CN101789370B - 形成用于n-FET应用的HfSiN金属的方法 - Google Patents

形成用于n-FET应用的HfSiN金属的方法 Download PDF

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Publication number
CN101789370B
CN101789370B CN2010101366125A CN201010136612A CN101789370B CN 101789370 B CN101789370 B CN 101789370B CN 2010101366125 A CN2010101366125 A CN 2010101366125A CN 201010136612 A CN201010136612 A CN 201010136612A CN 101789370 B CN101789370 B CN 101789370B
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CN
China
Prior art keywords
hfsin
source
lamination
metal
film
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Expired - Fee Related
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CN2010101366125A
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English (en)
Chinese (zh)
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CN101789370A (zh
Inventor
A·C·卡勒伽里
M·M·弗兰克
R·詹米
D·L·拉赛
F·R·麦克菲力
S·扎法尔
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Core Usa Second LLC
GlobalFoundries Inc
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International Business Machines Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/667—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN workfunction layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/013—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator
    • H10D64/01302—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H10D64/01304—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H10D64/01318—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0212—Manufacture or treatment of FETs having insulated gates [IGFET] using self-aligned silicidation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • H10D30/0227—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate having both lightly-doped source and drain extensions and source and drain regions self-aligned to the sides of the gate, e.g. lightly-doped drain [LDD] MOSFET or double-diffused drain [DDD] MOSFET
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/667—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN workfunction layers
    • H10D64/669—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN workfunction layers the conductor further comprising additional layers of alloy material, compound material or organic material, e.g. TaN/TiAlN
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/681—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered
    • H10D64/685—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered being perpendicular to the channel plane
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/691—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator comprising metallic compounds, e.g. metal oxides or metal silicates 

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Formation Of Insulating Films (AREA)
  • Electrodes Of Semiconductors (AREA)
CN2010101366125A 2005-01-13 2005-12-02 形成用于n-FET应用的HfSiN金属的方法 Expired - Fee Related CN101789370B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/035,369 2005-01-13
US11/035,369 US20060151846A1 (en) 2005-01-13 2005-01-13 Method of forming HfSiN metal for n-FET applications

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN2005800465277A Division CN101401211B (zh) 2005-01-13 2005-12-02 用于n-FET应用的半导体结构

Publications (2)

Publication Number Publication Date
CN101789370A CN101789370A (zh) 2010-07-28
CN101789370B true CN101789370B (zh) 2012-05-30

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CN2010101366125A Expired - Fee Related CN101789370B (zh) 2005-01-13 2005-12-02 形成用于n-FET应用的HfSiN金属的方法
CN2005800465277A Expired - Fee Related CN101401211B (zh) 2005-01-13 2005-12-02 用于n-FET应用的半导体结构

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CN2005800465277A Expired - Fee Related CN101401211B (zh) 2005-01-13 2005-12-02 用于n-FET应用的半导体结构

Country Status (7)

Country Link
US (3) US20060151846A1 (https=)
EP (1) EP1836732B1 (https=)
JP (1) JP5160238B2 (https=)
CN (2) CN101789370B (https=)
AT (1) ATE526684T1 (https=)
TW (1) TW200636870A (https=)
WO (1) WO2006076087A2 (https=)

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US7301219B2 (en) * 2005-06-06 2007-11-27 Macronix International Co., Ltd. Electrically erasable programmable read only memory (EEPROM) cell and method for making the same
JP4455427B2 (ja) * 2005-06-29 2010-04-21 株式会社東芝 半導体装置及びその製造方法
US7425497B2 (en) * 2006-01-20 2008-09-16 International Business Machines Corporation Introduction of metal impurity to change workfunction of conductive electrodes
US7611979B2 (en) * 2007-02-12 2009-11-03 International Business Machines Corporation Metal gates with low charge trapping and enhanced dielectric reliability characteristics for high-k gate dielectric stacks
US7648868B2 (en) * 2007-10-31 2010-01-19 International Business Machines Corporation Metal-gated MOSFET devices having scaled gate stack thickness
EP2123789A1 (en) * 2008-05-15 2009-11-25 Eifeler Werkzeuge GmbH A method of producing hard coatings
US8350341B2 (en) 2010-04-09 2013-01-08 International Business Machines Corporation Method and structure for work function engineering in transistors including a high dielectric constant gate insulator and metal gate (HKMG)
US8633534B2 (en) * 2010-12-22 2014-01-21 Intel Corporation Transistor channel mobility using alternate gate dielectric materials
US8916427B2 (en) * 2013-05-03 2014-12-23 Texas Instruments Incorporated FET dielectric reliability enhancement
KR102392059B1 (ko) * 2013-07-29 2022-04-28 삼성전자주식회사 반도체 소자 및 그 제조 방법
CN106158601A (zh) * 2015-03-26 2016-11-23 比亚迪股份有限公司 SiC基器件的栅介质层结构及栅介质层的形成方法
CN105448742B (zh) * 2015-12-30 2019-02-26 东莞市义仁汽车租赁有限公司 一种碳化硅材料上制备栅介质的方法
US10446400B2 (en) * 2017-10-20 2019-10-15 Samsung Electronics Co., Ltd. Method of forming multi-threshold voltage devices and devices so formed
CN110993603A (zh) * 2019-12-09 2020-04-10 中国科学院微电子研究所 半导体结构及其形成方法

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Also Published As

Publication number Publication date
EP1836732B1 (en) 2011-09-28
WO2006076087A2 (en) 2006-07-20
CN101789370A (zh) 2010-07-28
CN101401211A (zh) 2009-04-01
EP1836732A2 (en) 2007-09-26
CN101401211B (zh) 2012-03-21
JP5160238B2 (ja) 2013-03-13
JP2008530770A (ja) 2008-08-07
US20080038905A1 (en) 2008-02-14
TW200636870A (en) 2006-10-16
EP1836732A4 (en) 2009-07-01
US20060151846A1 (en) 2006-07-13
US7521346B2 (en) 2009-04-21
WO2006076087A3 (en) 2008-11-13
US20080245658A1 (en) 2008-10-09
ATE526684T1 (de) 2011-10-15

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