CN201364183Y - Flow rate detecting device - Google Patents
Flow rate detecting device Download PDFInfo
- Publication number
- CN201364183Y CN201364183Y CNU2009200668328U CN200920066832U CN201364183Y CN 201364183 Y CN201364183 Y CN 201364183Y CN U2009200668328 U CNU2009200668328 U CN U2009200668328U CN 200920066832 U CN200920066832 U CN 200920066832U CN 201364183 Y CN201364183 Y CN 201364183Y
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- Prior art keywords
- optical sensor
- traffic probe
- probe device
- flowmeter
- flow rate
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- Length Measuring Devices By Optical Means (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The utility model provides a flow rate detecting device used for detecting whether the liquid flow rate of chemo-mechanical grinding equipment meets the requirement. The flow rate detecting device comprises a flow meter and an optical sensor arranged on the flow meter. When the flow rate detecting device detects the fact that the liquid flow rate of the chemo-mechanical grinding equipment doesn't meet the requirement, the alarm device gives the alarm and informs the operator, thereby ensuring the cleaning effect of the wafer.
Description
Technical field
The utility model relates to integrated circuit and makes the field, specifically, relates to a kind of in order to the fluid flow of surveying chemical-mechanical grinding device satisfactory traffic probe device whether.
Background technology
Increase along with metal interconnected metal interlayer medium, cause the serious out-of-flatness of wafer surface, so that can't satisfy the depth of focus requirement of graph exposure, for solving the yield rate of this contradiction and raising chip, require wafer surface necessary smooth, smooth and clean, chemical mechanical milling tech is effective, a most ripe present planarization.Chemical mechanical milling tech comprises that wafer grinds and grinds the back and cleans.Wherein, grind the fundamental purpose of cleaning the back and be remove that lapping compound is residual, metal pollutant and free state ion, remove the pollutant of wafer surface.
Existing chemical-mechanical grinding device comprises a feed flow pipeline, and described feed flow pipeline can carry citric acid cleaning fluid (CST-100) to cleaning unit, and then utilizes the citric acid cleaning fluid to remove the pollutant of wafer surface.Therefore the flow of citric acid cleaning fluid has significant impact to the cleaning performance of wafer.In case the flow of citric acid cleaning fluid changes, the cleaning performance of wafer also is affected thereupon.Existing chemical-mechanical grinding device comprises a flow sensor, and whether described flow sensor can detect flow in the feed flow pipeline, but whether the fluid flow that can not detect actual feed flow pipeline conforms to the flow value of setting.At present, can show the citric acid wash liquid stream value of feed flow pipeline by being installed in the buoy type flowmeter on the feed flow pipeline.Therefore, need operating personnel often to observe the position of buoy in the flowmeter, judge whether the flow of the citric acid cleaning fluid of feed flow pipeline meets the requirements with visual manner.In case and operating personnel carelessness fails in time to observe the position of buoy in the flowmeter, this moment, operating personnel can't learn, then have a strong impact on the cleaning performance of wafer, bring tremendous loss to explained hereafter if the fluid flow of feed flow pipeline has not been inconsistent with setting value.Therefore, whether satisfactory traffic probe device has become urgent problem to provide a kind of fluid flow that can survey chemical-mechanical grinding device automatically.
The utility model content
The utility model provides a kind of traffic probe device, can't survey whether satisfactory problem of its fluid flow automatically to solve existing chemical-mechanical grinding device.
In view of this, the utility model proposes a kind of traffic probe device, comprising: flowmeter and optical sensor, described optical sensor is arranged on the described flowmeter.
Optionally, described traffic probe device also comprises database, and it has a load end, and the signal wire of described optical sensor is connected to the load end of described database.
Optionally, described traffic probe device also comprises warning device, and described warning device and described database electrically connect, and when described traffic probe device detects fluid flow when undesirable, described database starts described warning device and reports to the police.
Optionally, described optical sensor comprises transmitting terminal and receiving end, lays respectively at the both sides of described flowmeter.
Optionally, described optical sensor is five line sensors.
Optionally, described flow is counted buoy type flowmeter.
Traffic probe device provided by the utility model comprises flowmeter and optical sensor, described optical sensor is arranged on the described flowmeter, whether the fluid flow of the detectable chemical-mechanical grinding device of described traffic probe device meets the requirements, when described traffic probe device detects fluid flow when undesirable, warning device alert notice operating personnel can guarantee the cleaning performance of wafer.
Description of drawings
The traffic probe schematic representation of apparatus that Fig. 1 is provided for the utility model one embodiment;
The traffic probe Unit Installation synoptic diagram that Fig. 2 is provided for the utility model one embodiment;
The fundamental diagram of the traffic probe device that Fig. 3 is provided for the utility model one embodiment.
Embodiment
Below in conjunction with the drawings and specific embodiments the traffic probe device that the utility model proposes is described in further detail.
As shown in Figure 1, the traffic probe schematic representation of apparatus that it is provided for the utility model one embodiment, whether described traffic probe device 100 meets the requirements in order to the fluid flow of surveying chemical-mechanical grinding device, it comprises: flowmeter 110 and optical sensor 120, described optical sensor 120 is arranged on the described flowmeter 110.Described traffic probe device 100 also comprises database 130 and warning device 140, and the signal wire of optical sensor 120 is connected to the load end 131 of database 130, and warning device 140 electrically connects with database 130.
Mention that in background technology flowmeter 110 is installed on the feed flow pipeline of chemical-mechanical grinding device, it is in order to the flow of the citric acid cleaning fluid of the feed flow pipeline of demonstration chemical-mechanical grinding device.As shown in Figure 2, flowmeter 110 is a buoy type flowmeter, it comprises the buoy 112 that indicates graduated pipeline 111 and be positioned at the activity among the pipeline 111, and buoy type flowmeter 110 is according to the flow of the citric acid cleaning fluid of the position display feed flow pipeline of buoy 112.Optical sensor 120 comprises transmitting terminal 121 and receiving end 122, wherein transmitting terminal 121 and receiving end 122 lay respectively at the both sides of flowmeter 110, when traffic probe device 100 detects fluid flow in the flowmeter 110 when undesirable, database 130 starts warning device 140 alert notice operating personnel.
Please continue referring to Fig. 3, the fundamental diagram of the traffic probe device 100 that it provides for the utility model one embodiment, described optical sensor 120 is five line sensors, two signal wires of optical sensor 120 are connected on the both positive and negative polarity of direct supply, wherein, the voltage request of 120 pairs of direct supplys of optical sensor is 10 volts to 30 volts, because chemical-mechanical grinding device itself carries 5 volts, 12 volts, 24 volts are waited reference power supply, in the utility model one embodiment, optical sensor 100 connects the power supply of 12 volts of direct currents, the positive pole of power supply is connected on the positive terminal of load end 131 of database 130, and the negative terminal of load end 131 connects the signal wire of the receiving end 122 of optical sensor 120.When optical sensor 120 is triggered, when the switch in the optical sensor 120 is switched on, load end 131 two ends of database 130 have just been connected 12 volts DC voltage, the load end 131 of database 130 is triggered, and database 130 can be judged concrete trigger position according to the address of load end 131 and start warning device 140 warnings.
Specifically, in the utility model one embodiment, the flow of the citric acid cleaning fluid of chemical-mechanical grinding device meets the requirements during for 3ml/min, therefore, the scale value that the transmitting terminal 121 of optical sensor 120 and receiving end 122 are installed on flowmeter 110 is the both sides, position of 3ml/min, when buoy 111 rises to the scale place of 3ml/min, the transmitting terminal 121 of sensor 120 and the light between the receiving end 122 are blocked, at this moment explanation has the citric acid cleaning fluid to flow through, the flow of citric acid cleaning fluid that is the feed flow pipeline of chemical-mechanical grinding device is 3ml/min, and the fluid flow of feed flow pipeline meets the requirements.In case and buoy 111 is not raised up to the scale place of 3ml/min, the fluid flow that is chemical-mechanical grinding device is undesirable, the transmitting terminal 110 of sensor 100 and the light between the receiving end 120 are not blocked, optical sensor 120 is triggered, the load end two ends of database 130 have just been connected 12 volts DC voltage, the load end 131 of database 130 is triggered, after database 130 is judged concrete trigger position according to the address of load end 131, start warning device 140 alert notice operating personnel, this moment, operating personnel can take appropriate measures, and avoided because of the undesirable cleaning performance that influences wafer of the flow of citric acid cleaning fluid.
Traffic probe device provided by the utility model, when the flow value of the citric acid cleaning fluid of setting when the feed flow pipeline of chemical-mechanical grinding device changes, can adjust the installation site of the transmitting terminal and the receiving end of optical sensor accordingly, whether the fluid flow that detects chemical-mechanical grinding device easily meets the requirements.
In sum, the utility model provides a kind of traffic probe device, whether meet the requirements in order to the fluid flow of surveying chemical-mechanical grinding device, described traffic probe device comprises flowmeter and is arranged at optical sensor on the described flowmeter, whether the fluid flow that described traffic probe device can be surveyed described chemical-mechanical grinding device automatically meets the requirements, when the flow that detects described flowmeter when described traffic probe device is undesirable, warning device alert notice operating personnel can guarantee the cleaning performance of wafer.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (6)
1, a kind of traffic probe device is characterized in that, comprising:
Flowmeter; And
Optical sensor is arranged on the described flowmeter.
2, traffic probe device as claimed in claim 1 is characterized in that, also comprises database, and it has a load end, and the signal wire of described optical sensor is connected to the load end of described database.
3, traffic probe device as claimed in claim 2 is characterized in that, also comprises warning device, electrically connects with described database, and when described traffic probe device detects fluid flow when undesirable, described database starts described warning device and reports to the police.
4, traffic probe device as claimed in claim 1 is characterized in that, described optical sensor comprises transmitting terminal and receiving end, lays respectively at the both sides of described flowmeter.
5, traffic probe device as claimed in claim 1 is characterized in that, described optical sensor is five line sensors.
6, traffic probe device as claimed in claim 1 is characterized in that, described flow is counted buoy type flowmeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009200668328U CN201364183Y (en) | 2009-01-13 | 2009-01-13 | Flow rate detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009200668328U CN201364183Y (en) | 2009-01-13 | 2009-01-13 | Flow rate detecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201364183Y true CN201364183Y (en) | 2009-12-16 |
Family
ID=41474851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2009200668328U Expired - Lifetime CN201364183Y (en) | 2009-01-13 | 2009-01-13 | Flow rate detecting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201364183Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102267094A (en) * | 2010-06-04 | 2011-12-07 | 和舰科技(苏州)有限公司 | Fool-proof timing alarming method and device for wafer processing machine table |
-
2009
- 2009-01-13 CN CNU2009200668328U patent/CN201364183Y/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102267094A (en) * | 2010-06-04 | 2011-12-07 | 和舰科技(苏州)有限公司 | Fool-proof timing alarming method and device for wafer processing machine table |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130226 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130226 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20091216 |