CN101825841A - 掩膜存储清洗系统 - Google Patents
掩膜存储清洗系统 Download PDFInfo
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- CN101825841A CN101825841A CN 201010139315 CN201010139315A CN101825841A CN 101825841 A CN101825841 A CN 101825841A CN 201010139315 CN201010139315 CN 201010139315 CN 201010139315 A CN201010139315 A CN 201010139315A CN 101825841 A CN101825841 A CN 101825841A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 73
- 230000005540 biological transmission Effects 0.000 claims abstract description 106
- 238000003860 storage Methods 0.000 claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 claims abstract description 21
- 238000009434 installation Methods 0.000 claims description 14
- 238000012546 transfer Methods 0.000 claims description 14
- 239000011261 inert gas Substances 0.000 claims description 12
- 238000005096 rolling process Methods 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 14
- 230000008569 process Effects 0.000 abstract description 13
- 238000005086 pumping Methods 0.000 abstract 2
- 230000005055 memory storage Effects 0.000 description 12
- 230000006870 function Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000001154 acute effect Effects 0.000 description 3
- 230000000875 corresponding effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 208000002925 dental caries Diseases 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000011897 real-time detection Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000003967 crop rotation Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
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Application Number | Priority Date | Filing Date | Title |
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CN2010101393156A CN101825841B (zh) | 2010-03-30 | 2010-03-30 | 掩膜存储清洗系统 |
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CN2010101393156A CN101825841B (zh) | 2010-03-30 | 2010-03-30 | 掩膜存储清洗系统 |
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CN101825841A true CN101825841A (zh) | 2010-09-08 |
CN101825841B CN101825841B (zh) | 2012-07-04 |
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CN2010101393156A Expired - Fee Related CN101825841B (zh) | 2010-03-30 | 2010-03-30 | 掩膜存储清洗系统 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102226867A (zh) * | 2011-05-26 | 2011-10-26 | 常州瑞择微电子科技有限公司 | 光掩模冲洗的装卡装置 |
CN105652588A (zh) * | 2016-03-21 | 2016-06-08 | 京东方科技集团股份有限公司 | 一种掩膜板清洗系统 |
CN106311637A (zh) * | 2016-08-31 | 2017-01-11 | 浙江金洲管道科技股份有限公司 | 一种在线管道目检分拣线 |
CN109499976A (zh) * | 2018-12-28 | 2019-03-22 | 东莞市沃德精密机械有限公司 | 电池清洗设备 |
CN116593497A (zh) * | 2023-07-17 | 2023-08-15 | 合肥派拓智能科技有限公司 | 一种高精度oled金属掩膜板视觉缺陷检测设备 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59208837A (ja) * | 1983-05-13 | 1984-11-27 | Nec Kyushu Ltd | プラズマエツチング装置 |
CN1450608A (zh) * | 2002-03-01 | 2003-10-22 | 东京毅力科创株式会社 | 液体处理装置和液体处理方法 |
CN1456938A (zh) * | 2002-02-22 | 2003-11-19 | Asml荷兰有限公司 | 使用两件式盖子保护模版的系统和方法 |
CN1493921A (zh) * | 2002-07-29 | 2004-05-05 | ASML�عɹɷ�����˾ | 具有与真空室连通的真空掩模版库的光刻设备 |
CN1592948A (zh) * | 2000-09-06 | 2005-03-09 | 株式会社尼康 | 曝光装置以及器件制造方法 |
CN201654448U (zh) * | 2010-03-30 | 2010-11-24 | 东莞宏威数码机械有限公司 | 掩膜存储清洗设备 |
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2010
- 2010-03-30 CN CN2010101393156A patent/CN101825841B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59208837A (ja) * | 1983-05-13 | 1984-11-27 | Nec Kyushu Ltd | プラズマエツチング装置 |
CN1592948A (zh) * | 2000-09-06 | 2005-03-09 | 株式会社尼康 | 曝光装置以及器件制造方法 |
CN1456938A (zh) * | 2002-02-22 | 2003-11-19 | Asml荷兰有限公司 | 使用两件式盖子保护模版的系统和方法 |
CN1450608A (zh) * | 2002-03-01 | 2003-10-22 | 东京毅力科创株式会社 | 液体处理装置和液体处理方法 |
CN1493921A (zh) * | 2002-07-29 | 2004-05-05 | ASML�عɹɷ�����˾ | 具有与真空室连通的真空掩模版库的光刻设备 |
CN201654448U (zh) * | 2010-03-30 | 2010-11-24 | 东莞宏威数码机械有限公司 | 掩膜存储清洗设备 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102226867A (zh) * | 2011-05-26 | 2011-10-26 | 常州瑞择微电子科技有限公司 | 光掩模冲洗的装卡装置 |
CN102226867B (zh) * | 2011-05-26 | 2012-08-29 | 常州瑞择微电子科技有限公司 | 光掩模冲洗的装卡装置 |
CN105652588A (zh) * | 2016-03-21 | 2016-06-08 | 京东方科技集团股份有限公司 | 一种掩膜板清洗系统 |
CN106311637A (zh) * | 2016-08-31 | 2017-01-11 | 浙江金洲管道科技股份有限公司 | 一种在线管道目检分拣线 |
CN109499976A (zh) * | 2018-12-28 | 2019-03-22 | 东莞市沃德精密机械有限公司 | 电池清洗设备 |
CN116593497A (zh) * | 2023-07-17 | 2023-08-15 | 合肥派拓智能科技有限公司 | 一种高精度oled金属掩膜板视觉缺陷检测设备 |
CN116593497B (zh) * | 2023-07-17 | 2023-09-22 | 合肥派拓智能科技有限公司 | 一种高精度oled金属掩膜板视觉缺陷检测设备 |
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CN101825841B (zh) | 2012-07-04 |
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