CN101866869B - 一种半导体专用设备用晶片传输装置 - Google Patents
一种半导体专用设备用晶片传输装置 Download PDFInfo
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- CN101866869B CN101866869B CN2010101814070A CN201010181407A CN101866869B CN 101866869 B CN101866869 B CN 101866869B CN 2010101814070 A CN2010101814070 A CN 2010101814070A CN 201010181407 A CN201010181407 A CN 201010181407A CN 101866869 B CN101866869 B CN 101866869B
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CN2010101814070A CN101866869B (zh) | 2010-05-25 | 2010-05-25 | 一种半导体专用设备用晶片传输装置 |
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CN2010101814070A CN101866869B (zh) | 2010-05-25 | 2010-05-25 | 一种半导体专用设备用晶片传输装置 |
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CN101866869A CN101866869A (zh) | 2010-10-20 |
CN101866869B true CN101866869B (zh) | 2012-08-29 |
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CN2010101814070A Expired - Fee Related CN101866869B (zh) | 2010-05-25 | 2010-05-25 | 一种半导体专用设备用晶片传输装置 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102082064A (zh) * | 2010-11-29 | 2011-06-01 | 常州亿晶光电科技有限公司 | 等离子刻蚀机硅片定压施压夹具 |
CN107973122B (zh) * | 2016-10-21 | 2020-04-28 | 南京瀚宇彩欣科技有限责任公司 | 活动式支撑机构 |
CN109590705B (zh) * | 2018-12-26 | 2020-09-04 | 上海福赛特机器人有限公司 | 一种晶圆自动装配装置及自动装配方法 |
CN115036248B (zh) * | 2022-08-12 | 2022-11-04 | 安徽大华半导体科技有限公司 | 一种防过载芯片推出装置 |
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CN1820897A (zh) * | 2005-02-18 | 2006-08-23 | 株式会社迪思科 | 晶片搬运装置 |
CN1963620A (zh) * | 2006-11-17 | 2007-05-16 | 友达光电股份有限公司 | 吸附装置 |
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JPH1126544A (ja) * | 1997-07-08 | 1999-01-29 | Matsushita Electric Ind Co Ltd | ワーク搬送用キャリアの位置決め装置および位置決め方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN1820897A (zh) * | 2005-02-18 | 2006-08-23 | 株式会社迪思科 | 晶片搬运装置 |
CN1963620A (zh) * | 2006-11-17 | 2007-05-16 | 友达光电股份有限公司 | 吸附装置 |
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JP特开平11-26544A 1999.01.29 |
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Owner name: CETC BEIJING ELECTRONIC EQUIPMENT CO., LTD. Free format text: FORMER OWNER: NO.45 INST., CHINA ELECTRONIC SCIENCE AND TECHNOLOGY GROUP CORP. Effective date: 20101215 |
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Free format text: CORRECT: ADDRESS; FROM: 065201 NO. 20, HAIYOU STREET, YANJIAO ECONOMIC DEVELOPMENT ZONE, SANHE CITY, HEBEI PROVINCE TO: 100175 ROOM A119, NO. 18, XIHUAN SOUTH ROAD, ECONOMIC AND TECHNOLOGY DEVELOPMENT ZONE, BEIJING |
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Effective date of registration: 20101215 Address after: 100175 room All9, No. 18 West South Road, Beijing economic and Technological Development Zone Applicant after: CETC Beijing Electronic Equipment Co., Ltd. Address before: 065201 Hebei Province, Sanhe Yanjiao Economic Development Zone, 20 main street Applicant before: No.45 Inst., China Electronic science and Technology Group Corp. |
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