CN101512747B - 基板运送装置以及基板运送方法 - Google Patents

基板运送装置以及基板运送方法 Download PDF

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Publication number
CN101512747B
CN101512747B CN2007800331888A CN200780033188A CN101512747B CN 101512747 B CN101512747 B CN 101512747B CN 2007800331888 A CN2007800331888 A CN 2007800331888A CN 200780033188 A CN200780033188 A CN 200780033188A CN 101512747 B CN101512747 B CN 101512747B
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China
Prior art keywords
substrate
conveyor
branch
main
main conveyor
Prior art date
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Active
Application number
CN2007800331888A
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English (en)
Chinese (zh)
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CN101512747A (zh
Inventor
平田贤辅
水野智夫
村山晋
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IHI Corp
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IHI Corp
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Publication date
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Publication of CN101512747A publication Critical patent/CN101512747A/zh
Application granted granted Critical
Publication of CN101512747B publication Critical patent/CN101512747B/zh
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3208—Changing the direction of the conveying path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Relays Between Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
CN2007800331888A 2006-09-11 2007-02-15 基板运送装置以及基板运送方法 Active CN101512747B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP246134/2006 2006-09-11
JP2006246134A JP5028919B2 (ja) 2006-09-11 2006-09-11 基板搬送装置及び基板搬送方法
PCT/JP2007/052670 WO2008032456A1 (fr) 2006-09-11 2007-02-15 Appareil de transfert de substrat et procédé de mise en oeuvre associé

Publications (2)

Publication Number Publication Date
CN101512747A CN101512747A (zh) 2009-08-19
CN101512747B true CN101512747B (zh) 2012-04-25

Family

ID=39183525

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800331888A Active CN101512747B (zh) 2006-09-11 2007-02-15 基板运送装置以及基板运送方法

Country Status (5)

Country Link
JP (1) JP5028919B2 (https=)
KR (1) KR20090039792A (https=)
CN (1) CN101512747B (https=)
TW (1) TW200812889A (https=)
WO (1) WO2008032456A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100978852B1 (ko) * 2008-06-12 2010-08-31 세메스 주식회사 기판 반송 장치 및 그 방법 그리고 그 장치를 갖는 기판제조 설비
CN103158899A (zh) * 2011-12-15 2013-06-19 苏州澳昆智能机器人技术有限公司 包装箱输送线的包装箱转弯定位机构
KR101610215B1 (ko) * 2012-04-26 2016-04-07 가부시키가이샤 아이에이치아이 반송 장치
JP6106988B2 (ja) * 2012-08-23 2017-04-05 株式会社Ihi 搬送装置
JP5915358B2 (ja) * 2012-04-26 2016-05-11 株式会社Ihi 搬送装置
CN104779189B (zh) * 2014-01-13 2017-09-01 上海和辉光电有限公司 切割后玻璃面板搬送装置与搬送方法
CN107316834A (zh) * 2017-07-31 2017-11-03 武汉华星光电半导体显示技术有限公司 基板传送装置
EP3514825B1 (en) * 2018-01-22 2023-11-29 Meyer Burger GmbH Wafer sorting
CN110282433A (zh) * 2019-06-14 2019-09-27 中国建材国际工程集团有限公司 一种基于中断的玻璃自动对准系统及方法
CN112536786B (zh) * 2020-11-17 2022-01-28 宁波金凤焊割机械制造有限公司 一种金属条板喷码划线系统

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4161273B2 (ja) * 2003-12-16 2008-10-08 株式会社ダイフク 搬送装置

Also Published As

Publication number Publication date
TW200812889A (en) 2008-03-16
TWI329607B (https=) 2010-09-01
WO2008032456A1 (fr) 2008-03-20
CN101512747A (zh) 2009-08-19
JP2008066675A (ja) 2008-03-21
JP5028919B2 (ja) 2012-09-19
KR20090039792A (ko) 2009-04-22

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