CN101522759B - 聚硅烷的处理和用途 - Google Patents
聚硅烷的处理和用途 Download PDFInfo
- Publication number
- CN101522759B CN101522759B CN2007800308152A CN200780030815A CN101522759B CN 101522759 B CN101522759 B CN 101522759B CN 2007800308152 A CN2007800308152 A CN 2007800308152A CN 200780030815 A CN200780030815 A CN 200780030815A CN 101522759 B CN101522759 B CN 101522759B
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- China
- Prior art keywords
- polysilane
- plasma
- mixture
- component
- reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J3/00—Processes of treating or compounding macromolecular substances
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/20—Manufacture of shaped structures of ion-exchange resins
- C08J5/22—Films, membranes or diaphragms
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/16—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H5/00—Direct voltage accelerators; Accelerators using single pulses
- H05H5/04—Direct voltage accelerators; Accelerators using single pulses energised by electrostatic generators
- H05H5/047—Pulsed generators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/133—Renewable energy sources, e.g. sunlight
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Silicon Polymers (AREA)
- Silicon Compounds (AREA)
Abstract
Description
Claims (26)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006034061A DE102006034061A1 (de) | 2006-07-20 | 2006-07-20 | Polysilanverarbeitung und Verwendung |
DE102006034061.2 | 2006-07-20 | ||
PCT/EP2007/006487 WO2008009473A1 (de) | 2006-07-20 | 2007-07-20 | Polysilanverarbeitung und verwendung |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101522759A CN101522759A (zh) | 2009-09-02 |
CN101522759B true CN101522759B (zh) | 2012-05-23 |
Family
ID=38421409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800308152A Expired - Fee Related CN101522759B (zh) | 2006-07-20 | 2007-07-20 | 聚硅烷的处理和用途 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20090169457A1 (zh) |
EP (5) | EP2361944B1 (zh) |
JP (1) | JP5520602B2 (zh) |
KR (1) | KR20090057367A (zh) |
CN (1) | CN101522759B (zh) |
AU (1) | AU2007276384B2 (zh) |
DE (1) | DE102006034061A1 (zh) |
WO (1) | WO2008009473A1 (zh) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006034061A1 (de) | 2006-07-20 | 2008-01-24 | REV Renewable Energy Ventures, Inc., Aloha | Polysilanverarbeitung und Verwendung |
DE102006043929B4 (de) | 2006-09-14 | 2016-10-06 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von festen Polysilanmischungen |
DE102007013219A1 (de) | 2007-03-15 | 2008-09-18 | Rev Renewable Energy Ventures, Inc. | Plasmagestützte Synthese |
DE102008025264A1 (de) * | 2008-05-27 | 2009-12-03 | Rev Renewable Energy Ventures, Inc. | Granulares Silicium |
DE102008025261B4 (de) * | 2008-05-27 | 2010-03-18 | Rev Renewable Energy Ventures, Inc. | Halogeniertes Polysilan und plasmachemisches Verfahren zu dessen Herstellung |
DE102008025260B4 (de) | 2008-05-27 | 2010-03-18 | Rev Renewable Energy Ventures, Inc. | Halogeniertes Polysilan und thermisches Verfahren zu dessen Herstellung |
DE102008036143A1 (de) | 2008-08-01 | 2010-02-04 | Berlinsolar Gmbh | Verfahren zum Entfernen von nichtmetallischen Verunreinigungen aus metallurgischem Silicium |
JP6117471B2 (ja) * | 2008-09-17 | 2017-04-19 | ナガルジュナ ファーティライザーズ アンド ケミカルズ リミテッド | 第iii族ないし第v族典型元素のハロゲン化オリゴマーおよび/またはハロゲン化ポリマーの製造方法 |
DE102009027169A1 (de) | 2009-06-24 | 2010-12-30 | Wacker Chemie Ag | Verfahren zur Herstellung von Polysilanen |
DE102009056437B4 (de) | 2009-12-02 | 2013-06-27 | Spawnt Private S.À.R.L. | Verfahren und Vorrichtung zur Herstellung von kurzkettigen halogenierten Polysilanen |
DE102009056438B4 (de) * | 2009-12-02 | 2013-05-16 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von Hexachlordisilan |
DE102009056436B4 (de) * | 2009-12-02 | 2013-06-27 | Spawnt Private S.À.R.L. | Chloridhaltiges Silicium |
DE102009056731A1 (de) | 2009-12-04 | 2011-06-09 | Rev Renewable Energy Ventures, Inc. | Halogenierte Polysilane und Polygermane |
DE102010025948A1 (de) | 2010-07-02 | 2012-01-05 | Spawnt Private S.À.R.L. | Polysilane mittlerer Kettenlänge und Verfahren zu deren Herstellung |
DE102011078942A1 (de) * | 2011-07-11 | 2013-01-17 | Evonik Degussa Gmbh | Verfahren zur Herstellung höherer Silane mit verbesserter Ausbeute |
KR20140120507A (ko) * | 2013-04-03 | 2014-10-14 | 주식회사 케이씨씨 | 폴리실란 제조방법 |
DE102013207444A1 (de) * | 2013-04-24 | 2014-10-30 | Evonik Degussa Gmbh | Verfahren und Vorrichtung zur Herstellung von Polychlorsilanen |
DE102013207447A1 (de) | 2013-04-24 | 2014-10-30 | Evonik Degussa Gmbh | Verfahren und Vorrichtung zur Herstellung von Octachlortrisilan |
DE102014203810A1 (de) | 2014-03-03 | 2015-09-03 | Evonik Degussa Gmbh | Verfahren zur Herstellung reiner Octachlortrisilane und Decachlortetrasilane |
DE102014007767A1 (de) | 2014-05-21 | 2015-11-26 | Psc Polysilane Chemicals Gmbh | Verfahren und Vorrichtung zur Herstellung halogenierter Oligosilane aus Silicium und Tetrachlorsilan |
DE102014007766A1 (de) | 2014-05-21 | 2015-11-26 | Psc Polysilane Chemicals Gmbh | Verfahren zur plasmachemischen Herstellung halogenierter Oligosilane aus Tetrachlorsilan |
DE102014109275A1 (de) * | 2014-07-02 | 2016-01-07 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von Nanopartikeln, Nanopartikel und deren Verwendung |
DE102015009129B4 (de) * | 2014-07-22 | 2016-12-15 | Norbert Auner | Verfahren zur Spaltung von Silicium-Silicium-Bindungen und/oder von Silicium-Chlor-Bindungen in Mono-, Poly- und/oder Oligosilanen |
US20170334730A1 (en) * | 2014-12-15 | 2017-11-23 | Nagarjuna Fertilizers And Chemicals Limited | Method for producing chlorinated oligosilanes |
EP3088359B1 (de) | 2015-04-28 | 2018-09-12 | Evonik Degussa GmbH | Verfahren zur herstellung von octachlortrisilan und höherer polychlorsilane unter verwertung von hexachlordisilan |
CN108884228B (zh) * | 2016-04-11 | 2021-06-29 | 日本曹达株式会社 | 有机聚硅烷的制造方法 |
DE102016014900A1 (de) * | 2016-12-15 | 2018-06-21 | Psc Polysilane Chemicals Gmbh | Verfahren zur Erhöhung der Reinheit von Oligosilanen und Oligosilanverbindungen |
DE102016225872A1 (de) * | 2016-12-21 | 2018-06-21 | Evonik Degussa Gmbh | Verfahren zur Trennung von Gemischen höherer Silane |
EP3587348B1 (en) * | 2018-06-29 | 2021-08-11 | Evonik Operations GmbH | Partially hydrogenated chlorosilanes and methods for preparing same by selective hydrogenation |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4070444A (en) * | 1976-07-21 | 1978-01-24 | Motorola Inc. | Low cost, high volume silicon purification process |
US4683147A (en) * | 1984-04-16 | 1987-07-28 | Canon Kabushiki Kaisha | Method of forming deposition film |
EP0264722A2 (en) * | 1986-10-09 | 1988-04-27 | Mitsubishi Materials Corporation | Process for preparing amorphous silicon |
EP1264798A1 (en) * | 2000-08-02 | 2002-12-11 | Mitsubishi Materials Polycrystalline Silicon Corporation | Process for producing disilicon hexachloride |
WO2002100776A1 (en) * | 2001-06-08 | 2002-12-19 | Hemlock Semiconductor Corporation | Process for preparation of polycrystalline silicon |
WO2004036631A2 (en) * | 2002-10-18 | 2004-04-29 | Applied Materials, Inc. | Silicon-containing layer deposition with silicon compounds |
US20040152287A1 (en) * | 2003-01-31 | 2004-08-05 | Sherrill Adrian B. | Deposition of a silicon film |
CN1543436A (zh) * | 2001-07-23 | 2004-11-03 | 高纯度冶金硅及其制备方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL90972C (zh) * | 1954-03-12 | |||
US4321246A (en) * | 1980-05-09 | 1982-03-23 | Motorola, Inc. | Polycrystalline silicon production |
US4309259A (en) * | 1980-05-09 | 1982-01-05 | Motorola, Inc. | High pressure plasma hydrogenation of silicon tetrachloride |
DE3402318A1 (de) * | 1984-01-24 | 1985-07-25 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zur dotierung von lichtwellenleitergrundmaterial auf quarzglasbasis mit germanium |
DE3518620A1 (de) * | 1985-05-23 | 1986-11-27 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zur herstellung von lichtwellenleitergrundmaterial auf quarzglasbasis |
JPS63223175A (ja) * | 1987-03-11 | 1988-09-16 | Mitsubishi Metal Corp | 非晶質シリコン被膜の形成方法 |
DE3726702A1 (de) * | 1987-08-11 | 1989-02-23 | Wacker Chemie Gmbh | Verfahren zur verringerung des halogengehalts von halogenhaltigen polycarbosilanen und polysilanen |
EP1388570B1 (en) * | 1998-10-30 | 2009-08-26 | Mitsui Chemicals, Inc. | Crosslinked olefin elastomer foam and elastomer composition therefor |
US6703265B2 (en) * | 2000-08-02 | 2004-03-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US7033561B2 (en) * | 2001-06-08 | 2006-04-25 | Dow Corning Corporation | Process for preparation of polycrystalline silicon |
US6858196B2 (en) * | 2001-07-19 | 2005-02-22 | Asm America, Inc. | Method and apparatus for chemical synthesis |
DE102004037675A1 (de) * | 2004-08-04 | 2006-03-16 | Degussa Ag | Verfahren und Vorrichtung zur Reinigung von Wasserstoffverbindungen enthaltendem Siliciumtetrachlorid oder Germaniumtetrachlorid |
DE102005024041A1 (de) * | 2005-05-25 | 2006-11-30 | City Solar Ag | Verfahren zur Herstellung von Silicium aus Halogensilanen |
US7943721B2 (en) * | 2005-10-05 | 2011-05-17 | Kovio, Inc. | Linear and cross-linked high molecular weight polysilanes, polygermanes, and copolymers thereof, compositions containing the same, and methods of making and using such compounds and compositions |
DE102006034061A1 (de) | 2006-07-20 | 2008-01-24 | REV Renewable Energy Ventures, Inc., Aloha | Polysilanverarbeitung und Verwendung |
DE102007007874A1 (de) * | 2007-02-14 | 2008-08-21 | Evonik Degussa Gmbh | Verfahren zur Herstellung höherer Silane |
-
2006
- 2006-07-20 DE DE102006034061A patent/DE102006034061A1/de not_active Ceased
-
2007
- 2007-07-20 US US12/374,339 patent/US20090169457A1/en not_active Abandoned
- 2007-07-20 EP EP11167143.4A patent/EP2361944B1/de not_active Not-in-force
- 2007-07-20 EP EP11167144.2A patent/EP2361945B1/de not_active Not-in-force
- 2007-07-20 CN CN2007800308152A patent/CN101522759B/zh not_active Expired - Fee Related
- 2007-07-20 EP EP11167152.5A patent/EP2361946B1/de not_active Not-in-force
- 2007-07-20 AU AU2007276384A patent/AU2007276384B2/en not_active Ceased
- 2007-07-20 EP EP07786235.7A patent/EP2044143B1/de not_active Not-in-force
- 2007-07-20 JP JP2009519878A patent/JP5520602B2/ja not_active Expired - Fee Related
- 2007-07-20 WO PCT/EP2007/006487 patent/WO2008009473A1/de active Application Filing
- 2007-07-20 EP EP11167142A patent/EP2361943A1/de not_active Withdrawn
- 2007-07-20 KR KR1020097003338A patent/KR20090057367A/ko active IP Right Grant
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4070444A (en) * | 1976-07-21 | 1978-01-24 | Motorola Inc. | Low cost, high volume silicon purification process |
US4683147A (en) * | 1984-04-16 | 1987-07-28 | Canon Kabushiki Kaisha | Method of forming deposition film |
EP0264722A2 (en) * | 1986-10-09 | 1988-04-27 | Mitsubishi Materials Corporation | Process for preparing amorphous silicon |
EP1264798A1 (en) * | 2000-08-02 | 2002-12-11 | Mitsubishi Materials Polycrystalline Silicon Corporation | Process for producing disilicon hexachloride |
WO2002100776A1 (en) * | 2001-06-08 | 2002-12-19 | Hemlock Semiconductor Corporation | Process for preparation of polycrystalline silicon |
CN1543436A (zh) * | 2001-07-23 | 2004-11-03 | 高纯度冶金硅及其制备方法 | |
WO2004036631A2 (en) * | 2002-10-18 | 2004-04-29 | Applied Materials, Inc. | Silicon-containing layer deposition with silicon compounds |
US20040152287A1 (en) * | 2003-01-31 | 2004-08-05 | Sherrill Adrian B. | Deposition of a silicon film |
Non-Patent Citations (1)
Title |
---|
陈希茜,余兆祥.聚硅烷的合成与应用.《河南化工》.2004,(第12期), * |
Also Published As
Publication number | Publication date |
---|---|
AU2007276384A1 (en) | 2008-01-24 |
EP2044143A1 (de) | 2009-04-08 |
US20090169457A1 (en) | 2009-07-02 |
CN101522759A (zh) | 2009-09-02 |
EP2361946B1 (de) | 2017-02-15 |
DE102006034061A1 (de) | 2008-01-24 |
EP2044143B1 (de) | 2017-02-15 |
EP2361944B1 (de) | 2017-02-15 |
EP2361946A1 (de) | 2011-08-31 |
EP2361945B1 (de) | 2017-02-15 |
EP2361944A1 (de) | 2011-08-31 |
JP5520602B2 (ja) | 2014-06-11 |
EP2361943A1 (de) | 2011-08-31 |
EP2361945A1 (de) | 2011-08-31 |
WO2008009473A1 (de) | 2008-01-24 |
KR20090057367A (ko) | 2009-06-05 |
AU2007276384B2 (en) | 2013-06-06 |
JP2009543828A (ja) | 2009-12-10 |
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C06 | Publication | ||
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Owner name: SIBO ENTE PRIVATE LIMITED COMPANY Free format text: FORMER OWNER: REV RENEWABLE ENERGY VENTURES Effective date: 20101008 |
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Effective date of registration: 20101008 Address after: Luxemburg Luxemburg Applicant after: SPAWNT PRIVATE S.A.R.L. Address before: Swiss Swiss Applicant before: REV RENEWABLE ENERGY VENTURES Inc. |
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TR01 | Transfer of patent right |
Effective date of registration: 20160929 Address after: Hyderabad Patentee after: Nagarjuna Fertilizers and Chemicals Ltd. Address before: Mauritius Port Louis Patentee before: Dragon tree Industrial Services & Investment Pte. Ltd. Effective date of registration: 20160929 Address after: Mauritius Port Louis Patentee after: Dragon tree Industrial Services & Investment Pte. Ltd. Address before: Luxemburg Luxemburg Patentee before: SPAWNT PRIVATE S.A.R.L. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120523 Termination date: 20180720 |