CN101949006A - 氮化铜薄膜、氮化铜/铜以及铜二维有序阵列的制备方法 - Google Patents
氮化铜薄膜、氮化铜/铜以及铜二维有序阵列的制备方法 Download PDFInfo
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- CN101949006A CN101949006A CN 201010228989 CN201010228989A CN101949006A CN 101949006 A CN101949006 A CN 101949006A CN 201010228989 CN201010228989 CN 201010228989 CN 201010228989 A CN201010228989 A CN 201010228989A CN 101949006 A CN101949006 A CN 101949006A
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- copper
- nitride
- copper nitride
- ion implantation
- film
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- 239000010949 copper Substances 0.000 title claims abstract description 169
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 162
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 89
- -1 copper nitride Chemical class 0.000 title claims abstract description 74
- 238000000034 method Methods 0.000 title abstract description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 34
- 238000005468 ion implantation Methods 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 238000004544 sputter deposition Methods 0.000 claims abstract description 22
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 18
- 238000002360 preparation method Methods 0.000 claims abstract description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 15
- 239000010703 silicon Substances 0.000 claims abstract description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 9
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 5
- 239000002184 metal Substances 0.000 claims abstract description 5
- 239000000919 ceramic Substances 0.000 claims abstract description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 16
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 14
- 238000009415 formwork Methods 0.000 claims description 14
- 238000002347 injection Methods 0.000 claims description 11
- 239000007924 injection Substances 0.000 claims description 11
- 238000002513 implantation Methods 0.000 claims description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 5
- 230000002146 bilateral effect Effects 0.000 claims description 5
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 5
- 229960001866 silicon dioxide Drugs 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 238000010790 dilution Methods 0.000 claims description 3
- 239000012895 dilution Substances 0.000 claims description 3
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 16
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 abstract description 3
- 239000002086 nanomaterial Substances 0.000 abstract description 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000003786 synthesis reaction Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 49
- 238000005516 engineering process Methods 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- 238000001755 magnetron sputter deposition Methods 0.000 description 6
- 238000004062 sedimentation Methods 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 229910018069 Cu3N Inorganic materials 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 238000004549 pulsed laser deposition Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- DOIHHHHNLGDDRE-UHFFFAOYSA-N azanide;copper;copper(1+) Chemical compound [NH2-].[Cu].[Cu].[Cu+] DOIHHHHNLGDDRE-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000002000 scavenging effect Effects 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 229910002785 ReO3 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- HZXGNBMOOYOYIS-PAMPIZDHSA-L copper;(z)-1,1,1,5,5,5-hexafluoro-4-oxopent-2-en-2-olate Chemical compound [Cu+2].FC(F)(F)C(/[O-])=C/C(=O)C(F)(F)F.FC(F)(F)C(/[O-])=C/C(=O)C(F)(F)F HZXGNBMOOYOYIS-PAMPIZDHSA-L 0.000 description 1
- PTVDYARBVCBHSL-UHFFFAOYSA-N copper;hydrate Chemical compound O.[Cu] PTVDYARBVCBHSL-UHFFFAOYSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- VDGJOQCBCPGFFD-UHFFFAOYSA-N oxygen(2-) silicon(4+) titanium(4+) Chemical compound [Si+4].[O-2].[O-2].[Ti+4] VDGJOQCBCPGFFD-UHFFFAOYSA-N 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- 238000001149 thermolysis Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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CN 201010228989 CN101949006B (zh) | 2010-07-16 | 2010-07-16 | 氮化铜薄膜、氮化铜/铜以及铜二维有序阵列的制备方法 |
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CN101949006A true CN101949006A (zh) | 2011-01-19 |
CN101949006B CN101949006B (zh) | 2013-05-08 |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102517551A (zh) * | 2011-12-26 | 2012-06-27 | 常州大学 | 一种三维光子晶体的的制备方法 |
CN102623389A (zh) * | 2011-01-31 | 2012-08-01 | 北京泰龙电子技术有限公司 | 一种金属氮化物阻挡层的制备方法 |
CN103021931A (zh) * | 2011-09-23 | 2013-04-03 | 北京泰龙电子技术有限公司 | 一种金属氮化物阻挡层的制备方法 |
CN103276356A (zh) * | 2013-05-20 | 2013-09-04 | 杭州电子科技大学 | 一种提高Cu3N薄膜热稳定性的方法 |
CN109055976A (zh) * | 2018-08-03 | 2018-12-21 | 北京化工大学 | 一种多级结构过渡金属氮化物电极材料及其制备方法 |
CN109546157A (zh) * | 2018-11-07 | 2019-03-29 | 三峡大学 | 一种铜、氮化钴与碳原位复合电极的制备方法 |
AT523830B1 (de) * | 2020-08-03 | 2021-12-15 | Ruebig Ges M B H & Co Kg | Verfahren zur Herstellung einer antimikrobiellen Beschichtung |
CN114361414A (zh) * | 2021-12-28 | 2022-04-15 | 广东马车动力科技有限公司 | 一种复合材料及其制备方法与电池 |
CN117228641A (zh) * | 2023-11-16 | 2023-12-15 | 北京大学 | 一种补偿氮空位并抑制漏电流的氮化物铁电薄膜的制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005347654A (ja) * | 2004-06-07 | 2005-12-15 | Kyushu Institute Of Technology | 銅表面保護膜の形成方法と保護膜の形成された銅表面の処理方法 |
US20070187812A1 (en) * | 2004-06-07 | 2007-08-16 | Akira Izumi | Method for processing copper surface, method for forming copper pattern wiring and semiconductor device manufactured using such method |
CN101413104A (zh) * | 2008-11-28 | 2009-04-22 | 江苏工业学院 | 离子束增强沉积制备氮化铜薄膜的方法 |
WO2009125507A1 (ja) * | 2008-04-09 | 2009-10-15 | Ma Xiaodong | ナノワイヤの形成方法 |
-
2010
- 2010-07-16 CN CN 201010228989 patent/CN101949006B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005347654A (ja) * | 2004-06-07 | 2005-12-15 | Kyushu Institute Of Technology | 銅表面保護膜の形成方法と保護膜の形成された銅表面の処理方法 |
US20070187812A1 (en) * | 2004-06-07 | 2007-08-16 | Akira Izumi | Method for processing copper surface, method for forming copper pattern wiring and semiconductor device manufactured using such method |
WO2009125507A1 (ja) * | 2008-04-09 | 2009-10-15 | Ma Xiaodong | ナノワイヤの形成方法 |
CN101413104A (zh) * | 2008-11-28 | 2009-04-22 | 江苏工业学院 | 离子束增强沉积制备氮化铜薄膜的方法 |
Non-Patent Citations (3)
Title |
---|
《Applied Surface Science》 20010115 Toshikazu Nosaka et al Thermal decomposition of copper nitride thin films and dots formation by electron beam writing 期刊第360页第3段至361页第1段 5 第169-170卷, 2 * |
《物理学报》 20060731 赵信峰等 金属铜纳米孔洞阵列膜制备方法研究 参见期刊第3785页第4段-第3786页第5段 4-5 第55卷, 第7期 * |
《物理学报》 20060731 赵信峰等 金属铜纳米孔洞阵列膜制备方法研究 参见期刊第3785页第4段-第3786页第5段 4-5 第55卷, 第7期 2 * |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102623389A (zh) * | 2011-01-31 | 2012-08-01 | 北京泰龙电子技术有限公司 | 一种金属氮化物阻挡层的制备方法 |
CN103021931A (zh) * | 2011-09-23 | 2013-04-03 | 北京泰龙电子技术有限公司 | 一种金属氮化物阻挡层的制备方法 |
CN103021931B (zh) * | 2011-09-23 | 2015-09-23 | 北京泰龙电子技术有限公司 | 一种金属氮化物阻挡层的制备方法 |
CN102517551A (zh) * | 2011-12-26 | 2012-06-27 | 常州大学 | 一种三维光子晶体的的制备方法 |
CN102517551B (zh) * | 2011-12-26 | 2013-10-30 | 常州大学 | 一种三维光子晶体的制备方法 |
CN103276356A (zh) * | 2013-05-20 | 2013-09-04 | 杭州电子科技大学 | 一种提高Cu3N薄膜热稳定性的方法 |
CN109055976A (zh) * | 2018-08-03 | 2018-12-21 | 北京化工大学 | 一种多级结构过渡金属氮化物电极材料及其制备方法 |
CN109546157A (zh) * | 2018-11-07 | 2019-03-29 | 三峡大学 | 一种铜、氮化钴与碳原位复合电极的制备方法 |
CN109546157B (zh) * | 2018-11-07 | 2021-06-18 | 三峡大学 | 一种铜、氮化钴与碳原位复合电极的制备方法 |
AT523830B1 (de) * | 2020-08-03 | 2021-12-15 | Ruebig Ges M B H & Co Kg | Verfahren zur Herstellung einer antimikrobiellen Beschichtung |
AT523830A4 (de) * | 2020-08-03 | 2021-12-15 | Ruebig Ges M B H & Co Kg | Verfahren zur Herstellung einer antimikrobiellen Beschichtung |
CN114361414A (zh) * | 2021-12-28 | 2022-04-15 | 广东马车动力科技有限公司 | 一种复合材料及其制备方法与电池 |
CN114361414B (zh) * | 2021-12-28 | 2022-09-27 | 广东马车动力科技有限公司 | 一种复合材料及其制备方法与电池 |
CN117228641A (zh) * | 2023-11-16 | 2023-12-15 | 北京大学 | 一种补偿氮空位并抑制漏电流的氮化物铁电薄膜的制备方法 |
CN117228641B (zh) * | 2023-11-16 | 2024-01-30 | 北京大学 | 一种补偿氮空位并抑制漏电流的氮化物铁电薄膜的制备方法 |
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