CN102712014A - 薄板构件清洗装置 - Google Patents

薄板构件清洗装置 Download PDF

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Publication number
CN102712014A
CN102712014A CN2010800602896A CN201080060289A CN102712014A CN 102712014 A CN102712014 A CN 102712014A CN 2010800602896 A CN2010800602896 A CN 2010800602896A CN 201080060289 A CN201080060289 A CN 201080060289A CN 102712014 A CN102712014 A CN 102712014A
Authority
CN
China
Prior art keywords
thin
plate member
cleaning device
cleaning
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010800602896A
Other languages
English (en)
Chinese (zh)
Inventor
加藤祐介
山内隆伸
朝井庆
田畑信
迫田勇策
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Healthcare Co Ltd
Original Assignee
Omron Healthcare Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Healthcare Co Ltd filed Critical Omron Healthcare Co Ltd
Publication of CN102712014A publication Critical patent/CN102712014A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
CN2010800602896A 2010-01-08 2010-12-29 薄板构件清洗装置 Pending CN102712014A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010-003037 2010-01-08
JP2010003037A JP2011140007A (ja) 2010-01-08 2010-01-08 薄板部材洗浄装置
PCT/JP2010/073837 WO2011083743A1 (ja) 2010-01-08 2010-12-29 薄板部材洗浄装置

Publications (1)

Publication Number Publication Date
CN102712014A true CN102712014A (zh) 2012-10-03

Family

ID=44305479

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010800602896A Pending CN102712014A (zh) 2010-01-08 2010-12-29 薄板构件清洗装置

Country Status (5)

Country Link
US (1) US8656935B2 (enExample)
JP (1) JP2011140007A (enExample)
CN (1) CN102712014A (enExample)
DE (1) DE112010005108T5 (enExample)
WO (1) WO2011083743A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2844050T3 (es) 2015-10-30 2021-07-21 Johnson & Johnson Consumer Inc Dispositivo de nebulización de aerosol aséptico
CN108348698B (zh) 2015-10-30 2020-12-15 强生消费者公司 无菌气溶胶雾化装置
RU2728719C2 (ru) 2015-10-30 2020-07-30 Джонсон энд Джонсон Консьюмер Инк. Асептический аэрозольный туманообразователь
EP3368113B1 (en) 2015-10-30 2022-06-01 Johnson & Johnson Consumer Inc. Unit dose aseptic aerosol misting device
JP6733442B2 (ja) * 2016-09-08 2020-07-29 オムロンヘルスケア株式会社 メッシュ式ネブライザ
CN106540920A (zh) * 2016-11-26 2017-03-29 南京途酷信息科技有限公司 一种小工件超声波清洗装置
CN110960331A (zh) * 2017-09-11 2020-04-07 崔林 一种外科手术器械清洗消毒装置
JP6988365B2 (ja) * 2017-10-20 2022-01-05 オムロンヘルスケア株式会社 メッシュ式ネブライザおよび交換部材

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0739841A (ja) * 1993-07-27 1995-02-10 Nippon Kasei Chem Co Ltd 洗浄方法
WO1996018463A1 (en) * 1994-12-12 1996-06-20 Philips Electronics N.V. Device for rinsing objects
US6112355A (en) * 1997-09-19 2000-09-05 Speedfam Clean System Co., Ltd. Overflow scrub-washing method and apparatus
EP1088603A1 (en) * 1999-09-30 2001-04-04 Purex Co.Ltd. Method of removing contamination adhered to surfaces and apparatus used therefor
JP3253219B2 (ja) * 1994-08-23 2002-02-04 東京エレクトロン株式会社 半導体処理システムにおける洗浄装置
US20040089331A1 (en) * 2002-11-13 2004-05-13 Taiwan Semiconductor Manufacturing Co., Ltd. Rinsing lid for wet bench
CN2838780Y (zh) * 2005-10-09 2006-11-22 微硕自动化股份有限公司 光罩片清洗旋转机构
JP2007324509A (ja) * 2006-06-05 2007-12-13 Sony Corp 基板洗浄装置および基板洗浄方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2519654A (en) * 1945-07-23 1950-08-22 William B Heaney Washing machine for bearings
US3894551A (en) 1973-06-29 1975-07-15 John F Stohlman Container for use in cleansing jewelry
US5328601A (en) 1980-09-29 1994-07-12 Water Pollution Control Corporation Apparatus for in place gas cleaning of diffusion elements
US5167323A (en) 1990-08-09 1992-12-01 Tomei Sangyo Co., Ltd. Lens treating device for treating contact lens
US5181604A (en) 1990-09-14 1993-01-26 Tomei Sangyo Co., Ltd. Contact lens holder and treating device
JPH0477124U (enExample) 1990-11-15 1992-07-06
JPH06296939A (ja) 1993-04-13 1994-10-25 Tokyo Sensen Kikai Seisakusho:Kk 部品類洗浄機
JP3007442U (ja) 1994-08-03 1995-02-14 ソミールプロダクツ株式会社 入れ歯容器
JPH09162152A (ja) 1995-12-13 1997-06-20 Watanabe Shoko:Kk 万能型洗浄装置
JP3600747B2 (ja) * 1999-01-22 2004-12-15 大日本スクリーン製造株式会社 基板処理装置
JP3538114B2 (ja) * 1999-09-30 2004-06-14 野村マイクロ・サイエンス株式会社 表面付着汚染物質の除去方法及び除去装置
JP2001178639A (ja) 1999-12-27 2001-07-03 Hiroyuki Suzuki 水流式洗米機又は穀物洗い機
US6502589B1 (en) 2000-09-12 2003-01-07 Shawn W. Fitzgerald Method and device for cleaning and polishing jewelry
US7108001B2 (en) 2003-04-03 2006-09-19 Keith Pope Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom
US7484515B1 (en) 2003-09-09 2009-02-03 Bluestone Ronald H Combination parts jet washer and sink washer
KR101054115B1 (ko) 2004-05-20 2011-08-03 엘지전자 주식회사 식기 세척기의 도어 실링 개스킷 구조
JP2005341880A (ja) 2004-06-03 2005-12-15 Mayekawa Mfg Co Ltd 根菜類洗浄方法及び該装置
JP4582649B2 (ja) 2005-11-07 2010-11-17 国立大学法人広島大学 洗浄装置
JP2009218402A (ja) * 2008-03-11 2009-09-24 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0739841A (ja) * 1993-07-27 1995-02-10 Nippon Kasei Chem Co Ltd 洗浄方法
JP3253219B2 (ja) * 1994-08-23 2002-02-04 東京エレクトロン株式会社 半導体処理システムにおける洗浄装置
WO1996018463A1 (en) * 1994-12-12 1996-06-20 Philips Electronics N.V. Device for rinsing objects
US6112355A (en) * 1997-09-19 2000-09-05 Speedfam Clean System Co., Ltd. Overflow scrub-washing method and apparatus
EP1088603A1 (en) * 1999-09-30 2001-04-04 Purex Co.Ltd. Method of removing contamination adhered to surfaces and apparatus used therefor
US20040089331A1 (en) * 2002-11-13 2004-05-13 Taiwan Semiconductor Manufacturing Co., Ltd. Rinsing lid for wet bench
CN2838780Y (zh) * 2005-10-09 2006-11-22 微硕自动化股份有限公司 光罩片清洗旋转机构
JP2007324509A (ja) * 2006-06-05 2007-12-13 Sony Corp 基板洗浄装置および基板洗浄方法

Also Published As

Publication number Publication date
JP2011140007A (ja) 2011-07-21
WO2011083743A1 (ja) 2011-07-14
US8656935B2 (en) 2014-02-25
DE112010005108T5 (de) 2012-12-13
US20120279533A1 (en) 2012-11-08

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PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20121003