CN101920959A - 一种线切割用碳化硅微粉的提纯净化工艺 - Google Patents
一种线切割用碳化硅微粉的提纯净化工艺 Download PDFInfo
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- CN101920959A CN101920959A CN2009100332025A CN200910033202A CN101920959A CN 101920959 A CN101920959 A CN 101920959A CN 2009100332025 A CN2009100332025 A CN 2009100332025A CN 200910033202 A CN200910033202 A CN 200910033202A CN 101920959 A CN101920959 A CN 101920959A
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- silicon carbide
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- 238000000034 method Methods 0.000 title claims abstract description 46
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 33
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 33
- 239000000843 powder Substances 0.000 title claims abstract description 25
- 238000005520 cutting process Methods 0.000 title claims abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 84
- 239000003921 oil Substances 0.000 claims abstract description 20
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000003513 alkali Substances 0.000 claims abstract description 8
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 8
- 238000002474 experimental method Methods 0.000 claims abstract description 5
- 238000005187 foaming Methods 0.000 claims abstract description 5
- 238000011068 loading method Methods 0.000 claims abstract description 5
- 238000001035 drying Methods 0.000 claims abstract description 3
- 238000003756 stirring Methods 0.000 claims description 44
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 12
- 239000013543 active substance Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000005188 flotation Methods 0.000 claims description 5
- 230000002950 deficient Effects 0.000 claims description 4
- 239000003350 kerosene Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 239000012535 impurity Substances 0.000 abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000005406 washing Methods 0.000 abstract 4
- 238000012797 qualification Methods 0.000 abstract 3
- 239000002253 acid Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 description 6
- 239000003082 abrasive agent Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000498 ball milling Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910001651 emery Inorganic materials 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- NDLPOXTZKUMGOV-UHFFFAOYSA-N oxo(oxoferriooxy)iron hydrate Chemical compound O.O=[Fe]O[Fe]=O NDLPOXTZKUMGOV-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000009686 powder production technique Methods 0.000 description 1
- 239000012254 powdered material Substances 0.000 description 1
- 230000004223 radioprotective effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229960001866 silicon dioxide Drugs 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- Carbon And Carbon Compounds (AREA)
Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN200910033202.5A CN101920959B (zh) | 2009-06-15 | 2009-06-15 | 一种线切割用碳化硅微粉的提纯净化工艺 |
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CN200910033202.5A CN101920959B (zh) | 2009-06-15 | 2009-06-15 | 一种线切割用碳化硅微粉的提纯净化工艺 |
Publications (2)
Publication Number | Publication Date |
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CN101920959A true CN101920959A (zh) | 2010-12-22 |
CN101920959B CN101920959B (zh) | 2014-04-16 |
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CN200910033202.5A Expired - Fee Related CN101920959B (zh) | 2009-06-15 | 2009-06-15 | 一种线切割用碳化硅微粉的提纯净化工艺 |
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CN (1) | CN101920959B (zh) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102320602A (zh) * | 2011-08-18 | 2012-01-18 | 白山峰泰源研磨材有限公司 | 一种绿碳化硅微粉提纯方法 |
CN102328929A (zh) * | 2011-07-22 | 2012-01-25 | 周彬 | 一种碳化硅微粉提纯工艺 |
CN102328930A (zh) * | 2011-07-22 | 2012-01-25 | 周彬 | 一种从单晶硅切片废砂浆中回收碳化硅的方法 |
CN102951641A (zh) * | 2012-11-01 | 2013-03-06 | 临沭山田研磨材有限公司 | 节水环保型硅晶片线切割用碳化硅微粉的制备方法 |
CN103008093A (zh) * | 2012-12-05 | 2013-04-03 | 平顶山易成新材料股份有限公司 | 一种从超细碳化硅粉体中分离游离碳的方法 |
CN103553625A (zh) * | 2013-11-16 | 2014-02-05 | 连云港龙塔研磨材料有限公司 | 碳化硅精细陶瓷用碳化硅微粉的制备方法 |
CN104477917A (zh) * | 2014-11-20 | 2015-04-01 | 江苏乐园新材料集团有限公司 | 碳化硅冶炼方法 |
CN106365167A (zh) * | 2016-08-31 | 2017-02-01 | 福建省建瓯市富晶宝微粒有限公司 | 一种碳化硅微粉清质除杂工艺及其生产设备 |
CN106395827A (zh) * | 2016-08-31 | 2017-02-15 | 福建省建瓯市富晶宝微粒有限公司 | 一种碳化硅微粉提纯分级生产工艺及其生产设备 |
CN107055540A (zh) * | 2017-05-05 | 2017-08-18 | 郑州西利康新材料有限公司 | 一种金钢线专用碳化硅超细微粉制备工艺 |
CN107265459A (zh) * | 2017-07-31 | 2017-10-20 | 江苏乐园新材料集团有限公司 | 一种碳化硅微粉的化学提纯方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5863325A (en) * | 1995-05-31 | 1999-01-26 | Bridgestone Corporation | Process for producing high purity silicon carbide powder for preparation of a silicon carbide single crystal and single crystal |
CN101033066A (zh) * | 2006-03-06 | 2007-09-12 | 张捷平 | 碳化硅微粉回收的方法 |
CN101804982A (zh) * | 2010-04-15 | 2010-08-18 | 连云港东渡碳化硅有限公司 | 一种碳化硅超细微粉的纯化方法 |
-
2009
- 2009-06-15 CN CN200910033202.5A patent/CN101920959B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5863325A (en) * | 1995-05-31 | 1999-01-26 | Bridgestone Corporation | Process for producing high purity silicon carbide powder for preparation of a silicon carbide single crystal and single crystal |
CN101033066A (zh) * | 2006-03-06 | 2007-09-12 | 张捷平 | 碳化硅微粉回收的方法 |
CN101804982A (zh) * | 2010-04-15 | 2010-08-18 | 连云港东渡碳化硅有限公司 | 一种碳化硅超细微粉的纯化方法 |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102328929A (zh) * | 2011-07-22 | 2012-01-25 | 周彬 | 一种碳化硅微粉提纯工艺 |
CN102328930A (zh) * | 2011-07-22 | 2012-01-25 | 周彬 | 一种从单晶硅切片废砂浆中回收碳化硅的方法 |
CN102320602A (zh) * | 2011-08-18 | 2012-01-18 | 白山峰泰源研磨材有限公司 | 一种绿碳化硅微粉提纯方法 |
CN102951641A (zh) * | 2012-11-01 | 2013-03-06 | 临沭山田研磨材有限公司 | 节水环保型硅晶片线切割用碳化硅微粉的制备方法 |
CN103008093B (zh) * | 2012-12-05 | 2014-12-17 | 平顶山易成新材料有限公司 | 一种从超细碳化硅粉体中分离游离碳的方法 |
CN103008093A (zh) * | 2012-12-05 | 2013-04-03 | 平顶山易成新材料股份有限公司 | 一种从超细碳化硅粉体中分离游离碳的方法 |
CN103553625A (zh) * | 2013-11-16 | 2014-02-05 | 连云港龙塔研磨材料有限公司 | 碳化硅精细陶瓷用碳化硅微粉的制备方法 |
CN103553625B (zh) * | 2013-11-16 | 2015-04-22 | 连云港龙塔研磨材料有限公司 | 碳化硅精细陶瓷用碳化硅微粉的制备方法 |
CN104477917A (zh) * | 2014-11-20 | 2015-04-01 | 江苏乐园新材料集团有限公司 | 碳化硅冶炼方法 |
CN106365167A (zh) * | 2016-08-31 | 2017-02-01 | 福建省建瓯市富晶宝微粒有限公司 | 一种碳化硅微粉清质除杂工艺及其生产设备 |
CN106395827A (zh) * | 2016-08-31 | 2017-02-15 | 福建省建瓯市富晶宝微粒有限公司 | 一种碳化硅微粉提纯分级生产工艺及其生产设备 |
CN107055540A (zh) * | 2017-05-05 | 2017-08-18 | 郑州西利康新材料有限公司 | 一种金钢线专用碳化硅超细微粉制备工艺 |
CN107265459A (zh) * | 2017-07-31 | 2017-10-20 | 江苏乐园新材料集团有限公司 | 一种碳化硅微粉的化学提纯方法 |
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Effective date of registration: 20111130 Address after: 222000 Taiping Road, Taiping Industrial Zone, Sinpo District, Jiangsu, Lianyungang 1, China Applicant after: JIANGSU LEYUAN NEW MATERIALS CO.,LTD. Address before: 210009 Nanjing City, Jiangsu Province, the new model road No. 5 Applicant before: Nanjing Tech University |
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