CN102208355A - 四方平面无导脚半导体封装件及其制造方法 - Google Patents

四方平面无导脚半导体封装件及其制造方法 Download PDF

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CN102208355A
CN102208355A CN2010101549893A CN201010154989A CN102208355A CN 102208355 A CN102208355 A CN 102208355A CN 2010101549893 A CN2010101549893 A CN 2010101549893A CN 201010154989 A CN201010154989 A CN 201010154989A CN 102208355 A CN102208355 A CN 102208355A
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electric connection
chip
connection pad
chip carrier
semiconductor package
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CN102208355B (zh
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汤富地
魏庆全
林勇志
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Siliconware Precision Industries Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA

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Abstract

本发明涉及四方平面无导脚半导体封装件及其制造方法。一种四方平面无导脚半导体封装件,包括:芯片座;多个环设于该芯片座周围的电性连接垫,且该芯片座及各个该电性连接垫的底面覆盖有铜层;芯片,接置于该芯片座顶面上;多条焊线,分别电性连接该芯片与该电性连接垫;封装胶体,包覆该芯片、该焊线、该芯片座及该电性连接垫,但外露出该芯片座和该电性连接垫的底面的铜层;以及介电层,形成于该封装胶体的底面上,且该介电层形成有多个对应部分外露出该铜层的开口,其中,该铜层与介电层的接合度较佳,可防止焊料在回焊时渗入芯片座及电性连接垫与介电层的界面的焊料突出缺陷,提升了产品良率。还提供一种四方平面无导脚半导体封装件的制造方法。

Description

四方平面无导脚半导体封装件及其制造方法
技术领域
本发明涉及一种四方平面无导脚半导体封装件与其制造方法,尤指一种能防止焊料突出(solder extrusion)的四方平面无导脚半导体封装件及其制造方法。
背景技术
四方平面无导脚半导体封装件为一种使芯片座和接脚底面外露于封装胶体底部表面的封装单元,一般采用表面耦接技术将封装单元耦接至印刷电路板上,由此形成一特定功能的电路模块。在表面耦接程序中,四方平面无导脚半导体封装件的芯片座和接脚直接焊接至印刷电路板上。
举例而言,第6,238,952、6,261,864和6,306,685号美国专利揭露一种现有四方平面无导脚半导体封装件,以下配合图7,说明现有四方平面无导脚半导体封装件及其制造方法。
现有四方平面无导脚半导体封装件7,包括以下构件:导线架71,具有芯片座711和多个接脚713;芯片73,接置于该芯片座711上;多条焊线74,分别电性连接该芯片73和该多个接脚713;以及封装胶体75,包覆该芯片73、该多条焊线74和该导线架71。但该导线架71的芯片座711和多个接脚713凸伸于该封装胶体75外,其原因在于此类四方平面无导脚半导体封装件7的芯片座711和接脚713是由金属载体直接蚀刻形成得到,虽然可以增加I/O数量,但该制造方法仅能提供较多的接脚数目,而无法形成复杂的导电迹线。
如图8A至图8C’所示,第5830800和6635957号美国专利则揭露另一种四方平面无导脚半导体封装件8及其制造方法。首先在金属载体80上电镀形成多个接脚813,接脚813具有金/钯/镍/钯或钯/镍/金的金属层。接着,依序在接脚813上接置芯片83;以焊线84电性连接芯片83与接脚813;以及形成封装胶体85,之后在移除载体80后,在封装胶体85底面形成介电层86且该介电层86具有多个开口861,最后在该开口861中的接脚813上布植焊球87。然而,因焊球87在金层或钯层上的湿润能力(wetting ability)较佳,但介电层86与金层或钯层的接合度较差,焊料容易渗入接脚813和介电层86的界面,产生焊料突出(solder extrusion)862的缺陷,使得焊球无法形成,甚至造成相邻焊球连接的电性短路问题。不但影响后续的表面耦接(SMT)制造过程,增加成本亦降低产品良率。
这样,如何解决上述焊料突出问题,提升I/O数目,兼顾导电迹线的形成及产品良率,并开发新颖的四方平面无导脚半导体封装件及其制造方法,实为目前亟欲解决的课题。
发明内容
鉴于以上所述背景技术的缺点,本发明提供一种四方平面无导脚半导体封装件的制造方法,包括下列步骤:在载体上形成芯片座及多  个环设于该芯片座周围的电性连接垫,且至少部分该电性连接垫连结有导电迹线(Conductive Trace);在该芯片座顶面上接置芯片;以多条焊线电性连接该芯片与各个该电性连接垫;在该载体上形成封装胶体,以包覆该芯片座、该电性连接垫、该芯片及该焊线;移除该载体,以令该芯片座及该电性连接垫的底面外露出该封装胶体的底面;在该芯片座及该电性连接垫的外露底面上形成铜层,令该铜层遮覆住该芯片座及该电性连接垫的外露底面;以及在该封装胶体的底面上形成介电层(dielectric layer),并形成多个开口,以对应部分外露出该形成于该芯片座及该电性连接垫的底面上的铜层。
另一方面,根据前述制造方法,本发明还提供一种四方平面无导脚半导体封装件,包括:芯片座;多个环设于该芯片座周围的电性连接垫,其中,至少部分该电性连接垫连结有导电迹线,且该芯片座及各该电性连接垫的底面覆盖有铜层;芯片,接置于该芯片座顶面上;多条焊线,分别电性连接该芯片与该电性连接垫;封装胶体,包覆该芯片、该焊线、该芯片座及该电性连接垫,但外露出该芯片座和该电性连接垫的底面的铜层;以及介电层,形成于该封装胶体的底面上,且该介电层形成有多个对应部分外露出该铜层的开口。
由上可知,本发明在载体上形成芯片座和电性连接垫,可满足设置导电迹线及提升I/O数目的需求。又,本发明的四方平面无导脚半导体封装件及其制造方法,在移除载体后,再在该芯片座及该电性连接垫的外露底面上形成铜层,由于该铜层与介电层的接合度较佳,可防止焊料在回焊时渗入芯片座及电性连接垫与介电层的界面的焊料突出缺陷,进而提升产品良率。
附图说明
图1至图6是本发明的四方平面无导脚半导体封装件的制造方法的示意图,其中图1A是沿图1B虚线1A-1A的剖视图;
图7显示现有四方平面无导脚半导体封装件的示意图;以及
图8A至图8C’显示另一现有四方平面无导脚半导体封装件及其制造方法的示意图,其中,图8C’是图8C的局部放大图。
【主要元件符号说明】
10、80      载体
101         遮蔽图案
111、711    芯片座
113         电性连接垫
1131        导电迹线
12          铜层
13、73、83  芯片
14、74、84  焊线
15、75、85  封装胶体
16、86      介电层
161、861    开口
17、87      焊球
6、7、8     四方平面无导脚半导体封装件
71          导线架
713、813    接脚
862         焊料突出
具体实施方式
以下通过特定的具体实施例说明本发明的实施方式,所属技术领域普通技术人员可由本说明书所揭示的内容轻易地了解本发明的其他优点与功效。
请参阅图1至图6,为本发明的四方平面无导脚半导体封装件及其制造方法的示意图。
如图1A及图1B所示,图1A为图1B的剖视图,提供载体10,其材质例如为铜,以在该载体10上形成芯片座111及多个环设于该芯片座111周围的电性连接垫113。且较佳地,如图1B所示,至少部分该电性连接垫113延伸有导电迹线1131。该芯片座111及电性连接垫113可通过电镀方式形成,且该芯片座111及电性连接垫113可为金/钯/镍/钯、金/镍/铜/镍/银、金/镍/铜/银、钯/镍/钯、金/镍/金或钯/镍/金等的多层金属其中之一所构成。且较佳地,该金层或钯层位于芯片座111及电性连接垫113的底面(指芯片座111以及电性连接垫113接触该载体10的部位)。
再参阅图2A,在该芯片座111顶面上接置芯片13,接着以焊线14电性连接该芯片13与各个该电性连接垫113,之后再在该载体10上形成封装胶体15,以包覆该芯片座111、电性连接垫113、芯片13及焊线14。
又参阅图2B,移除该载体10,以令芯片座111及电性连接垫113的底面外露出该封装胶体15的底面。例如,可采用蚀刻的方式移除该载体10,以露出芯片座111及电性连接垫113的底面。
还参阅图3与图4,在芯片座111及电性连接垫113的外露底面上以无电电镀(Electroless plating)方式形成铜层12,令该铜层12遮覆住该芯片座111及该电性连接垫113的外露底面。
如图5所示,在该封装胶体15及芯片座111、电性连接垫113及导电迹线1131底面形成介电层16,且该介电层16具有多个开口161,外露出该铜层12。
如图6所示,在该开口161中形成焊球17,并切割该封装胶体以得到个别的四方平面无导脚半导体封装件6。
本发明还提供一种四方平面无导脚半导体封装件6,包括芯片座111、电性连接垫113、芯片13、多条焊线14、封装胶体15、铜层12及介电层16。
在一实施例中,本发明的四方平面无导脚半导体封装件还可包括多个焊球17,形成于该开口161中。
所述多个电性连接垫113设于该芯片座111周围,且较佳地,至少部分该电性连接垫113延伸有导电迹线1131,而该芯片座111和多个电性连接垫113可包括选自金、钯、银、铜及镍所组成群组的一种或多种材质,例如,金/钯/镍/钯层依序组成或金/镍/铜/镍/银、金/镍/铜/银、钯/镍/钯、金/镍/金或钯/镍/金的多层金属其中之一所构成。且较佳地,金层或钯层是该芯片座111及电性连接垫113的底部。
该芯片13接置在该芯片座111顶面上;多条焊线14分别电性连接该芯片13和该电性连接垫113;该封装胶体15包覆该芯片座111、电性连接垫113、芯片13及该多条焊线14,但外露出该芯片座111和电性连接垫113的底部。
该铜层12形成于该芯片座111和电性连接垫113的底部上,该铜层12可通过无电电镀方式形成,使得芯片座111和电性连接垫113部分底部形成铜层12。而介电层16形成于该封装胶体15及铜层12底面,且该介电层16具有多个外露出该铜层12的开口161。
在另一实施例中,该铜层12可遮覆住该芯片座111及电性连接垫113的全部或部分底部。较佳的实施例则为,该铜层12形成于介电层16覆盖芯片座111和电性连接垫113的区域,而铜层12未遮蔽的部分则可对应介电层16的开口。换言之,所形成的铜层12使该芯片座111及电性连接垫113的底面不与该介电层16接触。
综上所述,本发明提供一种新颖的四方平面无导脚半导体封装件及其制造方法,是利用移除载体之后,在该芯片座及该电性连接垫的底面上形成铜层,由于铜层与介电层的接合度较佳,可防止焊料在回焊时渗入芯片座及电性连接垫与介电层的界面的焊料突出缺陷,进而提升产品良率。
以上所述的具体实施例,仅用以例释本发明的特点及功效,而不用以限定本发明的可实施范畴,在未脱离本发明的上述精神与技术范畴下,任何运用本发明所揭示内容的等效改变及修饰,均仍应为权利要求所涵盖。

Claims (12)

1.一种四方平面无导脚半导体封装件的制造方法,包括下列步骤:
在载体上形成芯片座及多个环设于该芯片座周围的电性连接垫;
在该芯片座顶面上接置芯片;
以多条焊线电性连接该芯片与各个该电性连接垫;
在该载体上形成封装胶体,以包覆该芯片座、该电性连接垫、该芯片及该焊线;
移除该载体,以令该芯片座及该电性连接垫的底面外露出该封装胶体的底面;
在该芯片座及该电性连接垫的外露底面上形成铜层,令该铜层遮覆住该芯片座及该电性连接垫的外露底面;以及
在该封装胶体的底面上形成介电层,并形成多个开口,以对应部分外露出该形成于该芯片座及该电性连接垫的底面上的铜层。
2.根据权利要求1所述的四方平面无导脚半导体封装件的制造方法,还包括多个经由各个该开口与该外露的铜层电性连接的焊球。
3.根据权利要求1所述的四方平面无导脚半导体封装件的制造方法,其特征在于,该芯片座及该电性连结垫的底面由金层或钯层构成。
4.根据权利要求1所述的四方平面无导脚半导体封装件的制造方法,其特征在于,该载体是铜载体。
5.根据权利要求1所述的四方平面无导脚半导体封装件的制造方法,其特征在于,该铜层遮覆住该芯片座及电性连接垫的全部或部分底部。
6.根据权利要求1所述的四方平面无导脚半导体封装件的制造方法,其特征在于,该铜层以无电电镀方式形成。
7.根据权利要求1所述的四方平面无导脚半导体封装件的制造方法,其特征在于,至少部分该电性连接垫连结有导电迹线。
8.一种四方平面无导脚半导体封装件,包括:
芯片座;
多个环设于该芯片座周围的电性连接垫,且该芯片座及各该电性连接垫的底面覆盖有铜层;
芯片,接置于该芯片座顶面上;
多条焊线,分别电性连接该芯片与该电性连接垫;
封装胶体,包覆该芯片、该焊线、该芯片座及该电性连接垫,但外露出该芯片座和该电性连接垫的底面的铜层;以及
介电层,形成于该封装胶体的底面上,且该介电层形成有多个对应部分外露出该铜层的开口。
9.根据权利要求8所述的四方平面无导脚半导体封装件,还包括多个经由各个该开口与该铜层电性连接的焊球。
10.根据权利要求8所述的四方平面无导脚半导体封装件,其特征在于,至少部分该电性连接垫连结有导电迹线。
11.根据权利要求8所述的四方平面无导脚半导体封装件,其特征在于,该芯片座及该电性连结垫的底面由金层或钯层构成。
12.根据权利要求8所述的四方平面无导脚半导体封装件,其特征在于,该铜层遮覆住该芯片座及电性连接垫的全部或部分底部。
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