CN101939855B - 半导体发光装置及其制造方法 - Google Patents

半导体发光装置及其制造方法 Download PDF

Info

Publication number
CN101939855B
CN101939855B CN2008801265426A CN200880126542A CN101939855B CN 101939855 B CN101939855 B CN 101939855B CN 2008801265426 A CN2008801265426 A CN 2008801265426A CN 200880126542 A CN200880126542 A CN 200880126542A CN 101939855 B CN101939855 B CN 101939855B
Authority
CN
China
Prior art keywords
light
semiconductor construction
potential well
emitting
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008801265426A
Other languages
English (en)
Chinese (zh)
Other versions
CN101939855A (zh
Inventor
迈克尔·A·哈斯
托马斯·J·米勒
孙晓光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN101939855A publication Critical patent/CN101939855A/zh
Application granted granted Critical
Publication of CN101939855B publication Critical patent/CN101939855B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/813Bodies having a plurality of light-emitting regions, e.g. multi-junction LEDs or light-emitting devices having photoluminescent regions within the bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/011Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/018Bonding of wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/824Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/826Materials of the light-emitting regions comprising only Group IV materials

Landscapes

  • Led Devices (AREA)
  • Weting (AREA)
CN2008801265426A 2007-12-10 2008-11-07 半导体发光装置及其制造方法 Expired - Fee Related CN101939855B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US1260807P 2007-12-10 2007-12-10
US61/012,608 2007-12-10
PCT/US2008/082778 WO2009075973A2 (en) 2007-12-10 2008-11-07 Semiconductor light emitting device and method of making same

Publications (2)

Publication Number Publication Date
CN101939855A CN101939855A (zh) 2011-01-05
CN101939855B true CN101939855B (zh) 2013-10-30

Family

ID=40756058

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008801265426A Expired - Fee Related CN101939855B (zh) 2007-12-10 2008-11-07 半导体发光装置及其制造方法

Country Status (6)

Country Link
US (1) US20110121319A1 (enExample)
EP (1) EP2232590A4 (enExample)
JP (1) JP2011507273A (enExample)
KR (1) KR20100099254A (enExample)
CN (1) CN101939855B (enExample)
WO (1) WO2009075973A2 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012502472A (ja) * 2008-09-04 2012-01-26 スリーエム イノベイティブ プロパティズ カンパニー 単色光源
EP2332223A1 (en) * 2008-09-04 2011-06-15 3M Innovative Properties Company I i-vi mqw vcsel on a heat sink optically pumped by a gan ld
CN102203970A (zh) * 2008-09-04 2011-09-28 3M创新有限公司 具有光阻挡元件的光源
US8865493B2 (en) 2008-12-24 2014-10-21 3M Innovative Properties Company Method of making double-sided wavelength converter and light generating device using same
JP2012514329A (ja) 2008-12-24 2012-06-21 スリーエム イノベイティブ プロパティズ カンパニー 両方の側に波長変換器を有する光生成デバイス
KR20120092673A (ko) 2009-11-18 2012-08-21 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Ⅱ-ⅵ족 반도체를 위한 신규한 습식 에칭제 및 방법
EP2521189A3 (en) * 2011-04-29 2013-05-01 Institute of Nuclear Energy Research Atomic Energy Council Lift-off structure for substrate of a photoelectric device and the method thereof
US9331252B2 (en) * 2011-08-23 2016-05-03 Micron Technology, Inc. Wavelength converters, including polarization-enhanced carrier capture converters, for solid state lighting devices, and associated systems and methods
US8975614B2 (en) 2011-08-23 2015-03-10 Micron Technology, Inc. Wavelength converters for solid state lighting devices, and associated systems and methods
KR20140111876A (ko) 2013-03-12 2014-09-22 삼성디스플레이 주식회사 표시 장치
CN103579503A (zh) * 2013-11-14 2014-02-12 吉林大学 一种利用光交联聚合物对有机电子器件进行薄膜封装的方法
JP6628727B2 (ja) * 2014-01-06 2020-01-15 ルミレッズ ホールディング ベーフェー 加工されたサブストレートを用いた半導体発光デバイス及びその製造方法
FR3019380B1 (fr) * 2014-04-01 2017-09-01 Centre Nat Rech Scient Pixel semiconducteur, matrice de tels pixels, structure semiconductrice pour la realisation de tels pixels et leurs procedes de fabrication
CN104810444B (zh) * 2015-03-04 2018-01-09 华灿光电(苏州)有限公司 发光二极管外延片及其制备方法、发光二极管芯片制备及衬底回收方法
US9847454B2 (en) * 2015-10-02 2017-12-19 Epistar Corporation Light-emitting device
JP6843885B2 (ja) * 2016-05-13 2021-03-17 コミサリア ア エナジー アトミック エ オックス エナジーズ オルタネティヴ 複数の窒化ガリウムダイオードを備えた光電子デバイスを製造する方法
JP6760141B2 (ja) * 2017-03-07 2020-09-23 信越半導体株式会社 発光素子及びその製造方法
US20190123035A1 (en) * 2017-10-19 2019-04-25 Samsung Electronics Co., Ltd. Method of performing die-based heterogeneous integration and devices including integrated dies

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101076898A (zh) * 2004-12-09 2007-11-21 3M创新有限公司 多色led以及有关的半导体器件

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4584428A (en) * 1984-09-12 1986-04-22 Hughes Aircraft Company Solar energy converter employing a fluorescent wavelength shifter
US5055894A (en) * 1988-09-29 1991-10-08 The Boeing Company Monolithic interleaved LED/PIN photodetector array
JPH02267529A (ja) * 1989-04-07 1990-11-01 Fuji Photo Film Co Ltd 光波長変換素子およびその製造方法
US5300788A (en) * 1991-01-18 1994-04-05 Kopin Corporation Light emitting diode bars and arrays and method of making same
JP3215297B2 (ja) * 1995-07-18 2001-10-02 沖電気工業株式会社 半導体発光素子の製造方法
DE19542241C2 (de) * 1995-11-13 2003-01-09 Siemens Ag Optoelektronisches Bauelement in II-VI-Halbleitermaterial
JP3768302B2 (ja) * 1996-09-13 2006-04-19 同和鉱業株式会社 化合物半導体素子の製造方法
JPH11154774A (ja) * 1997-08-05 1999-06-08 Canon Inc 面発光半導体デバイスの製造方法、この方法によって製造された面発光半導体デバイス及びこのデバイスを用いた表示装置
JP3334598B2 (ja) * 1998-03-25 2002-10-15 日本電気株式会社 InP基板上II−VI族化合物半導体薄膜
JP2000012981A (ja) * 1998-06-19 2000-01-14 Canon Inc 面型半導体光デバイスおよびその作製方法
JP2002118327A (ja) * 2000-10-06 2002-04-19 Furukawa Electric Co Ltd:The 化合物半導体装置の製造方法
TW493286B (en) * 2001-02-06 2002-07-01 United Epitaxy Co Ltd Light-emitting diode and the manufacturing method thereof
US20050167684A1 (en) * 2004-01-21 2005-08-04 Chua Janet B.Y. Device and method for emitting output light using group IIB element selenide-based phosphor material
US20080231170A1 (en) * 2004-01-26 2008-09-25 Fukudome Masato Wavelength Converter, Light-Emitting Device, Method of Producing Wavelength Converter and Method of Producing Light-Emitting Device
US7208768B2 (en) * 2004-04-30 2007-04-24 Sharp Laboratories Of America, Inc. Electroluminescent device
WO2006046553A1 (ja) * 2004-10-28 2006-05-04 Matsushita Electric Industrial Co., Ltd. 表示装置及び表示装置の駆動方法
US7402831B2 (en) * 2004-12-09 2008-07-22 3M Innovative Properties Company Adapting short-wavelength LED's for polychromatic, broadband, or “white” emission
JP4837295B2 (ja) * 2005-03-02 2011-12-14 株式会社沖データ 半導体装置、led装置、ledヘッド、及び画像形成装置
DE102005047152A1 (de) * 2005-09-30 2007-04-12 Osram Opto Semiconductors Gmbh Epitaxiesubstrat, Verfahren zu seiner Herstellung und Verfahren zur Herstellung eines Halbleiterchips
JP2007157940A (ja) * 2005-12-02 2007-06-21 Nichia Chem Ind Ltd 発光装置および発光装置の製造方法
KR100730072B1 (ko) * 2005-12-06 2007-06-20 삼성전기주식회사 수직구조 질화갈륨계 발광 다이오드 소자 및 그 제조방법
JP2007250629A (ja) * 2006-03-14 2007-09-27 Toshiba Corp 発光装置及びその製造方法、並びに蛍光パターン形成物
JPWO2007139033A1 (ja) * 2006-05-26 2009-10-08 富士フイルム株式会社 面発光型エレクトロルミネッセント素子
US7952110B2 (en) * 2006-06-12 2011-05-31 3M Innovative Properties Company LED device with re-emitting semiconductor construction and converging optical element
US8188494B2 (en) * 2006-06-28 2012-05-29 Hewlett-Packard Development Company, L.P. Utilizing nanowire for generating white light
US9018619B2 (en) * 2006-10-09 2015-04-28 Cree, Inc. Quantum wells for light conversion
US8578427B2 (en) * 2008-03-04 2013-11-05 The Directv Group, Inc. Method for swapping channel assignments in a broadcast system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101076898A (zh) * 2004-12-09 2007-11-21 3M创新有限公司 多色led以及有关的半导体器件

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2007-103936A 2007.04.19
JP特开2007-158334A 2007.06.21

Also Published As

Publication number Publication date
WO2009075973A3 (en) 2009-08-13
JP2011507273A (ja) 2011-03-03
EP2232590A4 (en) 2013-12-25
US20110121319A1 (en) 2011-05-26
KR20100099254A (ko) 2010-09-10
CN101939855A (zh) 2011-01-05
EP2232590A2 (en) 2010-09-29
WO2009075973A2 (en) 2009-06-18

Similar Documents

Publication Publication Date Title
CN101939855B (zh) 半导体发光装置及其制造方法
US8304794B2 (en) Light emitting device
JP3520270B2 (ja) 発光ダイオードとその製造方法
CN101673794B (zh) 发光元件
KR102209263B1 (ko) 반도체 광디바이스의 제조 방법 및 반도체 광디바이스
US20110114917A1 (en) Light emitting device
JP2010114337A (ja) 発光素子
CN102208508B (zh) 一种发光二极管结构及其制造方法
JP2023014201A (ja) 半導体発光素子およびその製造方法
JPH11505066A (ja) エピタキシャルオーミックコンタクトを含む▲ii▼−▲vi▼族半導体材料の集積ヘテロ構造およびその製造方法
JP2012532454A (ja) カドミウム非含有の再発光半導体構成体
US20120180868A1 (en) Iii-nitride flip-chip solar cells
CN101897047B (zh) 具有键合界面的发光器件
US20080265272A1 (en) Light Emitting Device Having Zener Diode Therein And Method Of Fabricating The Same
JP2008103534A (ja) 半導体発光素子
US20240258771A1 (en) Iii-nitride-based devices grown on a thin template on thermally-decomposed material
CN107894678A (zh) Led背光源、背光模组及液晶显示装置
US9466766B2 (en) High-efficiency AlGaInP light-emitting diode grown directly on transparent substrate and manufacturing method thereof
JP2021002593A (ja) 半導体光デバイスの製造方法及び半導体光デバイス
US8941105B2 (en) Zinc oxide based compound semiconductor light emitting device
Hayashi et al. Thermally engineered flip-chip InGaN/GaN well-ordered nanocolumn array LEDs
JP6153351B2 (ja) 半導体発光装置
TWI817264B (zh) 垂直式發光二極體及其製造方法
TWI743463B (zh) 半導體光元件的製造方法以及半導體光元件的中間體
JP2003060233A (ja) 半導体発光素子、半導体発光素子の製造方法、及び半導体発光装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20131030

Termination date: 20181107

CF01 Termination of patent right due to non-payment of annual fee