CN102770753B - 进行样本的x射线分析的方法和设备 - Google Patents
进行样本的x射线分析的方法和设备 Download PDFInfo
- Publication number
- CN102770753B CN102770753B CN201080057541.8A CN201080057541A CN102770753B CN 102770753 B CN102770753 B CN 102770753B CN 201080057541 A CN201080057541 A CN 201080057541A CN 102770753 B CN102770753 B CN 102770753B
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- sample
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- wavelength
- xrd
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
- G01N23/2076—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/071—Investigating materials by wave or particle radiation secondary emission combination of measurements, at least 1 secondary emission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0921965.0A GB2476255B (en) | 2009-12-17 | 2009-12-17 | Method and apparatus for performing x-ray analysis of a sample |
| GB0921965.0 | 2009-12-17 | ||
| PCT/EP2010/069540 WO2011073148A1 (en) | 2009-12-17 | 2010-12-13 | Method and apparatus for performing x-ray analysis of a sample |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102770753A CN102770753A (zh) | 2012-11-07 |
| CN102770753B true CN102770753B (zh) | 2016-09-14 |
Family
ID=41717033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080057541.8A Active CN102770753B (zh) | 2009-12-17 | 2010-12-13 | 进行样本的x射线分析的方法和设备 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9031187B2 (https=) |
| EP (1) | EP2513641B1 (https=) |
| JP (1) | JP5855573B2 (https=) |
| CN (1) | CN102770753B (https=) |
| GB (1) | GB2476255B (https=) |
| IN (1) | IN2012DN05107A (https=) |
| RU (1) | RU2506570C1 (https=) |
| WO (1) | WO2011073148A1 (https=) |
| ZA (1) | ZA201204142B (https=) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102608144A (zh) * | 2012-03-28 | 2012-07-25 | 苏州科技学院 | 一种测量金属微结构残余应力三维分布的装置及其方法 |
| CN103076352B (zh) * | 2012-12-28 | 2015-02-25 | 中国科学院高能物理研究所 | 一种获得高品质薄膜样品x射线吸收谱的方法 |
| EP2762862B1 (en) * | 2013-01-30 | 2017-03-08 | Bruker AXS GmbH | XRF measurement apparatus for detecting contaminations on the bevel of a wafer |
| JP6685078B2 (ja) * | 2013-03-15 | 2020-04-22 | プロト マニュファクチャリング リミテッド | Ｘ線回折装置およびｘ線回折装置駆動方法 |
| FI125488B (en) * | 2014-06-09 | 2015-10-30 | Fenno Aurum Oy | Wavelength crystal dispersion spectrometer, X-ray fluorescence device and method for this |
| DE102014219601B4 (de) | 2014-08-13 | 2023-06-29 | Bruker Nano Gmbh | Verfahren zum Scannen einer Probe mittels einer Röntgenoptik und eine Apparatur zum Scannen einer Probe |
| US9746432B2 (en) | 2014-09-23 | 2017-08-29 | Olympus Scientific Solutions Americas Inc. | Spacer accessory for XRF handheld analyzers |
| US9784699B2 (en) * | 2015-03-03 | 2017-10-10 | Panalytical B.V. | Quantitative X-ray analysis—matrix thickness correction |
| US10697908B2 (en) | 2015-06-01 | 2020-06-30 | Xwinsys Ltd. | Metrology inspection apparatus |
| CN105092618A (zh) * | 2015-09-18 | 2015-11-25 | 北京师范大学 | 一种微束能量色散的x射线衍射仪及其使用方法 |
| CN105651801B (zh) * | 2015-12-30 | 2018-10-16 | 北京矿冶研究总院 | 一种矿浆矿物在线分析方法 |
| CN105891246B (zh) * | 2016-06-23 | 2018-11-16 | 北京至一恒盛技术服务有限公司 | 一种x射线荧光探测装置 |
| UA125139C2 (uk) | 2016-09-19 | 2022-01-19 | Сорек'Ю Нукліар Ресьорч Сентер | Система управління роботою системи рентгенівської флуоресценції для виявлення матеріалу, система рентгенівської флуоресценції для виявлення матеріалу та спосіб вимірювання на зразку для ідентифікації матеріалу з використанням рентгенівської флуоресценції |
| CN107228871B (zh) * | 2017-07-21 | 2023-07-04 | 中国地质大学（武汉） | 一种便携式x射线分析装置 |
| IT201700100060A1 (it) * | 2017-09-06 | 2019-03-06 | De Tec Tor S R L | Apparato di selezione di prodotti in base alla loro composizione tramite spettroscopia a fluorescenza a raggi x e relativo procedimento di selezione |
| EP3553507A1 (en) * | 2018-04-13 | 2019-10-16 | Malvern Panalytical B.V. | X-ray analysis apparatus |
| SE545836C2 (en) * | 2018-04-20 | 2024-02-20 | Metso Outotec Finland Oy | X-ray fluorescence analyser comprising a crystal diffractor |
| CN112313503B (zh) * | 2018-04-20 | 2024-07-05 | 美卓奥图泰芬兰有限公司 | X射线荧光分析仪系统和用于对浆料中的感兴趣元素执行x射线荧光分析的方法 |
| US11815480B2 (en) * | 2018-04-20 | 2023-11-14 | Outotec (Finland) Oy | X-ray fluorescence analyzer and a method for performing an x-ray fluorescence analysis |
| AU2018419253B2 (en) | 2018-04-20 | 2022-03-03 | Metso Finland Oy | X-ray fluorescence analyzer with a plurality of measurement channels, and a method for performing X-ray fluorescence analysis |
| JP6871629B2 (ja) * | 2018-06-29 | 2021-05-12 | 株式会社リガク | Ｘ線分析装置及びその光軸調整方法 |
| JP7394464B2 (ja) * | 2018-07-04 | 2023-12-08 | 株式会社リガク | 蛍光ｘ線分析装置 |
| JP7380421B2 (ja) * | 2020-05-27 | 2023-11-15 | 株式会社島津製作所 | Ｘ線分析装置およびｘ線分析方法 |
| EP4019951A1 (en) * | 2020-12-24 | 2022-06-29 | Inel S.A.S | Apparatuses and methods for combined simultaneous analyses of materials |
| GB202106959D0 (en) * | 2021-05-14 | 2021-06-30 | Malvern Panalytical Bv | Apparatus and method for x-ray fluorescence analysis |
| CN119173759A (zh) * | 2022-05-02 | 2024-12-20 | 斯格瑞公司 | X射线顺序阵列波长色散光谱仪 |
| CN114705708B (zh) * | 2022-06-07 | 2022-08-23 | 四川大学 | 一种样品表面成分智能分析方法及系统 |
| CN114720496B (zh) * | 2022-06-08 | 2022-08-26 | 四川大学 | 实现全场x射线荧光成像分析的衍射分析装置及方法 |
| CN116879335B (zh) * | 2023-09-08 | 2023-11-17 | 四川大学 | 一种组合扫描式xrd/xrf综合成像方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4263510A (en) * | 1979-07-30 | 1981-04-21 | General Electric Company | Combined x-ray diffraction and fluorescence spectroscopy apparatus with environmentally controllable chamber |
| CN1504744A (zh) * | 2002-12-02 | 2004-06-16 | 中国科学技术大学 | 对组合样品的结构和成分进行测量分析的方法及装置 |
| CN201335815Y (zh) * | 2009-01-14 | 2009-10-28 | 布莱格科技（北京）有限公司 | X射线衍射-荧光双谱仪 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3344274A (en) | 1967-09-26 | Ray analysis apparatus having both diffraction amd spectrometer tubes mounted on a common housing | ||
| EP0183043B1 (de) | 1984-10-22 | 1989-09-27 | Siemens Aktiengesellschaft | Einrichtung zur Röntgenanalyse |
| US4796284A (en) * | 1984-12-31 | 1989-01-03 | North American Philips Corporation | Polycrystalline X-ray spectrometer |
| JP2742415B2 (ja) * | 1987-11-27 | 1998-04-22 | 株式会社日立製作所 | Ｘ線分析装置 |
| JP2921597B2 (ja) * | 1990-11-17 | 1999-07-19 | 株式会社リコー | 全反射スペクトル測定装置 |
| GB9223592D0 (en) * | 1992-11-11 | 1992-12-23 | Fisons Plc | X-ray analysis apparatus |
| JPH11502025A (ja) * | 1995-10-03 | 1999-02-16 | フィリップス エレクトロニクス エヌ ベー | 同時ｘ線回折及びｘ線蛍光測定のための装置 |
| EP0815437A1 (en) * | 1996-01-12 | 1998-01-07 | Koninklijke Philips Electronics N.V. | X-ray analysis apparatus including a rotatable primary collimator |
| JP3593412B2 (ja) * | 1996-03-26 | 2004-11-24 | 株式会社リガク | Ｘ線分析装置および蛍光ｘ線分析用アタッチメント |
| JPH09318565A (ja) * | 1996-05-24 | 1997-12-12 | Rigaku Ind Co | Ｘ線分析方法および装置 |
| JP2000009666A (ja) * | 1998-06-24 | 2000-01-14 | Rigaku Industrial Co | Ｘ線分析装置 |
| JP3367478B2 (ja) * | 1999-07-29 | 2003-01-14 | 株式会社島津製作所 | 蛍光ｘ線分析装置 |
| JP4777539B2 (ja) | 2001-05-29 | 2011-09-21 | エスアイアイ・ナノテクノロジー株式会社 | 複合ｘ線分析装置 |
| JP2003098126A (ja) * | 2001-09-26 | 2003-04-03 | Rigaku Industrial Co | 蛍光・回折共用ｘ線分析装置 |
| US7092843B2 (en) * | 2003-10-21 | 2006-08-15 | X-Ray Optical Systems, Inc. | Apparatus and method for suppressing insignificant variations in measured sample composition data, including data measured from dynamically changing samples using x-ray analysis techniques |
| RU2255328C1 (ru) * | 2004-06-10 | 2005-06-27 | Южно-Уральский государственный университет | Способ определения концентрации фазы в веществе сложного химического состава |
| JP3912606B2 (ja) | 2004-10-26 | 2007-05-09 | 株式会社リガク | Ｘ線薄膜検査装置と、プロダクトウエーハの薄膜検査装置およびその方法 |
| JP2006213836A (ja) | 2005-02-04 | 2006-08-17 | Freudenberg-Nok General Partnership | ペルオキシド硬化したフルオロカーボンエラストマー組成物 |
| GB2447252B (en) * | 2007-03-06 | 2012-03-14 | Thermo Fisher Scientific Inc | X-ray analysis instrument |
| GB2457646B (en) | 2007-10-30 | 2010-03-03 | Imagination Tech Ltd | Method and apparatus for compressing and decompressing data |
| RU2362149C1 (ru) * | 2008-01-09 | 2009-07-20 | Государственное образовательное учреждение высшего профессионального образования "Южно-Уральский государственный университет" | Способ определения концентраций элемента и фазы, включающей данный элемент, в веществе сложного химического состава |
-
2009
- 2009-12-17 GB GB0921965.0A patent/GB2476255B/en not_active Expired - Fee Related
-
2010
- 2010-12-13 CN CN201080057541.8A patent/CN102770753B/zh active Active
- 2010-12-13 RU RU2012129873/28A patent/RU2506570C1/ru active
- 2010-12-13 JP JP2012543663A patent/JP5855573B2/ja active Active
- 2010-12-13 US US13/515,939 patent/US9031187B2/en active Active
- 2010-12-13 IN IN5107DEN2012 patent/IN2012DN05107A/en unknown
- 2010-12-13 WO PCT/EP2010/069540 patent/WO2011073148A1/en not_active Ceased
- 2010-12-13 EP EP10800909.3A patent/EP2513641B1/en active Active
-
2012
- 2012-06-06 ZA ZA2012/04142A patent/ZA201204142B/en unknown
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4263510A (en) * | 1979-07-30 | 1981-04-21 | General Electric Company | Combined x-ray diffraction and fluorescence spectroscopy apparatus with environmentally controllable chamber |
| CN1504744A (zh) * | 2002-12-02 | 2004-06-16 | 中国科学技术大学 | 对组合样品的结构和成分进行测量分析的方法及装置 |
| CN201335815Y (zh) * | 2009-01-14 | 2009-10-28 | 布莱格科技（北京）有限公司 | X射线衍射-荧光双谱仪 |
Also Published As
| Publication number | Publication date |
|---|---|
| ZA201204142B (en) | 2013-02-27 |
| JP5855573B2 (ja) | 2016-02-09 |
| JP2013514527A (ja) | 2013-04-25 |
| RU2506570C1 (ru) | 2014-02-10 |
| US9031187B2 (en) | 2015-05-12 |
| GB2476255B (en) | 2012-03-07 |
| CN102770753A (zh) | 2012-11-07 |
| EP2513641B1 (en) | 2019-04-10 |
| GB2476255A (en) | 2011-06-22 |
| EP2513641A1 (en) | 2012-10-24 |
| WO2011073148A1 (en) | 2011-06-23 |
| IN2012DN05107A (https=) | 2015-10-09 |
| GB0921965D0 (en) | 2010-02-03 |
| US20120294418A1 (en) | 2012-11-22 |
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