CN103193224A - 在非金属基底上低温制备石墨烯薄膜的方法 - Google Patents
在非金属基底上低温制备石墨烯薄膜的方法 Download PDFInfo
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- CN103193224A CN103193224A CN2013101320197A CN201310132019A CN103193224A CN 103193224 A CN103193224 A CN 103193224A CN 2013101320197 A CN2013101320197 A CN 2013101320197A CN 201310132019 A CN201310132019 A CN 201310132019A CN 103193224 A CN103193224 A CN 103193224A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 80
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- 239000000758 substrate Substances 0.000 title claims abstract description 71
- 238000000034 method Methods 0.000 title claims abstract description 53
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- 238000006243 chemical reaction Methods 0.000 claims description 24
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 239000007789 gas Substances 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
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- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
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- 238000004140 cleaning Methods 0.000 claims description 2
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- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103553029A (zh) * | 2013-10-31 | 2014-02-05 | 中国科学院上海微系统与信息技术研究所 | 一种基于竖直石墨烯的散热材料的制备方法 |
CN104018136A (zh) * | 2014-04-30 | 2014-09-03 | 中国科学院重庆绿色智能技术研究院 | 直接在三维结构基片上全表面共形覆盖石墨烯薄膜的方法 |
CN104045079A (zh) * | 2014-06-25 | 2014-09-17 | 无锡格菲电子薄膜科技有限公司 | 在蓝宝石与外延金属界面外延生长石墨烯的方法 |
CN105018896A (zh) * | 2014-04-22 | 2015-11-04 | 常州二维碳素科技股份有限公司 | 石墨烯薄膜、其制备方法及用途 |
CN105222117A (zh) * | 2014-06-04 | 2016-01-06 | 华北电力大学 | 一种具有石墨烯层的u型管 |
CN105296958A (zh) * | 2015-11-10 | 2016-02-03 | 中国科学院重庆绿色智能技术研究院 | 一种三维非催化性基底负载石墨烯薄膜结构及其在低温环境下的制备方法 |
CN105603393A (zh) * | 2016-02-22 | 2016-05-25 | 中国石油大学(北京) | 一种具有石墨烯保护膜的镁合金及其制备方法 |
CN105692604A (zh) * | 2016-03-24 | 2016-06-22 | 浙江极力动力新能源有限公司 | 一种气相等离子制备粉状石墨烯的方法 |
CN107161988A (zh) * | 2017-05-19 | 2017-09-15 | 中国电子科技集团公司第十三研究所 | 在蓝宝石衬底上制备纳米晶石墨烯的方法 |
CN108133885A (zh) * | 2017-11-07 | 2018-06-08 | 宁波大学 | 一种制备石墨烯肖特基结的方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3040698B1 (fr) * | 2015-09-03 | 2017-09-01 | Commissariat Energie Atomique | Procede de recristallisation d’un materiau carbone, tel que du graphene ou des nanotubes de carbone. |
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US20090314350A1 (en) * | 2008-06-18 | 2009-12-24 | Korea Advanced Institute Of Science And Technology | Organic solar cells and method of manufacturing the same |
WO2011094597A2 (en) * | 2010-02-01 | 2011-08-04 | The Regents Of The University Of California | Graphene nanomesh and method of making the same |
CN102260858A (zh) * | 2010-05-26 | 2011-11-30 | 中国科学院物理研究所 | 一种在各种基底上直接生长石墨烯的方法 |
WO2012108526A1 (ja) * | 2011-02-10 | 2012-08-16 | 独立行政法人産業技術総合研究所 | グラフェンの製造方法およびグラフェン |
KR101197639B1 (ko) * | 2010-09-20 | 2012-11-07 | 서울대학교산학협력단 | 그래핀 구조, 그 제조 방법 및 그래핀 구조를 이용한 투명 전극 |
JP5138244B2 (ja) * | 2007-03-20 | 2013-02-06 | 日本電信電話株式会社 | 電子デバイス用基板の製造方法 |
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2013
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JP5138244B2 (ja) * | 2007-03-20 | 2013-02-06 | 日本電信電話株式会社 | 電子デバイス用基板の製造方法 |
US20090314350A1 (en) * | 2008-06-18 | 2009-12-24 | Korea Advanced Institute Of Science And Technology | Organic solar cells and method of manufacturing the same |
WO2011094597A2 (en) * | 2010-02-01 | 2011-08-04 | The Regents Of The University Of California | Graphene nanomesh and method of making the same |
CN102260858A (zh) * | 2010-05-26 | 2011-11-30 | 中国科学院物理研究所 | 一种在各种基底上直接生长石墨烯的方法 |
KR101197639B1 (ko) * | 2010-09-20 | 2012-11-07 | 서울대학교산학협력단 | 그래핀 구조, 그 제조 방법 및 그래핀 구조를 이용한 투명 전극 |
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Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103553029B (zh) * | 2013-10-31 | 2015-07-01 | 中国科学院上海微系统与信息技术研究所 | 一种基于竖直石墨烯的散热材料的制备方法 |
CN103553029A (zh) * | 2013-10-31 | 2014-02-05 | 中国科学院上海微系统与信息技术研究所 | 一种基于竖直石墨烯的散热材料的制备方法 |
CN105018896A (zh) * | 2014-04-22 | 2015-11-04 | 常州二维碳素科技股份有限公司 | 石墨烯薄膜、其制备方法及用途 |
CN105018896B (zh) * | 2014-04-22 | 2018-03-02 | 常州二维碳素科技股份有限公司 | 石墨烯薄膜、其制备方法及用途 |
CN104018136A (zh) * | 2014-04-30 | 2014-09-03 | 中国科学院重庆绿色智能技术研究院 | 直接在三维结构基片上全表面共形覆盖石墨烯薄膜的方法 |
CN104018136B (zh) * | 2014-04-30 | 2016-08-24 | 中国科学院重庆绿色智能技术研究院 | 直接在三维结构基片上全表面共形覆盖石墨烯薄膜的方法 |
CN105222117B (zh) * | 2014-06-04 | 2017-10-27 | 华北电力大学 | 一种具有石墨烯层的u型管 |
CN105222117A (zh) * | 2014-06-04 | 2016-01-06 | 华北电力大学 | 一种具有石墨烯层的u型管 |
CN104045079A (zh) * | 2014-06-25 | 2014-09-17 | 无锡格菲电子薄膜科技有限公司 | 在蓝宝石与外延金属界面外延生长石墨烯的方法 |
CN105296958A (zh) * | 2015-11-10 | 2016-02-03 | 中国科学院重庆绿色智能技术研究院 | 一种三维非催化性基底负载石墨烯薄膜结构及其在低温环境下的制备方法 |
CN105296958B (zh) * | 2015-11-10 | 2018-10-02 | 中国科学院重庆绿色智能技术研究院 | 一种三维非催化性基底负载石墨烯薄膜结构及其在低温环境下的制备方法 |
CN105603393B (zh) * | 2016-02-22 | 2018-02-09 | 中国石油大学(北京) | 一种具有石墨烯保护膜的镁合金及其制备方法 |
CN105603393A (zh) * | 2016-02-22 | 2016-05-25 | 中国石油大学(北京) | 一种具有石墨烯保护膜的镁合金及其制备方法 |
CN105692604A (zh) * | 2016-03-24 | 2016-06-22 | 浙江极力动力新能源有限公司 | 一种气相等离子制备粉状石墨烯的方法 |
CN107161988A (zh) * | 2017-05-19 | 2017-09-15 | 中国电子科技集团公司第十三研究所 | 在蓝宝石衬底上制备纳米晶石墨烯的方法 |
CN108133885A (zh) * | 2017-11-07 | 2018-06-08 | 宁波大学 | 一种制备石墨烯肖特基结的方法 |
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