CN101717993B - 直拉重掺锑单晶的掺杂方法及掺杂装置 - Google Patents
直拉重掺锑单晶的掺杂方法及掺杂装置 Download PDFInfo
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Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102168302B (zh) * | 2011-04-13 | 2012-11-07 | 天津市环欧半导体材料技术有限公司 | 一种用于生产直拉硅单晶的双石英坩埚装置及方法 |
CN104928760A (zh) * | 2015-07-16 | 2015-09-23 | 中国电子科技集团公司第四十六研究所 | 一种用于重掺硼或磷直拉硅单晶掺杂装置和掺杂方法 |
CN105369346A (zh) * | 2015-12-09 | 2016-03-02 | 天津市环欧半导体材料技术有限公司 | 一种直拉重掺砷低电阻硅单晶的装置 |
CN111364098A (zh) * | 2018-12-26 | 2020-07-03 | 有研半导体材料有限公司 | 一种用于重掺直拉单晶的掺杂装置 |
CN109457294A (zh) * | 2018-12-27 | 2019-03-12 | 衢州晶哲电子材料有限公司 | 一种直拉重掺锑硅单晶锑源提纯装置及提纯掺杂方法 |
CN112941617B (zh) * | 2019-12-10 | 2022-09-09 | 有研半导体硅材料股份公司 | 一种用于重掺锑直拉单晶硅的掺杂装置及掺杂方法 |
CN113549994B (zh) * | 2021-07-22 | 2022-07-01 | 宁夏中欣晶圆半导体科技有限公司 | 直拉硅单晶的掺杂装置及方法 |
CN114381799A (zh) * | 2021-12-31 | 2022-04-22 | 杭州中欣晶圆半导体股份有限公司 | 消除重掺锑管道的方法 |
CN114574946A (zh) * | 2022-02-23 | 2022-06-03 | 中国电子科技集团公司第四十六研究所 | 一种重掺锑硅单晶中锑元素掺杂的方法及掺杂装置 |
CN115058767B (zh) * | 2022-05-30 | 2024-04-23 | 宁夏中晶半导体材料有限公司 | 一种用于mcz法拉制重掺锑单晶的加掺方法和装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5904768A (en) * | 1996-10-15 | 1999-05-18 | Memc Electronic Materials, Inc. | Process for controlling the oxygen content in silicon wafers heavily doped with antimony or arsenic |
CN1337476A (zh) * | 2000-08-16 | 2002-02-27 | 浙江大学 | 直拉硅单晶生长的重掺杂方法 |
CN1414147A (zh) * | 2001-10-26 | 2003-04-30 | 北京有色金属研究总院 | 一种用于直拉硅单晶制备中的掺杂方法及其装置 |
CN1556255A (zh) * | 2003-12-30 | 2004-12-22 | 宁波立立电子股份有限公司 | 用于重掺直拉硅单晶制造的掺杂方法及其掺杂漏斗 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5904768A (en) * | 1996-10-15 | 1999-05-18 | Memc Electronic Materials, Inc. | Process for controlling the oxygen content in silicon wafers heavily doped with antimony or arsenic |
US6214109B1 (en) * | 1996-10-15 | 2001-04-10 | Memc Electronic Materials, Inc. | Apparatus for controlling the oxygen content in silicon wafers heavily doped with antimony or arsenic |
CN1337476A (zh) * | 2000-08-16 | 2002-02-27 | 浙江大学 | 直拉硅单晶生长的重掺杂方法 |
CN1414147A (zh) * | 2001-10-26 | 2003-04-30 | 北京有色金属研究总院 | 一种用于直拉硅单晶制备中的掺杂方法及其装置 |
CN1556255A (zh) * | 2003-12-30 | 2004-12-22 | 宁波立立电子股份有限公司 | 用于重掺直拉硅单晶制造的掺杂方法及其掺杂漏斗 |
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