CN102219219B - 一种定向凝固及渣滤熔炼提纯多晶硅的方法及设备 - Google Patents
一种定向凝固及渣滤熔炼提纯多晶硅的方法及设备 Download PDFInfo
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- CN102219219B CN102219219B CN2011101259062A CN201110125906A CN102219219B CN 102219219 B CN102219219 B CN 102219219B CN 2011101259062 A CN2011101259062 A CN 2011101259062A CN 201110125906 A CN201110125906 A CN 201110125906A CN 102219219 B CN102219219 B CN 102219219B
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 80
- 230000008018 melting Effects 0.000 title claims abstract description 61
- 238000002844 melting Methods 0.000 title claims abstract description 61
- 239000002893 slag Substances 0.000 title claims abstract description 58
- 238000000034 method Methods 0.000 title claims abstract description 50
- 238000007711 solidification Methods 0.000 title abstract description 5
- 230000008023 solidification Effects 0.000 title abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 50
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 50
- 239000010703 silicon Substances 0.000 claims abstract description 50
- 239000012535 impurity Substances 0.000 claims abstract description 42
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052796 boron Inorganic materials 0.000 claims abstract description 40
- 239000007788 liquid Substances 0.000 claims abstract description 36
- 238000010438 heat treatment Methods 0.000 claims abstract description 32
- 239000002210 silicon-based material Substances 0.000 claims abstract description 29
- 229910052751 metal Inorganic materials 0.000 claims abstract description 24
- 239000002184 metal Substances 0.000 claims abstract description 24
- 239000002699 waste material Substances 0.000 claims abstract description 16
- 238000006243 chemical reaction Methods 0.000 claims abstract description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 46
- 229910002804 graphite Inorganic materials 0.000 claims description 35
- 239000010439 graphite Substances 0.000 claims description 35
- 238000003723 Smelting Methods 0.000 claims description 32
- 229920005591 polysilicon Polymers 0.000 claims description 31
- 241000282693 Cercopithecidae Species 0.000 claims description 24
- 230000006698 induction Effects 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 11
- 238000004321 preservation Methods 0.000 claims description 10
- 238000012423 maintenance Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
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- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
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- 238000005979 thermal decomposition reaction Methods 0.000 description 3
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- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
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- 238000010894 electron beam technology Methods 0.000 description 1
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- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- WRXVIGIHVLRVPC-UHFFFAOYSA-N silane trichlorosilane Chemical compound [SiH4].Cl[SiH](Cl)Cl WRXVIGIHVLRVPC-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001149 thermolysis Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Abstract
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CN2011101259062A CN102219219B (zh) | 2011-05-16 | 2011-05-16 | 一种定向凝固及渣滤熔炼提纯多晶硅的方法及设备 |
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CN102219219B true CN102219219B (zh) | 2012-11-07 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103318893A (zh) * | 2013-06-19 | 2013-09-25 | 青岛隆盛晶硅科技有限公司 | 多晶硅旋转凝固分离杂质的方法 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI498282B (zh) * | 2012-06-25 | 2015-09-01 | Silicor Materials Inc | 適用在用於純化矽之定向凝固之助熔劑組合物及其方法 |
CN102976334B (zh) * | 2012-12-13 | 2014-04-30 | 青岛隆盛晶硅科技有限公司 | 一种定向凝固尾料快速收集提纯多晶硅的方法及设备 |
CN102976332B (zh) * | 2012-12-13 | 2014-08-27 | 青岛隆盛晶硅科技有限公司 | 一种石英管取尾料式定向凝固提纯多晶硅的方法及设备 |
CN103318892A (zh) * | 2013-06-19 | 2013-09-25 | 青岛隆盛晶硅科技有限公司 | 多晶硅定向凝固诱导流动抑制杂质反扩散的方法 |
CN103420379B (zh) * | 2013-08-28 | 2016-03-02 | 青岛隆盛晶硅科技有限公司 | 电子束连续化熔炼制备太阳能级多晶硅的方法及其装置 |
CN105842031B (zh) * | 2016-05-09 | 2019-04-16 | 上海大学 | 高通量实验样品的制备设备 |
CN109112618A (zh) * | 2017-06-23 | 2019-01-01 | 镇江仁德新能源科技有限公司 | 一种太阳能多晶硅的定向凝固生长装置及方法 |
CN107523861A (zh) * | 2017-08-10 | 2017-12-29 | 镇江仁德新能源科技有限公司 | 一种在定向凝固过程中抓取杂质的方法 |
CN112743107B (zh) * | 2020-12-29 | 2022-10-25 | 西安交通大学 | 一种基于超高熔点合金的粉末冶金装置及冶金方法 |
CN113584586A (zh) * | 2021-08-06 | 2021-11-02 | 宁夏红日东升新能源材料有限公司 | 一种多晶硅离心定向凝固提纯方法与装置 |
CN114875484A (zh) * | 2022-04-15 | 2022-08-09 | 大连理工大学 | 一种电场耦合定向凝固技术回收金刚线切割硅粉制备高纯硅的方法 |
CN115784236A (zh) * | 2022-12-20 | 2023-03-14 | 宁夏海盛实业有限公司 | 工业硅杂质去除装置及其去除方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101343063A (zh) * | 2008-08-13 | 2009-01-14 | 厦门大学 | 太阳能级多晶硅的提纯装置及提纯方法 |
CN101920960A (zh) * | 2010-06-29 | 2010-12-22 | 华南师范大学 | 冶金法制备太阳能级多晶硅的方法及该方法制备的多晶硅 |
CN202226676U (zh) * | 2011-05-16 | 2012-05-23 | 大连隆田科技有限公司 | 一种定向凝固及渣滤熔炼提纯多晶硅的设备 |
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DE102005061690A1 (de) * | 2005-12-21 | 2007-07-05 | Solmic Gmbh | Verfahren zur Herstellung solartauglichen Siliziums |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN101343063A (zh) * | 2008-08-13 | 2009-01-14 | 厦门大学 | 太阳能级多晶硅的提纯装置及提纯方法 |
CN101920960A (zh) * | 2010-06-29 | 2010-12-22 | 华南师范大学 | 冶金法制备太阳能级多晶硅的方法及该方法制备的多晶硅 |
CN202226676U (zh) * | 2011-05-16 | 2012-05-23 | 大连隆田科技有限公司 | 一种定向凝固及渣滤熔炼提纯多晶硅的设备 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103318893A (zh) * | 2013-06-19 | 2013-09-25 | 青岛隆盛晶硅科技有限公司 | 多晶硅旋转凝固分离杂质的方法 |
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