CN101937874A - 产生不对称场效应晶体管的方法 - Google Patents
产生不对称场效应晶体管的方法 Download PDFInfo
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- CN101937874A CN101937874A CN2010102122429A CN201010212242A CN101937874A CN 101937874 A CN101937874 A CN 101937874A CN 2010102122429 A CN2010102122429 A CN 2010102122429A CN 201010212242 A CN201010212242 A CN 201010212242A CN 101937874 A CN101937874 A CN 101937874A
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- 238000002347 injection Methods 0.000 claims description 37
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- 125000001475 halogen functional group Chemical group 0.000 abstract description 6
- 238000002513 implantation Methods 0.000 abstract 3
- 229920002120 photoresistant polymer Polymers 0.000 description 33
- 239000000463 material Substances 0.000 description 13
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- 239000012212 insulator Substances 0.000 description 10
- 150000002500 ions Chemical class 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 4
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- 229910052581 Si3N4 Inorganic materials 0.000 description 3
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- 229910021332 silicide Inorganic materials 0.000 description 3
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
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- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
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- 229910052796 boron Inorganic materials 0.000 description 1
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- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
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- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- GOLXNESZZPUPJE-UHFFFAOYSA-N spiromesifen Chemical compound CC1=CC(C)=CC(C)=C1C(C(O1)=O)=C(OC(=O)CC(C)(C)C)C11CCCC1 GOLXNESZZPUPJE-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823418—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
- H01L21/823425—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures manufacturing common source or drain regions between a plurality of conductor-insulator-semiconductor structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823412—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66492—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a pocket or a lightly doped drain selectively formed at the side of the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66659—Lateral single gate silicon transistors with asymmetry in the channel direction, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
Claims (27)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/493,549 | 2009-06-29 | ||
US12/493,549 US8017483B2 (en) | 2009-06-29 | 2009-06-29 | Method of creating asymmetric field-effect-transistors |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101937874A true CN101937874A (zh) | 2011-01-05 |
CN101937874B CN101937874B (zh) | 2013-07-31 |
Family
ID=43381200
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010102122429A Expired - Fee Related CN101937874B (zh) | 2009-06-29 | 2010-06-23 | 产生不对称场效应晶体管的方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8017483B2 (zh) |
KR (1) | KR101547707B1 (zh) |
CN (1) | CN101937874B (zh) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8034692B2 (en) * | 2009-10-20 | 2011-10-11 | International Business Machines Corporation | Structure and method for manufacturing asymmetric devices |
US8237471B2 (en) * | 2009-11-25 | 2012-08-07 | International Business Machines Corporation | Circuit with stacked structure and use thereof |
US8569185B2 (en) * | 2010-02-05 | 2013-10-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of fabricating gate electrode using a treated hard mask |
US8877596B2 (en) * | 2010-06-24 | 2014-11-04 | International Business Machines Corporation | Semiconductor devices with asymmetric halo implantation and method of manufacture |
US8797303B2 (en) | 2011-03-21 | 2014-08-05 | Qualcomm Mems Technologies, Inc. | Amorphous oxide semiconductor thin film transistor fabrication method |
US9379254B2 (en) | 2011-11-18 | 2016-06-28 | Qualcomm Mems Technologies, Inc. | Amorphous oxide semiconductor thin film transistor fabrication method |
US9034748B2 (en) * | 2013-09-04 | 2015-05-19 | International Business Machines Corporation | Process variability tolerant hard mask for replacement metal gate finFET devices |
US20150200270A1 (en) * | 2014-01-16 | 2015-07-16 | Globalfoundries Inc. | Field effect transistors for high-performance and low-power applications |
US9184234B2 (en) | 2014-01-16 | 2015-11-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transistor design |
US9236445B2 (en) | 2014-01-16 | 2016-01-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transistor having replacement gate and epitaxially grown replacement channel region |
US9425099B2 (en) * | 2014-01-16 | 2016-08-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Epitaxial channel with a counter-halo implant to improve analog gain |
US9224814B2 (en) | 2014-01-16 | 2015-12-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Process design to improve transistor variations and performance |
KR102114237B1 (ko) | 2014-01-20 | 2020-05-25 | 삼성전자 주식회사 | 반도체 장치 및 이의 제조 방법 |
US9525031B2 (en) | 2014-03-13 | 2016-12-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Epitaxial channel |
US9419136B2 (en) | 2014-04-14 | 2016-08-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Dislocation stress memorization technique (DSMT) on epitaxial channel devices |
KR102374052B1 (ko) | 2016-02-26 | 2022-03-14 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
US11501969B2 (en) * | 2019-01-22 | 2022-11-15 | International Business Machines Corporation | Direct extreme ultraviolet lithography on hard mask with reverse tone |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6008094A (en) * | 1997-12-05 | 1999-12-28 | Advanced Micro Devices | Optimization of logic gates with criss-cross implants to form asymmetric channel regions |
US20030008484A1 (en) * | 2001-07-03 | 2003-01-09 | International Business Machines Corporation | Angled implant process |
US20030032245A1 (en) * | 2001-01-20 | 2003-02-13 | Samsung Electronics Co., Ltd | NAND-type flash memory device and method of forming the same |
CN1976030A (zh) * | 2005-11-30 | 2007-06-06 | 国际商业机器公司 | 集成电路及其制造方法 |
KR20070069742A (ko) * | 2005-12-28 | 2007-07-03 | 주식회사 하이닉스반도체 | 반도체 소자의 제조방법 |
CN101232018A (zh) * | 2007-01-25 | 2008-07-30 | 台湾积体电路制造股份有限公司 | 半导体结构及半导体芯片 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6025224A (en) | 1997-03-31 | 2000-02-15 | Siemens Aktiengesellschaft | Device with asymmetrical channel dopant profile |
US6083794A (en) | 1997-07-10 | 2000-07-04 | International Business Machines Corporation | Method to perform selective drain engineering with a non-critical mask |
US6242329B1 (en) | 1999-02-03 | 2001-06-05 | Advanced Micro Devices, Inc. | Method for manufacturing asymmetric channel transistor |
US6339005B1 (en) | 1999-10-22 | 2002-01-15 | International Business Machines Corporation | Disposable spacer for symmetric and asymmetric Schottky contact to SOI MOSFET |
US6479868B1 (en) | 2001-04-30 | 2002-11-12 | Advanced Micro Devices, Inc. | Silicon-on-insulator transistors with asymmetric source/drain junctions formed by angled germanium implantation |
US6756637B2 (en) | 2001-07-06 | 2004-06-29 | International Business Machines Corporation | Method of controlling floating body effects in an asymmetrical SOI device |
US7279387B2 (en) | 2005-02-25 | 2007-10-09 | United Microelectronics Corp. | Method for fabricating asymmetric semiconductor device |
US7449386B2 (en) * | 2006-11-16 | 2008-11-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Manufacturing method for semiconductor device to mitigate short channel effects |
-
2009
- 2009-06-29 US US12/493,549 patent/US8017483B2/en not_active Expired - Fee Related
-
2010
- 2010-06-03 KR KR1020100052153A patent/KR101547707B1/ko not_active IP Right Cessation
- 2010-06-23 CN CN2010102122429A patent/CN101937874B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6008094A (en) * | 1997-12-05 | 1999-12-28 | Advanced Micro Devices | Optimization of logic gates with criss-cross implants to form asymmetric channel regions |
US20030032245A1 (en) * | 2001-01-20 | 2003-02-13 | Samsung Electronics Co., Ltd | NAND-type flash memory device and method of forming the same |
US20030008484A1 (en) * | 2001-07-03 | 2003-01-09 | International Business Machines Corporation | Angled implant process |
CN1976030A (zh) * | 2005-11-30 | 2007-06-06 | 国际商业机器公司 | 集成电路及其制造方法 |
KR20070069742A (ko) * | 2005-12-28 | 2007-07-03 | 주식회사 하이닉스반도체 | 반도체 소자의 제조방법 |
CN101232018A (zh) * | 2007-01-25 | 2008-07-30 | 台湾积体电路制造股份有限公司 | 半导体结构及半导体芯片 |
Also Published As
Publication number | Publication date |
---|---|
CN101937874B (zh) | 2013-07-31 |
US20100330763A1 (en) | 2010-12-30 |
KR20110001886A (ko) | 2011-01-06 |
US8017483B2 (en) | 2011-09-13 |
KR101547707B1 (ko) | 2015-08-26 |
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Effective date of registration: 20171109 Address after: Grand Cayman, Cayman Islands Patentee after: GLOBALFOUNDRIES INC. Address before: American New York Patentee before: Core USA second LLC Effective date of registration: 20171109 Address after: American New York Patentee after: Core USA second LLC Address before: American New York Patentee before: International Business Machines Corp. |
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