CN101150156B - Lighting component and its making method - Google Patents

Lighting component and its making method Download PDF

Info

Publication number
CN101150156B
CN101150156B CN2006101396321A CN200610139632A CN101150156B CN 101150156 B CN101150156 B CN 101150156B CN 2006101396321 A CN2006101396321 A CN 2006101396321A CN 200610139632 A CN200610139632 A CN 200610139632A CN 101150156 B CN101150156 B CN 101150156B
Authority
CN
China
Prior art keywords
light
electrode
layer
dimpling
emitting component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2006101396321A
Other languages
Chinese (zh)
Other versions
CN101150156A (en
Inventor
谢育仁
范轩诚
许政义
黄崇桂
林锦源
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Epistar Corp
Original Assignee
Epistar Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epistar Corp filed Critical Epistar Corp
Priority to CN2006101396321A priority Critical patent/CN101150156B/en
Publication of CN101150156A publication Critical patent/CN101150156A/en
Application granted granted Critical
Publication of CN101150156B publication Critical patent/CN101150156B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

This invention discloses a light emitting element suitable for jointing flip chips and its manufacturing method, in which, the light-emitting element includes an electrode with multiple micro-convex blocks used in jointing to a base directly, and the light-emitting element can form joint of short distance with the base to increase radiating efficiency of the element.

Description

Light-emitting component and manufacturing approach thereof
Technical field
The present invention relates to a kind of light-emitting component, particularly relate to a kind of light-emitting component with dimpling cube electrode.
Background technology
Light-emitting diode (Light Emitting Diode; LED) in the utilization of high power illumination, except continuing to promote the brightness, heat dissipation problem is another subject matter of needing solution badly.When light emitting diode light taking-up efficient was not good, the light that can't pass light-emitting device (light-emitting diode and packaging body thereof) can convert heat energy into.If can't effectively this heat energy be derived light-emitting device, light-emitting diode temperature when operation can rise, thereby causes the component reliability problem.Prior Art proposes many methods for solving the element radiating problem.For example in light-emitting component with sapphire substrate gallium nitride growth series; Utilize the secondary transferring mode to remove the relatively poor sapphire substrate of thermal conductivity with the laser light irradiation or with the chemical etching mode; Combine the preferable silicon substrate of a thermal conductivity again, to improve the radiating effect of crystal grain itself.Another improvement mode is to replace traditional lead with flip-chip bond (flip-chip bonding) to engage (wire bonding).Fig. 1 discloses a kind of existing flip-chip bond light-emitting device; Comprise a light-emitting diode 10 and a base unit (submountunit) 20; Gold goal projection 24 is formed on first joint sheet 22 and second joint sheet 23, in order in a connection process, light-emitting diode 10 is combined with base unit 20.Gold goal projection 24 is to plant gold goal (Goldstud bump) mode; Be formed on one by one on first joint sheet 22 and second joint sheet 23; Utilize hot sound wave to engage (thermosonic bonding) mode again; Gold goal projection on the base unit 20 24 and the electrode 15 of light-emitting diode 10 and 16 composition surface are imposed ultrasonic waves (ultrasonic wave), the composition surface is rubbed fast produce high heat and the fusion joint.General gold goal diameter is about about 50um, and each gold goal size must be close, and avoiding when engaging, lower gold goal can't touch the face of being engaged, and influence product performance and joint rate of finished products.In addition; Because gold goal,, is sticked together on pedestal after the fusion of gold thread front end is spheroid with hot sound wave mode by gold thread; Size-constrained in the gold thread size and the further micro of gold goal; Cause thickness behind the joint still greater than 20um, therefore can't further reduce the thermal resistance (thermal resistance) of 21 of light-emitting diode 10 and pedestals, thereby limit the application of light-emitting diode 10 at high-power component.
Therefore, the present invention proposes a light-emitting component, can be used for flip-chip and directly engages, and need not extraly plant gold goal on pedestal, have bonding area wide, engage that distance is short, thermal conductivity is high, reliability is good, and the low advantage of cost.
Summary of the invention
The present invention proposes a light-emitting component; The mode with flip-chip bond that is applicable to directly is engaged on the pedestal; Comprise electrode, and light-emitting component forms a short distance through a plurality of dimpling pieces and pedestal and engages, to improve the radiating efficiency of light-emitting component with a plurality of dimpling pieces.
Another object of the present invention is providing a light-emitting component; Comprise that a transparency carrier, one first conduction type semiconductive layer are formed on this transparency carrier, an active layer is formed on this first conduction type semiconductive layer, one second conduction type semiconductive layer is formed on this active layer, a contact layer is formed on this second conduction type semiconductive layer and an electrode; Have a plurality of dimpling pieces; Be formed on this contact layer, in order to directly to be engaged on the pedestal.Wherein, these a plurality of dimpling pieces are one of the forming on this electrode.
Another object of the present invention is providing a light-emitting component, comprises a light-emitting diode, a pedestal and a plurality of dimpling piece.This light-emitting diode comprises a transparency carrier and at least one electrode, and this pedestal comprises at least one joint sheet, and these a plurality of dimpling pieces and are integrally formed on electrode or the joint sheet then between electrode and joint sheet.
Another object of the present invention comprises providing a light-emitting diode to comprise a transparency carrier and at least one electrode that form a plurality of dimpling pieces on this electrode, wherein, these a plurality of dimpling pieces are one of the forming on this electrode in the manufacturing approach that a light-emitting component is provided.
Description of drawings
Fig. 1 is a sketch map, shows according to the light-emitting component shown in the Prior Art;
Fig. 2 is a sketch map, shows according to a light-emitting component shown in the present;
Fig. 3 is a sketch map, shows according to another embodiment shown in the present;
Fig. 4 is a sketch map, shows according to another embodiment shown in the present;
Fig. 5 is a sketch map, shows according to another embodiment shown in the present;
Fig. 6 is a sketch map, shows according to an electrode top view shown in the present;
Fig. 7 is a sketch map, shows according to another electrode top view shown in the present;
Fig. 8 is according to the measured electric current of the present invention and the usefulness curve chart of luminous quantity.
The simple symbol explanation
10,30,50,60,70: luminescence unit;
20,40: base unit;
11,31: transparency carrier;
21,41: pedestal;
12,32,62,72: luminous lamination;
121,321,621,721: the first conductive type semiconductor layers;
122,322,622,722: active layer;
123,323,623,723: the second conductive type semiconductor layers;
13,33,63,73: the first contact layers;
14,34,64,74: the second contact layers;
15,35,65,75,85,95: the first electrodes;
16,36,66,76,86,96: the second electrodes;
22,42: the first joint sheets;
23,43: the second joint sheets;
24: the gold goal projection;
37: the electrode bed course.
Embodiment
Please refer to Fig. 2, comprise a light-emitting diode 30 and a base unit 40 according to a light-emitting component of the present invention.Light-emitting diode 30 comprises a transparency carrier 31, comprises that at least a material is selected from Al 2O 3, GaN, Glass, GaP, SiC, and CVD diamond the material group, the luminous lamination 32 that are constituted be formed on the transparency carrier 31, luminous lamination 32 can emit beam when receiving driven, the color of this light depends on the material of luminous lamination 32, for example (Al zGa 1-z) 0.5In 0.5The visual z value of material of P series is sent red, yellow or green light; Al xIn yGa (1-x-y)The then visual x of material of N series, the composition of y send the light of indigo plant or purple, one first contact layer 33, one second contact layer 34, one first electrode 35, and one second electrode 36.Luminous lamination 32 comprises one first conductive type semiconductor layer 321, an active layer (active layer) 322, and one second conductive type semiconductor layer 323; First conductive type semiconductor layer 321 can be n type or p type semiconductor layer; The conduction type of second conductive type semiconductor layer 323 and first conductivity type opposite, wherein second conductive type semiconductor layer 323 of part and active layer 322 are etched and remove with exposed first conductive type semiconductor layer 321 partly.First contact layer 33 is formed on the first exposed conductive type semiconductor layer 321; Second contact layer 34 is formed on second conductive type semiconductor layer 323; First contact layer 33 and second contact layer 34 are in order to form ohmic contact (ohmic contact) with first conductive type semiconductor layer 321 and second conductive type semiconductor layer 323 respectively, and first contact layer 33 or second contact layer 34 comprise that a kind of material is selected from BeAu, ZnAu, SiAu, reaches the material group that GeAu constituted.First electrode 35 is formed on first contact layer 33, and 36 at second electrode is formed on second contact layer 34.In one embodiment, light-emitting diode 30 comprises that also an electrode bed course 37 is formed between second contact layer 34 and second electrode 36, so that the upper surface of second electrode 36 and first electrode 35 is in fact on same horizontal plane.First electrode 35 or second electrode 36 comprise that at least a material is selected from gold, silver, aluminium, reaches the material group that copper constituted, and the material of electrode bed course 37 can be and is same as second electrode or second contact layer or other metal material.First electrode 35 and second electrode, 36 surfaces have a plurality of dimpling pieces, when directly being engaged in a base unit 40, for example are printed circuit board (PCB) (printed circuit board; PCB) time,, electric current is conducted on the pedestal through a plurality of dimpling pieces in order to a plurality of current channels to be provided.The mode that directly the engages mode like hot sound wave joint (thermosonic bonding) capable of using is directly to be engaged in a base unit 40.Base unit 40 comprises that a pedestal 41 and one first joint sheet 42 and one second joint sheet 43 are formed on the pedestal 41, in order to engage with first electrode 35 and second electrode 36 respectively; Pedestal 41 comprises the material that a heat conduction is good, comprises that at least a material is selected from silicon, SiC, AlN, CuW, Cu, reaches the material group that the CVD diamond is constituted; First joint sheet 42 or second joint sheet 43 comprise a metal or alloy material, for example gold, silver, aluminium or ashbury metal.In an embodiment, a plurality of dimpling pieces can existing photoetching and etching mode carry out the patterning and a part of degree of depth of etching electrode layer to form a plurality of dimpling pieces.The thickness of dimpling piece is 0.3~20um, and shape then can be polygon, circle or strip; The minor face length of the for example polygonal minimum length of side of the size of dimpling piece, round diameter or strip is between 1um to 250um.In a preferred embodiment of the present invention; Minimum dimpling piece thickness is 0.3um, after engaging, can provide a short circuit to close distance significantly to reduce the thermal resistance of 40 of light-emitting diode 30 and base units; And have the acceptable grow degree (shear strength) of cutting, to keep good joint.In another embodiment, as shown in Figure 3, electrode 55 and 56 is a plurality of dimpling pieces separated from one another, can existing photoetching and etching mode form, perhaps can be optionally to electroplate or the film growth mode form.
Please continue with reference to figure 4, according to another embodiment of the present invention, a light-emitting component comprises a light-emitting diode 60 and a base unit 40.Light-emitting diode 60 comprises a transparency carrier 31, has a first area a, a second area b on the transparency carrier 31, reaches a trench area c; One luminous lamination 62 is formed at first area a and the second area b on the transparency carrier 31 haply; Luminous lamination comprises one first conductive type semiconductor layer 621, an active layer (active layer) 622, and one second conductive type semiconductor layer 623 in regular turn, and the luminous lamination 62 that is positioned at first area a and second area b is connected with first conductive type semiconductor layer 621; One first contact layer 63 is formed on second conductive type semiconductor layer 623 that is positioned at first area a, one second contact layer 64 is formed on second conductive type semiconductor layer 623 that is positioned at second area b; One first electrode 65 is formed on first contact layer 63, and one second electrode 66 be formed on second contact layer 64.Because the luminous lamination 62 of first electrode, 65 belows does not remove, so first electrode 65 and second electrode 66 can be maintained at the same horizontal plane.Wherein, first electrode 65 and second electrode 66 comprise a plurality of dimpling pieces, when directly being engaged in a base unit 40, in order to a plurality of current channels to be provided, electric current are conducted on the pedestal through a plurality of dimpling pieces; The mode that directly the engages mode like hot sound wave joint (thermosonic bonding) capable of using is directly to be engaged in a base unit 40; These a plurality of dimpling pieces can existing photoetching and etching mode carry out the patterning and a part of degree of depth of etching electrode layer to form the dimpling piece.The thickness of dimpling piece is 0.3~20um, and shape then can be polygon, circle or strip; The minor face length of the for example polygonal minimum length of side of the size of dimpling piece, round diameter or strip is between 1~250um.In a preferred embodiment, minimum dimpling piece thickness is 0.3um, after engaging, can provide a short circuit to close distance significantly reducing thermal resistance, and have the acceptable grow degree (shear strength) of cutting, to keep good joint.In another embodiment, first electrode 65 and second electrode 66 can be a plurality of dimpling pieces separated from one another, can existing photoetching and etching mode form, perhaps can be optionally to electroplate or the film growth mode form.
Please continue with reference to figure 5, according to another embodiment of the present invention, a light-emitting diode 70 comprises a transparency carrier 31, has a first area a, a second area b on the transparency carrier 31, reaches a trench area c; One luminous lamination 72 is formed at first area a and the second area b on the transparency carrier 31 haply, and luminous lamination 72 comprises one first conductive type semiconductor layer 721, an active layer (active layer) 722, and one second conductive type semiconductor layer 723 in regular turn; Wherein, second conductive type semiconductor layer, 723 surfaces have concaveconvex shape, and the luminous lamination 72 that is positioned at first area a and second area b is connected with first conductive type semiconductor layer 721; One first contact layer 73 and one second contact layer 74 are complied with the surface configuration of second conductive type semiconductor layer 723, are formed at respectively on second conductive type semiconductor layer 723 of first area a and second area b; And one first electrode 75 and one second electrode 76 comply with the surface configuration of first contact layer 73 and second contact layer 74; Be formed at respectively on first contact layer 73 and second contact layer 74; Make first electrode 75 and second electrode, 76 surfaces form a plurality of dimpling pieces; When directly being engaged in a base unit 40,, electric current is conducted on the pedestal through a plurality of dimpling pieces in order to a plurality of current channels to be provided.The mode that directly the engages mode like hot sound wave joint (thermosonic bonding) capable of using is directly to be engaged in a base unit 40.In an embodiment, the concaveconvex shape of second conductive type semiconductor layer 723 forms with existing photoetching etching mode; The formation of first electrode 75 and second electrode 76; Deposit in regular turn earlier one conform to second conductive type semiconductor layer the electrode layer of contact layer on second conductive type semiconductor layer; Again with existing mode, for example the photoetching etching mode or (lift-off) method of the peeling off contact layer and electrode layer that will be positioned at trench area removes.Wherein, The dimpling piece thickness of first electrode 75 and second electrode 76 is between 0.3~20um; The shape of dimpling piece can be polygon, circle or strip, and the minor face of the for example polygonal minimum length of side of its size, round diameter or strip is long to be between 1um~250um.In a preferred embodiment, minimum dimpling piece thickness is 0.3um, after engaging, can provide a short circuit to close distance significantly reducing thermal resistance, and have the acceptable grow degree (shearstrength) of cutting to keep good joint.In another embodiment, second conductive type semiconductor layer is a flat surface, and contact layer has convex-concave surface, and the surface configuration that follow-up electrode layer is complied with contact layer is covered on the contact layer, makes electrode surface have the shape of dimpling piece.
Another embodiment of the present invention also can be used earlier figures 2 and inventive principle that Fig. 3 disclosed, a plurality of dimpling pieces are formed on first joint sheet 42 and second joint sheet 43 of base unit 40, but still road to identical joint effect.
Fig. 6 and Fig. 7 for this case according to electrode embodiment that the present invention disclosed.Like Fig. 6 and shown in Figure 7, a plurality of dimpling pieces on first electrode (85 and 95) or second electrode (86 and 96) are circle or strip, and are an array arrangement.For obtaining preferable joint effect; Can adjust the size and the arrangement mode thereof of dimpling piece or increase bonding area (being dimpling piece surface area summation); But along with bonding area increases; The requirement of electrode evenness with raising, to avoid causing factors such as buckling phenomenon because of dimpling piece uneven thickness or crystal grain stress, causing partly, sunk area engages bad.It is between 5% to 50% that bonding area accounts for electrode region surrounded area ratio.
Fig. 8 be traditional gold goal engage with the usefulness curve ratio that directly engages of the present invention.In embodiments of the invention, the dimpling piece of electrode is the circle of diameter 10um, is an array and arranges, and account for total electrode area and be about 5% (being same as the gold goal contact area approximately).Can know that by curve among the figure luminous quantity (flux) is roughly with proportional through electric current, but with the electric current increase, luminous quantity can present gradually saturated.Use the light-emitting component of traditional gold goal connected structure; Its saturation current is about 0.7 ampere (A); Maximum luminous quantity is about 50 lumens (lm); And being about 1.2 amperes (A) according to the measured saturation current of the light-emitting component of the direct connected structure of the present invention, maximum luminous quantity is about 75 lumens (lm), improves about 50%.Following table then be measured thermal resistance value relatively, can know by following table, according to the thermal resistance between light-emitting component of the present invention and base unit far below the thermal resistance between the conventional luminescent device base unit.In sum, the present invention has and reaches the progressive effect that causes low thermal resistance and high brightness.
Juncture V f[V] I f[A] ΔT[K] Thermal resistance [℃/W]
Gold goal engages 0.35 2.25 30.4 38.6
Au-Au directly engages 0.35 2.26 15.6 19.7
Each cited embodiment of the present invention is merely in order to explanation the present invention, is not in order to limit scope of the present invention.Anyone is to any modification that the present invention did or change neither disengaging claim of the present invention.

Claims (5)

1. light-emitting component comprises:
Transparency carrier;
The first conduction type semiconductive layer is formed on this transparency carrier;
Active layer is formed on this first conduction type semiconductive layer;
The second conduction type semiconductive layer is formed on this active layer;
Contact layer is formed on this second conduction type semiconductive layer, and forms ohmic contact with this second conduction type semiconductive layer, and contact layer has convex-concave surface; And
Electrode, the surface configuration of complying with this contact layer is formed on this contact layer thereby has a plurality of dimpling pieces, and when being used to this light-emitting component and being engaged on the pedestal via these a plurality of dimpling pieces, these a plurality of dimpling pieces provide a plurality of current channels,
Wherein these a plurality of dimpling pieces and this electrode are one of the forming on this contact layer.
2. light-emitting component as claimed in claim 1, wherein the thickness of these a plurality of dimpling pieces is between 0.3~20 micron.
3. light-emitting component as claimed in claim 1, wherein the shape of these a plurality of dimpling pieces comprises circle, strip, polygon or its combination.
4. light-emitting component as claimed in claim 1 also comprises pedestal, and these a plurality of dimpling pieces of this electrode are engaged on this pedestal with hot sound wave juncture.
5. light-emitting component as claimed in claim 1, wherein the material of these a plurality of dimpling pieces comprises that at least a material is selected from gold, silver, aluminium, reaches the material group that copper constituted.
CN2006101396321A 2006-09-22 2006-09-22 Lighting component and its making method Active CN101150156B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2006101396321A CN101150156B (en) 2006-09-22 2006-09-22 Lighting component and its making method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2006101396321A CN101150156B (en) 2006-09-22 2006-09-22 Lighting component and its making method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201010163933.4A Division CN101834254B (en) 2006-09-22 Luminescence component and manufacture method thereof

Publications (2)

Publication Number Publication Date
CN101150156A CN101150156A (en) 2008-03-26
CN101150156B true CN101150156B (en) 2012-05-30

Family

ID=39250571

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006101396321A Active CN101150156B (en) 2006-09-22 2006-09-22 Lighting component and its making method

Country Status (1)

Country Link
CN (1) CN101150156B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102054906A (en) * 2009-11-09 2011-05-11 亿光电子工业股份有限公司 Manufacturing method of LED and LED
CN102074636B (en) * 2009-11-19 2013-04-10 亿光电子工业股份有限公司 Light-emitting diode device with flip chip structure
CN102437261B (en) * 2010-09-29 2016-04-20 晶元光电股份有限公司 Semiconductor light-emitting elements and manufacture method thereof
CN102064164B (en) * 2010-10-28 2012-03-21 山东华光光电子有限公司 Freely combined lamp wick of flip-chip power LED tube core
CN104282816A (en) * 2013-07-05 2015-01-14 大连徳豪光电科技有限公司 Flip chip light-emitting diode with Bragg reflecting layer and method for manufacturing flip chip light-emitting diode with Bragg reflecting layer
US9548247B2 (en) * 2013-07-22 2017-01-17 Infineon Technologies Austria Ag Methods for producing semiconductor devices
US9812616B2 (en) * 2014-07-31 2017-11-07 Seoul Viosys Co., Ltd. Light-emitting diode
CN104810439A (en) * 2015-05-05 2015-07-29 湘能华磊光电股份有限公司 Method for manufacturing III-group semiconductor light-emitting devices
US10868216B2 (en) 2018-03-29 2020-12-15 Kunshan New Flat Panel Display Technology Center Co., Ltd. Display devices, light emitting diode chips and methods for manufacturing the same
CN208014728U (en) * 2018-03-29 2018-10-26 昆山工研院新型平板显示技术中心有限公司 Display device and its light-emitting diode chip for backlight unit
CN110867462A (en) * 2019-10-30 2020-03-06 深圳市华星光电半导体显示技术有限公司 Display panel and display device
CN112909153B (en) * 2019-12-03 2022-12-16 深圳市聚飞光电股份有限公司 Flip LED chip, circuit board and electronic equipment
WO2022011518A1 (en) * 2020-07-13 2022-01-20 重庆康佳光电技术研究院有限公司 Flip led chip, production method therefor, and display panel

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2760762Y (en) * 2004-04-08 2006-02-22 炬鑫科技股份有限公司 Gallium nitride LED structure
CN1776926A (en) * 1997-01-31 2006-05-24 松下电器产业株式会社 Light-emitting element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1776926A (en) * 1997-01-31 2006-05-24 松下电器产业株式会社 Light-emitting element
CN2760762Y (en) * 2004-04-08 2006-02-22 炬鑫科技股份有限公司 Gallium nitride LED structure

Also Published As

Publication number Publication date
CN101150156A (en) 2008-03-26

Similar Documents

Publication Publication Date Title
CN101150156B (en) Lighting component and its making method
US8067780B2 (en) Light emitting device and the manufacture method thereof
US8211722B2 (en) Flip-chip GaN LED fabrication method
US20060068515A1 (en) Method for manufacturing a GaN based LED of a back hole structure
CN101325236A (en) LED chip and manufacturing method thereof
CN100386890C (en) Method of mfg. GaN-base LED
CN103022334A (en) High-voltage inverted LED chip and manufacturing method thereof
CN102881799A (en) High voltage LED (light-emitting diode) chip and manufacturing methods thereof
CN102332521A (en) GaN (gallium nitride)-based LED (light-emitting diode) with N-type electrodes in dotted distribution and manufacturing method thereof
CN101359704B (en) Light element device and method for manufacturing same
CN101894851A (en) Addressable gallium nitride-based LED display microarray and preparation method thereof
CN108493311A (en) A kind of deep ultraviolet LED epitaxial chips encapsulating structure and preparation method
CN104393137A (en) Upside-down mounted luminescent device and manufacturing method thereof
JP5407116B2 (en) Light emitting device
TW201336116A (en) Light emitting diode unit and flip-chip light emitting diode packaging unit
CN101409319A (en) Method for manufacturing LED using bonding technology
CN101521251A (en) Manufacturing method of light-emitting diode (LED) with vertical structure
CN101359707A (en) LED and manufacturing method thereof
US9018643B2 (en) GaN LEDs with improved area and method for making the same
CN102569573A (en) LED chip for improving heat conduction
CN100353576C (en) Production of inverted gallium nitride base light emitting diode chip
CN102185046A (en) Method for manufacturing gallium nitride-based LED (Light Emitting Diode) with vertical structure
TWI525849B (en) A light-emitting device
CN101834254A (en) Light-emitting assembly and manufacture method thereof
CN101834254B (en) Luminescence component and manufacture method thereof

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant