CN102267094A - Fool-proof timing alarming method and device for wafer processing machine table - Google Patents
Fool-proof timing alarming method and device for wafer processing machine table Download PDFInfo
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- CN102267094A CN102267094A CN2010101945096A CN201010194509A CN102267094A CN 102267094 A CN102267094 A CN 102267094A CN 2010101945096 A CN2010101945096 A CN 2010101945096A CN 201010194509 A CN201010194509 A CN 201010194509A CN 102267094 A CN102267094 A CN 102267094A
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Abstract
The invention discloses a fool-proof timing alarming method and a fool-proof timing alarming device for a wafer processing machine table and belongs to the technical field of semiconductor production. The method comprises the following steps of: 1, judging whether the machine table moves by a signal output terminal on the machine table in a wafer processing process; and 2, when the machine table does not move, giving an alarm. Therefore, by the invention, the situation that the machine table does not move can be determined, the alarm can be given, and an engineer is informed to process a product at the first time, so that risk on discarding of the product is reduced, and the machine table is maintained to guarantee production continuity.
Description
Technical field
The present invention relates to the semiconductor processing technology field, particularly a kind of fool proof timing and alarming method and apparatus that is used for the wafer process board.
Background technology
In manufacture of semiconductor, the chemical grinding board IPEC776 that U.S. NOVELLUS company produces easily causes the board misprogramming because the board software fault is more, and then causes the board attonity in the wafer process process, and this board does not have the fool proof warning device, has the defective in the design.
The harm that brings like this has: (1) be under the board grinding head and cleaning device in product wafer (wafer) for a long time by the corrosion of chemicals such as lapping liquid and cause scrapping; (2) board stops to produce and is not discovered, and causes producing and interrupts influencing manufacturing schedule.
Summary of the invention
The invention provides a kind of fool proof timing and alarming method and apparatus that is used for the wafer process board, can detect the board attonity and send warning.
In order to achieve the above object, the present invention is by the following technical solutions:
A kind of fool proof timing and alarming method that is used for the wafer process board comprises step:
S1: in the wafer process process,, judge whether attonity of described board by the signal output terminal on the described board;
S2: when judging described board attonity, send warning.
As the optimization to technique scheme, described step S1 specifically comprises:
S11: when the grinding head of described board is in abrasion site, pick up counting;
S12: obtain the present timing time, and present timing time and setting value are compared,, and go to step S2 if the present timing time, is then judged described board attonity greater than setting value; Otherwise, then repeat this step.
As optimization, also comprise step after the described step S2 to technique scheme:
S3: when the grinding head of described board is in non-abrasion site, stop timing; Perhaps,
S3 ': when judging described board attonity, stop timing.
A kind of fool proof timing and alarming device that is used for the wafer process board comprises:
Judge module is used in the wafer process process by the signal output terminal on the described board, judges whether attonity of described board;
Alarm module is used for sending warning when judging described board attonity.
As the optimization to technique scheme, the signal output terminal on the described board comprises and is used to represent that the grinding head of described board is positioned at first lead-out terminal of abrasion site;
Described judge module is to have to judge timing time whether greater than the timer of setting value function, and described timer comprises and is used to trigger the first input end that this timer picks up counting and is used to export the output of timing time greater than duty setting signal; Wherein,
Described first signal input part is electrically connected with described first lead-out terminal;
Described alarm module is an alarm, and the signal input part of described alarm is electrically connected with the output of described timer.
As the optimization to technique scheme, the signal output terminal of described board also comprises and is used to represent that the grinding head of described board is positioned at second lead-out terminal of non-abrasion site;
Described timer also comprises reset terminal, and described reset terminal is electrically connected with described second lead-out terminal.
As the optimization to technique scheme, described board is the work-table of chemicomechanical grinding mill IPEC776 that U.S. NOVELLUS company produces.
Optimization as to technique scheme is characterized in that,
Described board triggers described timer to the first input end of described timer output high level signal and picks up counting, described timer timing zero clearing when described board is exported high level signal to the reset terminal of described timer, described timer to described alarm output signal, triggers alarm equipment alarm when its timing time reaches setting value.
As the optimization to technique scheme, described setting value is 500s.
A kind of wafer process board is provided with the above-mentioned any described fool proof timing and alarming of technical scheme device.
The present invention is the signal output terminal by described board in the wafer process process, judges whether attonity of described board; When judging described board attonity, send warning.Therefore, the present invention can detect the board attonity and send warning, notifies the engineer very first time treatment product, reduces the product rejection risk, safeguards that board guarantees the continuous of production.
Description of drawings
Below in conjunction with accompanying drawing the present invention is described in detail.
Fig. 1 is the schematic flow sheet that is used for the fool proof timing and alarming method of wafer process board of the present invention.
Fig. 2 is the structural representation that is used for the fool proof timing and alarming device of wafer process board of the present invention.
Fig. 3 is the timer that adopted of fool proof timing and alarming device shown in Figure 2 and the connection diagram of siren.
The specific embodiment
As shown in Figure 1, a kind of fool proof timing and alarming method that is used for the wafer process board of the present invention comprises:
S1: in the wafer process process,, judge whether attonity of described board by the signal output terminal on the described board;
S2: when judging described board attonity, send warning.
Fool proof timing and alarming method of the present invention, the signal output terminal by described board in the wafer process process is judged whether attonity of described board; When judging described board attonity, send warning.Therefore, the present invention can detect the board attonity and send warning, notifies the engineer very first time treatment product, reduces the product rejection risk, safeguards that board guarantees the continuous of production.
During application, described step S1 specifically can comprise:
S11: when the grinding head of described board is in abrasion site, pick up counting;
S12: obtain the present timing time, and present timing time and setting value are compared,, and go to step S2 if the present timing time, is then judged described board attonity greater than setting value; Otherwise, then repeat this step.
In the wafer process process, once grind and all in the regular hour, finish, when surpassing this time, can think that fault has appearred in board.Therefore, above-mentioned setting value can be taken as the upper limit time of once grinding among the present invention, like this, when timing time surpasses this upper limit during the time, judges the board attonity, and sends warning.
Further, in timing course, stop, can also comprising step after the described step S2 in order to make timing:
S3: when the grinding head of described board is in non-abrasion site, stop timing; Perhaps,
S3 ': when judging described board attonity, stop timing.
In addition, after timing stops, can also adopting timing zero clearing step, with convenient timing next time.
Corresponding with the above-mentioned fool proof timing and alarming method that is used for the wafer process board, the present invention also provides a kind of fool proof timing and alarming device that is used for the wafer process board, as shown in Figure 2, comprising:
In the fool proof timing and alarming device of the present invention, judge module 11 is judged whether attonity of described board by the signal output terminal of described board in the wafer process process; When judging described board attonity, alarm module 21 sends warning.Therefore, the present invention can detect the board attonity and send warning, notifies the engineer very first time treatment product, reduces the product rejection risk, safeguards that board guarantees the continuous of production.
Correspondingly, for can be by being carried out timing the wafer process time and by computing time relatively conveniently judging whether attonity of described board exactly, the signal output terminal on the described board comprises and is used to represent that the grinding head of described board is positioned at first lead-out terminal of abrasion site;
Described judge module 11 is judged timing time whether greater than the timer of setting value function for having, and described timer comprises and is used to trigger first input end that this timer picks up counting and is used to export the output of timing time greater than duty setting signal; Wherein,
The first input end of described timer is electrically connected with first lead-out terminal on the described board;
Described alarm module 21 is an alarm, and the input of described alarm is electrically connected with the output of described timer.
Correspondingly, in timing course, stop in order to make timing, the signal output terminal of described board also comprises and is used to represent that the grinding head of described board is positioned at second lead-out terminal of non-abrasion site;
Described timer also comprises reset terminal, and described reset terminal is electrically connected with described second lead-out terminal.
Further, board of the present invention is preferably the work-table of chemicomechanical grinding mill IPEC776 that U.S. NOVELLUS company produces.Be example with this board below, describe fool proof timing and alarming device of the present invention in detail.
(1) at first introduces the characteristic of above-mentioned board
This board grinds head and is in non-abrasion site (promptly going up position (up position)) when non-grinding, and the signal output pin M028 of board is 24VDC; When grinding, grind head and be in abrasion site (upper/lower positions (down position)), the signal output pin M027 of board is 24VDC.The 24VDC signal that the M027 pin of this board is exported promptly can be used to feed back on the grinding head of board/under state.
Set according to board, normal milling time can not surpass 500s, and therefore, can not surpass 500s the normal time that the grinding head is in upper/lower positions, if it surpasses this time, then assert the board attonity.
(2) realization of judge module 11 in the fool proof timing and alarming device of the present invention
Among this embodiment, as shown in Figure 3, judge module 11 is for realizing the timer of following function:
The input of (1) one high level signal picks up counting, and another high level signal is imported then timing zero clearing;
(2) reach the setting-up time value, the timer output voltage signal.
With Omron (OMRON) H5CX-ASD model timer is example, and this timer operating voltage is 24VDC, adopts the PNP pattern can realize picking up counting by 0, reaches setting value and then exports 24VDC.The signal of timer (Signal) pin picks up counting when connecting 24VDC, timing zero clearing when (reset) pin that resets is connected 24VDC.
(3) realization of alarm module 21 in the fool proof timing and alarming device of the present invention
As shown in Figure 3, the alarm module among this embodiment 21 is luminous siren.This luminous siren operating voltage is 24VDC.
The M028 pin of above-mentioned board is inserted the signal pins of timer, the M027 pin is inserted the reset pin of timer.Simultaneously, the voltage output end access siren with timer so that provide operating voltage for siren when timing reaches setting value, gives the alarm it.
Set according to board, the setting value of timer is made as 500s.When the grinding head of board is in upper/lower positions, M028 pin output 24VDC, timer picks up counting, and when timing reaches setting-up time 500s, promptly assert the board attonity, timer output 24VDC voltage signal.At this moment, siren receives this voltage signal, connects loop works, gives the alarm.
When board is finished grinding, when the grinding head is raised up to the position, M027 pin output 24VDC, at this moment, the timer reset pin receives the voltage signal of board output and resets, and the timing zero clearing (if timer has begun to export the 24VDC voltage signal before the zero clearing, then can stop to export this signal this moment, thereby stop to trigger siren, reporting to the police stops).
Corresponding with the above-mentioned fool proof timing and alarming method and apparatus that is used for the wafer process board, the present invention also provides a kind of wafer process board, and it is provided with above-mentioned fool proof timing and alarming device.
Above-mentioned only is preferred embodiment of the present invention, certainly, with further exploration other embodiments can also be arranged according to actual needs.But, should be clear and definite be that the conversion based on similar embodiment with same idea above-mentioned or that other are not explained out all should be encompassed among the protection domain of claim of the present invention.
Claims (10)
1. a fool proof timing and alarming method that is used for the wafer process board is characterized in that, comprises step:
S1: in the wafer process process,, judge whether attonity of described board by the signal output terminal on the described board;
S2: when judging described board attonity, send warning.
2. method according to claim 1 is characterized in that, described step S1 specifically comprises:
S11: when the grinding head of described board is in abrasion site, pick up counting;
S12: obtain the present timing time, and present timing time and setting value are compared,, and go to step S2 if the present timing time, is then judged described board attonity greater than setting value; Otherwise, then repeat this step.
3. method according to claim 2 is characterized in that, also comprises step after the described step S2:
S3: when the grinding head of described board is in non-abrasion site, stop timing; Perhaps,
S3 ': when judging described board attonity, stop timing.
4. a fool proof timing and alarming device that is used for the wafer process board is characterized in that, comprising:
Judge module is used in the wafer process process by the signal output terminal on the described board, judges whether attonity of described board;
Alarm module is used for sending warning when judging described board attonity.
5. fool proof timing and alarming device according to claim 4 is characterized in that, the signal output terminal on the described board comprises and is used to represent that the grinding head of described board is positioned at first lead-out terminal of abrasion site;
Described judge module is to have to judge timing time whether greater than the timer of setting value function, and described timer comprises and is used to trigger the first input end that this timer picks up counting and is used to export the output of timing time greater than duty setting signal; Wherein,
The first input end of described timer is electrically connected with first lead-out terminal on the described board;
Described alarm module is an alarm, and the input of described alarm is electrically connected with the output of described timer.
6. fool proof timing and alarming device according to claim 5 is characterized in that, the signal output terminal of described board also comprises and is used to represent that the grinding head of described board is positioned at second lead-out terminal of non-abrasion site;
Described timer also comprises reset terminal, and described reset terminal is electrically connected with second lead-out terminal on the described board.
7. fool proof timing and alarming device according to claim 6 is characterized in that, described board is the work-table of chemicomechanical grinding mill IPEC776 that U.S. NOVELLUS company produces.
8. fool proof timing and alarming device according to claim 7 is characterized in that,
Described board triggers described timer to the first input end of described timer output high level signal and picks up counting, described timer timing zero clearing when described board is exported high level signal to the reset terminal of described timer, described timer to described alarm output signal, triggers alarm equipment alarm when its timing time reaches setting value.
9. fool proof timing and alarming device according to claim 8 is characterized in that described setting value is 500s.
10. a wafer process board is characterized in that, is provided with as the described fool proof timing and alarming of arbitrary claim device in the claim 4 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2010101945096A CN102267094A (en) | 2010-06-04 | 2010-06-04 | Fool-proof timing alarming method and device for wafer processing machine table |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010101945096A CN102267094A (en) | 2010-06-04 | 2010-06-04 | Fool-proof timing alarming method and device for wafer processing machine table |
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| CN102267094A true CN102267094A (en) | 2011-12-07 |
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| CN2010101945096A Pending CN102267094A (en) | 2010-06-04 | 2010-06-04 | Fool-proof timing alarming method and device for wafer processing machine table |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102937802A (en) * | 2012-11-02 | 2013-02-20 | 上海华力微电子有限公司 | System and method for monitoring operating state of device |
| CN112103223A (en) * | 2020-11-17 | 2020-12-18 | 晶芯成(北京)科技有限公司 | Semiconductor device and alarm method thereof |
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| CN101359610A (en) * | 2007-08-01 | 2009-02-04 | 和舰科技(苏州)有限公司 | Method for detecting considerable wafer on vertical crystal boat |
| CN201333662Y (en) * | 2009-01-18 | 2009-10-28 | 湖南宇晶机器实业有限公司 | Speed regulating device of grinder |
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| CN101164155A (en) * | 2005-04-21 | 2008-04-16 | 株式会社荏原制作所 | Wafer transfer apparatus, polishing apparatus and wafer receiving method |
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| CN101359610A (en) * | 2007-08-01 | 2009-02-04 | 和舰科技(苏州)有限公司 | Method for detecting considerable wafer on vertical crystal boat |
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| CN102937802A (en) * | 2012-11-02 | 2013-02-20 | 上海华力微电子有限公司 | System and method for monitoring operating state of device |
| CN102937802B (en) * | 2012-11-02 | 2015-05-20 | 上海华力微电子有限公司 | System and method for monitoring operating state of device |
| CN112103223A (en) * | 2020-11-17 | 2020-12-18 | 晶芯成(北京)科技有限公司 | Semiconductor device and alarm method thereof |
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Application publication date: 20111207 |