CN102218777B - 脆性材料基板的分断方法 - Google Patents

脆性材料基板的分断方法 Download PDF

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Publication number
CN102218777B
CN102218777B CN201110078563.9A CN201110078563A CN102218777B CN 102218777 B CN102218777 B CN 102218777B CN 201110078563 A CN201110078563 A CN 201110078563A CN 102218777 B CN102218777 B CN 102218777B
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CN
China
Prior art keywords
score line
substrate
sword
brisement
disjunction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201110078563.9A
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English (en)
Chinese (zh)
Other versions
CN102218777A (zh
Inventor
村上健二
武田真和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN102218777A publication Critical patent/CN102218777A/zh
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Publication of CN102218777B publication Critical patent/CN102218777B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033—Apparatus for opening score lines in glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/10—Glass-cutting tools, e.g. scoring tools
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates
CN201110078563.9A 2010-03-31 2011-03-28 脆性材料基板的分断方法 Expired - Fee Related CN102218777B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-082952 2010-03-31
JP2010082952A JP5216040B2 (ja) 2010-03-31 2010-03-31 脆性材料基板の分断方法

Publications (2)

Publication Number Publication Date
CN102218777A CN102218777A (zh) 2011-10-19
CN102218777B true CN102218777B (zh) 2016-02-24

Family

ID=44775610

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110078563.9A Expired - Fee Related CN102218777B (zh) 2010-03-31 2011-03-28 脆性材料基板的分断方法

Country Status (4)

Country Link
JP (1) JP5216040B2 (ja)
KR (1) KR101318818B1 (ja)
CN (1) CN102218777B (ja)
TW (1) TWI429604B (ja)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5187421B2 (ja) * 2010-11-30 2013-04-24 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク方法
CN102581967B (zh) * 2012-02-06 2015-02-04 安徽白鹭电子科技有限公司 带有v型槽的微小硅片的切断方法
CN103586985A (zh) * 2012-08-17 2014-02-19 佳友科技有限公司 脆性材料加工方法与系统
JP5991133B2 (ja) * 2012-10-16 2016-09-14 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク用治具及びブレイク方法
JP6043150B2 (ja) * 2012-10-29 2016-12-14 三星ダイヤモンド工業株式会社 積層脆性材料基板のブレイク装置および積層脆性材料基板のブレイク方法
JP6014490B2 (ja) * 2012-12-27 2016-10-25 三星ダイヤモンド工業株式会社 分断方法、及び分断装置
JP6163341B2 (ja) * 2013-04-02 2017-07-12 三星ダイヤモンド工業株式会社 ブレイク装置
JP6140012B2 (ja) * 2013-07-08 2017-05-31 三星ダイヤモンド工業株式会社 貼り合わせ基板のブレイク方法
JP6262960B2 (ja) * 2013-08-23 2018-01-17 三星ダイヤモンド工業株式会社 基板分断装置
JP6207307B2 (ja) * 2013-09-03 2017-10-04 三星ダイヤモンド工業株式会社 ブレイク装置
JP6185812B2 (ja) * 2013-09-30 2017-08-23 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク方法並びにブレイク装置
JP6154713B2 (ja) 2013-09-30 2017-06-28 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク方法並びにブレイク装置
JP6243699B2 (ja) 2013-10-25 2017-12-06 三星ダイヤモンド工業株式会社 脆性材料基板の分断装置
JP6268917B2 (ja) * 2013-10-25 2018-01-31 三星ダイヤモンド工業株式会社 ブレイク装置
KR20160023075A (ko) * 2014-08-21 2016-03-03 한국미쯔보시다이아몬드공업(주) 기판 브레이크 장치
JP6481465B2 (ja) 2014-08-21 2019-03-13 三星ダイヤモンド工業株式会社 複合基板のブレイク方法
JP5913483B2 (ja) * 2014-08-25 2016-04-27 三星ダイヤモンド工業株式会社 脆性材料基板の分断方法並びに分断装置
JP6627326B2 (ja) * 2015-08-20 2020-01-08 三星ダイヤモンド工業株式会社 ブレイク装置
JP6271486B2 (ja) * 2015-09-29 2018-01-31 三星ダイヤモンド工業株式会社 ブレイクバー
TWI632040B (zh) * 2017-07-10 2018-08-11 煜峰投資顧問有限公司 脆性材料基板裂片裝置及使用該裝置之裂片方法
CN109093857B (zh) * 2018-07-03 2020-05-26 常州大学 基于双面应力集中的切割机
TWI820177B (zh) * 2018-09-26 2023-11-01 日商三星鑽石工業股份有限公司 附有金屬膜之基板的分割方法
TW202041343A (zh) * 2018-12-18 2020-11-16 日商三星鑽石工業股份有限公司 陶瓷片的製造方法及陶瓷片製造用之煅燒前片的製造方法
CN110328765A (zh) * 2019-07-05 2019-10-15 苏州德龙激光股份有限公司 晶圆裂片装置
CN111517630A (zh) * 2020-05-29 2020-08-11 河北南玻玻璃有限公司 一种玻璃清边装置
CN111896347A (zh) * 2020-08-07 2020-11-06 广东韶钢松山股份有限公司 一种截断装置及设备
JP2024501225A (ja) * 2020-12-21 2024-01-11 コーニング インコーポレイテッド 基板切断分離システムおよび方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2516547Y (zh) * 2001-12-10 2002-10-16 洛阳北方玻璃技术股份有限公司 多头双臂数控直线玻璃切割机
CN1646282A (zh) * 2002-04-01 2005-07-27 三星钻石工业股份有限公司 脆性材料基板的分断方法以及采用该方法的分断装置
JP2006289625A (ja) * 2005-04-05 2006-10-26 Sony Corp 貼り合わせ基板の基板ブレイク装置及びその基板ブレイク方法
JP2007073602A (ja) * 2005-09-05 2007-03-22 Shibaura Mechatronics Corp 半導体チップのピックアップ装置及びピックアップ方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007067365A (ja) * 2005-08-05 2007-03-15 Alps Electric Co Ltd 電子機器の製造方法
JP2008270018A (ja) * 2007-04-23 2008-11-06 Toyota Industries Corp 有機素子封止パネルの製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2516547Y (zh) * 2001-12-10 2002-10-16 洛阳北方玻璃技术股份有限公司 多头双臂数控直线玻璃切割机
CN1646282A (zh) * 2002-04-01 2005-07-27 三星钻石工业股份有限公司 脆性材料基板的分断方法以及采用该方法的分断装置
JP2006289625A (ja) * 2005-04-05 2006-10-26 Sony Corp 貼り合わせ基板の基板ブレイク装置及びその基板ブレイク方法
JP2007073602A (ja) * 2005-09-05 2007-03-22 Shibaura Mechatronics Corp 半導体チップのピックアップ装置及びピックアップ方法

Also Published As

Publication number Publication date
KR101318818B1 (ko) 2013-10-17
JP2011212963A (ja) 2011-10-27
JP5216040B2 (ja) 2013-06-19
TWI429604B (zh) 2014-03-11
TW201134777A (en) 2011-10-16
CN102218777A (zh) 2011-10-19
KR20110109881A (ko) 2011-10-06

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Granted publication date: 20160224

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