CN101289188B - 去除多晶硅中杂质磷和金属杂质的方法及装置 - Google Patents
去除多晶硅中杂质磷和金属杂质的方法及装置 Download PDFInfo
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- CN101289188B CN101289188B CN2008100116318A CN200810011631A CN101289188B CN 101289188 B CN101289188 B CN 101289188B CN 2008100116318 A CN2008100116318 A CN 2008100116318A CN 200810011631 A CN200810011631 A CN 200810011631A CN 101289188 B CN101289188 B CN 101289188B
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 title claims abstract description 30
- 239000012535 impurity Substances 0.000 title claims abstract description 24
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 230000008569 process Effects 0.000 title claims abstract description 11
- 229910052698 phosphorus Inorganic materials 0.000 title abstract description 8
- 239000011574 phosphorus Substances 0.000 title abstract description 8
- 239000002184 metal Substances 0.000 title abstract 3
- 229910052751 metal Inorganic materials 0.000 title abstract 3
- 238000010894 electron beam technology Methods 0.000 claims abstract description 34
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 23
- 239000002210 silicon-based material Substances 0.000 claims abstract description 20
- 239000010453 quartz Substances 0.000 claims abstract description 19
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052802 copper Inorganic materials 0.000 claims abstract description 11
- 239000010949 copper Substances 0.000 claims abstract description 11
- 238000009792 diffusion process Methods 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 3
- 230000006698 induction Effects 0.000 claims abstract description 3
- 229920005591 polysilicon Polymers 0.000 claims description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910002804 graphite Inorganic materials 0.000 claims description 7
- 239000010439 graphite Substances 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 7
- 238000010926 purge Methods 0.000 claims description 6
- 238000003723 Smelting Methods 0.000 claims description 4
- 239000011796 hollow space material Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 239000000470 constituent Substances 0.000 claims description 2
- 235000013312 flour Nutrition 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000005272 metallurgy Methods 0.000 abstract description 3
- 239000011863 silicon-based powder Substances 0.000 abstract description 3
- 238000007711 solidification Methods 0.000 abstract description 2
- 230000008023 solidification Effects 0.000 abstract description 2
- 230000004927 fusion Effects 0.000 abstract 4
- 238000003892 spreading Methods 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000005204 segregation Methods 0.000 description 4
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 239000005046 Chlorosilane Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
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CN2008100116318A CN101289188B (zh) | 2008-05-30 | 2008-05-30 | 去除多晶硅中杂质磷和金属杂质的方法及装置 |
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CN2008100116318A CN101289188B (zh) | 2008-05-30 | 2008-05-30 | 去除多晶硅中杂质磷和金属杂质的方法及装置 |
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CN101289188A CN101289188A (zh) | 2008-10-22 |
CN101289188B true CN101289188B (zh) | 2010-06-02 |
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CN2008100116318A Expired - Fee Related CN101289188B (zh) | 2008-05-30 | 2008-05-30 | 去除多晶硅中杂质磷和金属杂质的方法及装置 |
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Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8329133B2 (en) * | 2008-11-03 | 2012-12-11 | Gt Crystal Systems, Llc | Method and apparatus for refining metallurgical grade silicon to produce solar grade silicon |
CN101445957B (zh) * | 2008-12-16 | 2011-01-19 | 桂林实创真空数控设备有限公司 | 多晶硅提纯用真空电子束熔炼炉 |
CN101708850B (zh) * | 2009-11-19 | 2011-09-14 | 大连理工大学 | 连续熔炼去除多晶硅中磷和硼的方法及装置 |
CN101787563B (zh) * | 2010-03-19 | 2012-05-23 | 大连隆田科技有限公司 | 感应和电子束熔炼去除多晶硅中杂质磷和硼的方法及装置 |
CN101913608B (zh) * | 2010-07-29 | 2012-07-25 | 大连理工大学 | 一种去除工业硅中硼的方法 |
CN101905886B (zh) * | 2010-08-02 | 2012-02-15 | 大连理工大学 | 一种电子束梯度熔炼提纯多晶硅的方法 |
CN101941698B (zh) * | 2010-08-17 | 2012-08-29 | 青岛隆盛晶硅科技有限公司 | 电子束熔炼高效去除硅中杂质磷的方法及装置 |
CN102126725B (zh) * | 2011-01-29 | 2012-12-19 | 大连隆田科技有限公司 | 一种电子束浅熔池熔炼提纯多晶硅的方法及设备 |
CN102126726A (zh) * | 2011-01-29 | 2011-07-20 | 大连隆田科技有限公司 | 一种电子束高效提纯多晶硅粉体的方法及设备 |
CN102145895B (zh) * | 2011-05-16 | 2012-10-03 | 大连隆田科技有限公司 | 一种浅熔池真空熔炼提纯多晶硅的方法及设备 |
CN102424388B (zh) * | 2011-09-13 | 2013-02-27 | 山西纳克太阳能科技有限公司 | 一种太阳能级多晶硅脱金属杂质的方法 |
CN103420375B (zh) * | 2012-05-21 | 2015-08-26 | 韩国能量技术研究院 | 基于电子束熔炼利用引锭杆制造多晶硅的装置及方法 |
CN102849743B (zh) * | 2012-09-25 | 2014-03-19 | 青岛隆盛晶硅科技有限公司 | 一种反向诱导凝固提纯多晶硅的方法及设备 |
CN103351002B (zh) * | 2013-07-20 | 2015-01-07 | 青岛隆盛晶硅科技有限公司 | 多晶硅定向凝固装置 |
CN104651930A (zh) * | 2013-11-22 | 2015-05-27 | 青岛隆盛晶硅科技有限公司 | 电子束除氧与初步铸锭耦合制备多晶硅的装置及方法 |
CN103818907A (zh) * | 2014-03-04 | 2014-05-28 | 黄道德 | 一种太阳能电池多晶硅的除磷方法 |
CN103818908A (zh) * | 2014-03-04 | 2014-05-28 | 黄道德 | 一种用于太阳能电池的多晶硅的制造方法 |
CN103981372B (zh) * | 2014-05-29 | 2016-06-01 | 大连理工大学 | 一种去除高温合金中微量杂质元素的方法 |
CN104195636A (zh) * | 2014-09-01 | 2014-12-10 | 大连理工大学 | 一种冶金法快速制备硼母合金的方法 |
CN104451175A (zh) * | 2014-12-07 | 2015-03-25 | 金川集团股份有限公司 | 一种高纯金属铸锭的制造方法 |
CN108328618B (zh) * | 2018-01-30 | 2021-02-09 | 青岛蓝光晶科新材料有限公司 | 一种电磁感应定向凝固分离硅中硬质夹杂的方法 |
CN109052408A (zh) * | 2018-10-17 | 2018-12-21 | 大连颐和顺新材料科技有限公司 | 一种金刚线切割硅粉的连续熔炼方法及设备 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1873062A (zh) * | 2006-05-06 | 2006-12-06 | 大连理工大学 | 一种太阳能电池用高纯多晶硅的制备方法和装置 |
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- 2008-05-30 CN CN2008100116318A patent/CN101289188B/zh not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1873062A (zh) * | 2006-05-06 | 2006-12-06 | 大连理工大学 | 一种太阳能电池用高纯多晶硅的制备方法和装置 |
Non-Patent Citations (4)
Title |
---|
吴亚萍等.多晶硅的真空感应熔炼及定向凝固研究.特种铸造及有色合金26 12.2006,26(12),792-794. |
吴亚萍等.多晶硅的真空感应熔炼及定向凝固研究.特种铸造及有色合金26 12.2006,26(12),792-794. * |
徐云飞等.冶金法制备多晶Si杂质去除效果研究.特种铸造及有色合金26 9.2006,26(9),730-732. |
徐云飞等.冶金法制备多晶Si杂质去除效果研究.特种铸造及有色合金26 9.2006,26(9),730-732. * |
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Owner name: QINGDAO LONGSHENG CRYSTAL SILICON TECHNOLOGY CO., Free format text: FORMER OWNER: DALIAN UNIVERSITY OF TECHNOLOGY Effective date: 20120710 |
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Effective date of registration: 20120710 Address after: Pudong solar energy industry base in Jimo city of Shandong Province, Qingdao City, 266000 Patentee after: Qingdao Longsheng Crystalline Silicon Science & Technology Co., Ltd. Address before: 116024 Liaoning, Dalian, Ganjingzi Ling Road, No. 2 Patentee before: Dalian University of Technology |
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