CN102937802B - System and method for monitoring operating state of device - Google Patents
System and method for monitoring operating state of device Download PDFInfo
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- CN102937802B CN102937802B CN201210432475.9A CN201210432475A CN102937802B CN 102937802 B CN102937802 B CN 102937802B CN 201210432475 A CN201210432475 A CN 201210432475A CN 102937802 B CN102937802 B CN 102937802B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention relates to the field of semiconductor manufacture and particularly relates to a system and a method for monitoring an operating state of a device. According to the system and the method for monitoring the operating state of the device, preset operating time and actual operating time in operation are compared, timely automatic alarm is given when the device is suspected to be abnormally halted, and information of the device which is suspected to be abnormally halted is simultaneously displayed so that an engineer can conveniently, timely and accurately check and analyze the abnormal production device, inspection efficiencies of the engineer are improved, simultaneously, waste generated during production of the device is effectively prevented, and costs of the whole production process are reduced.
Description
Technical field
The present invention relates to field of semiconductor manufacture, particularly relate to a kind of system and method for watch-dog running status.
Background technology
At present, the production equipment on the full-automatic production line of wafer factory is often round-the-clock (24 hours) running, and namely equipment carries out producing, controlling voluntarily, and automatically in upper and lower inter process transmission; In prior art, mainly by computer terminal, this automatic production line and equipment are monitored, mainly by each equipment upper respectively with manufacturing execution system (Manufacturing Execution System, be called for short MES) carry out communication connection, to upgrade each equipment running status information in MES; But, when there is the situations such as deadlock when equipment, equipment can interrupt the connection between MES, and existing MES system can not this communicating interrupt of Timeliness coverage reporting to the police, and then cause the exception of Product Process, during waste equipment machine, and when using manpower to carry out inspection process, a large amount of human costs can be wasted again, cause the increase of whole production technology cost.
Summary of the invention
For above-mentioned Problems existing, present invention is disclosed a kind of system and method for watch-dog running status, mainly according to the comparison of the activity duration of presetting with the actual job time in operation, the doubtful abnormal equipment crashed is carried out in time to the technique of automatic alarm.
The object of the invention is to be achieved through the following technical solutions:
A system for watch-dog running status, is applied on automatic production line, comprises the production equipment for carrying out PROCESS FOR TREATMENT to chip, wherein, also comprises:
Monitoring modular, carries out communication with described production equipment and is connected, for from extraction equipment information on described production equipment;
Judge module, carries out communication with described automatic production line and described detection module respectively and is connected, and judges the running status of described production equipment according to the described facility information extracted, and determines whether alert trigger according to this running status.
The system of above-mentioned watch-dog running status, wherein, also comprises the warning device be connected with described judge module, receives described alarm and send audible and visible alarm.
The system of above-mentioned watch-dog running status, wherein, also comprises the display device be connected with described judge module, for showing the information of the production equipment of alert trigger.
The system of above-mentioned watch-dog running status, wherein, is preset with routine work time value according to the technique of carrying out in described production equipment in described judge module.
The system of above-mentioned watch-dog running status, wherein, whether described facility information comprises in described production equipment has in arbitrary lots, if having, then also comprises in this production equipment the start time finally starting operation batch.
The system of above-mentioned watch-dog running status, wherein, in described production equipment without in arbitrary lots time, described judge module judges the doubtful deadlock state of described production equipment, simultaneously alert trigger; Otherwise, then calculate according to the start time finally starting operation batch in production equipment the time value that it carries out technique, if this time value is greater than the routine work time value of default, then described judge module judges the doubtful deadlock state of described production equipment, simultaneously alert trigger.
A method for watch-dog running status, comprises the system described in above-mentioned any one, wherein,
Extract the facility information of described production equipment;
When described generation equipment is in production state, judge whether have in arbitrary lots in this production equipment;
If without in arbitrary lots in this production equipment, then judge the doubtful deadlock state of described production equipment, simultaneously alert trigger;
If have in this production equipment in arbitrary lots, then calculate according to the start time finally starting operation batch in production equipment the time value that it carries out technique;
If the time value of carrying out technique is greater than the routine work time value of default, then judge the doubtful deadlock state of described production equipment, simultaneously alert trigger; Otherwise, then judge that described production equipment running status is normal, and continue next technique.
The method of above-mentioned watch-dog running status, wherein, while also comprising above-mentioned alert trigger, by display module by production equipment information displaying.
The method of above-mentioned watch-dog running status, wherein, also comprises the judge module carrying out above-mentioned judgement processing step, and adopts monitoring modular to extract the facility information of described production equipment.
The system of above-mentioned watch-dog running status, wherein, also comprises the warning device be connected with described judge module, to receive described alarm and to send audible and visible alarm.
In sum, the system and method for a kind of watch-dog running status of the present invention, by the comparison according to the actual job time in the activity duration of presetting and operation, in time automatic alarm is carried out to the doubtful abnormal equipment crashed, the facility information of this doubtful deadlock is shown simultaneously, so that slip-stick artist facilitates, carries out Inspection and analysis to the production equipment of exception in time, accurately, thus while raising slip-stick artist patrols and examines efficiency, effectively avoid waste during production equipment machine, and then reduce the cost of whole production technology.
Accompanying drawing explanation
Fig. 1 is the structural representation of the system of watch-dog running status in the embodiment of the present invention one;
Fig. 2 is the schematic flow sheet of the method for watch-dog running status in the embodiment of the present invention two.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is further described:
Embodiment one:
Fig. 1 is the structural representation of the system of watch-dog running status in the embodiment of the present invention one; As shown in Figure 1, the system of a kind of watch-dog running status of the present invention, on the full-automatic production line of wafer factory, comprise judge module, detection module, MES server, warning device, multiple display device and multiple production equipment, the plurality of production equipment all carries out both-way communication with MES server and is connected, to collect production equipment information and the operation of production control equipment; Detection module is connected with MES server, to extract the information of production equipment, as whether there being the information such as arbitrary lots, production equipment coding in production equipment; Judge module is connected with detection module and MES server respectively, with the production equipment information extracted according to detection module, judge whether that alert trigger is to warning device, while alert trigger, abnormal production equipment information is sent to multiple display device to show, so that when sound and light alarm information reminding, the information of the production equipment of alert trigger is provided, accurately, timely analyzing and processing is carried out to production equipment to facilitate slip-stick artist.
Wherein, when in the production equipment in production equipment information without arbitrary lots in time, judge module judges the doubtful deadlock state of this production equipment, simultaneously alert trigger, and the information such as the coding of this production equipment is shown through display module; Otherwise, then the start time finally starting operation batch in production equipment is deducted current time to carry out calculating the difference of carrying out the process time, if this time difference is greater than the time value of the routine work of default, then judge module judges the doubtful deadlock state of this production equipment, alert trigger simultaneously, and the information such as the coding of this production equipment are shown through display module; If this time difference is less than or equal to the time value of the routine work of default, then judge module judges that this production equipment is normal, and notifies that MES server proceeds PROCESS FOR TREATMENT.
Above-mentioned display device can utilize the display terminal on existing production line to show, as computer monitor etc.; Judge module and detection module can embed and be arranged in MES server or production line computer terminal, so that operation; When the production equipment on production line is in the state of production (RUN), each parts in the system of watch-dog running status of the present invention start to carry out analyzing and processing, and the time of interval process can be set according to process requirements, the processing operation time etc. as carried out according to production equipment arranges the detection carrying out primary equipment running status every 10 minutes.
Embodiment two:
Fig. 2 is the schematic flow sheet of the method for watch-dog running status in the embodiment of the present invention two; As shown in Figure 2, the method for watch-dog running status, on the basis of embodiment one, first, detection module extracts the facility information of each production equipment by MES server; Secondly, judge module carries out analysis contrast to the production equipment information being in production state, if do not include the information of arbitrary lots in production equipment information, then judge the doubtful deadlock state of this production equipment, alert trigger simultaneously, and the information such as the coding of this production equipment are shown through display module, so that production line management and control personnel process this production equipment; If include the information of arbitrary lots in production equipment information, then proceed comparative analysis.
Then, the start time finally starting operation batch in this production equipment is deducted current time by judge module carries out calculating the difference of carrying out the process time, if this time difference is greater than the technique routine work time value according to presetting, then judge module judges the doubtful deadlock state of this production equipment, alert trigger simultaneously, and the information such as the coding of this production equipment are shown through display module; Otherwise then judge module judges that this production equipment is normal, and notifies that MES server proceeds PROCESS FOR TREATMENT.
Such as, the method of watch-dog running status in the present embodiment, under the state of RUN product, the state that all devices on detection and judge module Automatic Extraction production line is set is embedded by computer terminal on a production line, job information, obtain the tables of equipment under " RUN product " state, and by every platform equipment real time execution, job parameter is compared with the corresponding parameter preset, off-limits as exceeded the equipment that the time does not start new product batches operation, doubtful deadlock can be judged as, and send audible and visible alarm by alarm device, simultaneously by this facility information as coding etc. be presented on the display terminal of production line, so that production line personnel process this production equipment.
In sum, owing to have employed technique scheme, the embodiment of the present invention proposes a kind of method of watch-dog running status, by the comparison according to the actual job time in the activity duration of presetting and operation, in time automatic alarm is carried out to the doubtful abnormal equipment crashed, the facility information of this doubtful deadlock is shown simultaneously, so that slip-stick artist is convenient, in time, accurately Inspection and analysis is carried out to the production equipment of exception, thus while raising slip-stick artist patrols and examines efficiency, effectively avoid waste during production equipment machine, and then reduce the cost of whole production technology.
By illustrating and accompanying drawing, giving the exemplary embodiments of the ad hoc structure of embodiment, based on the present invention's spirit, also can do other conversion.Although foregoing invention proposes existing preferred embodiment, but these contents are not as limitation.
For a person skilled in the art, after reading above-mentioned explanation, various changes and modifications undoubtedly will be apparent.Therefore, appending claims should regard the whole change and correction of containing true intention of the present invention and scope as.In Claims scope, the scope of any and all equivalences and content, all should think and still belong to the intent and scope of the invention.
Claims (9)
1. a system for watch-dog running status, is applied on automatic production line, comprises the production equipment for carrying out PROCESS FOR TREATMENT to chip, it is characterized in that, also comprise:
Monitoring modular, carries out communication with described production equipment and is connected, for from extraction equipment information on described production equipment;
Judge module, carries out communication with described automatic production line and described monitoring modular respectively and is connected, and judges the running status of described production equipment according to the described facility information extracted, and determines whether alert trigger according to this running status;
Wherein, in described production equipment without in arbitrary lots time, described judge module judges the doubtful deadlock state of described production equipment, simultaneously alert trigger; Otherwise, then calculate according to the start time finally starting operation batch in production equipment the time value that it carries out technique, if this time value is greater than the routine work time value of default, then described judge module judges the doubtful deadlock state of described production equipment, simultaneously alert trigger.
2. the system of watch-dog running status according to claim 1, is characterized in that, also comprises the warning device be connected with described judge module, receives described alarm and send audible and visible alarm.
3. the system of watch-dog running status according to claim 1, is characterized in that, also comprises the display device be connected with described judge module, for showing the information of the production equipment of alert trigger.
4. the system of watch-dog running status according to claim 1, is characterized in that, is preset with routine work time value in described judge module according to the technique of carrying out in described production equipment.
5. the system of watch-dog running status according to claim 4, is characterized in that, whether described facility information comprises in described production equipment has in arbitrary lots, if having, then also comprises in this production equipment the start time finally starting operation batch.
6. a method for watch-dog running status, comprises the system in claim 1-5 described in any one, it is characterized in that,
Extract the facility information of described production equipment;
When described production equipment is in production state, judge whether have in arbitrary lots in this production equipment;
If without in arbitrary lots in this production equipment, then judge the doubtful deadlock state of described production equipment, simultaneously alert trigger;
If have in this production equipment in arbitrary lots, then calculate according to the start time finally starting operation batch in production equipment the time value that it carries out technique;
If the time value of carrying out technique is greater than the routine work time value of default, then judge the doubtful deadlock state of described production equipment, simultaneously alert trigger; Otherwise, then judge that described production equipment running status is normal, and continue technique.
7. the method for watch-dog running status according to claim 6, is characterized in that, while also comprising above-mentioned alert trigger, by display module by production equipment information displaying.
8. the method for watch-dog running status according to claim 6, is characterized in that, also comprises the judge module carrying out judging processing step, and adopts monitoring modular to extract the facility information of described production equipment.
9. the method for watch-dog running status according to claim 8, is characterized in that, also comprises the warning device be connected with described judge module, to receive described alarm and to send audible and visible alarm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210432475.9A CN102937802B (en) | 2012-11-02 | 2012-11-02 | System and method for monitoring operating state of device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210432475.9A CN102937802B (en) | 2012-11-02 | 2012-11-02 | System and method for monitoring operating state of device |
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| CN102937802A CN102937802A (en) | 2013-02-20 |
| CN102937802B true CN102937802B (en) | 2015-05-20 |
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| CN201210432475.9A Active CN102937802B (en) | 2012-11-02 | 2012-11-02 | System and method for monitoring operating state of device |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103309317B (en) * | 2013-05-31 | 2015-09-09 | 上海华力微电子有限公司 | The method for supervising of automatic production line master status and supervisory system |
| CN103810823B (en) * | 2014-02-27 | 2016-04-20 | 神华集团有限责任公司 | Alarm processing method and device |
| CN109032899A (en) * | 2017-06-12 | 2018-12-18 | 西门子（中国）有限公司 | The method and apparatus of indicating equipment state |
| CN108196520A (en) * | 2018-01-16 | 2018-06-22 | 北京铂阳顶荣光伏科技有限公司 | A kind of device status monitoring method, module and device |
| CN109696894B (en) * | 2018-12-30 | 2020-10-27 | 联想(北京)有限公司 | Production line state judgment method and device |
| CN110047165A (en) * | 2019-02-28 | 2019-07-23 | 广州明珞汽车装备有限公司 | A kind of production control and management system and method |
| CN110763538A (en) * | 2019-10-29 | 2020-02-07 | 湖北工程学院 | Method and device for monitoring collision damage of tissues of biological tissue dehydrator and dehydrator |
| CN112734175B (en) * | 2020-12-28 | 2023-09-26 | 江苏晟能科技有限公司 | Comprehensive energy management and control system for industrial enterprises |
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