JP4502414B2 - Production management information output device and production management information output method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention relates to a production management information output device.And production management information output methodMore specifically, a production management information output device that outputs various information for performing semiconductor production managementAnd production management information output methodAbout.
[0002]
[Prior art]
In recent years, the technology of semiconductor products has advanced very rapidly, and the cycle of technological innovation of semiconductor products has become very short compared to other electrical products. For this reason, regarding the production of semiconductor products, it has been very strongly demanded to shorten the production turnaround time (hereinafter referred to as production TAT).
[0003]
In the current production progress management of semiconductor products, the same processing unit in the production facility is grouped as a lot, and the production TAT for each lot is grasped based on the processing start time and processing end time for each lot. The amount of unprocessed products in each process and the actual processing volume are grasped.
[0004]
[Problems to be solved by the invention]
However, since there are various factors that influence the production TAT of the semiconductor product for each process, it is necessary to grasp the production TAT for each lot just like the production progress management of the semiconductor product. It was difficult to accurately grasp the factors. In addition, in order to shorten the production TAT without reducing the shipment amount of semiconductor products, it has been difficult to obtain a solution of how much production TAT it is appropriate to produce semiconductor products.
[0005]
  The present invention has been made to solve the above-described problems, and is capable of outputting information useful for shortening production TAT without reducing the shipment amount of semiconductor products. apparatusAnd production management information output methodThe purpose is to provide.
[0009]
  In order to achieve the above object, the production management information output device according to claim 1 inputs the product quantity to be processed and the product quantity to be processed for each process of semiconductor manufacturing, and the final shipment process. , Input means for inputting the quantity to be shipped, and based on the quantity input by the input means,In-process inventoryInformation and shipping volume informationcollectionDoInformation gatheringReceiving operation status information from the means and equipment used in each process to calculate equipment downtimeCalculationA detecting means for detecting the stoppage of the equipment by receiving information on the operating status from the equipment used in each process, and a stoppage of the equipment is detected by the detecting means. Or when it is determined that there is no malfunction,Information gatheringBy meanscollectionAbout the process of stopped and stopped equipmentIn-process inventoryBased on the information, a determination means for determining whether or not there is an unprocessed inventory of the product to be processed by the stopped facility, and if there is an unprocessed inventory, the waiting time for the facility non-operation time If there is no unprocessed inventory, a setting means to set the facility non-operation time as the non-operation time due to waiting for unprocessed inventory, and a non-operation time due to waiting for workers And a third output means for displaying on the display terminal information on equipment downtime within a predetermined period classified as downtime due to inventory waiting for processing.
[0010]
  A production management information output device according to claim 2 is the production management information output device according to claim 1, whereinIn-process inventoryIn excess determination means for determining whether or not the stock allowance for each process set in advance is exceeded, and at least one processIn-process inventoryIf the stock exceeds the stock allowance,In-process inventoryAnd a notification means for notifying that the allowable stock amount has been exceeded.
[0011]
  The production management information output device according to claim 3 is the production management information output device according to claim 2,In-process inventoryWithin the predetermined period based on the input means for inputting the excess factor information, the storage means for storing the input excess factor information, and the stored excess factor information And a fourth output means for displaying on the display terminal a graph representing the number of excess inventory occurrences for each excess factor.
  Further, in the production management information output method according to claim 4, the quantity of products to be processed and the quantity of products to be processed are input for each process of semiconductor manufacturing, and the quantity to be shipped for the last shipping process is Entered and based on the entered quantity,In-process inventoryInformation and shipping volume informationcollectionAnd receiving the operation status information from the equipment used in each process, calculating the equipment downtime, receiving the operation status information from the equipment used in each process, detecting the stop of the equipment, When a stop of the equipment is detected and it is determined that the stop of the equipment is not a failure or malfunction of the equipment,collectionAbout the process of stopped and stopped equipmentIn-process inventoryBased on the information, it is determined whether or not there is an unprocessed inventory of the product to be processed by the stopped facility. If there is an unprocessed inventory, the facility non-operation time at that point If there is no unprocessed inventory, the facility downtime at that time is set as the non-operational waiting time for unprocessed inventory, and the non-operational time due to waiting for workers and the Information on equipment downtime within a predetermined period classified as operating time is displayed on a display terminal.
  A production management information output method according to claim 5 is the production management information output method according to claim 4, whereinIn-process inventoryDetermines whether or not the preset stock allowance for each process has been exceeded, and at least one processIn-process inventoryIf the stock exceeds the stock allowance,In-process inventoryIs notified that the allowable stock amount has been exceeded.
  The production management information output method according to claim 6 is the production management information output method according to claim 5,In-process inventoryExcess factor information is input when the stock capacity exceeds the stock allowance, the input excess factor information is stored, and based on the stored excess factor information, the excess inventory for each excess factor within a predetermined period A graph representing the number of occurrences is displayed on a display terminal.
[0013]
FIG. 4 shows a graph related to the molding process, but a semiconductor product production manager looks at a graph in which the shipment amount against such (incoming amount + inventory amount) is plotted, and determines (incoming amount + inventory amount). For example, as shown in FIG. 4, a target shipment amount S1 is set in the vicinity where the shipment amount reaches a peak as shown in FIG. It is possible to narrow down the arrival amount + inventory amount (for example, (incoming amount + inventory amount) can be set to I1).
[0014]
In this way, the graph plotting the shipment amount with respect to (arrival amount + inventory amount) in each process output by the first output means is the production turnaround time (production TAT) without reducing the shipment amount of the semiconductor product. This is useful information for shortening. That is, according to the first aspect of the invention, it is possible to output information useful for shortening the production TAT without reducing the shipment amount of the semiconductor product.
[0022]
  In the production management information output device according to claim 1, the input means inputs the product quantity to be processed and the product quantity to be processed for each process of semiconductor manufacturing, and the final shipment process is shipped. Quantity is entered. Then, the first calculation means, based on the quantity input by the input means,In-process inventoryInformation and shipping quantity information. CalculationThe output means receives information on the operation status from the equipment used in each process, and calculates equipment downtime. And a detection means receives the information of an operating condition from the equipment used at each process, and detects the stop of an equipment. When the determination unit detects that the facility stop is detected by the detection unit and it is determined that the facility stop is not a failure or malfunction of the facility,Information gatheringBy meanscollectionAbout the process of stopped and stopped equipmentIn-process inventoryBased on the information, it is determined whether there is an unprocessed inventory of products to be processed by the stopped facility. Here, if there is unprocessed stock, the setting means sets the equipment downtime at that time as the downtime due to waiting for the worker, and if there is no unprocessed stock, the equipment downtime at that time Is set as the non-operational waiting time due to inventory waiting.
[0023]
  And second3The output means includes information on facility downtime within a predetermined period (illustrated in FIG. 11) classified into a downtime due to waiting for workers and a downtime due to unprocessed inventory waiting.Display on the display terminalThe
[0024]
As a result, the non-working time and unprocessed inventory due to worker waits without waiting for the worker to input the non-working factor (whether the work is waiting or unprocessed stock). It is possible to obtain information on equipment downtime within a predetermined period classified as downtime due to waiting. With this information, if the ratio of downtime due to waiting for workers is high, for example, the number of workers placed on the line is increased, and if the ratio of downtime due to unprocessed inventory is high, for example, logistics control It is possible to take an appropriate and prompt action such as improving the above.
[0025]
  Next, in the production management information output device according to claim 2, the excess determination means is provided in each step.In-process inventoryIt is determined whether or not the stock allowance for each process set in advance has been exceeded. Where at least one stepIn-process inventoryIf the inventory exceeds the stock allowance, the notification meansIn-process inventoryNotifies that the stock allowance has been exceeded.
[0026]
  As a result, in each processIn-process inventoryIf the excess is detected, the production manager can promptlyIn-process inventoryCan be recognized.
[0027]
  In the production management information output device according to claim 3, the production managerIn-process inventoryWhen the excess factor information is input by the input means when the inventory allowable amount is exceeded, the input excess factor information is stored in the storage means. Then, the fourth output means is a graph (illustrated in FIG. 14) representing the number of excess inventory occurrences for each excess factor within a predetermined period (one week, one month, etc.) based on the stored excess factor information. ) Is displayed on the display terminal.
[0028]
The production manager can easily recognize an excess factor having a large number of excess inventory by looking at a graph showing the excess inventory occurrence number for each excess factor. Along with this, for example, it is possible to determine the priority order in descending order of the number of occurrences of excess inventory, and deal with eliminating excess factors in descending order of priority, effectively eliminating excess factors and reducing production TAT. be able to.
[0030]
DETAILED DESCRIPTION OF THE INVENTION
  [FirstReference example]
  Below, using the drawingsThe second1Reference exampleWill be explained.
[0031]
  As shown in FIG.Reference exampleThe production progress management system 10 includes a production progress management host 12 as a host computer of the system, a storage device 16 for storing production progress management data, various graphs and warning messages created based on the production progress management data, and the like. And a data input terminal 14 connected to the production progress management host 12 via a communication line or the like and provided for each semiconductor manufacturing process.
[0032]
FIG. 2 shows input information and output information of the production progress management system. As shown in FIG. 2, when a product is first introduced into the production line, the operator inputs the product name, lot number, product quantity, and processing flow from the data input terminal 14 to the production progress management system 10 as input notification information. Information such as a delivery date is input, and the information is registered as management lot information in the production progress management system 10.
[0033]
Each lot passes through the process, at the start of the process of each process, information such as the lot number, product quantity, processing equipment, etc. to start processing, information at the end of the process of each process, such as lot number, product quantity, etc. Are respectively input.
[0034]
In the final shipping process, information such as a lot number to be shipped, a final good product quantity, and a shipping destination is input as shipping notification information.
[0035]
The time information is automatically set by the production progress management system 10 using a calendar function and a clock function provided in the production progress management host 12.
[0036]
  In the production progress management system 10, based on the information input as described above, as the information indicating the status of the production line, the actual processing amount of each process, the actual processing amount of each facility, and the in-process inventory amount of each process ( = (Amount received + amount in stock))collectionAndcollectionEach numerical value set is compared with each preset planned amount. For each lot, the production TAT in each process and the total production TAT from input to shipment are calculated. Among these, the production TAT from the input to the shipment is displayed on the data display terminal 18 as, for example, a histogram shown in FIG.
[0037]
  The production progress management system 10 according to the present embodiment has a predetermined period (for example, one day) in each process.In-process inventoryShipment amount againstcollectionAnd thecollectionA graph for each process in which the results are plotted is displayed on the data display terminal 18.
[0038]
  FIG. 4 illustrates a graph relating to the molding process. Semiconductor product production managers like thisIn-process inventoryLook at the graph plotting the shipment volume againstIn-process inventoryIt is possible to detect where the shipping amount reaches a peak even if the value is increased. For example, as shown in FIG. 4, a target shipping amount S1 is set in the vicinity where the shipping amount reaches a peak, and the target shipping amount S1 is obtained.In-process inventoryCan be squeezed. For example,In-process inventoryCan be set to I1.
  In addition, although the above analysis may be performed about all the processes, you may perform only about the important processes in a production line.
[0039]
  As described above, in each process provided from the production progress management system 10 of this embodiment.In-process inventoryThe semiconductor product production manager can obtain useful information for shortening the production TAT without reducing the shipment amount of the semiconductor product, by using the graph plotting the shipment amount against the above.
[0040]
  [SecondReference example]
  nextThe second2Reference exampleWill be explained.
[0041]
  BookReference exampleThen, as shown in FIG. 7, based on the production progress management system 10 described above, the operation rate management system 20 for managing the operation rates of various facilities, the information on the production progress management system 10 and the information on the operation rate management system 20. A TAT management system 40 that manages production TAT is connected via a network 46. Connected to the TAT management system 40 are a storage device 44 that stores TAT management data and a data display terminal 42 that displays various graphs and the like related to TAT management.
[0042]
As shown in FIG. 5, the operating rate management system 20 includes a facility operating rate totaling server 22, a storage device 26 storing data related to the operating rate of equipment, and data for displaying various graphs related to operating rate management. The operating status information is received from the display terminal 24 and the equipment 34 of each process, the operating time information of the equipment 34 is calculated, and the operating time information etc. is transmitted to the equipment operating rate totaling server 22 via the repeater 30 and the network 28. And an equipment information receiving device 32 for each process.
[0043]
Among these, the facility information receiving device 32 is configured by a personal computer, and is configured so that an operator can input the cause of malfunction of the facility 34 from the keyboard. In the facility information receiving device 32, the processing performance time of the facility 34, the failure time of the facility 34, and the failure factor are collected.
[0044]
In addition, in the facility information receiving device 32, information such as setup change that cannot be received from the facility 34 is input by the operator as a cause of the malfunction of the facility 34. As a result, non-working factors are classified, including setup changes.
[0045]
Further, at the start and end of processing in the facility 34, product information and quantity are input from the keyboard of the facility information receiving device 32 by the operator, and the input information is transmitted to the facility operation rate totaling server 22. Then, the equipment operation rate totaling server 22 collects information on the operation time, operation rate, non-operation time, work record, and processing history of the equipment 34.
[0046]
As described above, as shown in FIG. 6, product information and quantity information are input to the operation rate management system 20 at the start of processing and at the end of processing in the facility 34, and the cause of non-operation when the facility stops is directly from the facility 34. Manually or by an operator. On the other hand, the operating rate management system 20 outputs information on the operating time, operating rate, downtime, downtime factor, work record, and processing history of the facility 34.
[0047]
  The TAT management system 40 (FIG. 7) of the present embodiment is based on the information of the production progress management system 10 and the information of the above-mentioned operation rate management system 20 in each process.In-process inventoryThe amount of shipment information is calculated for each process, and the operation information for each facility collected aboveIn-process inventoryThe information about the equipment downtime is calculated. Also, in each process from the collected process start time information and process end time informationIn-process inventoryThe average production TAT information for is calculated. The TAT management system 40In-process inventoryA graph in which three types of data, that is, the shipment amount, equipment downtime, and average production TAT are plotted, is displayed on the data display terminal 42 for each process.
[0048]
  In FIG. 8 (A)In-process inventoryFigure 8 (B) shows a graph of shipment volume againstIn-process inventoryThe graph of equipment downtime forIn-process inventoryThe graph of the average production TAT with respect to each is illustrated.
[0049]
  From the graph in Fig. 8 (A), the production manager of semiconductor productsIn-process inventoryFrom the graph in Fig. 8 (B), it detects where the shipment amount reaches a peak even if the number is increased.In-process inventoryFrom the graph in Fig. 8 (C), detect where the equipment downtime starts to increaseIn-process inventoryIt is possible to detect where the average production TAT starts to increase.
[0050]
  In this way, the production manager is in a range where the equipment downtime and the average production TAT are at a low level and the shipment amount can be secured to some extent,In-process inventoryCan be set. For example,In-process inventoryCan be set to I2.
  As described above, according to the second embodiment, it is possible to appropriately reduce the average production TAT while securing a shipment amount of a certain level or more while keeping the facility downtime low.In-process inventoryCan be set.
[0051]
  [ThirdReference example]
  nextThe second3Reference exampleWill be explained.
[0052]
  BookReference exampleThen, another way of collecting information is performed in the TAT management system 40 of FIG.
[0053]
The TAT management system 40 obtains the production TAT information in each process from the processing start time information and the processing end time information from the production progress management system 10, and the operation information for each equipment from the operation rate management system 20 (in the equipment Information on the actual work time in each process is obtained from the time during which processing related to product production is performed).
[0054]
Then, the TAT management system 40 obtains the in-process no work time in each process by subtracting the in-process actual work time from the production TAT in each process, and the process end time information of one process and the process of the next process From the start time information, the inter-product product transfer time between these two steps is obtained.
[0055]
Further, the TAT management system 40 displays each information of the in-process actual work time, the in-process no work time, and the inter-process product movement time in each process on the data display terminal 42 for each process. Here, for example, a bar graph for each process in which the unit of the vertical axis is time as shown in FIG. 9 may be displayed, or each process in which the unit of the vertical axis is a ratio (%) as shown in FIG. Each bar graph may be displayed.
[0056]
The production manager of the semiconductor product determines where there is an obstacle to the production capacity from the information on the actual work time in the process, the in-process non-work time, and the inter-process product movement time in each displayed process (for example, between the processes) It is easy to determine whether it is in the physical distribution or in the equipment in the process. That is, according to the present embodiment, it is possible to obtain useful information for determining where the production capacity hindrance is present.
[0057]
  [No.1Embodiment]
  Next, the claim1, 4Corresponding to the described invention1An embodiment will be described.
[0058]
Also in this embodiment, as shown in FIG. 7, the production progress management system 10 and the operation rate management system 20 are connected via a network 46. With such a configuration, the operation rate management system 20 waits for product processing based on the information on the operation of the equipment 34 managed by itself and the information on the unprocessed inventory amount about each equipment obtained from the production progress management system 10. The time is automatically classified into non-working time due to waiting for workers (human waiting time) and non-working time due to unprocessed stock waiting (material waiting time), and information on the classified processing waiting time is output.
[0059]
Hereinafter, the processing routine executed by the facility operation rate totaling server 22 of the operation rate management system 20 will be described with reference to FIG. When the facility operation rate totaling server 22 detects that one of the facilities 34 is stopped, the processing routine of FIG. 12 is started.
[0060]
In step 102 of FIG. 12, the content of the stop factor signal from the facility 34 is checked, and in the next step 104, it is determined whether or not the content of the stop factor signal is a failure or malfunction of the facility 34. Here, if the content of the stop factor signal is a failure or malfunction of the equipment 34, the process proceeds to step 106, and the corresponding stop factor is set based on the content of the stop factor signal.
[0061]
On the other hand, if the content of the stop factor signal is not a malfunction or failure of the equipment 34 in step 104, the process proceeds to step 108, and the production progress management system 10 is inquired about the unprocessed inventory amount of the equipment 34.
[0062]
In response to this inquiry, the production progress management system 10 returns information on the unprocessed inventory amount of the equipment 34 to the operation rate management system 20.
[0063]
When a response from the production progress management system 10 is received in step 110, the process proceeds to step 112, and it is determined whether or not there is an unprocessed stock based on the response content (the unprocessed inventory amount of the corresponding equipment 34).
[0064]
Here, if there is an unprocessed inventory of the corresponding equipment 34 (if the unprocessed inventory amount is not 0), it can be determined that the absence of the worker is the cause of the stop of the corresponding equipment 34. Set the waiting state as On the other hand, if there is no unprocessed inventory of the corresponding equipment 34 at step 112 (if the unprocessed inventory amount is 0), it can be determined that there is no unprocessed inventory as a cause of stoppage of the corresponding equipment 34. Proceed and set the object waiting state as a stop factor.
[0065]
By the processing routine as described above, the waiting time of the corresponding equipment 34 can be reduced to the waiting time and the waiting time for the object without waiting for the operator to input the waiting factor (whether waiting for the person or waiting for the object). Can be automatically and accurately classified into non-operating time.
[0066]
The operation rate management system 20 uses the data display terminal 24 to provide information on the facility non-operation time within a predetermined period (illustrated in FIG. 11) classified into non-operation time due to waiting for people and non-operation time due to waiting for things. To display.
[0067]
Thereby, the administrator of the operation rate management system can easily confirm the ratio between the non-operation time due to waiting for a person and the non-operation time due to waiting for an object by looking at the information displayed on the data display terminal 24. . And, by this information, if the ratio of downtime due to waiting for workers is high, for example, increase the number of workers placed on the line, and if the ratio of downtime due to unprocessed inventory is high, for example, It becomes possible to take measures such as improving logistics control accurately and quickly.
[0068]
  [Second Embodiment]
  Next, a second embodiment corresponding to the invention described in claims 2, 3, 5, and 6 will be described. In the second embodiment, the production progress management system 10 has a daily basis as shown in FIG.In-process inventoryAnd a graph showing the shipping amount and for a predetermined period (1 month)In-process inventoryA graph representing the average value of the above and the average value of the shipment amount is created for each process and displayed on the data display terminal 18.
[0069]
The production progress manager confirms the above-mentioned two types of graphs, determines the allowable stock amount for each process, and inputs it from the keyboard of the data display terminal 18.
[0070]
The production progress management system 10 displays a warning message on the data display terminal 18 when the stock amount of each process exceeds the stock amount allowable value of each process input in this way or set in advance. Note that the data display terminal 18 may be provided with an alarm sound generating function to display a warning message and generate an alarm sound when the stock quantity is exceeded.
[0071]
  As a result, in each processIn-process inventoryCan be monitored for excess inventory allowances, and if an excess is detected, production managers can quicklyIn-process inventoryCan be recognized.
[0072]
  The production progress manager who sees a warning message or hears an alarm when the stock amount exceeds the allowable stock amount value of the process and recognizes the excess stock amount and investigates the cause of the excess. Excess factors include, for example, the amount that can be processed in the relevant processIn-process inventoryToo many, equipment failure, absence of workers, etc.
[0073]
Then, the production progress manager inputs the excess factor as the investigation result to the production progress management system 10 from the keyboard of the data display terminal 18. At this time, if the expected excess factor is coded and prepared in advance, the excess factor input operation is simplified. The excess factor information input here is stored in the storage device 16.
[0074]
Based on the excess factor information stored so far at a predetermined timing (for example, once a week or once a month), the number of excess inventory occurrences for each excess factor within the predetermined period is calculated. The represented graph (illustrated in FIG. 14) is displayed on the data display terminal 18.
[0075]
The production manager can easily recognize an excess factor having a large number of excess inventory by looking at a graph showing the excess inventory occurrence number for each excess factor. Along with this, it is possible to determine the priority order in descending order of the number of occurrences of excess inventory, and deal with eliminating excess factors in descending order of priority, effectively eliminating excess factors and reducing production TAT. it can.
[0076]
  In the second embodiment, the production progress management system 10 displays a warning message not only on the data display terminal 18 but also on the data input terminal 14 of the corresponding process when the stock amount of a certain process exceeds the allowable value. You may do it. As a result, the manager of the relevant process promptly receives the warning.In-process inventoryCan be recognized.
[0080]
  As explained above, the claims1, 4According to the described invention, it is classified into a non-working time due to waiting for a worker and a non-working time due to unprocessed inventory without waiting for an operator to input a non-working factor related to the non-working time as in the prior art. Because it is possible to obtain information on equipment downtime within a specified period, it is possible to accurately and quickly take measures such as rearranging workers on the line and improving logistics control based on this information. It becomes.
[0081]
  Moreover, according to invention of Claim 2, 5, in at least 1 processIn-process inventoryIf the inventory exceeds the stock allowance,In-process inventoryThe production manager will promptlyIn-process inventoryCan be recognized.
[0082]
  Claims3, 6According to the described invention, since a graph indicating the number of excess inventory occurrences for each excess factor is output, the production manager can easily recognize excess factors with a large number of excess inventory occurrences by looking at the graph. it can.
[Brief description of the drawings]
FIG. 1 is an overall configuration diagram of a semiconductor manufacturing line and a production progress management system.
FIG. 2 is a diagram showing input information and output information of a production progress management system.
FIG. 3 is a histogram of production TAT of a semiconductor production line.
FIG. 4 is a graph plotting data of ((arrival amount + inventory amount), shipment amount) for each process.
FIG. 5 is an overall configuration diagram of an operation rate collection system.
FIG. 6 is a diagram showing input information and output information of an operation rate collection system.
FIG. 7 is an overall configuration diagram of a TAT management system.
FIG. 8A is a graph plotting data of ((receipt amount + inventory amount), shipment amount) for each process, and FIG. 8 (B) is a graph of ((arrival amount + inventory amount), equipment failure for each process. (C) is a graph plotting ((incoming quantity + inventory quantity), average production TAT) data for each process.
FIG. 9 is a bar graph showing the classification of product residence time for each process in which the unit of the vertical axis is time.
FIG. 10 is a bar graph showing the classification of product residence time for each process with the unit of the vertical axis as a percentage.
FIG. 11 is a bar graph showing classification of equipment downtime.
FIG. 12 is a flowchart showing a processing routine of processing for separating the facility inoperative factor into waiting for a person and waiting for an object.
FIG. 13 is a graph showing the daily actual value / average value of (arrival amount + inventory amount) and shipment amount for each process;
FIG. 14 is a Pareto chart showing the number of excess occurrences for each inventory excess factor.
[Explanation of symbols]
10 Production progress management system
12 Production progress management host
18, 24, 42 Data display terminal
20 Occupancy rate management system
22 Utilization rate summary server
40 TAT management system

Claims (6)

An input means for inputting the quantity of products to be started and the quantity of products for which processing has been completed for each process of semiconductor manufacturing, and the quantity to be shipped for the final shipping process;
Information collecting means for collecting in-process inventory quantity information and shipping quantity information for each process based on the quantity input by the input means;
Receives information of operating conditions than equipment used in each step, a calculation output unit you calculating equipment downtime,
A detection means for receiving operation status information from the equipment used in each process and detecting the stop of the equipment,
When the stop of the equipment is detected by the detecting means, and it is determined that the stop of the equipment is not a failure or malfunction of the equipment, the in-process inventory amount for the stopped equipment process collected by the information collecting means A determination means for determining whether or not there is an unprocessed inventory of a product to be processed by the stopped facility based on the information;
If there is unprocessed inventory, set the equipment downtime at that time as the waiting time for workers, and if there is no unprocessed stock, set the equipment downtime at that time as unprocessed stock A setting means to set the non-working time by,
A third output means for displaying on the display terminal information on equipment downtime within a predetermined period classified into downtime due to waiting for workers and downtime due to unprocessed inventory;
A production management information output device. An excess determination means for determining whether the in-process inventory quantity in each process exceeds a preset inventory allowable quantity for each process;
Informing means for notifying that the in-process inventory amount exceeds the allowable stock amount in the corresponding process when the in-process inventory amount exceeds the allowable inventory amount in at least one process;
The production management information output device according to claim 1, further comprising: An input means for entering excess factor information when the in- process inventory exceeds the inventory allowance,
Storage means for storing the input excess factor information;
A fourth output means for displaying, on the display terminal, a graph indicating the number of excess inventory occurrences for each excess factor within a predetermined period based on the stored excess factor information;
The production management information output device according to claim 2, further comprising: For each process of semiconductor manufacturing, the product quantity to be processed and the product quantity to be processed are entered, and the quantity to be shipped is entered for the last shipping process,
Based on the input quantity, collect in-process inventory quantity information and shipment quantity information for each process,
Receives operating status information from equipment used in each process, calculates equipment downtime,
Receives operating status information from the equipment used in each process, detects equipment outages,
When the stop of the equipment is detected and it is determined that the stop of the equipment is not a failure or failure of the equipment, the stop is performed based on the collected in-process inventory amount information about the process of the stopped equipment. Determine whether there is unprocessed inventory of the products processed by
If there is unprocessed inventory, set the equipment downtime at that time as the waiting time for workers, and if there is no unprocessed stock, set the equipment downtime at that time as unprocessed stock Set up with non-working hours by
A production management information output method, wherein information on equipment downtime within a predetermined period classified into a downtime due to waiting for workers and a downtime due to unprocessed inventory is displayed on a display terminal. It is determined whether or not exceeded the stock allowance for each step of the work-in-progress inventory amount is set in advance in each step,
5. The production according to claim 4, wherein when the in-process inventory quantity exceeds the allowable inventory quantity in at least one process, notification is made that the in-process inventory quantity exceeds the allowable inventory quantity in the corresponding process. Management information output method. Excess factor information is entered when the in- process inventory exceeds the inventory allowance,
Memorize the input excess factor information,
6. The production management information output method according to claim 5, wherein a graph representing the number of excess inventory occurrences for each excess factor within a predetermined period is displayed on a display terminal based on the stored excess factor information.

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