JP5171093B2 - 搬送装置 - Google Patents

搬送装置 Download PDF

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Publication number
JP5171093B2
JP5171093B2 JP2007099476A JP2007099476A JP5171093B2 JP 5171093 B2 JP5171093 B2 JP 5171093B2 JP 2007099476 A JP2007099476 A JP 2007099476A JP 2007099476 A JP2007099476 A JP 2007099476A JP 5171093 B2 JP5171093 B2 JP 5171093B2
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JP
Japan
Prior art keywords
driven
link
links
active
rotation axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007099476A
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English (en)
Japanese (ja)
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JP2008258427A5 (OSRAM
JP2008258427A (ja
Inventor
和博 武者
展史 南
健二 吾郷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2007099476A priority Critical patent/JP5171093B2/ja
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to DE112008000908T priority patent/DE112008000908T5/de
Priority to PCT/JP2008/054352 priority patent/WO2008126556A1/ja
Priority to KR1020097020641A priority patent/KR101071606B1/ko
Priority to CN200880011092.6A priority patent/CN101652228B/zh
Priority to TW097110814A priority patent/TWI463592B/zh
Publication of JP2008258427A publication Critical patent/JP2008258427A/ja
Publication of JP2008258427A5 publication Critical patent/JP2008258427A5/ja
Priority to US12/564,572 priority patent/US8382421B2/en
Application granted granted Critical
Publication of JP5171093B2 publication Critical patent/JP5171093B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2007099476A 2007-04-05 2007-04-05 搬送装置 Active JP5171093B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2007099476A JP5171093B2 (ja) 2007-04-05 2007-04-05 搬送装置
PCT/JP2008/054352 WO2008126556A1 (ja) 2007-04-05 2008-03-11 搬送装置
KR1020097020641A KR101071606B1 (ko) 2007-04-05 2008-03-11 반송 장치
CN200880011092.6A CN101652228B (zh) 2007-04-05 2008-03-11 搬送装置
DE112008000908T DE112008000908T5 (de) 2007-04-05 2008-03-11 Transportvorrichtung
TW097110814A TWI463592B (zh) 2007-04-05 2008-03-26 搬送裝置
US12/564,572 US8382421B2 (en) 2007-04-05 2009-09-22 Transport apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007099476A JP5171093B2 (ja) 2007-04-05 2007-04-05 搬送装置

Publications (3)

Publication Number Publication Date
JP2008258427A JP2008258427A (ja) 2008-10-23
JP2008258427A5 JP2008258427A5 (OSRAM) 2009-09-03
JP5171093B2 true JP5171093B2 (ja) 2013-03-27

Family

ID=39981696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007099476A Active JP5171093B2 (ja) 2007-04-05 2007-04-05 搬送装置

Country Status (2)

Country Link
JP (1) JP5171093B2 (OSRAM)
CN (1) CN101652228B (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105805252A (zh) * 2016-05-06 2016-07-27 广州市兴世机械制造有限公司 一种双驱动五连杆机构
CN110697634B (zh) * 2019-11-01 2024-06-25 无锡中鼎集成技术有限公司 一种蛙式货叉移动结构
CN112706157B (zh) * 2021-03-29 2021-06-15 湖南机电职业技术学院 一种机械手装置的放料机械手臂

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09283588A (ja) * 1996-04-08 1997-10-31 Hitachi Ltd 基板搬送装置及び基板の搬送方法
JP2000001218A (ja) * 1998-06-15 2000-01-07 Hitachi Ltd 搬送装置
JP4463409B2 (ja) * 2000-10-24 2010-05-19 株式会社アルバック 搬送装置及び真空処理装置
JP4291709B2 (ja) * 2003-04-16 2009-07-08 株式会社ダイヘン 直線移動機構およびこれを用いた搬送ロボット
CN2762970Y (zh) * 2004-11-04 2006-03-08 大连理工大学 一种传输机器人

Also Published As

Publication number Publication date
CN101652228A (zh) 2010-02-17
JP2008258427A (ja) 2008-10-23
CN101652228B (zh) 2012-12-12

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