JP5791101B2 - 貼り合せ板状体検査装置及び方法 - Google Patents

貼り合せ板状体検査装置及び方法 Download PDF

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Publication number
JP5791101B2
JP5791101B2 JP2011109951A JP2011109951A JP5791101B2 JP 5791101 B2 JP5791101 B2 JP 5791101B2 JP 2011109951 A JP2011109951 A JP 2011109951A JP 2011109951 A JP2011109951 A JP 2011109951A JP 5791101 B2 JP5791101 B2 JP 5791101B2
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Japan
Prior art keywords
plate
line sensor
sensor camera
bonded
illumination
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JP2011109951A
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Japanese (ja)
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JP2012242142A5 (enExample
JP2012242142A (ja
Inventor
林　義典
義典 林
博之 若葉
博之 若葉
紀 井筒
紀 井筒
勝利 関
勝利 関
小野　洋子
洋子 小野
隆徳 権藤
隆徳 権藤
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2011109951A priority Critical patent/JP5791101B2/ja
Priority to KR1020120046110A priority patent/KR101296969B1/ko
Priority to TW101115762A priority patent/TWI499770B/zh
Priority to CN201210151151.8A priority patent/CN102788798B/zh
Publication of JP2012242142A publication Critical patent/JP2012242142A/ja
Publication of JP2012242142A5 publication Critical patent/JP2012242142A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2011109951A 2011-05-16 2011-05-16 貼り合せ板状体検査装置及び方法 Expired - Fee Related JP5791101B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011109951A JP5791101B2 (ja) 2011-05-16 2011-05-16 貼り合せ板状体検査装置及び方法
KR1020120046110A KR101296969B1 (ko) 2011-05-16 2012-05-02 첩합 판상체 검사 장치 및 방법
TW101115762A TWI499770B (zh) 2011-05-16 2012-05-03 Closure plate body inspection apparatus and method
CN201210151151.8A CN102788798B (zh) 2011-05-16 2012-05-15 贴合板状体检查装置与方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011109951A JP5791101B2 (ja) 2011-05-16 2011-05-16 貼り合せ板状体検査装置及び方法

Publications (3)

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JP2012242142A JP2012242142A (ja) 2012-12-10
JP2012242142A5 JP2012242142A5 (enExample) 2014-06-26
JP5791101B2 true JP5791101B2 (ja) 2015-10-07

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JP2011109951A Expired - Fee Related JP5791101B2 (ja) 2011-05-16 2011-05-16 貼り合せ板状体検査装置及び方法

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JP (1) JP5791101B2 (enExample)
KR (1) KR101296969B1 (enExample)
CN (1) CN102788798B (enExample)
TW (1) TWI499770B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104406988A (zh) * 2014-11-18 2015-03-11 浙江大学 一种玻璃内部缺陷的检测方法
KR20170133113A (ko) * 2016-05-25 2017-12-05 코닝정밀소재 주식회사 유리 상면 상의 이물질 검출 방법과 장치, 및 입사광 조사 방법
CN106872483A (zh) * 2017-02-04 2017-06-20 大连益盛达智能科技有限公司 解决光学检测设备因透明材质中的气泡影响检测的方法
CN110391132B (zh) * 2018-04-16 2023-05-16 芝浦机械电子株式会社 有机膜形成装置
KR102713409B1 (ko) * 2018-11-26 2024-10-04 삼성디스플레이 주식회사 윈도우 패널, 이를 포함하는 표시 장치 및 그 제조 방법
CN113702401B (zh) * 2021-08-17 2023-12-08 芜湖东旭光电科技有限公司 玻璃边部缺陷的检测方法
CN114152619B (zh) * 2021-11-30 2024-05-03 天马微电子股份有限公司 线路板及显示装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3178644B2 (ja) * 1995-02-10 2001-06-25 セントラル硝子株式会社 透明板状体の欠点検出方法
JPH11328756A (ja) * 1998-03-13 1999-11-30 Sanyo Electric Co Ltd 貼り合せ型ディスクの接着部の検査方法および検査装置
JP2001141662A (ja) * 1999-11-18 2001-05-25 Central Glass Co Ltd 透明板状体の欠点検出方法および検出装置
JP2001143353A (ja) * 1999-11-18 2001-05-25 Aiwa Co Ltd ディスク装置のディスク取出機構
JP2003083904A (ja) * 2001-09-17 2003-03-19 Central Glass Co Ltd 透明板状体の欠点検出方法およびその装置
JP4038133B2 (ja) * 2002-02-28 2008-01-23 芝浦メカトロニクス株式会社 基板貼り合わせ装置及び方法並びに基板検出装置
TWI264714B (en) * 2002-08-01 2006-10-21 Ricoh Kk Optical disk inspection device, optical disk inspection method, manufacturing method of optical disk, and optical disk
JP2004212202A (ja) * 2002-12-27 2004-07-29 Dainippon Printing Co Ltd 透光体の外観検査方法及び装置
JP2004257776A (ja) * 2003-02-25 2004-09-16 Kiyousera Opt Kk 光透過体検査装置
JP2004301882A (ja) * 2003-03-28 2004-10-28 Fujitsu Display Technologies Corp 液晶表示パネルの欠陥検出方法
JP2004309262A (ja) * 2003-04-04 2004-11-04 V Technology Co Ltd シール材塗布検査装置
JP4322890B2 (ja) * 2005-06-13 2009-09-02 シャープ株式会社 起伏検査装置、起伏検査方法、起伏検査装置の制御プログラム、記録媒体
KR101132103B1 (ko) * 2005-11-30 2012-04-05 세이코 인스트루 가부시키가이샤 접합 방법, 및, 표시 장치의 제조 방법
JP5051874B2 (ja) * 2006-01-11 2012-10-17 日東電工株式会社 積層フィルムの製造方法、積層フィルムの欠陥検出方法、積層フィルムの欠陥検出装置
CN101790679B (zh) * 2007-09-04 2012-05-09 旭硝子株式会社 检测透明板体内部的微小异物的方法及其装置
JP5128920B2 (ja) * 2007-12-03 2013-01-23 芝浦メカトロニクス株式会社 基板表面検査装置及び基板表面検査方法
CN101241086A (zh) * 2008-03-03 2008-08-13 中国科学院光电技术研究所 一种基于对玻璃材料的气泡、杂质测量的检测仪
JP2009249211A (ja) * 2008-04-03 2009-10-29 Central Glass Co Ltd 合わせガラスの光学的欠陥の検査方法および検査装置
JP5334617B2 (ja) * 2009-02-17 2013-11-06 日東電工株式会社 配線回路基板の製造方法
KR101209857B1 (ko) * 2009-02-20 2012-12-10 삼성코닝정밀소재 주식회사 유리 표면 이물 검사 장치 및 방법
JP2010223613A (ja) * 2009-03-19 2010-10-07 Futec Inc 光学検査装置
JP5521377B2 (ja) * 2009-04-13 2014-06-11 セントラル硝子株式会社 ガラス板の欠陥識別方法および装置
DE202009017691U1 (de) * 2009-09-02 2010-05-20 Gp Inspect Gmbh Vorrichtung zur Detektion von Defekten in einem Objekt

Also Published As

Publication number Publication date
CN102788798B (zh) 2015-06-03
CN102788798A (zh) 2012-11-21
KR20120128093A (ko) 2012-11-26
KR101296969B1 (ko) 2013-08-20
TWI499770B (zh) 2015-09-11
TW201303284A (zh) 2013-01-16
JP2012242142A (ja) 2012-12-10

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