CN102937802A - System and method for monitoring operating state of device - Google Patents
System and method for monitoring operating state of device Download PDFInfo
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- CN102937802A CN102937802A CN2012104324759A CN201210432475A CN102937802A CN 102937802 A CN102937802 A CN 102937802A CN 2012104324759 A CN2012104324759 A CN 2012104324759A CN 201210432475 A CN201210432475 A CN 201210432475A CN 102937802 A CN102937802 A CN 102937802A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention relates to the field of semiconductor manufacture and particularly relates to a system and a method for monitoring an operating state of a device. According to the system and the method for monitoring the operating state of the device, preset operating time and actual operating time in operation are compared, timely automatic alarm is given when the device is suspected to be abnormally halted, and information of the device which is suspected to be abnormally halted is simultaneously displayed so that an engineer can conveniently, timely and accurately check and analyze the abnormal production device, inspection efficiencies of the engineer are improved, simultaneously, waste generated during production of the device is effectively prevented, and costs of the whole production process are reduced.
Description
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to a kind of system and method for watch-dog running status.
Background technology
At present, the production equipment on the full-automatic production line of wafer factory often is round-the-clock (24 hours) running, and namely equipment is produced voluntarily, controlled, and automatically in up and down inter process transmission; In the prior art, mainly be by the computer terminal this automatic production line and equipment to be monitored, mainly be with each equipment upper respectively with manufacturing execution system (Manufacturing Execution System, be called for short MES) carry out the communication connection, to upgrade each equipment running status information among the MES; Yet, when the situations such as equipment generation deadlock, equipment can interrupt with MES between be connected, and existing MES system can in time not find this communicating interrupt and report to the police, and then cause the unusual of Product Process, during waste equipment machine, and use manpower to patrol when processing, can waste a large amount of human costs again, cause the increase of whole production technology cost.
Summary of the invention
For the problem of above-mentioned existence, the present invention has disclosed a kind of system and method for watch-dog running status, mainly is comparing of default activity duration of basis and actual job time in service, the equipment of doubtful unusual deadlock is in time carried out the technique of automatic alarm.
The objective of the invention is to be achieved through the following technical solutions:
A kind of system of watch-dog running status is applied on the automatic production line, comprises for the production equipment that chip is carried out PROCESS FOR TREATMENT, wherein, also comprises:
Monitoring modular carries out communication with described production equipment and is connected, to be used for extraction equipment information from the described production equipment;
Judge module, respectively with described automatic production line be connected detection module and carry out communication and be connected, judge the running status of described production equipment according to the described facility information that extracts, and determine whether to trigger alarm according to this running status.
The system of above-mentioned watch-dog running status wherein, also comprises the warning device that is connected with described judge module, receives described alarm and sends audible and visible alarm.
The system of above-mentioned watch-dog running status wherein, also comprises the display device that is connected with described judge module, is used for showing the information of the production equipment that triggers alarm.
The system of above-mentioned watch-dog running status wherein, is preset with the routine work time value according to the technique of carrying out in the described production equipment in the described judge module.
The system of above-mentioned watch-dog running status, wherein, whether described facility information comprises in the described production equipment has in the arbitrary batch of operation, if having, then also comprises the start time that begins at last operation batch in this production equipment.
The system of above-mentioned watch-dog running status, wherein, without in the arbitrary batch of operation time, described judge module is judged the doubtful deadlock state of described production equipment, triggers simultaneously alarm in the described production equipment; Otherwise, then calculate the time value that it carries out technique according to the start time that begins at last operation batch in the production equipment, if this time value is greater than the routine work time value of default, then described judge module is judged the doubtful deadlock state of described production equipment, triggers simultaneously alarm.
A kind of method of watch-dog running status comprises the described system of above-mentioned any one, wherein,
Extract the facility information of described production equipment;
Whether when described generation equipment is in the production state, judging has in the arbitrary batch of operation in this production equipment;
If without in the arbitrary batch of operation, then judge the doubtful deadlock state of described production equipment in this production equipment, trigger simultaneously alarm;
If have in this production equipment in the arbitrary batch of operation, then calculate the time value that it carries out technique according to the start time that begins at last operation batch in the production equipment;
If carry out the time value of technique greater than the routine work time value of default, then judge the doubtful deadlock state of described production equipment, trigger simultaneously alarm; Otherwise, judge that then described production equipment running status is normal, and continue next technique.
The method of above-mentioned watch-dog running status wherein, when also comprising above-mentioned triggering alarm, shows production equipment information by display module.
The method of above-mentioned watch-dog running status wherein, also comprises the judge module that carries out above-mentioned judgement processing step, and adopts monitoring modular to extract the facility information of described production equipment.
The system of above-mentioned watch-dog running status wherein, also comprises the warning device that is connected with described judge module, to receive described alarm and to send audible and visible alarm.
In sum, the system and method for a kind of watch-dog running status of the present invention, by comparing according to default activity duration and actual job in service time, equipment to doubtful unusual deadlock in time carries out automatic alarm, facility information that simultaneously will this doubtful deadlock shows, so that the slip-stick artist is convenient, in time, accurately unusual production equipment is checked analysis, thereby when the raising slip-stick artist patrols and examines efficient, waste when effectively having avoided the production equipment machine, and then reduced the cost of whole production technology.
Description of drawings
Fig. 1 is the structural representation of the system of watch-dog running status in the embodiment of the invention one;
Fig. 2 is the schematic flow sheet of the method for watch-dog running status in the embodiment of the invention two.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is further described:
Embodiment one:
Fig. 1 is the structural representation of the system of watch-dog running status in the embodiment of the invention one; As shown in Figure 1, the system of a kind of watch-dog running status of the present invention, on the full-automatic production line of wafer factory, comprise judge module, detection module, MES server, warning device, a plurality of display device and a plurality of production equipment, these a plurality of production equipments all carry out both-way communication with the MES server and are connected, to collect the operation of production equipment information and production control equipment; Detection module is connected with the MES server, to extract the information of production equipment, as whether the information such as arbitrary batch of operation, production equipment coding are arranged in the production equipment; Judge module is connected with detection module and MES server respectively, with the production equipment information that extracts according to detection module, judge whether to trigger alarm to warning device, when triggering alarm unusual production equipment information being sent to a plurality of display device shows, so that when the sound and light alarm information reminding, provide the information of the production equipment that triggers alarm, to make things convenient for the slip-stick artist accurately, timely production equipment is carried out analyzing and processing.
Wherein, when in the production equipment in the production equipment information without arbitrary batch of operation in the time, judge module is judged the doubtful deadlock state of this production equipment, triggers simultaneously alarm, and the information such as coding of this production equipment are shown through display module; Otherwise, then being deducted the current time start time that begins at last operation batch in the production equipment calculates the difference of carrying out the process time, if this time difference is greater than the time value of the routine work of default, then judge module is judged the doubtful deadlock state of this production equipment, trigger simultaneously alarm, and the information such as coding of this production equipment are shown through display module; If this time difference is less than or equal to the time value of the routine work of default, then judge module judges that this production equipment is normal, and notice MES server is proceeded PROCESS FOR TREATMENT.
Above-mentioned display device can utilize the display terminal on the existing production line to show, such as computer monitor etc.; Judge module and detection module can embed and be arranged on MES server or the production line computer terminal, so that operation; When the production equipment on the production line is in the state of production (RUN), each parts in the system of watch-dog running status of the present invention begin to carry out analyzing and processing, and can be set the time that process at the interval according to process requirements, carried out the detection of primary equipment running status every 10 minutes such as the settings such as technological operation time of carrying out according to production equipment.
Embodiment two:
Fig. 2 is the schematic flow sheet of the method for watch-dog running status in the embodiment of the invention two; As shown in Figure 2, the method for watch-dog running status, on the basis of embodiment one, at first, detection module extracts the facility information of each production equipment by the MES server; Secondly, judge module is analyzed contrast to the production equipment information that is in the production state, if do not include the information of arbitrary batch of operation in the production equipment information, then judge the doubtful deadlock state of this production equipment, trigger simultaneously alarm, and the information such as coding of this production equipment are shown through display module, so that production line management and control personnel process this production equipment; If include the information of arbitrary batch of operation in the production equipment information, then proceed comparative analysis.
Then, judge module deducts the current time with the start time that begins at last operation batch in this production equipment and calculates the difference of carrying out the process time, if this time difference is greater than according to predefined technique routine work time value, then judge module is judged the doubtful deadlock state of this production equipment, trigger simultaneously alarm, and the information such as coding of this production equipment are shown through display module; Otherwise then judge module judges that this production equipment is normal, and notice MES server is proceeded PROCESS FOR TREATMENT.
For example, the method of watch-dog running status in the present embodiment, under the state of RUN product, by embed the state that all devices on detection and the judge module Automatic Extraction production line is set in production line computer terminal, job information, obtain the tables of equipment under " RUN product " state, and with every equipment real time execution, job parameter is compared with default corresponding parameter, off-limits as exceeding the equipment that the time does not begin new product batches operation, can be judged as doubtful deadlock, and send audible and visible alarm by alarm device, simultaneously this facility information is waited such as coding to be presented on the display terminal of production line, so that the production line personnel process this production equipment.
In sum, owing to adopted technique scheme, the embodiment of the invention proposes a kind of method of watch-dog running status, by comparing according to default activity duration and actual job in service time, equipment to doubtful unusual deadlock in time carries out automatic alarm, facility information that simultaneously will this doubtful deadlock shows, so that the slip-stick artist is convenient, in time, accurately unusual production equipment is checked analysis, thereby when the raising slip-stick artist patrols and examines efficient, waste when effectively having avoided the production equipment machine, and then reduced the cost of whole production technology.
By explanation and accompanying drawing, provided the exemplary embodiments of the ad hoc structure of embodiment, based on the present invention's spirit, also can do other conversion.Although foregoing invention has proposed existing preferred embodiment, yet these contents are not as limitation.
For a person skilled in the art, read above-mentioned explanation after, various changes and modifications undoubtedly will be apparent.Therefore, appending claims should be regarded whole variations and the correction of containing true intention of the present invention and scope as.Any and all scope of equal value and contents all should be thought still to belong in the intent of the present invention and the scope in claims scope.
Claims (10)
1. the system of a watch-dog running status is applied on the automatic production line, comprises for the production equipment that chip is carried out PROCESS FOR TREATMENT, it is characterized in that, also comprises:
Monitoring modular carries out communication with described production equipment and is connected, to be used for extraction equipment information from the described production equipment;
Judge module, respectively with described automatic production line be connected detection module and carry out communication and be connected, judge the running status of described production equipment according to the described facility information that extracts, and determine whether to trigger alarm according to this running status.
2. the system of watch-dog running status according to claim 1 is characterized in that, also comprises the warning device that is connected with described judge module, receives described alarm and sends audible and visible alarm.
3. the system of watch-dog running status according to claim 1 is characterized in that, also comprises the display device that is connected with described judge module, is used for showing the information of the production equipment that triggers alarm.
4. the system of watch-dog running status according to claim 1 is characterized in that, is preset with the routine work time value according to the technique of carrying out in the described production equipment in the described judge module.
5. the system of watch-dog running status according to claim 4 is characterized in that, whether described facility information comprises in the described production equipment has in the arbitrary batch of operation, if having, then also comprises the start time that begins at last operation batch in this production equipment.
6. the system of watch-dog running status according to claim 5 is characterized in that, without in the arbitrary batch of operation time, described judge module is judged the doubtful deadlock state of described production equipment, triggers simultaneously alarm in the described production equipment; Otherwise, then calculate the time value that it carries out technique according to the start time that begins at last operation batch in the production equipment, if this time value is greater than the routine work time value of default, then described judge module is judged the doubtful deadlock state of described production equipment, triggers simultaneously alarm.
7. the method for a watch-dog running status comprises the described system of any one among the claim 1-6, it is characterized in that,
Extract the facility information of described production equipment;
Whether when described generation equipment is in the production state, judging has in the arbitrary batch of operation in this production equipment;
If without in the arbitrary batch of operation, then judge the doubtful deadlock state of described production equipment in this production equipment, trigger simultaneously alarm;
If have in this production equipment in the arbitrary batch of operation, then calculate the time value that it carries out technique according to the start time that begins at last operation batch in the production equipment;
If carry out the time value of technique greater than the routine work time value of default, then judge the doubtful deadlock state of described production equipment, trigger simultaneously alarm; Otherwise, judge that then described production equipment running status is normal, and continue technique.
8. the method for watch-dog running status according to claim 7 is characterized in that, when also comprising above-mentioned triggering alarm, by display module production equipment information is shown.
9. the method for watch-dog running status according to claim 7 is characterized in that, also comprises the judge module that carries out above-mentioned judgement processing step, and adopts monitoring modular to extract the facility information of described production equipment.
10. the system of watch-dog running status according to claim 7 is characterized in that, also comprises the warning device that is connected with described judge module, to receive described alarm and to send audible and visible alarm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201210432475.9A CN102937802B (en) | 2012-11-02 | 2012-11-02 | System and method for monitoring operating state of device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210432475.9A CN102937802B (en) | 2012-11-02 | 2012-11-02 | System and method for monitoring operating state of device |
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| CN102937802A true CN102937802A (en) | 2013-02-20 |
| CN102937802B CN102937802B (en) | 2015-05-20 |
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| CN103309317A (en) * | 2013-05-31 | 2013-09-18 | 上海华力微电子有限公司 | Monitoring method and monitoring system for automatic production line main equipment state |
| CN103810823A (en) * | 2014-02-27 | 2014-05-21 | 神华集团有限责任公司 | Alarm processing method and device |
| CN108196520A (en) * | 2018-01-16 | 2018-06-22 | 北京铂阳顶荣光伏科技有限公司 | A kind of device status monitoring method, module and device |
| CN109032899A (en) * | 2017-06-12 | 2018-12-18 | 西门子（中国）有限公司 | The method and apparatus of indicating equipment state |
| CN109696894A (en) * | 2018-12-30 | 2019-04-30 | 联想(北京)有限公司 | Production line state judging method and device |
| CN110047165A (en) * | 2019-02-28 | 2019-07-23 | 广州明珞汽车装备有限公司 | A kind of production control and management system and method |
| CN110763538A (en) * | 2019-10-29 | 2020-02-07 | 湖北工程学院 | Method and device for monitoring collision damage of tissues of biological tissue dehydrator and dehydrator |
| CN112734175A (en) * | 2020-12-28 | 2021-04-30 | 江苏晟能科技有限公司 | Comprehensive energy management and control system for industrial enterprise |
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| CN110763538A (en) * | 2019-10-29 | 2020-02-07 | 湖北工程学院 | Method and device for monitoring collision damage of tissues of biological tissue dehydrator and dehydrator |
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