CN102446760A - 制作垂直二极管的方法 - Google Patents
制作垂直二极管的方法 Download PDFInfo
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- CN102446760A CN102446760A CN2010105080964A CN201010508096A CN102446760A CN 102446760 A CN102446760 A CN 102446760A CN 2010105080964 A CN2010105080964 A CN 2010105080964A CN 201010508096 A CN201010508096 A CN 201010508096A CN 102446760 A CN102446760 A CN 102446760A
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CN2010105080964A CN102446760A (zh) | 2010-10-15 | 2010-10-15 | 制作垂直二极管的方法 |
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CN2010105080964A CN102446760A (zh) | 2010-10-15 | 2010-10-15 | 制作垂直二极管的方法 |
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CN102446760A true CN102446760A (zh) | 2012-05-09 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015032279A1 (en) * | 2013-09-04 | 2015-03-12 | International Business Machines Corporation | Trench sidewall protection for selective epitaxial semiconductor material formation |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6590240B1 (en) * | 1999-07-28 | 2003-07-08 | Stmicroelectronics S.A. | Method of manufacturing unipolar components |
JP2004140039A (ja) * | 2002-10-15 | 2004-05-13 | Fuji Electric Device Technology Co Ltd | 半導体装置の製造方法 |
CN1503365A (zh) * | 2002-11-27 | 2004-06-09 | 旺宏电子股份有限公司 | 含有二极管的掩模式只读存储器及其制造方法 |
CN101834273A (zh) * | 2010-01-28 | 2010-09-15 | 中国科学院上海微系统与信息技术研究所 | 一种降低相变存储器功耗的单元结构及其制备方法 |
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- 2010-10-15 CN CN2010105080964A patent/CN102446760A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6590240B1 (en) * | 1999-07-28 | 2003-07-08 | Stmicroelectronics S.A. | Method of manufacturing unipolar components |
JP2004140039A (ja) * | 2002-10-15 | 2004-05-13 | Fuji Electric Device Technology Co Ltd | 半導体装置の製造方法 |
CN1503365A (zh) * | 2002-11-27 | 2004-06-09 | 旺宏电子股份有限公司 | 含有二极管的掩模式只读存储器及其制造方法 |
CN101834273A (zh) * | 2010-01-28 | 2010-09-15 | 中国科学院上海微系统与信息技术研究所 | 一种降低相变存储器功耗的单元结构及其制备方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015032279A1 (en) * | 2013-09-04 | 2015-03-12 | International Business Machines Corporation | Trench sidewall protection for selective epitaxial semiconductor material formation |
US9252014B2 (en) | 2013-09-04 | 2016-02-02 | Globalfoundries Inc. | Trench sidewall protection for selective epitaxial semiconductor material formation |
US9269575B2 (en) | 2013-09-04 | 2016-02-23 | Globalfoundries Inc. | Trench sidewall protection for selective epitaxial semiconductor material formation |
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130619 Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHA Effective date: 20130619 |
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Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
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Effective date of registration: 20130619 Address after: 100176 No. 18 Wenchang Avenue, Beijing economic and Technological Development Zone Applicant after: Semiconductor Manufacturing International (Beijing) Corporation Applicant after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Applicant before: Semiconductor Manufacturing International (Shanghai) Corporation |
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Application publication date: 20120509 |