CN102203934B - 使用定向剥落在绝缘体结构上形成半导体的方法和装置 - Google Patents

使用定向剥落在绝缘体结构上形成半导体的方法和装置 Download PDF

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Publication number
CN102203934B
CN102203934B CN200980143710.7A CN200980143710A CN102203934B CN 102203934 B CN102203934 B CN 102203934B CN 200980143710 A CN200980143710 A CN 200980143710A CN 102203934 B CN102203934 B CN 102203934B
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China
Prior art keywords
semiconductor wafer
depth
donor semiconductor
weakened
ion
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Expired - Fee Related
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CN200980143710.7A
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English (en)
Chinese (zh)
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CN102203934A (zh
Inventor
S·切瑞克德简
J·S·希特斯
J·G·库亚德
R·O·马斯克梅耶
M·J·莫尔
A·尤森科
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Corning Inc
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Corning Inc
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Filing date
Publication date
Priority claimed from US12/290,384 external-priority patent/US8003491B2/en
Priority claimed from US12/290,362 external-priority patent/US7816225B2/en
Application filed by Corning Inc filed Critical Corning Inc
Publication of CN102203934A publication Critical patent/CN102203934A/zh
Application granted granted Critical
Publication of CN102203934B publication Critical patent/CN102203934B/zh
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/011—Division of wafers or substrates to produce devices, each consisting of a single electric circuit element
    • H10D89/015—Division of wafers or substrates to produce devices, each consisting of a single electric circuit element the wafers or substrates being other than semiconductor bodies, e.g. insulating bodies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Physical Vapour Deposition (AREA)
  • Recrystallisation Techniques (AREA)
CN200980143710.7A 2008-10-30 2009-10-29 使用定向剥落在绝缘体结构上形成半导体的方法和装置 Expired - Fee Related CN102203934B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US12/290,384 US8003491B2 (en) 2008-10-30 2008-10-30 Methods and apparatus for producing semiconductor on insulator structures using directed exfoliation
US12/290,362 US7816225B2 (en) 2008-10-30 2008-10-30 Methods and apparatus for producing semiconductor on insulator structures using directed exfoliation
US12/290,384 2008-10-30
US12/290,362 2008-10-30
PCT/US2009/062504 WO2010059361A2 (en) 2008-10-30 2009-10-29 Methods and apparatus for producing semiconductor on insulator structures using directed exfoliation

Publications (2)

Publication Number Publication Date
CN102203934A CN102203934A (zh) 2011-09-28
CN102203934B true CN102203934B (zh) 2014-02-12

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CN200980143710.7A Expired - Fee Related CN102203934B (zh) 2008-10-30 2009-10-29 使用定向剥落在绝缘体结构上形成半导体的方法和装置
CN200980143709.4A Expired - Fee Related CN102203933B (zh) 2008-10-30 2009-10-29 使用定向剥落在绝缘体结构上形成半导体的方法和装置

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CN200980143709.4A Expired - Fee Related CN102203933B (zh) 2008-10-30 2009-10-29 使用定向剥落在绝缘体结构上形成半导体的方法和装置

Country Status (6)

Country Link
EP (2) EP2359400A2 (cg-RX-API-DMAC7.html)
JP (2) JP5650653B2 (cg-RX-API-DMAC7.html)
KR (2) KR20110081318A (cg-RX-API-DMAC7.html)
CN (2) CN102203934B (cg-RX-API-DMAC7.html)
TW (2) TWI451534B (cg-RX-API-DMAC7.html)
WO (2) WO2010059361A2 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5703853B2 (ja) * 2011-03-04 2015-04-22 信越半導体株式会社 貼り合わせウェーハの製造方法
FR3055063B1 (fr) * 2016-08-11 2018-08-31 Soitec Procede de transfert d'une couche utile
CN111834205B (zh) * 2020-07-07 2021-12-28 中国科学院上海微系统与信息技术研究所 一种异质半导体薄膜及其制备方法
CN114975765A (zh) * 2022-07-19 2022-08-30 济南晶正电子科技有限公司 复合单晶压电薄膜及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6054370A (en) * 1998-06-30 2000-04-25 Intel Corporation Method of delaminating a pre-fabricated transistor layer from a substrate for placement on another wafer
WO2004044975A1 (en) * 2002-11-12 2004-05-27 S.O.I. Tec Silicon On Insulator Technologies Semiconductor structure, and methods for fabricating same
US20060220127A1 (en) * 2003-04-22 2006-10-05 Forschungszentrum Julich Gmbh Method for producing a tensioned layer on a substrate, and a layer structure
US7148124B1 (en) * 2004-11-18 2006-12-12 Alexander Yuri Usenko Method for forming a fragile layer inside of a single crystalline substrate preferably for making silicon-on-insulator wafers

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2714524B1 (fr) * 1993-12-23 1996-01-26 Commissariat Energie Atomique Procede de realisation d'une structure en relief sur un support en materiau semiconducteur
US6048411A (en) * 1997-05-12 2000-04-11 Silicon Genesis Corporation Silicon-on-silicon hybrid wafer assembly
TW437078B (en) * 1998-02-18 2001-05-28 Canon Kk Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof
JP3031904B2 (ja) * 1998-02-18 2000-04-10 キヤノン株式会社 複合部材とその分離方法、及びそれを利用した半導体基体の製造方法
US20010007790A1 (en) * 1998-06-23 2001-07-12 Henley Francois J. Pre-semiconductor process implant and post-process film separation
FR2811807B1 (fr) * 2000-07-12 2003-07-04 Commissariat Energie Atomique Procede de decoupage d'un bloc de materiau et de formation d'un film mince
JP2002124652A (ja) * 2000-10-16 2002-04-26 Seiko Epson Corp 半導体基板の製造方法、半導体基板、電気光学装置並びに電子機器
FR2830983B1 (fr) * 2001-10-11 2004-05-14 Commissariat Energie Atomique Procede de fabrication de couches minces contenant des microcomposants
EP1429381B1 (en) * 2002-12-10 2011-07-06 S.O.I.Tec Silicon on Insulator Technologies A method for manufacturing a material compound
US7176528B2 (en) 2003-02-18 2007-02-13 Corning Incorporated Glass-based SOI structures
JP2006324051A (ja) * 2005-05-17 2006-11-30 Nissin Ion Equipment Co Ltd 荷電粒子ビーム照射方法および装置
JP4977999B2 (ja) * 2005-11-21 2012-07-18 株式会社Ｓｕｍｃｏ 貼合せ基板の製造方法及びその方法で製造された貼合せ基板
US7691730B2 (en) * 2005-11-22 2010-04-06 Corning Incorporated Large area semiconductor on glass insulator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6054370A (en) * 1998-06-30 2000-04-25 Intel Corporation Method of delaminating a pre-fabricated transistor layer from a substrate for placement on another wafer
WO2004044975A1 (en) * 2002-11-12 2004-05-27 S.O.I. Tec Silicon On Insulator Technologies Semiconductor structure, and methods for fabricating same
US20060220127A1 (en) * 2003-04-22 2006-10-05 Forschungszentrum Julich Gmbh Method for producing a tensioned layer on a substrate, and a layer structure
US7148124B1 (en) * 2004-11-18 2006-12-12 Alexander Yuri Usenko Method for forming a fragile layer inside of a single crystalline substrate preferably for making silicon-on-insulator wafers

Also Published As

Publication number Publication date
CN102203934A (zh) 2011-09-28
JP5650652B2 (ja) 2015-01-07
CN102203933B (zh) 2015-12-02
JP5650653B2 (ja) 2015-01-07
KR101568898B1 (ko) 2015-11-12
WO2010059367A3 (en) 2010-08-05
TWI430338B (zh) 2014-03-11
TW201030815A (en) 2010-08-16
KR20110081318A (ko) 2011-07-13
TW201036112A (en) 2010-10-01
TWI451534B (zh) 2014-09-01
WO2010059367A2 (en) 2010-05-27
KR20110081881A (ko) 2011-07-14
JP2012507870A (ja) 2012-03-29
CN102203933A (zh) 2011-09-28
WO2010059361A3 (en) 2010-08-12
WO2010059361A2 (en) 2010-05-27
EP2356676A2 (en) 2011-08-17
JP2012507868A (ja) 2012-03-29
EP2359400A2 (en) 2011-08-24

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Termination date: 20161029