CN100573814C - The exception monitoring device and method of controlled part in a kind of microelectronics etching system - Google Patents
The exception monitoring device and method of controlled part in a kind of microelectronics etching system Download PDFInfo
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- CN100573814C CN100573814C CNB200610113335XA CN200610113335A CN100573814C CN 100573814 C CN100573814 C CN 100573814C CN B200610113335X A CNB200610113335X A CN B200610113335XA CN 200610113335 A CN200610113335 A CN 200610113335A CN 100573814 C CN100573814 C CN 100573814C
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Abstract
The exception monitoring device and method of controlled part in a kind of microelectronics etching system of the present invention, obtain the working status parameter of each controlled part, and according to the working status parameter of detected each controlled part of controlled part detecting unit, compare with the safe work state parameter of the corresponding controlled part of setting, whether working properly, then export about the unusual warning message of corresponding controlled part as undesired if differentiating described controlled part.Check corresponding controlled part according to the warning information indication attendant who dishes out in this method, thereby avoid producing bad handicraft product.Simultaneously, need the I/O channel of the controlled part of monitoring can flexible configuration, reduced the unusual erroneous judgement of microelectronics etching system controlled part and mistake to a great extent and sent out and fail to judge, and very easily investigated and prosecuted the controlled part of fault.
Description
Technical field
The present invention relates to a kind of monitoring technical field of electronic system equipment, relate in particular to the exception monitoring device and method of controlled part in a kind of microelectronics etching system.
Background technology
At present, along with the high speed development of electronic technology, people are more and more higher to the integrated level requirement of integrated circuit, and the working ability of semiconductor wafer constantly improves in this enterprise that will seek survival the product integrated circuit.It is the main method that obtains semiconductor wafer that the microelectronics etching system that utilization has a plasma device carries out etching processing.
Common microelectronics etching system mainly is made up of following subsystem as shown in Figure 1: industrial control computer 1, reaction chamber 2, vacuum system 3, air-channel system 4, temperature control system 5, wafer jacking system 6 and radio system 7.Wherein, the Control Software of industrial control computer 1 is generally the Control Software of the independent research that drives based on integrated circuit board.Need to handle a plurality of input and output amounts in the microelectronics etching control system.We adopt industrial computer that various input and output are connected together and handle.Industrial control computer 1 comprises various input and output: digital input-output card, analog input output card, CAN bus interface card, serial line interface and/or Ethernet interface
The operation principle of microelectronics etching system is under industrial control computer 1 control, vacuum system 3 satisfies the condition of reaction chamber 2 pressure stabilitys, temperature control system 5 control constant temperature, 6 pairs of wafers of wafer jacking system carry out lifting, and air-channel system 4 carries out the mass flow control of gas.Radio system 7 is carried out the setting of radio frequency, makes the gas ionization build-up of luminance, and wafer is carried out etching.
In the running of system, vacuum, temperature, reaction chamber pressure, radio frequency size etc. are all needed to monitor in real time and can not occur the wrong report of system.In system, the utilization said method has reached comparatively satisfied effect to the monitoring of various transducers.
In the microelectronics etching system, usually adopt distributed control architecture, increase the reliability of system, the controlled part that industrial computer need be controlled is a lot, the signal that need handle and data are in 1,100, and the stability of assurance system operation and technologist's safety seem extremely important.Etching system is except providing hardware interlock between the equipment, software interlocking, also should effectively monitor the signal and the data of controlled part state, when the appearance of controlled part state is unusual, should send the warning information of relevant device, indication the attendant keep in repair or exchange device more, thereby avoid producing bad handicraft product.
Summary of the invention
In view of above-mentioned existing in prior technology problem, the exception monitoring device and method that the purpose of this invention is to provide controlled part in a kind of microelectronics etching system, by for the difference of abnormality with to the detection of its occurrence frequency, avoided an alarm signal is sent out in the erroneous judgement of abnormal signal and mistake, thereby the equipment that guarantees is in and can carries out state of the art.
The objective of the invention is to be achieved through the following technical solutions:
The exception monitoring device of controlled part in a kind of microelectronics etching system comprises:
Controlled part detecting unit: obtain the working status parameter of each controlled part, and be sent to controlled part operating state judgement unit;
Controlled part operating state judgement unit: according to the working status parameter of detected each controlled part of controlled part detecting unit, compare with the safe work state parameter and the Control Parameter of the corresponding controlled part of setting, whether working properly, then export about the unusual warning message of corresponding controlled part as undesired if differentiating described controlled part.
Described controlled part detecting unit comprises:
Controlled part detection module: comprise the detecting element of being located at each controlled part place, obtain the working status parameter of each controlled part;
Data transmission module: the working status parameter data of detected each controlled part of controlled part detection module are sent to controlled part operating state judgement unit by data-interface.
Described controlled part operating state judgement unit comprises:
Data comparison module: whether the working status parameter of more detected each controlled part in the safe work state parameter and Control Parameter scope of the corresponding controlled part of setting, as not in this scope, then shows the operation irregularity of this controlled part;
Alarm module: as the operation irregularity of controlled part, then output alarm information take place.
Described controlled part operating state judgement unit also comprises:
Data setting module: safe work state parameter and the Control Parameter of setting controlled part;
And/or;
Data memory module: the safe work state parameter and the Control Parameter of the controlled part that storage is set.
The method for monitoring abnormality of controlled part in a kind of microelectronics etching system comprises:
Obtain the working status parameter of each controlled part, and according to the working status parameter of detected each controlled part of controlled part detecting unit, compare with the safe work state parameter of the corresponding controlled part of setting, whether working properly, then export about the unusual warning message of corresponding controlled part as undesired if differentiating described controlled part.
Described method comprises:
A, obtain the safe work state parameter and the Control Parameter of each controlled part of setting, generate the data item table to be monitored of each controlled part;
B, the detecting element of being located at each controlled part place obtain the relevant work state parameter of each controlled part according to data item table to be monitored;
C, according to the relevant work state parameter of each controlled part and the safe work state parameter and the Control Parameter of setting, judge whether operation irregularity of corresponding controlled part;
D, controlled part operation irregularity are as described then exported the unusual warning message of corresponding controlled part.
Described steps A comprises:
A1, set safe work state parameter area, monitoring periods or the specified data exception frequency of the needs monitoring of each controlled part;
A2, according to the safe work state parameter of the needs monitoring of each controlled part of setting, generate the data item table to be monitored of each controlled part.
Described step C comprises:
Whether the relevant work state parameter of monitoring each controlled part exceeds the safe work state parameter of setting in the monitoring periods of setting unusual number of times surpasses the specified data exception frequency of setting; Show whether operation irregularity of corresponding controlled part as surpassing.
Described method also comprises:
After system start-up, finish beginning execution in step A at all technological operation function ons.
Described method also comprises:
In the overall process of system start-up work, circulation execution in step A is to step D.
As seen from the above technical solution provided by the invention, the exception monitoring device and method of controlled part in a kind of microelectronics etching system of the present invention, obtain the working status parameter of each controlled part, and according to the working status parameter of detected each controlled part of controlled part detecting unit, compare with the safe work state parameter of the corresponding controlled part of setting, whether working properly, then export about the unusual warning message of corresponding controlled part as undesired if differentiating described controlled part.Check corresponding controlled part according to the warning information indication attendant who dishes out in this method, thereby avoid producing bad handicraft product.Simultaneously, need the I/O channel of the controlled part of monitoring can flexible configuration, reduced the unusual erroneous judgement of microelectronics etching system controlled part and mistake to a great extent and sent out and fail to judge, and very easily investigated and prosecuted the controlled part of fault.
Description of drawings
Fig. 1 is the schematic diagram of microelectronics etching system;
Fig. 2 is the structural representation of the exception monitoring device of controlled part in a kind of microelectronics etching system of the present invention;
Fig. 3 is inductively coupled plasma dress of the present invention and method interposed structure schematic diagram two.
Embodiment
The exception monitoring device of controlled part in a kind of microelectronics etching system of the present invention, its embodiment be as shown in Figure 2: comprise controlled part detecting unit and controlled part operating state judgement unit, wherein:
The controlled part detecting unit is used to obtain the working status parameter of each controlled part, and is sent to controlled part operating state judgement unit; Specifically comprise: controlled part detection module and data transmission module, wherein:
The controlled part detection module comprises the detecting element of being located at each controlled part place, adopts various transducers usually, is used to obtain the working status parameter of each controlled part;
Data transmission module is sent to controlled part operating state judgement unit by data-interface with the working status parameter data of detected each controlled part of controlled part detection module.
Controlled part operating state judgement unit is used for the working status parameter according to detected each controlled part of controlled part detecting unit, compare with the safe work state parameter and the Control Parameter of the corresponding controlled part of setting, whether working properly, then export about the unusual warning message of corresponding controlled part as undesired if differentiating described controlled part.Specifically comprise: data comparison module and alarm module, wherein:
Whether the working status parameter that data comparison module is used for more detected each controlled part in the safe work state parameter and Control Parameter scope of the corresponding controlled part of setting, as not in this scope, then shows the operation irregularity of this controlled part;
Alarm module is used for as the operation irregularity of controlled part, then output alarm information take place.
Described controlled part operating state judgement unit also comprises data setting module and/or data memory module simultaneously, wherein:
The data setting module is used to set the safe work state parameter and the Control Parameter of controlled part;
Data memory module is used to store the safe work state parameter and the Control Parameter of the controlled part of setting.
The method for monitoring abnormality of controlled part in a kind of microelectronics etching system of the present invention, its core concept is to obtain the working status parameter of each controlled part, and according to the working status parameter of detected each controlled part of controlled part detecting unit, compare with the safe work state parameter of the corresponding controlled part of setting, whether working properly, then export about the unusual warning message of corresponding controlled part as undesired if differentiating described controlled part.Be specially:
A, obtain the safe work state parameter and the Control Parameter of each controlled part of setting, generate the data item table to be monitored of each controlled part; Usually can comprise:
A1, set safe work state parameter area, monitoring periods or the specified data exception frequency of the needs monitoring of each controlled part;
A2, according to the safe work state parameter of the needs monitoring of each controlled part of setting, generate the data item table to be monitored of each controlled part.
B, the detecting element of being located at each controlled part place obtain the relevant work state parameter of each controlled part according to data item table to be monitored;
C, according to the relevant work state parameter of each controlled part and the safe work state parameter and the Control Parameter of setting, judge whether operation irregularity of corresponding controlled part; Whether the relevant work state parameter that is generally each controlled part of monitoring exceeds the safe work state parameter of setting in the monitoring periods of setting unusual number of times surpasses the specified data exception frequency of setting; Show whether operation irregularity of corresponding controlled part as surpassing.
D, controlled part operation irregularity are as described then exported the unusual warning message of corresponding controlled part.
In above-mentioned process, after system start-up, finish beginning execution in step A at all technological operation function ons.In the overall process of system start-up work, circulation execution in step A is to step D simultaneously.
As seen method of the present invention after system start-up, finishes at all technological operation function ons, starts this function at last.Read configuration data items that needs monitoring and abnormal frequency and the monitoring periods that is provided with, and generate Monitoring Data item table.Each data item in the monitoring form successively in real time, if the unusual number of times that the state value of this data item took place in a period of time is greater than the abnormal frequency that is provided with before this, this data item corresponding warning information of then dishing out is carried out respective handling.Repeat each data item in the monitoring form, move up to this function stop.
Method of the present invention process particularly comprises as shown in Figure 3:
Step 31, system start-up, all technological operation function ons finish, and start the exception monitoring function of controlled part, read configuration file, and generate the data item table to be monitored of controlled part; Configuration file comprises the safe work state parameter and the Control Parameter of each controlled part; Data item table to be monitored or to revise flexibly as required;
Step 32, judged whether to start the exception monitoring function of controlled part, in this way, execution in step 34, otherwise, execution in step 33;
Step 33, EP (end of program) are not carried out the exception monitoring of controlled part;
Step 34, detect each data item in the data item table to be monitored successively;
Whether the working status parameter of the controlled part that step 35, judgement are detected is unusual, in this way, and execution in step 36, otherwise, execution in step 37;
This step only need judge whether the working status parameter of controlled part exceeds the safe work state parameter area of setting.
Step 36, counter is added one;
Step 37, to counter O reset, be used for the processing of shielding harness erroneous judgement;
Step 38, judge counter value whether greater than the abnormal frequency value that is provided with before this, execution in step 39 in this way, otherwise, execution in step 311;
The purpose of setting abnormal frequency is the influence that prevents other signal, avoids erroneous judgement, gets rid of reliably and disturbs.
The warning message of step 39, the corresponding controlled part of output starts corresponding processing procedure; Help the attendant to find out the controlled part of distribution fault exactly.
Step 310, to counter O reset;
Step 311, judge whether data item table to be monitored checks out, in this way, execution in step 312, otherwise, execution in step 34;
Step 312, judge whether monitoring periods expires, and in this way, restarts timing, otherwise, timing continued; And execution in step 34.
Owing to adopt above technical scheme, having reduced the unusual erroneous judgement of microelectronics etching system controlled part and mistake in actual applications to a great extent sends out and to fail to judge, False Rate reduces to 0.3% by 2%, and very easily investigate and prosecute the controlled part of fault, effectively raise the maintenance efficiency of microelectronics etching system.Simultaneously, need the I/O channel of the controlled part of monitoring can flexible configuration, reduced the unusual erroneous judgement of microelectronics etching system controlled part and mistake to a great extent and sent out and fail to judge, and very easily investigated and prosecuted the controlled part of fault.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection range of claims.
Claims (9)
1, the exception monitoring device of controlled part in a kind of microelectronics etching system, it is characterized in that, comprise: the controlled part detecting unit: safe work state parameter and the Control Parameter of obtaining each controlled part of setting, generate the data item table to be monitored of each controlled part, and detect the working status parameter of each controlled part, and be sent to controlled part operating state judgement unit according to this data item table to be monitored;
Controlled part operating state judgement unit: according to the working status parameter of detected each controlled part of controlled part detecting unit, compare with the safe work state parameter and the Control Parameter of the corresponding controlled part of setting, whether working properly, then export about the unusual warning message of corresponding controlled part as undesired if differentiating described controlled part.
2, the exception monitoring device of controlled part in the microelectronics etching system according to claim 1 is characterized in that described controlled part detecting unit comprises:
Controlled part detection module: comprise the detecting element of being located at each controlled part place, obtain the working status parameter of each controlled part;
Data transmission module: the working status parameter data of detected each controlled part of controlled part detection module are sent to controlled part operating state judgement unit by data-interface.
3, the exception monitoring device of controlled part in the microelectronics etching system according to claim 1 is characterized in that, described controlled part operating state judgement unit comprises:
Data comparison module: whether the working status parameter of more detected each controlled part in the safe work state parameter and Control Parameter scope of the corresponding controlled part of setting, as not in this scope, then shows the operation irregularity of this controlled part;
Alarm module: as the operation irregularity of controlled part, then output alarm information take place.
4, the exception monitoring device of controlled part in the microelectronics etching system according to claim 3 is characterized in that, described controlled part operating state judgement unit also comprises:
Data setting module: safe work state parameter and the Control Parameter of setting controlled part;
And/or;
Data memory module: the safe work state parameter and the Control Parameter of the controlled part that storage is set.
5, the method for monitoring abnormality of controlled part in a kind of microelectronics etching system is characterized in that, comprising:
A, obtain the safe work state parameter and the Control Parameter of each controlled part of setting, generate the data item table to be monitored of each controlled part;
B, the detecting element of being located at each controlled part place obtain the relevant work state parameter of each controlled part according to data item table to be monitored;
C, according to the safe work state parameter of the relevant work state parameter of each controlled part and setting and Control Parameter relatively judges whether operation irregularity of corresponding controlled part;
D, controlled part operation irregularity are as described then exported the unusual warning message of corresponding controlled part.
6, the method for monitoring abnormality of controlled part in the microelectronics etching system according to claim 5 is characterized in that described steps A comprises:
A1, set safe work state parameter area, monitoring periods or the specified data exception frequency of the needs monitoring of each controlled part;
A2, according to the safe work state parameter of the needs monitoring of each controlled part of setting, generate the data item table to be monitored of each controlled part.
7, the method for monitoring abnormality of controlled part in the microelectronics etching system according to claim 6 is characterized in that described step C comprises:
Whether the relevant work state parameter of monitoring each controlled part exceeds the safe work state parameter of setting in the monitoring periods of setting unusual number of times surpasses the specified data exception frequency of setting; Show whether operation irregularity of corresponding controlled part as surpassing.
8, the method for monitoring abnormality of controlled part in the microelectronics etching system according to claim 5 is characterized in that described method also comprises:
After system start-up, finish beginning execution in step A at all technological operation function ons.
9, the method for monitoring abnormality of controlled part in the microelectronics etching system according to claim 5 is characterized in that described method also comprises:
In the overall process of system start-up work, circulation execution in step A is to step D.
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| US9349660B2 (en) * | 2011-12-01 | 2016-05-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit manufacturing tool condition monitoring system and method |
| CN104281141B (en) * | 2013-07-04 | 2017-07-21 | 北京北方微电子基地设备工艺研究中心有限责任公司 | A kind of control method and system of process gas interlocking |
| CN103920861B (en) * | 2014-04-30 | 2015-08-05 | 广东文灿压铸股份有限公司 | Die casting apparatus for automatically sorting |
| CN105450454B (en) * | 2015-12-03 | 2018-11-23 | 广州华多网络科技有限公司 | A kind of service monitoring alarm method and device |
| CN110767579B (en) * | 2019-10-31 | 2023-08-18 | 北京北方华创微电子装备有限公司 | Semiconductor process monitoring method and device |
| CN116547612A (en) * | 2021-09-26 | 2023-08-04 | 宁德时代新能源科技股份有限公司 | Abnormality detection method and device for production system and production line equipment |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016, building 2, block M5, No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |