CN102120578B - 一种电子束除磷、除金属的耦合提纯多晶硅的方法及设备 - Google Patents
一种电子束除磷、除金属的耦合提纯多晶硅的方法及设备 Download PDFInfo
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CN201110031566A CN102120578B (zh) | 2011-01-29 | 2011-01-29 | 一种电子束除磷、除金属的耦合提纯多晶硅的方法及设备 |
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CN201110031566A CN102120578B (zh) | 2011-01-29 | 2011-01-29 | 一种电子束除磷、除金属的耦合提纯多晶硅的方法及设备 |
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CN102120578A CN102120578A (zh) | 2011-07-13 |
CN102120578B true CN102120578B (zh) | 2012-10-03 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103435043A (zh) * | 2013-08-28 | 2013-12-11 | 青岛隆盛晶硅科技有限公司 | 电子束熔炼与长晶技术耦合制备多晶硅的装置及工艺方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103981372B (zh) * | 2014-05-29 | 2016-06-01 | 大连理工大学 | 一种去除高温合金中微量杂质元素的方法 |
CN105567991A (zh) * | 2014-10-17 | 2016-05-11 | 宁波创润新材料有限公司 | 熔炼设备 |
CN104445903B (zh) * | 2014-11-25 | 2017-04-12 | 大连理工大学 | 一种电子束熔炼多晶硅粉体与定向凝固结合的装置及方法 |
CN104561574B (zh) * | 2014-12-24 | 2016-08-24 | 大连理工大学 | 一种电子束连续熔炼装置及利用该装置制备硅锭的方法 |
CN116086185B (zh) * | 2023-04-07 | 2024-01-05 | 无锡市胜钢超硬材料有限公司 | 一种镍基合金熔化装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3325900B2 (ja) * | 1996-10-14 | 2002-09-17 | 川崎製鉄株式会社 | 多結晶シリコンの製造方法及び装置、並びに太陽電池用シリコン基板の製造方法 |
CN101445957A (zh) * | 2008-12-16 | 2009-06-03 | 桂林实创真空数控设备有限公司 | 多晶硅提纯用真空电子束熔炼炉 |
CN101475174A (zh) * | 2009-01-23 | 2009-07-08 | 晶海洋半导体材料(东海)有限公司 | 一种提纯工业硅制备太阳能级硅的方法 |
CN201981011U (zh) * | 2011-01-29 | 2011-09-21 | 大连隆田科技有限公司 | 一种电子束除磷、除金属的耦合提纯多晶硅的设备 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3325900B2 (ja) * | 1996-10-14 | 2002-09-17 | 川崎製鉄株式会社 | 多結晶シリコンの製造方法及び装置、並びに太陽電池用シリコン基板の製造方法 |
CN101445957A (zh) * | 2008-12-16 | 2009-06-03 | 桂林实创真空数控设备有限公司 | 多晶硅提纯用真空电子束熔炼炉 |
CN101475174A (zh) * | 2009-01-23 | 2009-07-08 | 晶海洋半导体材料(东海)有限公司 | 一种提纯工业硅制备太阳能级硅的方法 |
CN201981011U (zh) * | 2011-01-29 | 2011-09-21 | 大连隆田科技有限公司 | 一种电子束除磷、除金属的耦合提纯多晶硅的设备 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103435043A (zh) * | 2013-08-28 | 2013-12-11 | 青岛隆盛晶硅科技有限公司 | 电子束熔炼与长晶技术耦合制备多晶硅的装置及工艺方法 |
CN103435043B (zh) * | 2013-08-28 | 2015-05-27 | 青岛隆盛晶硅科技有限公司 | 电子束熔炼与长晶技术耦合制备多晶硅的装置及工艺方法 |
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