - Fee Related CN102788798B (zh) 2011-05-16 2012-05-15 贴合板状体检查装置与方法

Country Status (4)

Country Link
JP (1) JP5791101B2 (enExample)
KR (1) KR101296969B1 (enExample)
CN (1) CN102788798B (enExample)
TW (1) TWI499770B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104406988A (zh) * 2014-11-18 2015-03-11 浙江大学 一种玻璃内部缺陷的检测方法
KR20170133113A (ko) * 2016-05-25 2017-12-05 코닝정밀소재 주식회사 유리 상면 상의 이물질 검출 방법과 장치, 및 입사광 조사 방법
CN106872483A (zh) * 2017-02-04 2017-06-20 大连益盛达智能科技有限公司 解决光学检测设备因透明材质中的气泡影响检测的方法
CN110391132B (zh) * 2018-04-16 2023-05-16 芝浦机械电子株式会社 有机膜形成装置
KR102713409B1 (ko) * 2018-11-26 2024-10-04 삼성디스플레이 주식회사 윈도우 패널, 이를 포함하는 표시 장치 및 그 제조 방법
CN113702401B (zh) * 2021-08-17 2023-12-08 芜湖东旭光电科技有限公司 玻璃边部缺陷的检测方法
CN114152619B (zh) * 2021-11-30 2024-05-03 天马微电子股份有限公司 线路板及显示装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0726457A2 (en) * 1995-02-10 1996-08-14 Central Glass Company, Limited Method and apparatus for detecting defects in transparent sheets, particularly glass sheets
CN1441294A (zh) * 2002-02-28 2003-09-10 芝浦机械电子装置股份有限公司 基板贴合装置及其方法以及基板检测装置
CN1495748A (zh) * 2002-08-01 2004-05-12 株式会社理光 光盘检查装置、光盘检查方法、光盘制造方法和光盘
CN101241086A (zh) * 2008-03-03 2008-08-13 中国科学院光电技术研究所 一种基于对玻璃材料的气泡、杂质测量的检测仪
CN101322169A (zh) * 2005-11-30 2008-12-10 精工电子有限公司 粘合方法以及显示装置的制造方法
CN101790679A (zh) * 2007-09-04 2010-07-28 旭硝子株式会社 检测透明板体内部的微小异物的方法及其装置
CN101813640A (zh) * 2009-02-20 2010-08-25 三星康宁精密琉璃株式会社 玻璃表面的异物检查装置及检查方法
CN101883979A (zh) * 2007-12-03 2010-11-10 芝浦机械电子装置股份有限公司 基板表面检查装置以及基板表面检查方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11328756A (ja) * 1998-03-13 1999-11-30 Sanyo Electric Co Ltd 貼り合せ型ディスクの接着部の検査方法および検査装置
JP2001141662A (ja) * 1999-11-18 2001-05-25 Central Glass Co Ltd 透明板状体の欠点検出方法および検出装置
JP2001143353A (ja) * 1999-11-18 2001-05-25 Aiwa Co Ltd ディスク装置のディスク取出機構
JP2003083904A (ja) * 2001-09-17 2003-03-19 Central Glass Co Ltd 透明板状体の欠点検出方法およびその装置
JP2004212202A (ja) * 2002-12-27 2004-07-29 Dainippon Printing Co Ltd 透光体の外観検査方法及び装置
JP2004257776A (ja) * 2003-02-25 2004-09-16 Kiyousera Opt Kk 光透過体検査装置
JP2004301882A (ja) * 2003-03-28 2004-10-28 Fujitsu Display Technologies Corp 液晶表示パネルの欠陥検出方法
JP2004309262A (ja) * 2003-04-04 2004-11-04 V Technology Co Ltd シール材塗布検査装置
JP4322890B2 (ja) * 2005-06-13 2009-09-02 シャープ株式会社 起伏検査装置、起伏検査方法、起伏検査装置の制御プログラム、記録媒体
JP5051874B2 (ja) * 2006-01-11 2012-10-17 日東電工株式会社 積層フィルムの製造方法、積層フィルムの欠陥検出方法、積層フィルムの欠陥検出装置
JP2009249211A (ja) * 2008-04-03 2009-10-29 Central Glass Co Ltd 合わせガラスの光学的欠陥の検査方法および検査装置
JP5334617B2 (ja) * 2009-02-17 2013-11-06 日東電工株式会社 配線回路基板の製造方法
JP2010223613A (ja) * 2009-03-19 2010-10-07 Futec Inc 光学検査装置
JP5521377B2 (ja) * 2009-04-13 2014-06-11 セントラル硝子株式会社 ガラス板の欠陥識別方法および装置
DE202009017691U1 (de) * 2009-09-02 2010-05-20 Gp Inspect Gmbh Vorrichtung zur Detektion von Defekten in einem Objekt

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0726457A2 (en) * 1995-02-10 1996-08-14 Central Glass Company, Limited Method and apparatus for detecting defects in transparent sheets, particularly glass sheets
CN1441294A (zh) * 2002-02-28 2003-09-10 芝浦机械电子装置股份有限公司 基板贴合装置及其方法以及基板检测装置
CN1495748A (zh) * 2002-08-01 2004-05-12 株式会社理光 光盘检查装置、光盘检查方法、光盘制造方法和光盘
CN101322169A (zh) * 2005-11-30 2008-12-10 精工电子有限公司 粘合方法以及显示装置的制造方法
CN101790679A (zh) * 2007-09-04 2010-07-28 旭硝子株式会社 检测透明板体内部的微小异物的方法及其装置
CN101883979A (zh) * 2007-12-03 2010-11-10 芝浦机械电子装置股份有限公司 基板表面检查装置以及基板表面检查方法
CN101241086A (zh) * 2008-03-03 2008-08-13 中国科学院光电技术研究所 一种基于对玻璃材料的气泡、杂质测量的检测仪
CN101813640A (zh) * 2009-02-20 2010-08-25 三星康宁精密琉璃株式会社 玻璃表面的异物检查装置及检查方法

Also Published As

Publication number Publication date
CN102788798A (zh) 2012-11-21
KR20120128093A (ko) 2012-11-26
KR101296969B1 (ko) 2013-08-20
JP5791101B2 (ja) 2015-10-07
TWI499770B (zh) 2015-09-11
TW201303284A (zh) 2013-01-16
JP2012242142A (ja) 2012-12-10

Similar Documents

Publication Publication Date Title
CN102788798B (zh) 贴合板状体检查装置与方法
KR101909617B1 (ko) 이미지 수집 장치, 단말 장치, 액정 단말 장치 및 이미지 수집 방법
CN102954970B (zh) 用于检测玻璃衬底的表面缺陷的设备
JP4613086B2 (ja) 欠陥検査装置
CN102749334B (zh) 基板检查装置、基板检查方法及基板检查装置的调整方法
CN107241467A (zh) 电子装置
JP2005345383A (ja) 表面形状の検査方法および検査装置
CN107111383A (zh) 非接触输入装置及方法
CN103185726B (zh) 照明装置、照明方法以及检查装置
CN105652523B (zh) 显示组件及其制备方法和显示装置
JP2012242142A5 (enExample)
KR101374440B1 (ko) 첩합 판상체 검사 장치 및 방법
TWI449877B (zh) Closure plate body inspection apparatus and method
WO2017000264A1 (zh) 一种投影系统
JP2015137927A (ja) 撮像装置及び検査システム
JP2005241586A (ja) 光学フィルムの検査装置および光学フィルムの検査方法
CN115078399A (zh) 基板检测装置
CN102866157B (zh) 贴合板状体检查装置以及方法
JP2013250816A (ja) 座標入力装置、及び座標入力システム
JP6699365B2 (ja) 結像光学素子の評価方法および結像光学素子の評価装置
JP2016151988A (ja) 入力システム
KR20150090699A (ko) 부품 검사 장치
TW201935311A (zh) 用於處理基板的裝置及方法
TW202210913A (zh) 指紋識別模組與顯示裝置
JP2013250814A (ja) 座標入力装置、及び座標入力システム

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150603

Termination date: 20190515

CF01 Termination of patent right due to non-payment of annual fee