CN101866870B - 一种半导体专用设备用晶片吸附搬运机构 - Google Patents
一种半导体专用设备用晶片吸附搬运机构 Download PDFInfo
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CN 201010181423 CN101866870B (zh) | 2010-05-25 | 2010-05-25 | 一种半导体专用设备用晶片吸附搬运机构 |
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CN 201010181423 CN101866870B (zh) | 2010-05-25 | 2010-05-25 | 一种半导体专用设备用晶片吸附搬运机构 |
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CN101866870A CN101866870A (zh) | 2010-10-20 |
CN101866870B true CN101866870B (zh) | 2013-10-23 |
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Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102201325B (zh) * | 2011-03-01 | 2015-06-24 | 中国电子科技集团公司第四十五研究所 | 一种固晶机柔性拾放晶片机构 |
CN102357762B (zh) * | 2011-10-29 | 2014-04-23 | 无锡万洪电子机械有限公司 | 叠层焊接机真空吸持机构 |
EP3866184A1 (en) * | 2012-11-30 | 2021-08-18 | Nikon Corporation | Carrier system, exposure apparatus and carry-in method |
US10186448B2 (en) * | 2015-12-11 | 2019-01-22 | Lam Research Corporation | Wafer support pedestal with wafer anti-slip and anti-rotation features |
CN106505022A (zh) * | 2017-01-03 | 2017-03-15 | 江西比太科技有限公司 | 载板及使用该载板的太阳能电池生产设备 |
CN109427642A (zh) * | 2017-08-31 | 2019-03-05 | 上海微电子装备(集团)股份有限公司 | 一种吸盘装置及吸盘转运保护装置及基底运输方法 |
CN108890680A (zh) * | 2018-08-23 | 2018-11-27 | 苏州软体机器人科技有限公司 | 一种利用静电吸附效应进行抓取动作的执行器 |
CN113386162B (zh) * | 2021-06-11 | 2022-08-12 | 山东润平塑业有限公司 | 一种转运塑料板用抓取装置以及塑料板抓取方法 |
CN113410174B (zh) * | 2021-06-25 | 2024-01-30 | 上海隐冠半导体技术有限公司 | 吸附机构及吸附系统 |
CN114222443A (zh) * | 2021-11-08 | 2022-03-22 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | 可360度旋转的高拾取率的柔性贴片头结构 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1341958A (zh) * | 2000-08-04 | 2002-03-27 | 株式会社东芝 | 芯片的拾取装置及半导体装置的制造方法 |
CN1820897A (zh) * | 2005-02-18 | 2006-08-23 | 株式会社迪思科 | 晶片搬运装置 |
CN1963620A (zh) * | 2006-11-17 | 2007-05-16 | 友达光电股份有限公司 | 吸附装置 |
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JPH1126544A (ja) * | 1997-07-08 | 1999-01-29 | Matsushita Electric Ind Co Ltd | ワーク搬送用キャリアの位置決め装置および位置決め方法 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1341958A (zh) * | 2000-08-04 | 2002-03-27 | 株式会社东芝 | 芯片的拾取装置及半导体装置的制造方法 |
CN1820897A (zh) * | 2005-02-18 | 2006-08-23 | 株式会社迪思科 | 晶片搬运装置 |
CN1963620A (zh) * | 2006-11-17 | 2007-05-16 | 友达光电股份有限公司 | 吸附装置 |
Non-Patent Citations (1)
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JP特开平11-26544A 1999.01.29 |
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