CN101542246A - 分光模块 - Google Patents

分光模块 Download PDF

Info

Publication number
CN101542246A
CN101542246A CNA2008800005031A CN200880000503A CN101542246A CN 101542246 A CN101542246 A CN 101542246A CN A2008800005031 A CNA2008800005031 A CN A2008800005031A CN 200880000503 A CN200880000503 A CN 200880000503A CN 101542246 A CN101542246 A CN 101542246A
Authority
CN
China
Prior art keywords
light
main body
spectroscopic module
layer
spectroscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2008800005031A
Other languages
English (en)
Chinese (zh)
Inventor
柴山胜己
H·泰希曼
能野隆文
铃木智史
D·希勒
U·施塔克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to CN201510551247.7A priority Critical patent/CN105606215A/zh
Publication of CN101542246A publication Critical patent/CN101542246A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
CNA2008800005031A 2007-06-08 2008-06-05 分光模块 Pending CN101542246A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510551247.7A CN105606215A (zh) 2007-06-08 2008-06-05 分光模块

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007152966A JP4891840B2 (ja) 2007-06-08 2007-06-08 分光モジュール
JP152966/2007 2007-06-08

Related Child Applications (2)

Application Number Title Priority Date Filing Date
CN201310359016.7A Division CN103424187B (zh) 2007-06-08 2008-06-05 分光模块
CN201510551247.7A Division CN105606215A (zh) 2007-06-08 2008-06-05 分光模块

Publications (1)

Publication Number Publication Date
CN101542246A true CN101542246A (zh) 2009-09-23

Family

ID=40093758

Family Applications (3)

Application Number Title Priority Date Filing Date
CN201310359016.7A Active CN103424187B (zh) 2007-06-08 2008-06-05 分光模块
CNA2008800005031A Pending CN101542246A (zh) 2007-06-08 2008-06-05 分光模块
CN201510551247.7A Pending CN105606215A (zh) 2007-06-08 2008-06-05 分光模块

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201310359016.7A Active CN103424187B (zh) 2007-06-08 2008-06-05 分光模块

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201510551247.7A Pending CN105606215A (zh) 2007-06-08 2008-06-05 分光模块

Country Status (7)

Country Link
US (1) US8045157B2 (enExample)
EP (1) EP2048484B1 (enExample)
JP (1) JP4891840B2 (enExample)
KR (4) KR101389171B1 (enExample)
CN (3) CN103424187B (enExample)
TW (2) TWI468652B (enExample)
WO (1) WO2008149948A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108027324A (zh) * 2015-08-31 2018-05-11 惠普发展公司，有限责任合伙企业 光谱显微镜
CN110808259A (zh) * 2019-11-25 2020-02-18 华天慧创科技（西安）有限公司 一种晶圆透镜模组
CN113820790A (zh) * 2021-10-27 2021-12-21 华天慧创科技（西安）有限公司 一种微型光准直器透镜结构及制作方法

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2063239A4 (en) * 2007-06-08 2013-12-25 Hamamatsu Photonics Kk SPECTROSCOPIC MODULE
EP2063238B1 (en) * 2007-06-08 2018-08-22 Hamamatsu Photonics K.K. Spectroscope
EP2072978A4 (en) * 2007-06-08 2014-01-08 Hamamatsu Photonics Kk SPECTROSCOPIC MODULE
JP4887221B2 (ja) * 2007-06-08 2012-02-29 浜松ホトニクス株式会社 分光モジュール
JP4891841B2 (ja) 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
EP2075555A4 (en) 2007-06-08 2014-01-01 Hamamatsu Photonics Kk SPECTROSCOPIC MODULE
JP2010261767A (ja) * 2009-05-01 2010-11-18 Canon Inc 分光装置及びそれを有する画像形成装置
JP5592089B2 (ja) 2009-08-19 2014-09-17 浜松ホトニクス株式会社 分光モジュール及びその製造方法
CN106199795B (zh) * 2011-02-08 2019-03-05 浜松光子学株式会社 光学元件及其制造方法
US9435689B2 (en) * 2012-10-31 2016-09-06 Corning Incorporated Hyperspectral imaging system, monolithic spectrometer and methods for manufacturing the monolithic spectrometer
GB2508376A (en) 2012-11-29 2014-06-04 Ibm Optical spectrometer comprising an adjustably strained photodiode
JP2014187576A (ja) * 2013-03-25 2014-10-02 Seiko Epson Corp 分光カメラ、及びアライメント調整方法
JP6251073B2 (ja) * 2014-02-05 2017-12-20 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
EP3372966B1 (en) * 2017-03-10 2021-09-01 Hitachi High-Tech Analytical Science Limited A portable analyzer using optical emission spectoscopy
CN109387282B (zh) 2017-08-08 2023-04-11 三星电子株式会社 滤光器和包括该滤光器在内的光谱仪
JP1627076S (enExample) * 2018-04-27 2019-09-09
JP1626335S (enExample) * 2018-04-27 2019-09-02
JP1623120S (enExample) * 2018-04-27 2019-07-16
JP1624467S (enExample) * 2018-04-27 2019-08-05
JP1623119S (enExample) * 2018-04-27 2019-07-16
JP1627077S (enExample) * 2018-04-27 2019-09-09
CN112384771B (zh) 2018-07-06 2024-07-09 浜松光子学株式会社 分光模块和分光模块的制造方法
CN108956467B (zh) * 2018-08-09 2022-04-22 京东方科技集团股份有限公司 一种微流控芯片及其工作方法
KR102877637B1 (ko) 2019-03-29 2025-10-27 삼성전자주식회사 다파장 광을 이용한 광학 장치 및 그 동작 방법
KR102869875B1 (ko) 2019-12-20 2025-10-10 삼성전자주식회사 편분광 필터, 편분광 필터 어레이, 및 편분광 센서
US12148775B2 (en) 2020-10-13 2024-11-19 Samsung Electronics Co., Ltd. Hyperspectral element, hyperspectral sensor including the same, and hyperspectral image generating apparatus
KR102883986B1 (ko) 2021-10-14 2025-11-07 삼성전자주식회사 이미지 획득 장치 및 방법, 이를 포함하는 전자 장치
KR102667266B1 (ko) 2021-12-03 2024-05-21 삼성전자주식회사 이미지 센서 및 이를 포함하는 스캐너 및 그 동작방법
KR102654875B1 (ko) 2021-12-23 2024-04-05 삼성전자주식회사 자외선 차단 물질을 검출하는 장치 및 이를 포함하는 모바일 디바이스
KR102830286B1 (ko) 2022-01-06 2025-07-04 삼성전자주식회사 분광 필터와 이를 포함하는 이미지 센서 및 전자 장치
KR102730648B1 (ko) * 2022-02-24 2024-11-15 한국과학기술원 초박형 마이크로 분광기 및 이의 제조방법

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143685A (en) * 1978-04-29 1979-11-09 Ritsuo Hasumi Compact spectroscope for digital light wavemeter
DE3509131A1 (de) * 1985-03-14 1986-09-18 Fa. Carl Zeiss, 7920 Heidenheim Verfahren zur justierten montage der optischen bauteile eines optischen geraetes
JPS626126A (ja) * 1985-07-03 1987-01-13 Shimadzu Corp 光スペクトル分析用センサ
DE3611246A1 (de) * 1986-04-04 1987-10-15 Kernforschungsz Karlsruhe Verfahren zum herstellen eines passiven optischen bauelements mit einem oder mehreren echelette-gittern und nach diesem verfahren hergestelltes bauelement
JPS63229765A (ja) * 1987-03-18 1988-09-26 Fujitsu Ltd 赤外線検知器
JPH03119917A (ja) 1989-09-30 1991-05-22 Iseki & Co Ltd 草刈機の刈草装置
US5026160A (en) * 1989-10-04 1991-06-25 The United States Of America As Represented By The Secretary Of The Navy Monolithic optical programmable spectrograph (MOPS)
DE4038638A1 (de) 1990-12-04 1992-06-11 Zeiss Carl Fa Diodenzeilen-spektrometer
JP3375147B2 (ja) 1992-05-26 2003-02-10 浜松ホトニクス株式会社 半導体光検出装置
JP2713838B2 (ja) 1992-10-15 1998-02-16 浜松ホトニクス株式会社 分光イメージングセンサ
JPH06229829A (ja) * 1993-02-04 1994-08-19 Olympus Optical Co Ltd 受光素子アレイ
US5920418A (en) * 1994-06-21 1999-07-06 Matsushita Electric Industrial Co., Ltd. Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator
JPH08145794A (ja) 1994-11-17 1996-06-07 Shimadzu Corp 分光器
US6224912B1 (en) 1996-04-03 2001-05-01 The Rogo Institute Cancer-cell proliferation-suppressing material produced by cancer cells restricted by entrapment
US6303934B1 (en) * 1997-04-10 2001-10-16 James T. Daly Monolithic infrared spectrometer apparatus and methods
DE19717015A1 (de) * 1997-04-23 1998-10-29 Inst Mikrotechnik Mainz Gmbh Miniaturisiertes optisches Bauelement sowie Verfahren zu seiner Herstellung
EP0942267B1 (de) * 1998-03-11 2006-08-30 Gretag-Macbeth AG Spektrometer
JP3355489B2 (ja) * 1998-03-11 2002-12-09 日本板硝子株式会社 光分波器およびその組立方法
US6181418B1 (en) * 1998-03-12 2001-01-30 Gretag Macbeth Llc Concentric spectrometer
AU3032700A (en) * 1999-01-08 2000-07-24 Ibsen Micro Structures A/S Spectrometer
EP1041372B1 (de) 1999-04-01 2006-03-01 Gretag-Macbeth AG Spektrometer
WO2002004901A1 (en) 2000-07-11 2002-01-17 Adc Telecommunications, Inc. Monitoring apparatus for optical transmission systems
US6657723B2 (en) * 2000-12-13 2003-12-02 International Business Machines Corporation Multimode planar spectrographs for wavelength demultiplexing and methods of fabrication
JP4236418B2 (ja) * 2001-05-09 2009-03-11 日本板硝子株式会社 樹脂正立レンズアレイおよびその製造方法
WO2003012531A1 (en) 2001-08-02 2003-02-13 Aegis Semiconductor Tunable optical instruments
JP2003139611A (ja) 2001-11-06 2003-05-14 Olympus Optical Co Ltd 分光光度計
JP3912111B2 (ja) 2002-01-09 2007-05-09 富士通株式会社 波長多重双方向光伝送モジュール
JP4151271B2 (ja) * 2002-01-24 2008-09-17 株式会社ニコン 分光装置
JP3818441B2 (ja) 2002-02-20 2006-09-06 日本電信電話株式会社 基板実装構造及び半導体装置
JP2003318478A (ja) * 2002-04-26 2003-11-07 Sumitomo Electric Ind Ltd 光通信装置
JP2004191246A (ja) 2002-12-12 2004-07-08 Matsushita Electric Ind Co Ltd 凹凸検出センサ
DE10304312A1 (de) * 2003-02-04 2004-08-12 Carl Zeiss Jena Gmbh Kompakt-Spektrometer
JP2004309146A (ja) * 2003-04-02 2004-11-04 Olympus Corp 分光光度計
JP4409860B2 (ja) * 2003-05-28 2010-02-03 浜松ホトニクス株式会社 光検出器を用いた分光器
DE10344472A1 (de) * 2003-09-25 2005-05-04 Hilti Ag Optischer Strahlteiler
JP4627410B2 (ja) 2004-04-20 2011-02-09 浜松ホトニクス株式会社 分光器を用いた測定装置
KR100541954B1 (ko) * 2004-06-11 2006-01-12 삼성전자주식회사 광픽업장치
JP4473665B2 (ja) * 2004-07-16 2010-06-02 浜松ホトニクス株式会社 分光器
CN1800941B (zh) 2005-01-06 2010-05-12 群康科技(深圳)有限公司 背光模组
KR100767671B1 (ko) * 2005-05-09 2007-10-18 엘지전자 주식회사 휴대가능한 프로젝터용 광학시스템
TWI289352B (en) * 2005-07-06 2007-11-01 Asia Optical Co Inc Micro lens and its manufacturing method
CN100451611C (zh) * 2005-10-21 2009-01-14 中国科学院上海光学精密机械研究所 快速测量光谱的分光光度计
US7697137B2 (en) * 2006-04-28 2010-04-13 Corning Incorporated Monolithic Offner spectrometer
JP4891841B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
EP2063239A4 (en) * 2007-06-08 2013-12-25 Hamamatsu Photonics Kk SPECTROSCOPIC MODULE
EP2075555A4 (en) * 2007-06-08 2014-01-01 Hamamatsu Photonics Kk SPECTROSCOPIC MODULE
EP2063238B1 (en) * 2007-06-08 2018-08-22 Hamamatsu Photonics K.K. Spectroscope
EP2072978A4 (en) * 2007-06-08 2014-01-08 Hamamatsu Photonics Kk SPECTROSCOPIC MODULE
JP4887221B2 (ja) * 2007-06-08 2012-02-29 浜松ホトニクス株式会社 分光モジュール

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108027324A (zh) * 2015-08-31 2018-05-11 惠普发展公司，有限责任合伙企业 光谱显微镜
US10830643B2 (en) 2015-08-31 2020-11-10 Hewlett-Packard Development Company, L.P. Spectral microscope
CN108027324B (zh) * 2015-08-31 2021-10-08 惠普发展公司，有限责任合伙企业 光谱显微镜
CN110808259A (zh) * 2019-11-25 2020-02-18 华天慧创科技（西安）有限公司 一种晶圆透镜模组
CN113820790A (zh) * 2021-10-27 2021-12-21 华天慧创科技（西安）有限公司 一种微型光准直器透镜结构及制作方法

Also Published As

Publication number Publication date
TW200914805A (en) 2009-04-01
EP2048484A4 (en) 2014-01-01
JP4891840B2 (ja) 2012-03-07
JP2008304379A (ja) 2008-12-18
KR101721253B1 (ko) 2017-03-29
WO2008149948A1 (ja) 2008-12-11
EP2048484B1 (en) 2016-12-07
US8045157B2 (en) 2011-10-25
KR20120085922A (ko) 2012-08-01
EP2048484A1 (en) 2009-04-15
KR20100017079A (ko) 2010-02-16
TWI484144B (zh) 2015-05-11
US20100103412A1 (en) 2010-04-29
CN103424187B (zh) 2016-06-29
CN103424187A (zh) 2013-12-04
KR20150127737A (ko) 2015-11-17
KR101817911B1 (ko) 2018-01-11
TW201245675A (en) 2012-11-16
KR101389171B1 (ko) 2014-04-24
TWI468652B (zh) 2015-01-11
KR20170016035A (ko) 2017-02-10
CN105606215A (zh) 2016-05-25
KR101705478B1 (ko) 2017-02-09

Similar Documents

Publication Publication Date Title
CN101542246A (zh) 分光模块
CN102834702B (zh) 分光模块
CN101636645B (zh) 分光模块
CN102822647B (zh) 分光模块
US9797773B2 (en) Spectroscopy module and manufacturing method therefor
JP5512961B2 (ja) 分光モジュール及びその製造方法
CN101542249A (zh) 分光模块
JP4990420B1 (ja) 分光モジュールの製造方法
CN102027340B (zh) 分光模块的制造方法以及分光模块
JP4966428B2 (ja) 分光モジュール
JP4970616B2 (ja) 分光モジュール
JP5113947B2 (ja) 分光モジュール

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20090923