CN102788798B - Bonding plate-shaped body checking device and method - Google Patents
Bonding plate-shaped body checking device and method Download PDFInfo
- Publication number
- CN102788798B CN102788798B CN201210151151.8A CN201210151151A CN102788798B CN 102788798 B CN102788798 B CN 102788798B CN 201210151151 A CN201210151151 A CN 201210151151A CN 102788798 B CN102788798 B CN 102788798B
- Authority
- CN
- China
- Prior art keywords
- video camera
- line sensor
- tabular body
- laminating
- tabular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
Abstract
The invention provides a bonding plate-shaped body checking device and a method. Even if the periphery of the bonding plate-shaped body has a light-proof area, a checking image which displays the peripheral state of an adhesive and bubbles or foreign matters in the adhesive can be obtained. The bonding plate-shaped body checking device comprises a wire sensor camera (50), a first lighting component (51) which conducts lighting on the surface of the bonding plate-shaped body from the side of a first plate-shaped body (11), a second lighting component (52) which conducts lighting on the wire sensor camera from the side of a second plate-shaped body (12). The first lighting component conducts a tilted lighting on a pre-determined area (EL) which has a predetermined distance from a shooting line (LC) on the surface of the bonding plate-shaped body and extends along the direction of the shooting line from the upper part of the bonding plate-shaped body. Under the state that the first and second lighting components conduct lighting, the wire sensor camera scans the bonding plate-shaped body to generate a checking image.
Description
Technical field
The present invention relates to and the laminating tabular body utilizing the bonding agent with light transmission by the 1st tabular body and the laminating of the 2nd tabular body to be photographed and apparatus and method are looked in the laminating tabular health check-up generating check image, described 1st tabular body has transmission region, and described 2nd tabular body is formed with light tight region at periphery and is formed with transmission region in the inner side in this light tight region.In addition, described light tight region comprises the complete impervious region of visible ray certainly, also comprise in fact can to video camera photograph the degree that has an impact, visible ray cannot through region.
Background technology
Example such sensor cover board component 10(laminating tabular body as shown in FIG. 1A and 1B in the display panels of touch panel formula).Further, Figure 1A is the cut-open view of the structure that sensor cover board component 10 is shown, Figure 1B is the vertical view of the structure that sensor cover board component 10 is shown.This sensor cover board component 10 is formed as such structure: sensor panel 11(the 1st tabular body arrangement being formed with the circuit block such as sensor element and grid (grid)) and cloche 12(the 2nd tabular body) by being coated in the bonding agent 13(resin on the whole surface of this sensor panel 11, there is light transmission) fit together.Sensor panel 11 becomes the structure being formed with circuit block on the glass substrate, and becomes the transmission region (but the part of circuit block is light tight) on the whole with light transmission.And the periphery of cloche 12 becomes the light tight region 12b(black region of preset width), the inside region of light tight region 12b becomes the transmission region 12a with light transmission.
As shown in Figure 1 C, the sensor cover board component 10 of this spline structure is adhered to liquid crystal panel assembly 20(by the bonding agent 15 with light transmission and is made up of liquid crystal panel, color filter, Polarizer etc.).In the display panels of the touch panel formula formed like this, utilize liquid crystal panel assembly 20 to realize image display, output signal from the sensor element on the sensor panel 11 corresponding by the position of finger touch cloche 12 meanwhile.Further, the signal exported from each sensor element of this sensor panel 11 can be utilized to control to show based on the image of liquid crystal panel assembly 20.
, such as, as shown in Figure 2, to fit tabular body at the sensor cover board component 20(manufacturing above-mentioned such structure) process in there is following situation: generation bubble BL bonding agent 13 in; Bonding agent 13 overflows (with reference to solid line: hereinafter referred to as overflow ((over flow)) from the ora terminalis of sensor panel 11; And bonding agent 13 is not filled to the acies (with reference to dotted line: hereinafter referred to as losing stream (under flow)) of sensor panel 11 between sensor panel 11 and cloche 12.The shape of bubble BL and bubble BL etc. whether is had and in order to detect the overflow that whether there is bonding agent 13 between sensor panel 11 and cloche 12 or lose stream and overflow or lose the degree of stream in order to check in such bonding agent 13, testing fixture is as follows useful, this testing fixture is photographed to sensor cover board component 10, and generates the overflow of bubble and the bonding agent 13 demonstrated in bonding agent 13 or lose the check image of the state flowed.
In such testing fixture (device is looked in the health check-up of laminating tabular), such as, can consider to utilize technology such disclosed in patent documentation 1.
Disclosed in this patent documentation 1, technology is, under the state of irradiating light from a surface of the fit type dish (laminating tabular body) utilizing bonding agent two dishes (DVD etc.) to be fitted, utilizes video camera to photograph to this laminating dish from another face side.In the check image generated by this photography, brightness is different in the part of the part of bonding agent, the part of air layer and groove, and this check image can be utilized to detect bubble (air layer) in bonding agent and the bonding agent spilling (with reference to paragraph 0051 ~ paragraph 0055) from precalculated position.
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 11-328756 publication
When described existing technology (with reference to citing document 1) is applied in the testing fixture of aforesaid sensor cover board component 10, under the state of irradiating light from such as cloche 12 side of sensor cover board component 10, video camera is utilized to photograph to sensor cover board component 10 from sensor panel 11 side.Because the bubble in bonding agent 13 or foreign matter etc. can be manifested in the check image generated by this photography, therefore, it is possible to utilize this check image to check bubble in bonding agent 13, to have foreign and their size etc.
, because the periphery of the cloche 12 in aforesaid sensor cover board component 10 becomes non-transmissive region 12b, therefore, at this non-transmissive region 12b, the light irradiated from cloche 12 side can not be through.Therefore, in the check image utilizing the photography from sensor panel 11 side to generate under the state of irradiating light from cloche 12 side, the state of the overflow of the bonding agent 13 that the periphery that can not be apparent in cloche 12 occurs and lose stream mode (with reference to Fig. 2), thus this check image cannot be utilized to check the overflow of bonding agent 13 and to lose stream.
Summary of the invention
The present invention completes in view of such problem, the health check-up of a kind of laminating tabular is provided to look into apparatus and method, even if there is light tight region at the periphery of laminating tabular body, the check image that bonding agent is displayed together with the bubble in bonding agent or foreign matter in the state of this periphery also can be obtained.
Laminating tabular of the present invention health check-up is looked into device and is photographed to utilizing the bonding agent with light transmission and generate check image by the laminating tabular body of the 1st tabular body and the laminating of the 2nd tabular body, described 1st tabular body has transmission region, described 2nd tabular body has the light tight region formed at periphery and the transmission region formed in the position in the inner part of the periphery than this light tight region of formation, the structure that device is looked in the health check-up of described laminating tabular is, the health check-up of described laminating tabular is looked into device and is had: line sensor video camera, it configures opposedly with described 1st tabular body of described laminating tabular body, 1st illuminating member, throw light in described 1st surface of tabular side to this laminating tabular body from described laminating tabular body under its state of not crossing the optical axis of described line sensor video camera at optical axis, and the 2nd illuminating member, it throws light on from the described 2nd tabular side of described laminating tabular body towards described line sensor video camera, the photolineation of described 1st illuminating member to the described line sensor video camera on the surface from described laminating tabular body leaves predetermined distance and throws light in the presumptive area extended along the direction of this photolineation, under the 1st illuminating member and the 2nd illuminating member carry out the state of throwing light on, while maintain the relative position relation of described line sensor video camera and described 1st illuminating member, while utilize tabular body of fitting described in described line sensor camera-scanning, generate described check image thus.
And, the adhesive substrates of the 1st tabular body and the laminating of the 2nd tabular body is photographed and generates check image utilizing the bonding agent with light transmission by laminating tabular health check-up checking method of the present invention, described 1st tabular body has transmission region, described 2nd tabular body has the light tight region formed at periphery and the transmission region formed in the position in the inner part of the periphery than this light tight region of formation, in described laminating tabular health check-up checking method, use following parts: line sensor video camera, it configures opposedly with described 1st tabular body of described laminating tabular body; 1st illuminating member, throw light in described 1st surface of tabular side to this laminating tabular body from described laminating tabular body under its state of not crossing the optical axis of described line sensor video camera at optical axis; And the 2nd illuminating member, it throws light on from the described 2nd tabular side of described laminating tabular body towards described line sensor video camera, and described laminating tabular health check-up checking method has following step: the photolineation of described 1st illuminating member to the described line sensor video camera on the surface from described laminating tabular body leaves predetermined distance and the step of throwing light in the presumptive area extended along the direction of this photolineation; Under carrying out the state of throwing light at the 1st illuminating member and the 2nd illuminating member, while maintain the relative position relation of described line sensor video camera and described 1st illuminating member, while utilize the step of tabular body of fitting described in described line sensor camera-scanning, by fitting described in described line sensor camera-scanning, tabular body generates described check image.
According to such structure, under the 1st illuminating member and the 2nd illuminating member carry out the state of throwing light on, while maintain the relative position relation of described line sensor video camera and described 1st illuminating member, while utilize described line sensor camera-scanning laminating tabular body, in the process, the illumination light of the 2nd illuminating member can arrive line sensor video camera by the transmission region of the transmission region of the 2nd tabular body, bonding agent and the 1st tabular body.Now, towards the described illumination light of line sensor video camera by the bubble in bonding agent or foreign materials away.
And, the 2nd illuminating member illumination light due to be formed at the periphery of the 2nd tabular body light tight region and under the state not arriving line sensor video camera, from the illumination light of the 1st illuminating member by the diffuse reflection such as acies of bonding agent, this irreflexive part can arrive line sensor video camera.
1st illuminating member carries out predetermined distance between the photolineation of the line sensor video camera on the surface of the presumptive area of throwing light on and laminating tabular body sideling and angle of inclination can be decided based on following condition: when the illumination light from the 1st illuminating member is by the transmission region of the 1st tabular body and bonding agent, make the impact for being given by the brightness of the bubble in the bonding agent of the optical illumination from the 2nd illuminating member or foreign matter little as much as possible, and, enable to be incident to line sensor video camera in a part for the irreflexive light in place such as the edge of bonding agent.
Under the 1st illuminating member and the 2nd illuminating member carry out the state of throwing light on, while maintain the relative position relation of described line sensor video camera and described 1st illuminating member, while utilize described line sensor camera-scanning laminating tabular body, in the process, in bonding agent towards the illumination light from the 2nd illuminating member of line sensor video camera by the bubble in bonding agent or foreign materials away, and, from the illumination light of the 1st illuminating member by the diffuse reflection such as acies of bonding agent, this irreflexive part can arrive line sensor video camera, therefore, even if there is light tight region at the periphery of laminating tabular body, also the check image that bonding agent can be displayed together with the bubble in bonding agent or foreign matter in the state of this periphery can be obtained.
Accompanying drawing explanation
Figure 1A is the cut-open view of the structure of the sensor cover board component of the example illustrated as laminating tabular body.
Figure 1B is the vertical view of the structure of the sensor cover board component of the example illustrated as laminating tabular body.
Fig. 1 C is the cut-open view of the structure of the display panels of the touch panel formula that the structure utilizing bonding agent the sensor cover board component shown in Figure 1A and Figure 1B and Liquid crystal module to be bonded is shown.
Fig. 2 amplifies the cut-open view that the structure in the acies portion of sensor cover board component is shown.
Fig. 3 A illustrates that the figure of the basic structure of observing from side of device (sensor panel component inspection device) is looked in the laminating tabular health check-up of an embodiment of the invention.
Fig. 3 B illustrates that the figure of the basic structure from top view of device (sensor panel component inspection device) is looked in the laminating tabular health check-up of an embodiment of the invention.
Fig. 4 A be the relation illustrated between line sensor video camera and lighting unit figure (one of).
Fig. 4 B is the figure (two) of the relation illustrated between line sensor video camera and lighting unit.
Fig. 5 illustrates that the figure of the basic structure of the disposal system of device (sensor cover board component) is looked in the laminating tabular health check-up of an embodiment of the invention.
Fig. 6 be illustrate from lighting unit and enter illumination light in sensor panel assembly and this illumination light by the reflected light of baffle reflection state (one of) figure.
Fig. 7 be illustrate from lighting unit and enter illumination light in sensor panel assembly and this illumination light by the figure of the state (two) of the reflected light of baffle reflection.
Fig. 8 be illustrate from lighting unit and enter illumination light in sensor panel assembly and this illumination light by the figure of the state (three) of the reflected light of baffle reflection.
Fig. 9 be illustrate from lighting unit and enter illumination light in sensor panel assembly and this illumination light by the figure of the state (four) of the reflected light of baffle reflection.
Figure 10 be illustrate from lighting unit and enter illumination light in sensor panel assembly and this illumination light by the figure of the state (five) of the reflected light of baffle reflection.
Figure 11 be illustrate from lighting unit and enter illumination light in sensor panel assembly and this illumination light by the figure of the state (six) of the reflected light of baffle reflection.
Figure 12 be illustrate from lighting unit and enter illumination light in sensor panel assembly and this illumination light by the figure of the state (seven) of the reflected light of baffle reflection.
Figure 13 be the illumination light from lighting unit of the edge end illustrated at sensor cover board component state (one of) figure.
Figure 14 is the figure of the state (two) of the illumination light from lighting unit of the edge end illustrated at sensor cover board component.
Figure 15 is the figure of the state (three) of the illumination light from lighting unit of the edge end illustrated at sensor cover board component.
Figure 16 is the figure of the example that check image is shown.
Figure 17 is the figure of another example that check image is shown.
Figure 18 illustrates that the figure of the structure of device (sensor panel component inspection device) is looked in the laminating tabular health check-up of other embodiment of the present invention.
Figure 19 illustrates that the figure of the structure of device (sensor panel component inspection device) is looked in the laminating tabular health check-up of other embodiment another of the present invention.
Label declaration
10: sensor cover board component (laminating tabular body);
11: sensor panel (the 1st tabular body);
12: cloche (the 2nd tabular body);
12a: transmission region;
12b: light tight region;
13,15: bonding agent;
20: liquid crystal panel assembly;
50: line sensor video camera;
50a: line sensor;
51: lighting unit (the 1st illuminating member);
52: reflecting plate (the 2nd illuminating member);
53: back lighting unit (the 2nd illuminating member);
60: travel mechanism;
70: processing unit;
71: display unit;
72: operating unit.
Embodiment
Below, accompanying drawing is utilized to be described embodiments of the present invention.
The laminating tabular health check-up of an embodiment of the invention is looked into device and is formed like that as shown in Figure 3 A and Figure 3 B.This laminating tabular testing fixture be as described above (with reference to Figure 1A, Figure 1B and Fig. 2) sensor cover board component 10(is fitted tabular body) device (sensor panel component inspection device) that checks, described sensor cover board component 10 is for utilizing bonding agent 13 by sensor panel (senser panel) 11(the 1st tabular body) and cloche 12(the 2nd tabular body) structure that is bonded.Further, Fig. 3 A shows the basic structure of observing from side of sensor panel component inspection device, and Fig. 3 B shows the basic structure from top view of sensor panel component inspection device.
In Fig. 3 A and Fig. 3 B, this sensor panel component inspection device has: line sensor video camera 50; Lighting unit 51(the 1st illuminating member); Reflecting plate 52(the 2nd illuminating member); And travel mechanism 60.Travel mechanism 60 makes sensor cover board component 10 move with predetermined velocity linear, this sensor cover board component 10 with make sensor panel 11 upward, cloche 12 mode is downward arranged on mobile route.Line sensor video camera 50 comprises the optical systems such as the line sensor 50a that is made up of such as CCD element line and lens (omitting diagram), and fixed configurations becomes opposed with the sensor panel 11 of the sensor cover board component 10 on mobile route.Further, the attitude of line sensor video camera 50 is adjusted in the following manner: the moving direction A(of sensor cover board component 10 is crossed such as in the direction that line sensor 50a is extended, orthogonal with moving direction A), and, make the optical axis A of line sensor video camera 50
oPT1with sensor cover board component 10(sensor panel 11) surface normal.The reflecting surface that reflecting plate 52 has to make the mode of incident light to process, near the sensor cover board component 10 on mobile route, this reflecting plate 52 fixed configurations becomes, and its reflecting surface is opposed with the cloche 12 of sensor cover board component 10.Utilize by the reflecting plate 52(reflecting surface configured like this) reflected light (illumination light) that reflects, throws light on from cloche 12 side of sensor cover board component 10 towards line sensor video camera 50.
Lighting unit 51 is configured to, the downstream of the line sensor video camera 50 on the moving direction A of the sensor cover board component 10 on mobile route, the upstream side of this line sensor video camera 50 namely on the direction of scanning B of line sensor video camera 50 described later is opposed with sensor panel 11.Be make lighting unit 51 from the oblique upper of sensor cover board component 10 by the pose adjustment of lighting unit 51, specifically, from the optical axis A of lighting unit 51
oPT2relative to sensor cover board component 10(sensor panel 11) normal to a surface direction become the direction of predetermined angle, do not cross the optical axis A of line sensor video camera 50
oPT1ground throws light on to the surface of sensor cover board component 10.And, as shown in Figure 4 A and 4 B shown in FIG., lighting unit 51 leaves predetermined distance to the photolineation Lc of the line sensor video camera 50 on the surface from sensor cover board component 10 to the downstream (upstream side of the direction of scanning B of line sensor video camera 50) of the moving direction A of sensor cover board component 10 and at presumptive area (hereinafter referred to as the field of illumination) E extended along the direction of this photolineation Lc
lthrow light on.The described field of illumination E of lighting unit 51 on the surface of sensor cover board component 10
lin, the illuminating line L of position central authorities on the direction orthogonal with the moving direction A of described sensor cover board component 10
l, and the described photolineation Lc on the surface of sensor cover board component 10 of line sensor video camera 50 maintains predetermined interval, described field of illumination E
lbe not overlapped in the described photographing region Ec of (not being contained in) line sensor video camera 50.
In the sensor panel component inspection device of foregoing structure, utilize travel mechanism 60 that sensor cover board component 10 is moved to direction A on mobile route, thus, while maintain the relative position relation of line sensor video camera 50 and lighting unit 51, line sensor video camera 50 is made to carry out optical scanning to the opposite direction B of described moving direction A to sensor cover board component 10.The photography of line sensor video camera 50 pairs of sensor cover board components 10 is completed by this scanning.And, due to the restriction of the length of line sensor 50a, when cannot by line sensor video camera 50 once along direction B scanning come comprehensive scanning sensor panel assembly 10, by making photographing region Ec move while carry out Multiple-Scan along the direction stepping orthogonal with direction of scanning B, carry out the comprehensive photography to sensor cover board component 10.
The disposal system of sensor panel component inspection device is formed as shown in Figure 5.
In Figure 5, line sensor video camera 50, display unit 71 and operating unit 72 are connected with processing unit 70.And, processing unit 70 generates the image information of the image representing sensor cover board component 10 according to the signal of video signal from line sensor video camera 50, and described sensor camera 50 synchronously carries out optical scanning to sensor cover board component 10 with the movement of the sensor cover board component 10 utilizing travel mechanism 60 to realize.Further, the check image of sensor cover board component 10 is presented on display unit 71 according to described image information by processing unit 70.As described later, in this check image, the acies portion (overflow situation or thanks to stream mode) of the circuit block of the bubble in the bonding agent 13 of sensor cover board component 10, foreign matter, sensor panel 11, in addition bonding agent 13 can display.And, processing unit 70 obtains the information of the various instructions corresponding with the operation of operating unit 72, generate various information (position etc. in the size of bubble or foreign matter, the acies portion of bonding agent 13) from described check image simultaneously, and these information can be presented on display unit 71 as check result.
In above-mentioned sensor panel component inspection device, under lighting unit 51 carries out the state of throwing light on, under the control of processing unit 70, line sensor video camera 50 carries out optical scanning by the movement of the sensor cover board component 10 realized by travel mechanism 60 to sensor cover board component 10.In this process, such as, shown in Fig. 6 ~ Figure 12, as the photographing region E of line sensor video camera 50
cwhen the part corresponding at the transmission region 12a with cloche 12 moves, α is incident to the illumination light R from lighting unit 51 on the surface (Fig. 3 A reference) of sensor panel 11 sideling at a predetermined angle
l1while at sensor panel 11(transmission region), bonding agent 13 and cloche 12(transmission region 12a) in refraction while pass through, and arrive reflecting plate 52.Then, this illumination light R
l1by reflecting plate 52 diffuse reflection, a part for this reflected light is as illumination light R
l2cloche 12(transmission region 12a from sensor cover board component 10) side advances towards line sensor video camera 50.Like this, at illumination (the illumination light R from sensor panel 11 side carrying out being sent by lighting unit 51
l1) and illumination (the illumination light R from cloche 12 side that reflected by reflecting plate 52
l2) state under, line sensor video camera 50 pairs of sensor cover board components 10 scan.
From the described illumination light R of reflecting plate 52
l2(reflected light) is if such as shown in Figure 6 and Figure 8, enter the part not forming circuit component not having the part of foreign matter and bubble and sensor panel 11 of the bonding agent 13 in sensor cover board component 10, then can be incident to line sensor video camera 50 with keeping intact.Such as, as shown in Figure 7, if at the described illumination light R reflected by reflecting plate 52
l2the progress path in sensor cover board component 10 of (reflected light) exists the circuit component EL being formed at sensor panel 11, then this illumination light R
l2can be covered by this circuit component EL, reflect, scattering and can not fully be incident to line sensor video camera 50.Such as, as shown in Figure 9, if the described illumination light R of reflecting plate 52 reflection
l2by the outer exterior portion of the bubble BL in bonding agent 13, then this illumination light R
l2line sensor video camera 50 can not can be fully incident to due to the refraction of the outer exterior portion generation at bubble BL or scattering.Such as, as shown in Figure 10, if illumination light R
l2by the central portion of bubble BL, then this illumination light R
l2can line sensor video camera 50 be incident to keeping intact.Such as, as shown in figure 11, if at the described illumination light R reflected by reflecting plate 52
l2the progress path in sensor cover board component 10 in exist and be formed at the flaw D of sensor panel 11, then this illumination light R
l2can due to the refraction or at random and can not fully be incident to line sensor video camera 50 in the generation of described flaw D place.And, such as, as shown in figure 12, if at the described illumination light R reflected by reflecting plate 52
l2the progress path in sensor cover board component 10 in exist mix the foreign matter FB in bonding agent 13, then this illumination light R
l2can due to occur at foreign matter FB place blocking, refraction, scattering and can not fully be incident to line sensor video camera 50.
Like this, the part corresponding with the transmission region 12a of cloche 12 of line sensor video camera 50 scanning sensor panel assembly 10 under lighting unit 51 carries out the state of throwing light on, in the process, to the illumination light R irradiated from lighting unit 51
l1carry out the illumination light R of the reflecting plate 52 reflected
l2if enter the part not forming circuit component EL not having the part of foreign matter FB and bubble BL and sensor panel 11 of bonding agent 13, then can be incident to line sensor video camera 50(with keeping intact with reference to Fig. 6 and Fig. 8), if but the circuit component EL(being subject to sensor panel 11 with reference to Fig. 7), bubble BL(in bonding agent 13 is with reference to Fig. 9 and Figure 10) or foreign matter (with reference to Figure 12), sensor panel 11 flaw D(with reference to Figure 11) impact (cover, reflect, scattering etc.), then can not fully be incident to line sensor video camera 50.The check image I of such as, sensor cover board component 10 therefore, as shown in figure 16, represented by the image information generated based on the signal of video signal from line sensor video camera 50 by processing unit 70
10in, with the bright image section I corresponding with the transmission region 12a of cloche 12
12a(with reference to Fig. 6 and Fig. 8) is background, can indicate the dark image section I corresponding with circuit component EL
eL(with reference to Fig. 7), the periphery corresponding with bubble BL comparatively dark (corresponding with the outer exterior portion of bubble: reference Fig. 9) and inside become the ring-type image section I of bright portion (reference Figure 10)
bL, corresponding with flaw D dark image section I
d(with reference to Figure 11) and the dark image section I corresponding with foreign matter FB
fB(with reference to Figure 12).
Next, such as, as shown in Figure 13 ~ Figure 15, as the photographing region E of line sensor video camera 50
cwith the light tight region 12b(of cloche 12 also comprise can to the photography of line sensor video camera 50 produce the degree of materially affect, visible ray cannot through region) corresponding part move (line sensor video camera 50 scans) time, α is incident to the illumination light R from lighting unit 51 on the surface (Fig. 3 A reference) of sensor panel 11 sideling at a predetermined angle
l1interdicted by the light tight region 12b of cloche 12 and reflecting plate 52 can not be arrived.Therefore, reflected light (the illumination light R of reflecting plate 52 can not be produced
l2), not do not arrive the illumination light of line sensor video camera 50 from cloche 12 side by sensor cover board component 10.
In such situation, such as, as shown in figure 13, the acies portion being in direction of scanning B upstream side of sensor cover board component 10 is with the illumination light R towards the lighting unit 51 from oblique upper
l1mode move that (this acies portion of sensor cover board component 10 becomes illumination light R
l1receiving surface).In fig. 13, on-line sensor video camera 50 scanning glass cover 12(zone of opacity 12b) the region E1 on surface when, from the illumination light R of lighting unit 51
l1normal reflection can be carried out by this region E1, and line sensor video camera 50 can not be incident to.As illumination light R
l1when being incident to the end 13p1 of the bonding agent 13 being in overflow situation, this illumination light R
l1by the end 13p1 diffuse reflection of bonding agent 13, a part for this reflected light can be incident to the line sensor video camera 50 being in position P1.When on-line sensor video camera 50 scanning is in the region E2 on the surface of the bonding agent 13 of overflow situation, if exist concavo-convex, then from the illumination light R of lighting unit 51 on the surface of the bonding agent 13 overflowed from sensor panel 11
l1can by the surface diffuse reflectance of bonding agent 13, a part for this reflected light can be incident to line sensor video camera 50.And, as the illumination light R from lighting unit 51
l1when being incident to the edge angle 11p1 of sensor panel 11, this illumination light R
l1can by the edge angle 11p1 diffuse reflection of sensor panel 11, a part for this reflected light can be incident to the line sensor video camera 50 being positioned at position P2.And, when on-line sensor video camera 50 scans the region E3 of the sensor panel 11 corresponding with the light tight region 12b of cloche 12, from the illumination light R of lighting unit 51
l1although through sensor panel 11 and bonding agent 13, can normal reflection can be carried out by the surface of the light tight region 12b of cloche 12 and can not be incident to line sensor video camera 50.Further, when on-line sensor video camera 50 scans the region E4 corresponding with the transmission region 12a of cloche 12, as previously mentioned (with reference to Fig. 6 ~ Figure 12), reflected light (the illumination light R reflected by reflecting plate 52 can be become
l2) state of irradiating from cloche 12 side towards line sensor video camera 50.
And such as, as shown in figure 14, the acies portion in B downstream, direction of scanning of sensor cover board component 10 is with the illumination light R from the lighting unit 51 from oblique upper
l1the mode of keeping out of the way moves, and (this acies portion of sensor cover board component 10 becomes illumination light R
l1keep out of the way face (escaping げ face)).In fig. 14, when finishing to continue to the line sensor video camera 50 of the scanning of the region E4 corresponding with the transmission region 12a of cloche 12 the region E5 scanning the sensor panel 11 corresponding with the light tight region 12b of cloche 12, from the illumination light R of lighting unit 51
l1although through sensor panel 11 and bonding agent 13, can normal reflection can be carried out by the light tight region 12b of cloche 12 and can not be incident to line sensor video camera 50.As the illumination light R from lighting unit 51
l1when being incident to the edge angle 11p2 of sensor panel 11, this illumination light R
l1can by the edge angle 11p2 diffuse reflection of sensor panel 11, a part for this reflected light can be incident to the line sensor video camera 50 being positioned at position P3.And, when on-line sensor video camera 50 scanning is in the region E6 on the surface of the bonding agent 13 of overflow situation, if exist concavo-convex, then from the illumination light R of lighting unit 51 on the surface of the bonding agent 13 overflowed from sensor panel 11
l1on the surface except the shadow part formed by sensor panel 11 of bonding agent 13, diffuse reflection can occur, a part for this reflected light can be incident to line sensor video camera 50.As illumination light R
l1when being incident to the end 13p2 of the bonding agent 13 that this is in overflow status, this illumination light R
l1can by the end 13p2 diffuse reflection of bonding agent 13, a part for this reflected light can be incident to the line sensor video camera 50 being in position P4.And on-line sensor video camera 50 scans the light tight region 12b of cloche 12(except the part of the shadow except becoming bonding agent 13) surf zone E7 when, from the illumination light R of lighting unit 51
l1normal reflection can be carried out by this region E7, and line sensor video camera can not be incident to.
And, same with Figure 13, figure 15 illustrates bonding agent 13 with towards the illumination light R from lighting unit 51
l1the acies portion of B side, direction of scanning of sensor cover board component 10 of mode movement become the situation of thanks to stream mode.
In fig .15, as the illumination light R from lighting unit 51
l1when being incident to the end 13p3 of the bonding agent 13 of thanks to stream mode through sensor panel 11, this illumination light R
l1by the end 13p3 diffuse reflection of bonding agent 13, a part for this reflected light can be incident to the line sensor video camera 50 being positioned at position P2 through sensor panel 11.In other cases, specifically, when the region E2 of the part do not contacted with bonding agent 13 when the surf zone E1 of the light tight region 12b of on-line sensor video camera 50 scanning glass cover 12, in on-line sensor video camera 50 scanning sensor panel 11 and the region E3 continued with described region E2 of on-line sensor video camera 50 scanning sensor panel 11 when, basically, from the illumination light R of lighting unit 51
l1can carry out normal reflection by the surface of the light tight region 12b of cloche 12, light can not be incident to line sensor video camera 50.And, at the illumination light R from lighting unit 51
l1when being incident to the edge angle 11p1 of sensor panel 11, same with the situation shown in Figure 13, this illumination light R
l1by the edge angle 11p1 diffuse reflection of sensor panel 11, a part for this reflected light can be incident to line sensor video camera 50.
Like this, the part corresponding with the light tight region 12b of cloche 12 of line sensor video camera 50 scanning sensor panel assembly 10 under lighting unit 51 carries out the state of throwing light on, in the process, from the illumination light R of lighting unit 51
l1substantially line sensor video camera 50 can not be incident to by the surperficial normal reflection of the light tight region 12b of cloche 12, but, respectively by edge angle 11p1,11p2(of sensor panel 11 with reference to Figure 13 ~ Figure 15), end 13p1,13p2,13p3(of bonding agent 13 be with reference to Figure 13 ~ Figure 15) and the part of reflected light that reflects of the jog (with reference to Figure 13, Figure 14) on surface of bonding agent 13 can be incident to line sensor video camera 50.The check image I of such as, sensor cover board component 10 therefore, as shown in figure 16, represented by the image information generated based on the signal of video signal from line sensor video camera 50 by processing unit 70
10in, by the dark image section I corresponding with the light tight region 12b of cloche 12
12bas a setting, the image section I corresponding with bonding agent 13 can be indicated
13and the image section I corresponding with sensor panel 11
11.
And, specifically, as shown in figure 17, with the dark image section I corresponding with the light tight region 12b of cloche 12
12bfor background, the bright image I be made up of following lines can be indicated
13: tiger stripes I
11p1, I
11p2(the acies line corresponding to cloche 11), it is with that a part for reflected light can be made to be incident to edge angle 11p1, the 11p2 shown in the edge angle of the cloche 11 of line sensor video camera 50, such as Figure 13 and Figure 14 is corresponding; Tiger stripes I
13p1(the acies line corresponding to bonding agent 13), it is with that a part for reflected light can be made to be incident to the end 13p1 shown in the end of the bonding agent 13 becoming overflow situation of line sensor video camera 50, such as Figure 13 is corresponding; And thinner tiger stripes, it is with that a part for reflected light can be made to be incident to the jog on the surface of the bonding agent 13 becoming overflow situation of line sensor video camera 50 is corresponding.
As mentioned above, based on the illumination light R from lighting unit 51
l1illumination and based on the illumination light R from reflecting plate 52
l2illumination state under, in check image represented by the image information that processing unit 70 generates based on the signal of video signal from line sensor video camera 50, the state being arranged in the bonding agent of the part corresponding with the light tight region 12b of cloche 12 together can display with the circuit component EL of the bubble BL of bonding agent 13 or foreign matter FB, sensor panel 11 or flaw D (with reference to Figure 16 and Figure 17).This check image is presented on display unit 71 under the control of processing unit 70.User just can judge the presence or absence of bubble BL in the bonding agent 13 of sensor cover board component 10 or foreign matter FB and state, the state of circuit component EL of sensor panel 11 or the overflow of the presence or absence of flaw D and state and bonding agent 13 according to the single check image shown at display unit 71 or lose the state of stream.
In above-mentioned sensor panel component inspection device, by the illumination light R from lighting unit 51
l1the field of illumination E formed on the surface of sensor cover board component 10
lwith the photolineation L of line sensor video camera 50
cor photographing region E
cbetween distance and tilt angle alpha (the optical axis A of lighting unit 51
oPT2angle relative to the normal to a surface direction of sensor cover board component 10) (with reference to Fig. 4 A and Fig. 4 B) decide based on following condition: at the illumination light R from lighting unit 51
l1by (with reference to Fig. 6 ~ Figure 12) when sensor panel 11 and bonding agent 13, make for by the illumination light R from reflecting plate 52
l2the impact that the flaw D of the bubble BL in the bonding agent 13 of illumination or foreign matter FB, sensor panel 11 or the brightness of circuit component EL are given is little as much as possible, further, enable to be incident to line sensor video camera 50 in the part diffused at the edge angle of sensor panel 11 or the end of bonding agent 13 and the concavo-convex place on surface.
In aforesaid sensor panel component inspection device, reflecting plate 52 is configured to opposed with the cloche 12 of sensor cover board component 10, but, such as, as shown in figure 18, also can replace reflecting plate 52, configure back lighting unit 53(the 2nd illuminating member in the mode that the cloche 12 with sensor cover board component 10 is opposed).
And, in aforesaid sensor panel component inspection device, lighting unit 51 is configured in line sensor video camera 50 downstream on the moving direction A of sensor cover board component 10, namely the upstream side of this line sensor video camera 50 on the direction of scanning B of line sensor video camera 50 is configured in, but, such as, as shown in figure 19, also lighting unit 51 can be configured in the upstream side of the line sensor video camera 50 on the moving direction A of sensor cover board component 10, namely the downstream of this line sensor video camera 50 on the direction of scanning B of line sensor video camera 50 is configured in.In this case, the degree of tilt of lighting unit 51 or field of illumination E
lwith photographing region E
c(photolineation L
c) relative position relation set in the same manner as aforementioned.Further, in the example shown in Figure 19, reflecting plate also can be used to replace back lighting unit 53.
The laminating tabular body becoming check object is the sensor cover board component 10 used in the display panels of touch panel formula, but, as long as utilize the laminating tabular body that the 1st tabular body and the 2nd tabular body with transmission region are fitted by the bonding agent with light transmission, be not particularly limited, described 2nd tabular body has the light tight region formed at periphery and the transmission region formed in the position in the inner part of the periphery than this light tight region of formation.
And, in aforesaid sensor panel component inspection device, be in the top of carrying out the sensor cover board component 10 of movement in upside from making sensor panel 11 and carry out the illumination of lighting unit 51 and the photography (with reference to Fig. 3 A, Figure 18, Figure 19) of line sensor video camera 50, but be not limited to such structure, also can be configured to, be in the below of carrying out the sensor cover board component 10 of movement in downside from making sensor panel 11 and carry out the illumination of lighting unit 51 and the photography of line sensor video camera 50.
And, in the sensor panel component inspection device shown in Fig. 3 A, by reflecting plate 52 fixed configurations become opposed with the cloche 12 of sensor cover board component 10, but also can make reflecting plate 52 can with sensor cover board component 10 synchronizing moving.
Claims (6)
1. device is looked in laminating tabular health check-up, the laminating tabular body of the 1st tabular body and the laminating of the 2nd tabular body is photographed and generates check image utilizing the bonding agent with light transmission by it, described 1st tabular body has transmission region, described 2nd tabular body has the light tight region formed at periphery and the transmission region formed in the position in the inner part of the periphery than this light tight region of formation, wherein
The health check-up of described laminating tabular is looked into device and is had:
Line sensor video camera, it configures opposedly with described 1st tabular body of described laminating tabular body;
1st illuminating member, throw light in described 1st surface of tabular side to this laminating tabular body from described laminating tabular body under its state of not crossing the optical axis of described line sensor video camera at optical axis; And
2nd illuminating member, it throws light on from the described 2nd tabular side of described laminating tabular body towards described line sensor video camera,
The photolineation of described 1st illuminating member to the described line sensor video camera on the surface from described laminating tabular body leaves predetermined distance and throws light on sideling in the presumptive area extended along the direction of this photolineation,
Under the 1st illuminating member and the 2nd illuminating member carry out the state of throwing light on, while maintain the relative position relation of described line sensor video camera and described 1st illuminating member, while utilize tabular body of fitting described in described line sensor camera-scanning, generate described check image thus.
2. device is looked in laminating tabular according to claim 1 health check-up, wherein,
Described 2nd illuminating member has reflection part, and described reflection part is configured opposedly with described 2nd tabular body, and the illumination light from described 1st illuminating member through described laminating tabular body is reflected towards described line sensor video camera.
3. device is looked in laminating tabular according to claim 1 and 2 health check-up, wherein,
The photographing region that described line sensor video camera carries out photographing on the surface of described laminating tabular body is not contained in by the described presumptive area on the surface of the described laminating tabular body of described 1st illuminating member illumination.
4. device is looked in laminating tabular according to claim 3 health check-up, wherein,
The position leaning on the upstream side of the direction of scanning of this line sensor video camera than the described photographing region of described line sensor video camera is positioned at by the described presumptive area on the surface of the described laminating tabular body of described 1st illuminating member illumination.
5. a laminating tabular health check-up checking method, the adhesive substrates of the 1st tabular body and the laminating of the 2nd tabular body is photographed and generates check image utilizing the bonding agent with light transmission by it, described 1st tabular body has transmission region, described 2nd tabular body has the light tight region formed at periphery and the transmission region formed in the position in the inner part of the periphery than this light tight region of formation, wherein
Use as lower component in described laminating tabular health check-up checking method:
Line sensor video camera, it configures opposedly with described 1st tabular body of described laminating tabular body;
1st illuminating member, throw light in described 1st surface of tabular side to this laminating tabular body from described laminating tabular body under its state of not crossing the optical axis of described line sensor video camera at optical axis; And
2nd illuminating member, it throws light on from the described 2nd tabular side of described laminating tabular body towards described line sensor video camera,
Described laminating tabular health check-up checking method has following steps:
The photolineation of described 1st illuminating member to the described line sensor video camera on the surface from described laminating tabular body leaves predetermined distance and the step of throwing light on sideling in the presumptive area extended along the direction of this photolineation; With
Under the 1st illuminating member and the 2nd illuminating member carry out the state of throwing light on, maintain the relative position relation of described line sensor video camera and described 1st illuminating member, while utilize the step of tabular body of fitting described in described line sensor camera-scanning,
By fitting described in described line sensor camera-scanning, tabular body generates described check image.
6. laminating tabular health check-up checking method according to claim 5, wherein,
The photographing region that described line sensor video camera carries out photographing on the surface of described laminating tabular body is not contained in by the described presumptive area on the surface of the described laminating tabular body of described 1st illuminating member illumination.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011109951A JP5791101B2 (en) | 2011-05-16 | 2011-05-16 | Bonded plate inspection apparatus and method |
| JP2011-109951 | 2011-05-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102788798A CN102788798A (en) | 2012-11-21 |
| CN102788798B true CN102788798B (en) | 2015-06-03 |
Family
ID=47154262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210151151.8A Expired - Fee Related CN102788798B (en) | 2011-05-16 | 2012-05-15 | Bonding plate-shaped body checking device and method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5791101B2 (en) |
| KR (1) | KR101296969B1 (en) |
| CN (1) | CN102788798B (en) |
| TW (1) | TWI499770B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104406988A (en) * | 2014-11-18 | 2015-03-11 | 浙江大学 | Method for detecting defects inside glass |
| KR20170133113A (en) * | 2016-05-25 | 2017-12-05 | 코닝정밀소재 주식회사 | Method and apparatus of detecting particles on upper surface of glass, and method of irradiating incident light |
| CN106872483A (en) * | 2017-02-04 | 2017-06-20 | 大连益盛达智能科技有限公司 | Optical detection apparatus are solved because of the method for the aeration detection in transparent material |
| CN110391132B (en) * | 2018-04-16 | 2023-05-16 | 芝浦机械电子株式会社 | Organic film forming apparatus |
| KR20200062435A (en) * | 2018-11-26 | 2020-06-04 | 삼성디스플레이 주식회사 | Window panel, display device including the same, and manufacturing method thereof |
| CN113702401B (en) * | 2021-08-17 | 2023-12-08 | 芜湖东旭光电科技有限公司 | Glass edge defect detection method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0726457A2 (en) * | 1995-02-10 | 1996-08-14 | Central Glass Company, Limited | Method and apparatus for detecting defects in transparent sheets, particularly glass sheets |
| CN1441294A (en) * | 2002-02-28 | 2003-09-10 | 芝浦机械电子装置股份有限公司 | Base board plying-up device and its method and base board detector |
| CN1495748A (en) * | 2002-08-01 | 2004-05-12 | 株式会社理光 | Optical disk check device, optical disk check method, optical disk making method and disk |
| CN101241086A (en) * | 2008-03-03 | 2008-08-13 | 中国科学院光电技术研究所 | Detector for measuring glass material air blister and impurity |
| CN101322169A (en) * | 2005-11-30 | 2008-12-10 | 精工电子有限公司 | Bonding method and method for manufacturing display device |
| CN101790679A (en) * | 2007-09-04 | 2010-07-28 | 旭硝子株式会社 | Method and device for detecting micro foreign matter within transparent plate |
| CN101813640A (en) * | 2009-02-20 | 2010-08-25 | 三星康宁精密琉璃株式会社 | Apparatus for detecting particles on a glass surface and a method thereof |
| CN101883979A (en) * | 2007-12-03 | 2010-11-10 | 芝浦机械电子装置股份有限公司 | Substrate surface inspecting apparatus and substrate surface inspecting method |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11328756A (en) * | 1998-03-13 | 1999-11-30 | Sanyo Electric Co Ltd | Method for inspecting adhesive part of bonding type disk and inspecting apparatus |
| JP2001141662A (en) * | 1999-11-18 | 2001-05-25 | Central Glass Co Ltd | Method and apparatus for detecting flaw of transparent plate-shaped object |
| JP2001143353A (en) * | 1999-11-18 | 2001-05-25 | Aiwa Co Ltd | Disk ejecting mechanism of disk device |
| JP2003083904A (en) * | 2001-09-17 | 2003-03-19 | Central Glass Co Ltd | Method and device for detecting defect of transparent plate-shaped body |
| JP2004212202A (en) * | 2002-12-27 | 2004-07-29 | Dainippon Printing Co Ltd | Appearance inspection method and apparatus for translucent element |
| JP2004257776A (en) * | 2003-02-25 | 2004-09-16 | Kiyousera Opt Kk | Inspection device for light transmission body |
| JP2004301882A (en) * | 2003-03-28 | 2004-10-28 | Fujitsu Display Technologies Corp | Method for defecting detect of liquid crystal display panel |
| JP2004309262A (en) * | 2003-04-04 | 2004-11-04 | V Technology Co Ltd | Sealant application inspection device |
| JP4322890B2 (en) * | 2005-06-13 | 2009-09-02 | シャープ株式会社 | Undulation inspection device, undulation inspection method, control program of undulation inspection device, recording medium |
| JP5051874B2 (en) * | 2006-01-11 | 2012-10-17 | 日東電工株式会社 | Laminated film manufacturing method, laminated film defect detection method, laminated film defect detection apparatus |
| JP2009249211A (en) * | 2008-04-03 | 2009-10-29 | Central Glass Co Ltd | Method and instrument for inspecting optical defects of laminated glass |
| JP5334617B2 (en) * | 2009-02-17 | 2013-11-06 | 日東電工株式会社 | Method for manufacturing printed circuit board |
| JP2010223613A (en) * | 2009-03-19 | 2010-10-07 | Futec Inc | Optical examining device |
| JP5521377B2 (en) * | 2009-04-13 | 2014-06-11 | セントラル硝子株式会社 | Glass plate defect identification method and apparatus |
| DE202009017691U1 (en) * | 2009-09-02 | 2010-05-20 | Gp Inspect Gmbh | Device for detecting defects in an object |
-
2011
- 2011-05-16 JP JP2011109951A patent/JP5791101B2/en not_active Expired - Fee Related
-
2012
- 2012-05-02 KR KR1020120046110A patent/KR101296969B1/en active IP Right Grant
- 2012-05-03 TW TW101115762A patent/TWI499770B/en not_active IP Right Cessation
- 2012-05-15 CN CN201210151151.8A patent/CN102788798B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0726457A2 (en) * | 1995-02-10 | 1996-08-14 | Central Glass Company, Limited | Method and apparatus for detecting defects in transparent sheets, particularly glass sheets |
| CN1441294A (en) * | 2002-02-28 | 2003-09-10 | 芝浦机械电子装置股份有限公司 | Base board plying-up device and its method and base board detector |
| CN1495748A (en) * | 2002-08-01 | 2004-05-12 | 株式会社理光 | Optical disk check device, optical disk check method, optical disk making method and disk |
| CN101322169A (en) * | 2005-11-30 | 2008-12-10 | 精工电子有限公司 | Bonding method and method for manufacturing display device |
| CN101790679A (en) * | 2007-09-04 | 2010-07-28 | 旭硝子株式会社 | Method and device for detecting micro foreign matter within transparent plate |
| CN101883979A (en) * | 2007-12-03 | 2010-11-10 | 芝浦机械电子装置股份有限公司 | Substrate surface inspecting apparatus and substrate surface inspecting method |
| CN101241086A (en) * | 2008-03-03 | 2008-08-13 | 中国科学院光电技术研究所 | Detector for measuring glass material air blister and impurity |
| CN101813640A (en) * | 2009-02-20 | 2010-08-25 | 三星康宁精密琉璃株式会社 | Apparatus for detecting particles on a glass surface and a method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20120128093A (en) | 2012-11-26 |
| TWI499770B (en) | 2015-09-11 |
| CN102788798A (en) | 2012-11-21 |
| JP2012242142A (en) | 2012-12-10 |
| TW201303284A (en) | 2013-01-16 |
| KR101296969B1 (en) | 2013-08-20 |
| JP5791101B2 (en) | 2015-10-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102788798B (en) | Bonding plate-shaped body checking device and method | |
| WO2020037991A1 (en) | Under-screen optical fingerprint identification system and electronic device | |
| JP5792348B1 (en) | Position input device and touch panel | |
| CN109917545A (en) | Aerial image display device | |
| US20110019204A1 (en) | Optical and Illumination Techniques for Position Sensing Systems | |
| CN102449584A (en) | Optical position detection apparatus | |
| JP5515280B2 (en) | Position detecting device and electro-optical device | |
| CN103748514A (en) | Projection system | |
| US20180120676A1 (en) | Projection system | |
| WO2019030991A1 (en) | Aerial image display device | |
| JP2012242142A5 (en) | ||
| KR101374440B1 (en) | Inspection apparatus of attached panel shaped member and method thereof | |
| JP4149493B2 (en) | Fresnel optical element, display screen, and projection display device | |
| TWI449877B (en) | Closure plate body inspection apparatus and method | |
| KR101893445B1 (en) | Light-emitting assembly and display device | |
| WO2019099285A1 (en) | Methods and apparatus for detecting surface defects on glass sheets | |
| TWI518575B (en) | Optical touch module | |
| KR100693326B1 (en) | Rear projection screen | |
| JP2007522495A (en) | Rear projection screen | |
| JP2013250816A (en) | Coordinate input device, and coordinate input system | |
| CN102866157B (en) | Device and method are looked in the health check-up of laminating tabular | |
| JP5609581B2 (en) | Optical position detection device and device with position detection function | |
| JP2013250814A (en) | Coordinate input device, and coordinate input system | |
| CN115343846A (en) | Imaging window manufacturing method, imaging window, imaging system and vehicle | |
| JP2010204788A (en) | Illuminator and electrooptical device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150603 Termination date: 20190515 |