CN102145894B - 一种电子束及渣滤熔炼提纯多晶硅的方法及设备 - Google Patents
一种电子束及渣滤熔炼提纯多晶硅的方法及设备 Download PDFInfo
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- CN102145894B CN102145894B CN 201110125905 CN201110125905A CN102145894B CN 102145894 B CN102145894 B CN 102145894B CN 201110125905 CN201110125905 CN 201110125905 CN 201110125905 A CN201110125905 A CN 201110125905A CN 102145894 B CN102145894 B CN 102145894B
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- 239000002893 slag Substances 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims abstract description 62
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 61
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 54
- 238000003723 Smelting Methods 0.000 title claims abstract description 46
- 229920005591 polysilicon Polymers 0.000 title abstract description 24
- 238000001914 filtration Methods 0.000 title abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 69
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 69
- 239000010703 silicon Substances 0.000 claims abstract description 69
- 229910052796 boron Inorganic materials 0.000 claims abstract description 57
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 56
- 239000012535 impurity Substances 0.000 claims abstract description 47
- 229910052751 metal Inorganic materials 0.000 claims abstract description 35
- 239000002184 metal Substances 0.000 claims abstract description 35
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 34
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 32
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910052802 copper Inorganic materials 0.000 claims abstract description 29
- 239000010949 copper Substances 0.000 claims abstract description 29
- 238000002844 melting Methods 0.000 claims abstract description 28
- 230000008018 melting Effects 0.000 claims abstract description 28
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 28
- 239000011574 phosphorus Substances 0.000 claims abstract description 28
- 239000002210 silicon-based material Substances 0.000 claims abstract description 22
- 230000008569 process Effects 0.000 claims abstract description 19
- 238000010438 heat treatment Methods 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000007788 liquid Substances 0.000 claims abstract description 14
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 38
- 229910002804 graphite Inorganic materials 0.000 claims description 29
- 239000010439 graphite Substances 0.000 claims description 29
- 230000007246 mechanism Effects 0.000 claims description 11
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- 238000006243 chemical reaction Methods 0.000 claims description 10
- 238000004321 preservation Methods 0.000 claims description 8
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- 239000002994 raw material Substances 0.000 claims description 7
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- 206010008531 Chills Diseases 0.000 claims description 4
- 239000002826 coolant Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
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- XJKVPKYVPCWHFO-UHFFFAOYSA-N silicon;hydrate Chemical compound O.[Si] XJKVPKYVPCWHFO-UHFFFAOYSA-N 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 10
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- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 238000002203 pretreatment Methods 0.000 description 3
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- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 2
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- 239000011734 sodium Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
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- 238000010276 construction Methods 0.000 description 1
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- 239000010453 quartz Substances 0.000 description 1
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- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- WRXVIGIHVLRVPC-UHFFFAOYSA-N silane trichlorosilane Chemical compound [SiH4].Cl[SiH](Cl)Cl WRXVIGIHVLRVPC-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001149 thermolysis Methods 0.000 description 1
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Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102491338A (zh) * | 2011-11-22 | 2012-06-13 | 虞海盈 | 生产多晶硅的方法 |
CN102674366B (zh) * | 2012-04-28 | 2014-09-17 | 中国科学院福建物质结构研究所 | 一种真空连续熔炼提纯太阳能级硅材料的设备 |
CN102976334B (zh) * | 2012-12-13 | 2014-04-30 | 青岛隆盛晶硅科技有限公司 | 一种定向凝固尾料快速收集提纯多晶硅的方法及设备 |
CN102976332B (zh) * | 2012-12-13 | 2014-08-27 | 青岛隆盛晶硅科技有限公司 | 一种石英管取尾料式定向凝固提纯多晶硅的方法及设备 |
CN103318892A (zh) * | 2013-06-19 | 2013-09-25 | 青岛隆盛晶硅科技有限公司 | 多晶硅定向凝固诱导流动抑制杂质反扩散的方法 |
CN103420379B (zh) * | 2013-08-28 | 2016-03-02 | 青岛隆盛晶硅科技有限公司 | 电子束连续化熔炼制备太阳能级多晶硅的方法及其装置 |
CN104178809B (zh) * | 2014-09-01 | 2016-08-31 | 大连理工大学 | 一种冶金法制备低金属硼母合金的方法 |
CN104195639B (zh) * | 2014-09-01 | 2017-02-15 | 大连理工大学 | 一种制备硼母合金的方法 |
CN111235399B (zh) * | 2020-03-13 | 2021-11-02 | 陕西创能新材料科技有限公司 | 制备钛棒的方法、钛棒、钛合金及钛合金器件 |
CN113604768B (zh) * | 2021-08-06 | 2023-03-10 | 江阴恩特莱特镀膜科技有限公司 | 一种用于喷涂靶材的硅磷粉末的生产设备及制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1204298A (zh) * | 1996-10-14 | 1999-01-06 | 川崎制铁株式会社 | 多晶硅的制造方法和装置以及太阳能电池用硅基片的制造方法 |
CN101905885A (zh) * | 2009-06-05 | 2010-12-08 | 贵阳宝源阳光硅业有限公司 | 一种用于提纯硅的低硼熔渣及其制备方法 |
CN102001662A (zh) * | 2010-12-10 | 2011-04-06 | 云南乾元光能产业有限公司 | 一种去除工业硅中硼、磷及其它杂质的综合利用方法 |
CN102040219A (zh) * | 2009-10-14 | 2011-05-04 | 贵阳宝源阳光硅业有限公司 | 一种由工业硅提纯制备高纯硅的方法 |
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JPH11240710A (ja) * | 1998-02-27 | 1999-09-07 | Kawasaki Steel Corp | シリコン鋳造用鋳型 |
JP2010116310A (ja) * | 2008-11-14 | 2010-05-27 | Koso Itokukei Zairyo Yugenkoshi | シリコンの精製方法及び精製装置 |
CN202063730U (zh) * | 2011-05-16 | 2011-12-07 | 大连隆田科技有限公司 | 一种电子束及渣滤熔炼提纯多晶硅的设备 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1204298A (zh) * | 1996-10-14 | 1999-01-06 | 川崎制铁株式会社 | 多晶硅的制造方法和装置以及太阳能电池用硅基片的制造方法 |
CN101905885A (zh) * | 2009-06-05 | 2010-12-08 | 贵阳宝源阳光硅业有限公司 | 一种用于提纯硅的低硼熔渣及其制备方法 |
CN102040219A (zh) * | 2009-10-14 | 2011-05-04 | 贵阳宝源阳光硅业有限公司 | 一种由工业硅提纯制备高纯硅的方法 |
CN102001662A (zh) * | 2010-12-10 | 2011-04-06 | 云南乾元光能产业有限公司 | 一种去除工业硅中硼、磷及其它杂质的综合利用方法 |
Non-Patent Citations (2)
Title |
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JP特开2010-116310A 2010.05.27 |
JP特开平11-240710A 1999.09.07 |
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