KR101296969B1 - 첩합 판상체 검사 장치 및 방법 - Google Patents

첩합 판상체 검사 장치 및 방법 Download PDF

Info

Publication number
KR101296969B1
KR101296969B1 KR1020120046110A KR20120046110A KR101296969B1 KR 101296969 B1 KR101296969 B1 KR 101296969B1 KR 1020120046110 A KR1020120046110 A KR 1020120046110A KR 20120046110 A KR20120046110 A KR 20120046110A KR 101296969 B1 KR101296969 B1 KR 101296969B1
Authority
KR
South Korea
Prior art keywords
plate
line sensor
sensor camera
bonded
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020120046110A
Other languages
English (en)
Korean (ko)
Other versions
KR20120128093A (ko
Inventor
요시노리 하야시
히로시 와카바
오사무 이즈츠
카츠토시 세키
요코 오노
타카노리 곤도
Original Assignee
시바우라 메카트로닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 시바우라 메카트로닉스 가부시키가이샤 filed Critical 시바우라 메카트로닉스 가부시키가이샤
Publication of KR20120128093A publication Critical patent/KR20120128093A/ko
Application granted granted Critical
Publication of KR101296969B1 publication Critical patent/KR101296969B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020120046110A 2011-05-16 2012-05-02 첩합 판상체 검사 장치 및 방법 Expired - Fee Related KR101296969B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-109951 2011-05-16
JP2011109951A JP5791101B2 (ja) 2011-05-16 2011-05-16 貼り合せ板状体検査装置及び方法

Publications (2)

Publication Number Publication Date
KR20120128093A KR20120128093A (ko) 2012-11-26
KR101296969B1 true KR101296969B1 (ko) 2013-08-20

Family

ID=47154262

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120046110A Expired - Fee Related KR101296969B1 (ko) 2011-05-16 2012-05-02 첩합 판상체 검사 장치 및 방법

Country Status (4)

Country Link
JP (1) JP5791101B2 (enExample)
KR (1) KR101296969B1 (enExample)
CN (1) CN102788798B (enExample)
TW (1) TWI499770B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104406988A (zh) * 2014-11-18 2015-03-11 浙江大学 一种玻璃内部缺陷的检测方法
KR20170133113A (ko) * 2016-05-25 2017-12-05 코닝정밀소재 주식회사 유리 상면 상의 이물질 검출 방법과 장치, 및 입사광 조사 방법
CN106872483A (zh) * 2017-02-04 2017-06-20 大连益盛达智能科技有限公司 解决光学检测设备因透明材质中的气泡影响检测的方法
CN110391132B (zh) * 2018-04-16 2023-05-16 芝浦机械电子株式会社 有机膜形成装置
KR102713409B1 (ko) * 2018-11-26 2024-10-04 삼성디스플레이 주식회사 윈도우 패널, 이를 포함하는 표시 장치 및 그 제조 방법
CN113702401B (zh) * 2021-08-17 2023-12-08 芜湖东旭光电科技有限公司 玻璃边部缺陷的检测方法
CN114152619B (zh) * 2021-11-30 2024-05-03 天马微电子股份有限公司 线路板及显示装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004257776A (ja) * 2003-02-25 2004-09-16 Kiyousera Opt Kk 光透過体検査装置
JP2009249211A (ja) * 2008-04-03 2009-10-29 Central Glass Co Ltd 合わせガラスの光学的欠陥の検査方法および検査装置
JP2010223613A (ja) * 2009-03-19 2010-10-07 Futec Inc 光学検査装置
JP2011053213A (ja) * 2009-09-02 2011-03-17 Gp Inspect Gmbh 物体の欠陥を検出するための方法および装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3178644B2 (ja) * 1995-02-10 2001-06-25 セントラル硝子株式会社 透明板状体の欠点検出方法
JPH11328756A (ja) * 1998-03-13 1999-11-30 Sanyo Electric Co Ltd 貼り合せ型ディスクの接着部の検査方法および検査装置
JP2001141662A (ja) * 1999-11-18 2001-05-25 Central Glass Co Ltd 透明板状体の欠点検出方法および検出装置
JP2001143353A (ja) * 1999-11-18 2001-05-25 Aiwa Co Ltd ディスク装置のディスク取出機構
JP2003083904A (ja) * 2001-09-17 2003-03-19 Central Glass Co Ltd 透明板状体の欠点検出方法およびその装置
JP4038133B2 (ja) * 2002-02-28 2008-01-23 芝浦メカトロニクス株式会社 基板貼り合わせ装置及び方法並びに基板検出装置
TWI264714B (en) * 2002-08-01 2006-10-21 Ricoh Kk Optical disk inspection device, optical disk inspection method, manufacturing method of optical disk, and optical disk
JP2004212202A (ja) * 2002-12-27 2004-07-29 Dainippon Printing Co Ltd 透光体の外観検査方法及び装置
JP2004301882A (ja) * 2003-03-28 2004-10-28 Fujitsu Display Technologies Corp 液晶表示パネルの欠陥検出方法
JP2004309262A (ja) * 2003-04-04 2004-11-04 V Technology Co Ltd シール材塗布検査装置
JP4322890B2 (ja) * 2005-06-13 2009-09-02 シャープ株式会社 起伏検査装置、起伏検査方法、起伏検査装置の制御プログラム、記録媒体
US7927440B2 (en) * 2005-11-30 2011-04-19 Seiko Instruments Inc. Bonding method and method of manufacturing a display device
JP5051874B2 (ja) * 2006-01-11 2012-10-17 日東電工株式会社 積層フィルムの製造方法、積層フィルムの欠陥検出方法、積層フィルムの欠陥検出装置
WO2009031420A1 (ja) * 2007-09-04 2009-03-12 Asahi Glass Company, Limited 透明板体内部の微小異物を検出する方法及びその装置
JP5128920B2 (ja) * 2007-12-03 2013-01-23 芝浦メカトロニクス株式会社 基板表面検査装置及び基板表面検査方法
CN101241086A (zh) * 2008-03-03 2008-08-13 中国科学院光电技术研究所 一种基于对玻璃材料的气泡、杂质测量的检测仪
JP5334617B2 (ja) * 2009-02-17 2013-11-06 日東電工株式会社 配線回路基板の製造方法
KR101209857B1 (ko) * 2009-02-20 2012-12-10 삼성코닝정밀소재 주식회사 유리 표면 이물 검사 장치 및 방법
JP5521377B2 (ja) * 2009-04-13 2014-06-11 セントラル硝子株式会社 ガラス板の欠陥識別方法および装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004257776A (ja) * 2003-02-25 2004-09-16 Kiyousera Opt Kk 光透過体検査装置
JP2009249211A (ja) * 2008-04-03 2009-10-29 Central Glass Co Ltd 合わせガラスの光学的欠陥の検査方法および検査装置
JP2010223613A (ja) * 2009-03-19 2010-10-07 Futec Inc 光学検査装置
JP2011053213A (ja) * 2009-09-02 2011-03-17 Gp Inspect Gmbh 物体の欠陥を検出するための方法および装置

Also Published As

Publication number Publication date
TWI499770B (zh) 2015-09-11
TW201303284A (zh) 2013-01-16
JP2012242142A (ja) 2012-12-10
KR20120128093A (ko) 2012-11-26
JP5791101B2 (ja) 2015-10-07
CN102788798B (zh) 2015-06-03
CN102788798A (zh) 2012-11-21

Similar Documents

Publication Publication Date Title
KR101296969B1 (ko) 첩합 판상체 검사 장치 및 방법
JP5025551B2 (ja) タッチパネル
TWI571769B (zh) 非接觸輸入裝置及方法
US11275033B2 (en) Device for optical inspection of empty and liquid-filled containers
JP2006267022A (ja) 欠陥検査装置及び方法
KR20130079140A (ko) 조명 장치, 조명 방법 및 검사 장치
JP2012242142A5 (enExample)
KR101374440B1 (ko) 첩합 판상체 검사 장치 및 방법
US20120257371A1 (en) Illumination device for an image capture system
CN102645736B (zh) 光学输入设备及其穿透式光学镜头模组
KR102633672B1 (ko) 유리 시트들 상의 표면 결함들을 검출하기 위한 방법들 및 장치
TWI449877B (zh) Closure plate body inspection apparatus and method
JP2013250817A (ja) 座標入力装置及び座標入力システム
CN102866157B (zh) 贴合板状体检查装置以及方法
JP5609581B2 (ja) 光学式位置検出装置および位置検出機能付き機器
JP2013250816A (ja) 座標入力装置、及び座標入力システム
JP2016151988A (ja) 入力システム
JP2014021789A (ja) 入力装置およびそれを具備する入力システム
JP2010204788A (ja) 照明装置及び電気光学装置
JP2013250814A (ja) 座標入力装置、及び座標入力システム
WO2021090827A1 (ja) 検査装置
JP2013250812A (ja) 座標入力装置、座標検出方法、及び座標入力システム

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20160720

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

FPAY Annual fee payment

Payment date: 20170719

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20180718

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20190809

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20190809