CN102422521B - 致动器及使用致动器的光扫描装置 - Google Patents

致动器及使用致动器的光扫描装置 Download PDF

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Publication number
CN102422521B
CN102422521B CN201080020675.2A CN201080020675A CN102422521B CN 102422521 B CN102422521 B CN 102422521B CN 201080020675 A CN201080020675 A CN 201080020675A CN 102422521 B CN102422521 B CN 102422521B
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CN
China
Prior art keywords
actuator
drive
movable frame
driving
pair
Prior art date
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Active
Application number
CN201080020675.2A
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English (en)
Chinese (zh)
Other versions
CN102422521A (zh
Inventor
山田司
江原正人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsumi Electric Co Ltd
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Mitsumi Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsumi Electric Co Ltd filed Critical Mitsumi Electric Co Ltd
Priority to CN201410083527.5A priority Critical patent/CN103840704B/zh
Publication of CN102422521A publication Critical patent/CN102422521A/zh
Application granted granted Critical
Publication of CN102422521B publication Critical patent/CN102422521B/zh
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • H02N2/123—Mechanical transmission means, e.g. for gearing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
CN201080020675.2A 2009-05-11 2010-04-21 致动器及使用致动器的光扫描装置 Active CN102422521B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410083527.5A CN103840704B (zh) 2009-05-11 2010-04-21 致动器及使用致动器的光扫描装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2009-114317 2009-05-11
JP2009114317 2009-05-11
JP2009205316A JP5444968B2 (ja) 2009-05-11 2009-09-04 アクチュエータ及びこれを用いた光走査装置
JP2009-205316 2009-09-04
PCT/JP2010/057096 WO2010131557A1 (ja) 2009-05-11 2010-04-21 アクチュエータ及びアクチュエータを用いた光走査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201410083527.5A Division CN103840704B (zh) 2009-05-11 2010-04-21 致动器及使用致动器的光扫描装置

Publications (2)

Publication Number Publication Date
CN102422521A CN102422521A (zh) 2012-04-18
CN102422521B true CN102422521B (zh) 2014-09-03

Family

ID=43084934

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201410083527.5A Active CN103840704B (zh) 2009-05-11 2010-04-21 致动器及使用致动器的光扫描装置
CN201080020675.2A Active CN102422521B (zh) 2009-05-11 2010-04-21 致动器及使用致动器的光扫描装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201410083527.5A Active CN103840704B (zh) 2009-05-11 2010-04-21 致动器及使用致动器的光扫描装置

Country Status (4)

Country Link
US (2) US8610983B2 (enExample)
JP (1) JP5444968B2 (enExample)
CN (2) CN103840704B (enExample)
WO (1) WO2010131557A1 (enExample)

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JP5736766B2 (ja) 2010-12-22 2015-06-17 ミツミ電機株式会社 光走査装置
JP5666955B2 (ja) * 2011-03-24 2015-02-12 スタンレー電気株式会社 光偏向器
US10730742B2 (en) * 2012-01-24 2020-08-04 Pioneer Corporation Actuator with plurality of torsion bars having varying spring constant
CN104272166A (zh) * 2012-05-07 2015-01-07 松下知识产权经营株式会社 光学反射元件
JP6180155B2 (ja) * 2013-04-01 2017-08-16 富士電機株式会社 アクチュエータ
JP6349851B2 (ja) * 2014-03-27 2018-07-04 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
JPWO2015146144A1 (ja) * 2014-03-28 2017-04-13 住友精密工業株式会社 駆動装置
JP5967145B2 (ja) * 2014-06-24 2016-08-10 ミツミ電機株式会社 光走査装置
EP3197052B1 (en) * 2014-09-18 2020-07-01 Mitsumi Electric Co., Ltd. Capacitive load drive circuit and optical scanning device
JP6492914B2 (ja) 2015-04-15 2019-04-03 株式会社デンソー 光走査装置
US9841163B1 (en) * 2015-04-29 2017-12-12 Cooper Technologies Company Light redirecting flange in luminaires
CN105305877B (zh) * 2015-10-30 2017-08-25 西安交通大学 采用轴向限位—径向箝位机构的尺蠖式压电作动器及方法
IT201600079604A1 (it) * 2016-07-28 2018-01-28 St Microelectronics Srl Struttura oscillante con attuazione piezoelettrica, sistema e metodo di fabbricazione
JP6814076B2 (ja) * 2017-03-14 2021-01-13 浜松ホトニクス株式会社 光モジュール
JP6455547B2 (ja) * 2017-05-24 2019-01-23 ミツミ電機株式会社 光走査装置
JP7066982B2 (ja) * 2017-05-30 2022-05-16 船井電機株式会社 光走査装置
JP6924090B2 (ja) 2017-07-21 2021-08-25 浜松ホトニクス株式会社 アクチュエータ装置
EP3667394B1 (en) * 2017-08-10 2025-08-13 Hamamatsu Photonics K.K. Mirror device
JP6585147B2 (ja) * 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
US11394284B2 (en) * 2017-12-01 2022-07-19 Hamamatsu Photonics K.K. Actuator device
JP7132481B2 (ja) * 2018-02-23 2022-09-07 ミツミ電機株式会社 アクチュエータ及び光走査装置
CN108428786B (zh) * 2018-03-26 2020-10-02 浙江宝纺印染有限公司 一种微角度驱动装置的制备方法
CN108494284B (zh) * 2018-03-26 2020-09-18 徐明秀 一种微角度驱动装置的制备方法
CN108614353B (zh) * 2018-05-10 2020-08-04 西安交通大学 基于离子交换聚合金属材料的二维偏转解耦机构及其偏转方法
CN112567284B (zh) * 2018-08-10 2023-07-18 浜松光子学株式会社 致动器装置、以及致动器装置的制造方法
JP7422744B2 (ja) * 2018-09-05 2024-01-26 ベーア－ヘラー サーモコントロール ゲーエムベーハー 触覚応答を備える車両操作ユニット
US11221478B2 (en) 2019-04-15 2022-01-11 Microsoft Technology Licensing, Llc MEMS scanner
EP3998505B1 (en) * 2019-04-26 2023-07-19 FUJIFILM Corporation Micromirror device
JP6962348B2 (ja) * 2019-05-13 2021-11-05 株式会社村田製作所 振動装置
JP7297538B2 (ja) 2019-06-06 2023-06-26 スタンレー電気株式会社 光偏向器及び製造方法
CN112165273B (zh) * 2020-09-24 2021-11-30 南京工程学院 基于同向偏心约束和斜压电陶瓷的耦合模态型超声波电机
JP7600030B2 (ja) * 2021-05-14 2024-12-16 スタンレー電気株式会社 光偏向器
JP2023138058A (ja) * 2022-03-18 2023-09-29 日東電工株式会社 配線回路基板

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JP2005148459A (ja) * 2003-11-17 2005-06-09 Stanley Electric Co Ltd ２次元光スキャナ及び光学装置
US20070268544A1 (en) * 2006-05-19 2007-11-22 Konica Minolta Holdings, Inc., Optical scanner and scanning type projector
US7442918B2 (en) * 2004-05-14 2008-10-28 Microvision, Inc. MEMS device having simplified drive
WO2009028152A1 (ja) * 2007-08-27 2009-03-05 Panasonic Corporation 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置

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JP3956933B2 (ja) 2002-11-26 2007-08-08 ブラザー工業株式会社 光走査装置および画像形成装置
US7446911B2 (en) 2002-11-26 2008-11-04 Brother Kogyo Kabushiki Kaisha Optical scanning apparatus and image forming apparatus
US7535619B2 (en) * 2005-04-27 2009-05-19 Hewlett-Packard Development Company, L.P. Discharge of MEM devices having charge induced via focused beam to enter different states

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JP2005148459A (ja) * 2003-11-17 2005-06-09 Stanley Electric Co Ltd ２次元光スキャナ及び光学装置
US7442918B2 (en) * 2004-05-14 2008-10-28 Microvision, Inc. MEMS device having simplified drive
US20070268544A1 (en) * 2006-05-19 2007-11-22 Konica Minolta Holdings, Inc., Optical scanner and scanning type projector
WO2009028152A1 (ja) * 2007-08-27 2009-03-05 Panasonic Corporation 圧電アクチュエータおよびこれを用いた光学反射素子および圧電駆動装置

Non-Patent Citations (1)

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JP特开2005-148459A 2005.06.09

Also Published As

Publication number Publication date
JP2010288435A (ja) 2010-12-24
CN103840704B (zh) 2016-09-14
US20120062970A1 (en) 2012-03-15
WO2010131557A1 (ja) 2010-11-18
CN103840704A (zh) 2014-06-04
US8610983B2 (en) 2013-12-17
US20140016170A1 (en) 2014-01-16
JP5444968B2 (ja) 2014-03-19
CN102422521A (zh) 2012-04-18
US8681404B2 (en) 2014-03-25

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