CN101652228B - 搬送装置 - Google Patents

搬送装置 Download PDF

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Publication number
CN101652228B
CN101652228B CN200880011092.6A CN200880011092A CN101652228B CN 101652228 B CN101652228 B CN 101652228B CN 200880011092 A CN200880011092 A CN 200880011092A CN 101652228 B CN101652228 B CN 101652228B
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CN
China
Prior art keywords
rotation
arm
gear
engaging
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN200880011092.6A
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English (en)
Chinese (zh)
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CN101652228A (zh
Inventor
武者和博
南展史
吾乡健二
浅石隆
小池土志夫
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Ulvac Inc
Original Assignee
Ulvac Inc
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Publication date
Priority claimed from JP2007107845A external-priority patent/JP5075459B2/ja
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority claimed from PCT/JP2008/054352 external-priority patent/WO2008126556A1/ja
Publication of CN101652228A publication Critical patent/CN101652228A/zh
Application granted granted Critical
Publication of CN101652228B publication Critical patent/CN101652228B/zh
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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN200880011092.6A 2007-04-05 2008-03-11 搬送装置 Active CN101652228B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP099476/2007 2007-04-05
JP2007099476A JP5171093B2 (ja) 2007-04-05 2007-04-05 搬送装置
JP2007107845A JP5075459B2 (ja) 2007-04-17 2007-04-17 搬送装置
JP107845/2007 2007-04-17
PCT/JP2008/054352 WO2008126556A1 (ja) 2007-04-05 2008-03-11 搬送装置

Publications (2)

Publication Number Publication Date
CN101652228A CN101652228A (zh) 2010-02-17
CN101652228B true CN101652228B (zh) 2012-12-12

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ID=39981696

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200880011092.6A Active CN101652228B (zh) 2007-04-05 2008-03-11 搬送装置

Country Status (2)

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JP (1) JP5171093B2 (OSRAM)
CN (1) CN101652228B (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105805252A (zh) * 2016-05-06 2016-07-27 广州市兴世机械制造有限公司 一种双驱动五连杆机构
CN110697634B (zh) * 2019-11-01 2024-06-25 无锡中鼎集成技术有限公司 一种蛙式货叉移动结构
CN112706157B (zh) * 2021-03-29 2021-06-15 湖南机电职业技术学院 一种机械手装置的放料机械手臂

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2762970Y (zh) * 2004-11-04 2006-03-08 大连理工大学 一种传输机器人

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09283588A (ja) * 1996-04-08 1997-10-31 Hitachi Ltd 基板搬送装置及び基板の搬送方法
JP2000001218A (ja) * 1998-06-15 2000-01-07 Hitachi Ltd 搬送装置
JP4463409B2 (ja) * 2000-10-24 2010-05-19 株式会社アルバック 搬送装置及び真空処理装置
JP4291709B2 (ja) * 2003-04-16 2009-07-08 株式会社ダイヘン 直線移動機構およびこれを用いた搬送ロボット

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2762970Y (zh) * 2004-11-04 2006-03-08 大连理工大学 一种传输机器人

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JP特开2000-1218A 2000.01.07
JP特开2000-42952A 2000.02.15
JP特开平9-283588A 1997.10.31

Also Published As

Publication number Publication date
CN101652228A (zh) 2010-02-17
JP2008258427A (ja) 2008-10-23
JP5171093B2 (ja) 2013-03-27

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