CN102034925A - Flat FCB (Flip Chip Bonding) GaN-based LED (Light-Emitting Diode) chip structure - Google Patents

Flat FCB (Flip Chip Bonding) GaN-based LED (Light-Emitting Diode) chip structure Download PDF

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Publication number
CN102034925A
CN102034925A CN2010105220762A CN201010522076A CN102034925A CN 102034925 A CN102034925 A CN 102034925A CN 2010105220762 A CN2010105220762 A CN 2010105220762A CN 201010522076 A CN201010522076 A CN 201010522076A CN 102034925 A CN102034925 A CN 102034925A
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electrode
bonding
type gan
gan layer
layer
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CN2010105220762A
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CN102034925B (en
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沈燕
徐现刚
徐化勇
郑鹏
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Changshu intellectual property operation center Co.,Ltd.
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Shandong Huaguang Optoelectronics Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/14Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/49105Connecting at different heights
    • H01L2224/49107Connecting at different heights on the semiconductor or solid-state body

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Abstract

The invention provides a flat FCB (Flip Chip Bonding) GaN-based LED (Light-Emitting Diode) chip structure comprising a substrate. An N-type GaN layer, a QW (Quantum Well) active area, a P-type GaN layer, a current extension level and a light-reflecting layer are sequentially arranged below the substrate from top to bottom, a stepped surface to the N-type GaN layer is etched on the light-reflecting layer, an N electrode is made on the N-type GaN layer of the stepped surface, a P electrode is made on the light-reflecting layer and arranged on the same plane with the outer end of the P electrode, a transparent insulated medium film is coated on the plane of the P electrode bonding pad and the N electrode bonding pad except the regions of P electrode bonding pad and the N electrode bonding pad, a P bonding board is made at the outer end of the P electrode bonding spot, an N bonding board is made at the outer end of the bonding point of the N electrode, and the P bonding board and the N bonding board are bonded on a P electrode area and an N electrode area of a conductive Si or SiC substrate by cocrystallization or alloy. The insulated medium film is coated outside the PN bonding pads to prevent PN from being subjected to short circuits and a limit N-area electrode conductive flat is spliced to the P area desk.

Description

Dull and stereotyped flip chip bonding GaN based LED chip structure
Technical field
The present invention relates to the structure of a kind of GaN base blue-ray LED (light-emitting diode), belong to the light emitting diode construction technical field.
Background technology
The structure of traditional Sapphire Substrate GaN base LED (light-emitting diode) chip is provided with N type GaN layer 2, quantum well QW active area 3, P type GaN layer 4 and current extending 5 as shown in Figure 1 from the bottom to top successively on substrate 1, be provided with N electrode 7 on N type GaN layer 2.Electrode just is positioned at the exiting surface of chip.In this structure, fraction P type GaN layer 4 and " luminous " layer are etched, and electrically contact so that form with following N type GaN layer 2.Light takes out from top P type GaN layer 4.P type GaN layer 4 limited conductivity require to precipitate one deck current-diffusion layer 5 again on its surface.The beam split of the too thick meeting of this current-diffusion layer 5 absorbent portion, thus light extraction efficiency reduced, cross thin meeting and limit the ability of electric current at the big electric current of all even diffusion in surface of P type GaN layer 4.This structural constraint the operating power of led chip, the heat of this structure pn knot is derived by Sapphire Substrate and is gone, thermally conductive pathways is long, and sapphire thermal conductivity coefficient low than metal (be 35W/m? K), the led chip thermal resistance of this structure is big.Simultaneously, the p electrode of this structure and lead-in wire block part light.Device power, light extraction efficiency and the hot property of this packed LED chip all can not be optimum.
In order to overcome these deficiencies of above-mentioned traditional die, flip-chip (Flipchip) has been invented by Lumileds Lighting company, its structure as shown in Figure 2, substrate 1 is in the top, below substrate 1, be provided with N type GaN layer 2, quantum well QW active area 3, P type GaN layer 4, transparent current expansion 5 and reflection layer 6 from top to bottom successively, be etched with on the reflection layer 6 to the step surface of N type GaN layer 2, be manufactured with N electrode 7 on the N of this step surface type GaN layer, N electrode 7 and P electrode 8 are by metal salient point weldering plate 9,10 and 11 welding of lower end heat conduction Si substrate.In this structure, light takes out from Sapphire Substrate 1, needn't pass through current-diffusion layer 5 outgoing, and current-diffusion layer can be thickeied like this, increases the current density of Flipchip.This structure can also directly be led the heat of pn knot to the high backing material of thermal conductivity coefficient by metal salient point simultaneously, and radiating effect calibration assembling structure has greater advantage.
The heat that the pn knot produces in this inverted structure chip mainly passes to the backing material or the external world by metal salient point, and the common metal salient point has only the area of two pad sizes of chip, generally about 100um, concentrate density very big at metal salient point place heat, the some temperature of this position is quite high.If metal salient point is excessive, chip PN electrode causes the metal salient point adhesion and short circuit easily.Led chip power increases, and producing heat can't timely and effectively shed, and luminous efficiency is descended, the spectral red shift that temperature rise is launched chip, and the colour temperature quality descends, and the LED life-span reduces.
Chinese patent literature CN1967883 discloses a kind of " high power LED flip-chip and preparation method thereof ", is to pass through evaporation metal speculum on silicon on the basis of traditional inverted structure, to improve bright dipping, still still adopts traditional metal salient point heat conduction.Chinese patent literature patent CN1901189 discloses a kind of " plane flip-chip LED integrated chip and manufacture method ", but chip still is connected by solder-ball flip with silicon substrate.The heat that chip pn knot produces will be difficult to realize the target in led chip 100 ℃ of 100,000 hours life-spans of working temperature if can not well derive.
Summary of the invention
The present invention is directed to that limited, the excessive salient point of heat-conducting metal salient point causes this difficult problem of chip PN short circuit again easily in the flip chip structure, propose the dull and stereotyped flip chip bonding GaN based LED chip structure of a kind of good heat dissipation effect, metal pad panelized.
Dull and stereotyped flip chip bonding GaN based LED chip structure of the present invention adopts following technical solution:
This flat board flip chip bonding GaN based LED chip structure comprises substrate, is provided with N type GaN layer, quantum well QW active area, P type GaN layer, current extending and reflection layer below substrate from top to bottom successively; Be etched with on the reflection layer to the step surface of N type GaN layer, be manufactured with the N electrode on the N of this step surface type GaN layer, be manufactured with the P electrode on reflection layer, the outer end of N electrode and P electrode is in same horizontal plane; On other zone except that P electrode pad and N electrode pad of P electrode pad and N electrode pad place face, be coated with the layer of transparent dielectric insulating film, P electrode pads outer end is manufactured with P weldering plate, N electrode pads outer end is manufactured with N weldering plate, and P weldering plate and N weldering plate eutectic or gold alloy solder are received on the P electrode district and N electrode district of heat conduction Si substrate.
The present invention is coated with dielectric insulating film at PN pad exterior domain, prevented that PN is communicated with short circuit, derive two PN welding electrodes by the PN pad area, novelty is taken limited N region electrode heat conduction flat board to P district table top, has substituted the inverted structure that traditional PN solder joint is derived two metal salient points.This structure, metal salient point are converted into the sheet metal electrode, and the heat energy that its pn knot produces enough better leaves, isolate with deielectric-coating before two plate electrode welding disking areas simultaneously, can be not bonded to one another and short circuit, this structure LED radiating effect is more excellent, technology is simple and easy to realize, is fit to large-scale production in batches.
Description of drawings
Fig. 1 is the structural representation of common packed LED chip.
Fig. 2 is the structural representation of common flip LED chips.
Fig. 3 is the end view of the dull and stereotyped flip chip bonding GaN of the present invention base LED chip.
Fig. 4 is the vertical view of the dull and stereotyped flip chip bonding GaN of the present invention base LED chip.
Wherein: 1, substrate, 2, N type GaN layer, 3, quantum well QW active area, 4, P type GaN layer, 5, current extending, 6, reflection layer, 7, the N electrode, 8, dielectric insulating film, 9, P welds plate, 10, N welds plate, 11, heat conduction Si or SiC substrate.
Embodiment
The structure of dull and stereotyped flip chip bonding GaN base LED of the present invention is to improve on the basis of flip chip structure shown in Figure 2, as shown in Figure 3 and Figure 4, be etched with on the reflection layer 6 to the step surface of N type GaN layer 4, on the N of this step surface type GaN layer 4, be manufactured with N electrode 7, be manufactured with P electrode 8 on reflection layer 6, N electrode 7 is in same horizontal plane with the outer end of P electrode 8.On other zone except that P electrode pad and N electrode pad of P electrode pad and N electrode pad place face, be coated with layer of transparent dielectric insulating film 12.P electrode pads outer end is manufactured with P weldering plate 9, and N electrode pads outer end is manufactured with N weldering plate 10, and P weldering plate 9 and N weldering plate 10 are welded on the P electrode district and N electrode district of heat conduction Si or SiC substrate 11.
This structure mainly is flip-chip metal salient point welding passage of heat is extended to the metal flat welding, and one deck protective insulating film that passes through of novelty is taken the dull and stereotyped expansion of limited N region electrode heat conduction to P district table top.N weldering plate 10 is not taken to P district table top by the size restrictions expansion of N district can.

Claims (1)

1. a dull and stereotyped flip chip bonding GaN based LED chip structure comprises substrate, is provided with N type GaN layer, quantum well QW active area, P type GaN layer, current extending and reflection layer below substrate from top to bottom successively; Be etched with on the reflection layer to the step surface of N type GaN layer, be manufactured with the N electrode on the N of this step surface type GaN layer, be manufactured with the P electrode on reflection layer, it is characterized in that: the outer end of N electrode and P electrode is in same horizontal plane; On other zone except that P electrode pad and N electrode pad of P electrode pad and N electrode pad place face, be coated with the layer of transparent dielectric insulating film, P electrode pads outer end is manufactured with P weldering plate, N electrode pads outer end is manufactured with N weldering plate, and P weldering plate and N weldering plate eutectic or gold alloy solder are received on the P electrode district and N electrode district of heat conduction Si or SiC substrate.
CN2010105220762A 2010-10-28 2010-10-28 Flat FCB (Flip Chip Bonding) GaN-based LED (Light-Emitting Diode) chip structure Active CN102034925B (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102354721A (en) * 2011-11-04 2012-02-15 祝进田 Manufacturing method of LED (light-emitting diode) chip with inverted structure
CN102927481A (en) * 2011-11-25 2013-02-13 俞国宏 High-power LED lamp
CN103247743A (en) * 2013-05-24 2013-08-14 安徽三安光电有限公司 Veneering type lighting device and manufacturing method thereof
CN103311261A (en) * 2013-05-24 2013-09-18 安徽三安光电有限公司 Integrated LED (Light Emitting Diode) light emitting device and manufacturing method thereof
CN103531689A (en) * 2013-05-24 2014-01-22 安徽三安光电有限公司 Light emitting device
CN103824923A (en) * 2012-11-19 2014-05-28 罗容 Semiconductor luminous chip, semiconductor illuminating lamp and manufacture method thereof
CN104733598A (en) * 2013-12-20 2015-06-24 新世纪光电股份有限公司 Semiconductor light emitting structure and semiconductor packaging structure
CN105276911A (en) * 2014-05-29 2016-01-27 潍坊博瑞光电科技有限公司 LED refrigerator lighting device and manufacturing method thereof
WO2017063460A1 (en) * 2015-10-13 2017-04-20 厦门市三安光电科技有限公司 Eutectic electrode structure of led flip chip, and led flip chip
CN106997918A (en) * 2017-05-26 2017-08-01 厦门市东太耀光电子有限公司 A kind of LED chip front pad structure

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004006468A (en) * 2002-05-31 2004-01-08 Matsushita Electric Ind Co Ltd Semiconductor light emitting device
CN1967883A (en) * 2005-11-17 2007-05-23 上海蓝光科技有限公司 High power LED flip-chip and its manufacturing method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004006468A (en) * 2002-05-31 2004-01-08 Matsushita Electric Ind Co Ltd Semiconductor light emitting device
CN1967883A (en) * 2005-11-17 2007-05-23 上海蓝光科技有限公司 High power LED flip-chip and its manufacturing method

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102354721A (en) * 2011-11-04 2012-02-15 祝进田 Manufacturing method of LED (light-emitting diode) chip with inverted structure
CN102927481B (en) * 2011-11-25 2013-11-20 俞国宏 High-power LED lamp
CN102927481A (en) * 2011-11-25 2013-02-13 俞国宏 High-power LED lamp
CN103824923B (en) * 2012-11-19 2016-11-09 深圳大道半导体有限公司 A kind of semiconductor luminous chip, semiconductor lamp and manufacture method thereof
CN103824923A (en) * 2012-11-19 2014-05-28 罗容 Semiconductor luminous chip, semiconductor illuminating lamp and manufacture method thereof
CN103311261B (en) * 2013-05-24 2016-02-17 安徽三安光电有限公司 Integrated LED luminescent device and preparation method thereof
CN103531689A (en) * 2013-05-24 2014-01-22 安徽三安光电有限公司 Light emitting device
WO2014187162A1 (en) * 2013-05-24 2014-11-27 厦门市三安光电科技有限公司 Surface-mount light-emitting component and manufacturing method therefor
CN103311261A (en) * 2013-05-24 2013-09-18 安徽三安光电有限公司 Integrated LED (Light Emitting Diode) light emitting device and manufacturing method thereof
CN103247743B (en) * 2013-05-24 2016-04-20 安徽三安光电有限公司 Surface stuck type luminescent device and preparation method thereof
CN103247743A (en) * 2013-05-24 2013-08-14 安徽三安光电有限公司 Veneering type lighting device and manufacturing method thereof
US9537057B2 (en) 2013-05-24 2017-01-03 Xiamen Sanan Optoelectronics Technology Co., Ltd. Surface-mounted light-emitting device and fabrication method thereof
CN103531689B (en) * 2013-05-24 2017-02-22 安徽三安光电有限公司 Light emitting device
CN104733598A (en) * 2013-12-20 2015-06-24 新世纪光电股份有限公司 Semiconductor light emitting structure and semiconductor packaging structure
CN105276911A (en) * 2014-05-29 2016-01-27 潍坊博瑞光电科技有限公司 LED refrigerator lighting device and manufacturing method thereof
CN105276911B (en) * 2014-05-29 2019-08-20 潍坊博瑞光电科技有限公司 A kind of LED freezer lighting device and its manufacturing method
WO2017063460A1 (en) * 2015-10-13 2017-04-20 厦门市三安光电科技有限公司 Eutectic electrode structure of led flip chip, and led flip chip
CN106997918A (en) * 2017-05-26 2017-08-01 厦门市东太耀光电子有限公司 A kind of LED chip front pad structure

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Effective date of registration: 20151211

Address after: 261061 Weifang high tech Zone, Jin Road, No. 9, No.

Patentee after: Shandong Inspur Huaguang Optoelectronics Co., Ltd.

Address before: Tianchen Avenue high tech Zone of Ji'nan City, Shandong Province, No. 1835 250101

Patentee before: Shandong Huaguang Photoelectronic Co., Ltd.

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Effective date of registration: 20201120

Address after: 215500 No.13, Caotang Road, Changshu, Suzhou, Jiangsu Province

Patentee after: Changshu intellectual property operation center Co.,Ltd.

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Address after: 215500 5th floor, building 4, 68 Lianfeng Road, Changfu street, Changshu City, Suzhou City, Jiangsu Province

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Address before: No.13 caodang Road, Changshu City, Suzhou City, Jiangsu Province

Patentee before: Changshu intellectual property operation center Co.,Ltd.