CN101740444B - Conveying mechanism - Google Patents
Conveying mechanism Download PDFInfo
- Publication number
- CN101740444B CN101740444B CN200910212114.1A CN200910212114A CN101740444B CN 101740444 B CN101740444 B CN 101740444B CN 200910212114 A CN200910212114 A CN 200910212114A CN 101740444 B CN101740444 B CN 101740444B
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- Prior art keywords
- housing
- movable pads
- support plate
- move
- opening
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- 230000007246 mechanism Effects 0.000 title abstract description 13
- 230000007723 transport mechanism Effects 0.000 claims description 26
- 230000003028 elevating effect Effects 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims description 6
- 230000000630 rising effect Effects 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 239000000758 substrate Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000001788 irregular Effects 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Dicing (AREA)
Abstract
The present invention provides a conveying mechanism capable of conveying a plurality of devices even though the devices are small or having concave or convex on surfaces. The conveying mechanism (15) has a housing (48), a moveable pad (62) storied in the housing (48) and a moveable pad moving component (68). After storied in a storage concave (70) of the moveable pad (62) located at a moving out and in position (64) in the housing (48), a plurality of divided devices (30) are moved to a holding position (66) together with the moveable pad (62) for being held between the storage concave (70) and the lower wall (74) of the housing (48) and being conveyed to a storage tray (14), the moving in and out opening (82) of the housing (48) is located just above the opening part (82) of the storage tray (14), and the moveable pad (62) is converted to the moving in and out position (64).
Description
Technical field
The present invention relates to a kind of transport mechanism, for by a plurality of devices that keep above of support plate above support plate conveyance to storing tray.
Background technology
In the cutting apart of the workpiece of the rectangular shapes such as conductor package substrate, by cutter, be divided into each device.In when cutting, base plate for packaging is by the support plate attracting holding being formed by resin etc., and is being supported under the state of plate attracting holding, by bite, along cut-off rule, cut apart; This support plate has the escape of the attraction hole forming corresponding to each device and the bite forming corresponding to cut-off rule.Afterwards, above each device after being cut apart by conveyance fixture attracting holding, and conveyance is to the storing tray (with reference to patent documentation 1) of regulation.
Patent documentation 1: TOHKEMY 2003-163180 communique
But, such as in the situation that the undersized device below 3 * 3mm or form irregular device by electrode etc. from the teeth outwards, even if want, a plurality of devices after cutting apart are adsorbed to maintenance together and carry out conveyance above support plate, also be difficult to maintain the sufficient absorption affinity of each device, possibly cannot do not make device come off and enough stably carry out conveyance.
Summary of the invention
The present invention carries out in view of the above fact, its major technique problem is to provide a kind of novelty and modified transport mechanism, even at undersized device or form irregular device from the teeth outwards in the situation that, also can not come off and stably carry out conveyance.
According to the present invention, as the transport mechanism of realizing above-mentioned major technique problem, provide a kind of transport mechanism, for the conveyance above this of this support plate of a plurality of devices that keep above of support plate, to storing tray, be is characterized in that to possess:
Housing, is installed as lifting freely and freedom of movement in the horizontal direction; Housing elevating movement member, for making this housing elevating movement; Housing mobile member, for moving in the horizontal direction this housing; Movable pads, is arranged on to freedom of movement in this housing moving into take out of between position and holding position in the horizontal direction; And movable pads mobile member, for this movable pads is moved,
This movable pads have for accommodate the plurality of device, at least 1 of open underneath accommodate recess, being stipulated by the lower wall that is formed with moving into of the shape corresponding with this support plate and takes out of opening below of this housing,
When making this movable pads be positioned at this, move into and take out of position, this that makes this housing move into take out of opening be positioned at the plurality of device directly over, and when this housing is declined, a plurality of devices that should keep above of this support plate are accommodated to this of this movable pads and are accommodated in recess, then when making this accommodate liner while moving to this holding position, a plurality of devices that should keep above of this support plate move together with this movable pads, and be maintained at by this of this movable pads, accommodate in the enclosure space of this lower wall defined of recess and this housing
When making this housing increase, move in the horizontal direction, this that makes this housing move into take out of opening be positioned at this storing tray directly over, then making this movable pads from this holding position, move to this moves into while taking out of opening, this of this movable pads accommodated a plurality of devices of accommodating in recess and moved together with this movable pads, and moved into and taken out of opening and drop in this storing tray by this of this housing.
Be preferably, the ranks configuration device group that exists a plurality of a plurality of devices that configured by ranks to form on support plate, movable pads have with a plurality of ranks configuration device groups respectively corresponding a plurality of rectangles accommodate recess.And, be preferably, the additional gas ejection member that is provided with on storing tray, this gas ejection member is taken out of opening, to the recess of accommodating of movable pads, is sprayed gas by being positioned at moving into of housing directly over storing tray.
In transport mechanism of the present invention, make a plurality of devices from moving together with movable pads support substrate, remain on by the enclosure space of the lower wall defined of accommodating recess and housing of movable pads and carry out conveyance, therefore even if at undersized device or form irregular device from the teeth outwards in the situation that, also can stably carry out conveyance.
Accompanying drawing explanation
Fig. 1 means the approximate vertical view of an example of the cutter of the preferred implementation that possesses transport mechanism of the present invention.
Fig. 2 means the general principal view of an example of the cutter of the preferred implementation that possesses transport mechanism of the present invention.
Fig. 3 is the stereogram by the plate object before a plurality of devices of being split into of transport mechanism conveyance of the present invention.
Fig. 4 means the stereogram of the preferred implementation of transport mechanism of the present invention.
Fig. 5 means the stereogram of the preferred implementation of transport mechanism of the present invention.
Fig. 6 means the summary ideograph of conveyance flow process of the preferred implementation of transport mechanism of the present invention.
Fig. 7 means the summary ideograph of conveyance flow process of the preferred implementation of transport mechanism of the present invention.
Symbol description:
8 regions that are installed
12 cutting zones
14 storing trays
15 transport mechanisms
18 plate objects
24 support plates
26 ranks configuration device groups
48 housings
50 housing mobile members
52 housing lift components
62 movable pads
64 move into and take out of position
66 holding positions
68 movable pads mobile members
70 accommodate recess
72 move into and take out of opening
82 peristomes
84 gas ejection members
Embodiment
Below, with reference to illustrated accompanying drawing, illustrate in greater detail the preferred implementation of the transport mechanism forming according to the present invention.
In Fig. 1 and Fig. 2, illustrate as the cutter of exemplary that possesses the processing machine of the transport mechanism forming according to the present invention.Illustrated cutting machine tool is for shell 2, and on this shell 2, regulation has filling region 4, standby region 6, the region 8 that is installed, calibration region 10, cutting zone 12 and accommodates region 14.In filling, dispose in region 4 and supply with box 16, in this box 16 above-below direction devices spaced apart taken in a plurality of plate objects 18.
As shown in Figure 3, being accommodated in the plate object 18 in box 16, is the rectangular-shaped conductor package substrate of QFN substrate (Quad Flat Non-leaded package: four sides are without pin flat packaging) etc. as an example.Illustrated plate object 18 by substrate 19, be arranged on substrate 19 rear side (not shown) such as IC chips and the resin 21 of the overall sealing such as IC chip is formed, this IC chip etc. is arranged on the surface of substrate 19 in formed region of being stipulated by cut-off rule 28.A plurality of devices 30 are arranged as ranks shape and form ranks configuration device group 26, in the illustrated embodiment, have 3 ranks configuration device groups 26, and each ranks configuration device group 26 comprises a plurality of devices 30.By cut-off rule 28 is cut off in length and breadth, be divided into thus a plurality of devices 30.
With reference to Fig. 1, go on to say, by suitable taking out of, move into member (not shown), plate object 18 is taken out of to standby region 6 from box 16.Standby region 6 is the assigned positions in the pair of guide rails 20 configuring movably on Width, the plate object 18 of being taken out of to this assigned position carrys out integral body above attracting holding by not shown conveyance member, and conveyance is to being positioned in the chuck table 22 being installed in region 8.Transport mechanism is to have from the known conveyance member of the attraction mechanism of attracting holding plate object 18 above, and because plate object 18 is not divided, so the conveyance of this conveyance member can be carried out conveyance no problemly.
With reference to Fig. 1 and Fig. 2, go on to say, chuck table 22 is configured to: in Fig. 1, can be to move in X-direction at above-below direction, and can rotate.Downside in chuck table 22 disposes known X-axis driving mechanism, this X-axis driving mechanism by the chuck table 22 that makes rotatable structure from be installed region 8 till the ball-screw that cutting zone 12 moves freely in X-direction and motor etc. form.This driving mechanism is covered by the guard blocks such as retractile bellows in X-direction 23.On on the central portion of chuck table 22, be fixed with support plate 24.Support plate 24 is, by the negative pressure from chuck table 22, keeps plate object 18, and with the size corresponding to plate object 18, forms as shown in Figure 4, in order to prevent the position skew of plate object 18, and by the larger material of coefficient of friction for example rubber form.And, be formed with: when having put plate object 18, on the corresponding position of the cut-off rule 28 with plate object 18, form, for holding the groove 32 of bite when the cutting; A plurality of attractions hole (not shown) with each device 30 of attracting holding on region being divided by groove 32.Support plate 24 can suitably be set accordingly with kept plate object.Plate object 18 by not shown conveyance member by from 6 conveyances of standby region to support plate 24, each cut-off rule 28 of each plate object 18 is positioned on the groove 32 of support plate 24, the back side of each device 30 (resin face) is attracted to maintain.
Next, chuck table 22 is positioned in calibration region 10 by X-axis driving mechanism.Near calibration region 10, dispose the calibrated component 34 configuring movably in the Y direction with X-direction quadrature.When chuck table 22 is positioned in calibration region 10, calibrated component 34 be positioned in plate object 18 in chuck table 22 above on.Making a video recording in surface by 34 pairs of plate objects 18 of calibrated component, and processes by image the position that detects the cut-off rule 28 that should be cut by bite described later, and when cutting, bite is critically positioned on cut-off rule 28.Calibrated component 34 is the known microscope structure of having carried ccd video camera etc.
Put the chuck table 22 that is detected the plate object 18 of cutting position by calibrated component 34, be positioned to cutting zone 12.On cutting zone 12, a pair of cutting member 36 can relatively move relative to being configured in the Y direction with X-axis quadrature.Cutting member 36 possesses: axle 40, and handling are freely provided with bite 38; With shell 42, this axle 40 is supported as rotatable, and comprised the not shown rotary driving source that makes its rotary actuation.And, dispose: not shown index feed member, by cutting member 36 with respect to chuck table 22 index feed in Y direction relatively; Not shown incision feeding member, relatively above cuts feeding in Z-direction (vertical direction) by cutting member 36 with respect to chuck table 22.Index feed member and incision feeding member are for example to possess ball-screw and make the pulse motor of this ball-screw rotation, the known construction that respectively cutting member 36 is moved up in the side of hope, detailed.
Between region 8 and calibration region 10, dispose cascade 44 and the air curtain 46 that two regions are separated being installed.Cascade 44 and air curtain 46 are configured to: on high some positions, surface of the plate object 18 putting than chuck table 22, to the movement of chuck table 22, can not cause obstacle.Cascade 44 forms the bar-shaped of size that width is at least large than the long limit of plate object 18, towards cutting zone 12 sides, oliquely downward separate on the bearing of trend of cascade 44 closely-spacedly and be formed with a plurality of holes, the rinse water that is supplied to cascade 44 by not shown rinse water supplying tubing is sprayed from a plurality of holes.In cutting or after cutting, from cascade jet cleaning water, the surface of the plate object 18 putting in chuck table 22 is cleaned.And, air curtain 46 forms bar-shaped with cascade 44 same sizes, roughly towards just descending, on the bearing of trend of air curtain 46, separate and be formed with a plurality of holes closely-spacedly, the air that is supplied to air curtain 46 by not shown air supply pipe arrangement sprays from a plurality of holes, with the mode of separating be installed region 8 and cutting zone 12 curtain shape ground air supply all the time.
Be positioned at the plate object 18 of cutting zone 12, along by the detected cut-off rule 28 of calibrated component 34, by cutting member 36, critically carry out cut.The bite 38 of High Rotation Speed is positioned on the extended line of cut-off rule 28 and on the Z position of the regulation that plate object 18 is cut apart, chuck table 22 moves along X-axis, thus plate object 18 along its total length, from its edge-to-edge be cut.Bite 38 is cut to the centre of groove 32, so although plate object 14 is divided, can not injure support plate 24.Next, cutting member 36 is by index feed in Y direction, and equally by every 1 line cut apart.When having cut apart the whole cut-off rule 28 extending in prescribed direction (X-direction), chuck table 22 90-degree rotations, along cutting with cut-off rule 28 execution of cut-off rule 28 quadratures of cutting before.In when cutting, from the washer jet and the cascade 44 that are configured in above-mentioned cutting member 36, spray a large amount of cutting water, rinse water, by the strength of cutting water, rinse water remove cutting swarf or the device 30 that is not attracted to maintain beyond remainder.Therefore,, when having cut whole cut-off rule 28 of plate object 18, as shown in Figure 4, on support plate 24, only leave a plurality of devices 30 that are attracted to maintain.
If cutting finishes, chuck table 22 is back to the region 8 that is installed.Now, a plurality of devices 30 that keep in chuck table 22, low speed is by under cascade 44 and air curtain 46.By the rinse water of spraying from cascade 44, remove the cutting swarf device 30, by air curtain 46, remove rinse water, chuck table 22 is back to the region that is installed.After this, by more than 15 device 30 of transport mechanism of the present invention by conveyance to storing tray 14.
At this, with reference to Fig. 1, Fig. 2, the transport mechanism 15 of embodiments of the present invention is elaborated.Transport mechanism 15 comprises: housing 48; Make housing 48 from the top (representing with double dot dash line) in the region 8 that is installed to the mobile housing mobile member 50 in the top (representing with solid line) of storing tray 14; And the housing elevating movement member 52 that makes housing 48 elevating movements.Housing mobile member 50 comprises: rotate freely and install and the ball-screw 54 that extends the top of direction storing tray 14 from the region 8 that is installed; The pulse motor 56 linking with an end of ball-screw 54; And the pair of guide rails 60 that the base portion 58 of the other end and housing 48 links is guided.In base portion 58, in the mode screwing togather with ball-screw 54, accommodate and be fixed with nut (not shown), by driving pulse motor 56, base portion 58 is guided by pair of guide rails 60 and moves in the horizontal direction.And, in base portion 58, dispose housing lift component 52.Housing lift component 52You air cylinder mechanism forms, cylinder portion (double dot dash line in base portion) is in base portion 58, the front end of piston rod is connected with the connecting member 53 above that is fixed on housing 48, stretching of the piston rod causing corresponding to air pressure, with housing 48 elevating movements of link 53 links.
Next, the detailed formation of housing 48 is described with reference to Fig. 4.In housing 48, possess: movable pads 62, for a plurality of devices 30 of 24 attracting holdings of the support plate in chuck table 22 are accommodated to housing 48; With movable pads mobile member 68, for make movable pads 62 described later move into take out of between 64Yu holding position, position 66 move in the horizontal direction.
Return to Fig. 4 and go on to say, in movable pads 62, above movable pads 62 and across moving into, take out of 64He holding position, position 66 and dispose pair of guide rails 78.On the top of movable pads 62, dispose pair of sliding holding components 80, this slip holding components 80 combines slidably with guide rail 78.Movable pads mobile member 68 consists of a pair of air cylinder mechanism 76, and the cylinder of air cylinder mechanism 76 is fixed in housing 48, and the top of piston and movable pads 62 link.Piston by air cylinder mechanism 76 stretches, and movable pads 62 is guided by pair of guide rails 78 thus, moves moving into take out of between 64Yu holding position, position 66.Importantly, configure each parts, so that the gap below and between the lower wall 74 of housing 48 of movable pads 62 remains definitely, slide.This certain gap is preferably 0.05～0.1mm.
Next, with reference to Fig. 5, the storing tray 14 by a plurality of devices 30 of transport mechanism 15 conveyance is described.Storing tray 14 is for accommodate the dish of a plurality of devices 30 in inside, has and the above-mentioned peristome 82 of taking out of opening 72 roughly the same shapes of moving on the top of storing tray 14.At peristome 82, possesses the upwards gas injection member 84 of gas jet.Gas injection member 84 by the internal perisporium devices spaced apart along peristome 82 and by spray-hole upwards a plurality of air nozzles 86 of configuration form.Air nozzle 86 is communicated with pipe arrangement 90 storing tray 14 is inner, and this pipe arrangement 90 is communicated with not shown air supply source, and when air supply, air is injected into the upper area of peristome 82.
With reference to Fig. 6 and Fig. 7, the action of transport mechanism 15 and storing tray 14 is as constructed as above elaborated.When pallet 22 is positioned in while being installed region 8, the housing mobile member 50 of transport mechanism 15 moves to housing 48 to be positioned in the top (Fig. 6 (a)) of the support plate 24 in the region 8 that is installed.Now, movable pads 62 is positioned in to move into and takes out of position 64.Next, by housing elevating mechanism 52, housing 48 is declined, support plate 24 is inserted into move into takes out of opening 72, and a plurality of devices 30 that support plate 24 keeps are above accommodated accommodating in recess 70 (Fig. 6 (b)) to movable pads 62 according to each ranks configuration device group 26.Now, the length of moving into each limit of taking out of opening 72 forms than the large 0.1～0.2mm of the length on each limit of support plate 24, move into and take out of opening 72 and have the gap of 0.05～0.1mm and insert with support plate 24, therefore a plurality of devices 30 can not contact and move into the edge of taking out of opening 72.And, be formed with the thickness of moving into the lower wall 74 of taking out of opening 72 and be set to the thin thickness 0.05～0.1mm than support plate 24, therefore described later when a plurality of devices 30 are moved together with movable pads 62, do not exist a plurality of devices 30 to be moved into take out of between opening 72 and support plate 24 and the unfavorable condition such as clamp or tangle, can stably slide.
Afterwards, make housing 48 risings (Fig. 6 (d)), and by housing mobile member 50, from the region 8 that is installed, to the top of storing tray 14, move, by moving into of housing 48 take out of opening 72 navigate to storing tray 14 peristome 82 directly over (Fig. 7 (a)).When making the lower wall 76 of housing 48 with above storing tray 14 during butt, even in the situation that device 30 is small size device, also prevent reliably the situation of dispersing towards periphery.Next, when making movable pads 62 64 move to and move into while taking out of position 66 from holding position, a plurality of devices 30 of accommodating in recess 70 of accommodating of movable pads 62 move together with movable pads 62, and by moving into of housing 48, take out of opening 72 and drop in storing tray 14 (Fig. 7 (b)).Now, the gas ejection member 84 forming from the inwall of the peristome 82 along storing tray 14 sprays air etc., by be positioned in peristome 82 directly over moving into of housing 48 take out of opening 72, to movable pads 62, accommodate the whole area spray gas of recess 70, even just in case device 30 remains in accommodate recess 70 in the situation that, the strength that also can spray by gas falls it.
Claims (3)
1. a transport mechanism, for the conveyance above this of this support plate of a plurality of devices that keep above of support plate, to storing tray, be is characterized in that to possess:
Housing, is installed as lifting freely and freedom of movement in the horizontal direction; Housing elevating movement member, for making this housing elevating movement; Housing mobile member, for moving in the horizontal direction this housing; Movable pads, is arranged on to freedom of movement in this housing moving into take out of between position and holding position in the horizontal direction; And movable pads mobile member, for this movable pads is moved,
This movable pads have for accommodate the plurality of device, at least 1 of open underneath accommodate recess, being stipulated by the lower wall that is formed with moving into of the shape corresponding with this support plate and takes out of opening below of this housing,
When making this movable pads be positioned at this, move into and take out of position, this that makes this housing move into take out of opening be positioned at the plurality of device directly over, and when this housing is declined, a plurality of devices that should keep above of this support plate are accommodated to this of this movable pads and are accommodated in recess, then when making this movable pads move to this holding position, a plurality of devices that should keep above of this support plate move together with this movable pads, and be maintained at by this of this movable pads, accommodate in the enclosure space of this lower wall defined of recess and this housing
When this housing is moved in the horizontal direction when rising, this that makes this housing move into take out of opening be positioned at this storing tray directly over, then making this movable pads from this holding position, move to this moves into while taking out of opening, this of this movable pads accommodated a plurality of devices of accommodating in recess and moved together with this movable pads, and moved into and taken out of opening and drop in this storing tray by this of this housing.
2. the transport mechanism of recording as claim 1, is characterized in that,
This support plate should above on, the ranks configuration device group that exists a plurality of the plurality of devices that configured by ranks to form, this movable pads have with the plurality of ranks configuration device group respectively corresponding a plurality of rectangles accommodate recess.
3. as claim 1 or 2 transport mechanisms of recording, it is characterized in that,
The additional gas ejection member that is provided with on this storing tray, this gas ejection member moves into by this that is positioned at this housing directly over this storing tray and take out of opening, to this of this movable pads, accommodate recess sprays gas.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008288459A JP5248987B2 (en) | 2008-11-11 | 2008-11-11 | Transport mechanism |
| JP288459/2008 | 2008-11-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101740444A CN101740444A (en) | 2010-06-16 |
| CN101740444B true CN101740444B (en) | 2014-03-12 |
Family
ID=42305888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910212114.1A Active CN101740444B (en) | 2008-11-11 | 2009-11-10 | Conveying mechanism |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5248987B2 (en) |
| CN (1) | CN101740444B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012049430A (en) * | 2010-08-30 | 2012-03-08 | Disco Abrasive Syst Ltd | Cutting device |
| JP6105951B2 (en) * | 2013-01-23 | 2017-03-29 | 株式会社ディスコ | Tape peeling method and tape peeling apparatus |
| JP6061710B2 (en) * | 2013-02-01 | 2017-01-18 | 株式会社ディスコ | Resin coating equipment |
| JP6118666B2 (en) * | 2013-07-02 | 2017-04-19 | 株式会社ディスコ | Cutting equipment |
| JP6679157B2 (en) * | 2015-10-27 | 2020-04-15 | 株式会社ディスコ | Transfer mechanism of processing equipment |
| JP6762220B2 (en) * | 2016-12-15 | 2020-09-30 | 株式会社ディスコ | Transfer mechanism of processing equipment |
| JPWO2022195931A1 (en) * | 2021-03-18 | 2022-09-22 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1733578A (en) * | 2004-08-02 | 2006-02-15 | 株式会社迪思科 | Work-piece conveyance and storage device and cutting apparatus having the same |
| CN101127316A (en) * | 2006-08-16 | 2008-02-20 | 株式会社迪思科 | Wafer transfer method and grinding device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000232080A (en) * | 1999-02-10 | 2000-08-22 | Disco Abrasive Syst Ltd | Workpiece to be processed dividing system, and pellet- shifting apparatus |
| JP4309084B2 (en) * | 2001-11-26 | 2009-08-05 | アピックヤマダ株式会社 | Dicing machine |
| JP2004207424A (en) * | 2002-12-25 | 2004-07-22 | Towa Corp | Cutting-off method and equipment of substrate |
| JP4638172B2 (en) * | 2004-03-31 | 2011-02-23 | 積水化学工業株式会社 | IC chip manufacturing method and IC chip manufacturing apparatus |
-
2008
- 2008-11-11 JP JP2008288459A patent/JP5248987B2/en active Active
-
2009
- 2009-11-10 CN CN200910212114.1A patent/CN101740444B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1733578A (en) * | 2004-08-02 | 2006-02-15 | 株式会社迪思科 | Work-piece conveyance and storage device and cutting apparatus having the same |
| CN101127316A (en) * | 2006-08-16 | 2008-02-20 | 株式会社迪思科 | Wafer transfer method and grinding device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010118376A (en) | 2010-05-27 |
| JP5248987B2 (en) | 2013-07-31 |
| CN101740444A (en) | 2010-06-16 |
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