CN101512747B - 基板运送装置以及基板运送方法 - Google Patents

基板运送装置以及基板运送方法 Download PDF

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Publication number
CN101512747B
CN101512747B CN2007800331888A CN200780033188A CN101512747B CN 101512747 B CN101512747 B CN 101512747B CN 2007800331888 A CN2007800331888 A CN 2007800331888A CN 200780033188 A CN200780033188 A CN 200780033188A CN 101512747 B CN101512747 B CN 101512747B
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China
Prior art keywords
branch
conveyer
substrate
conveyor
mentioned
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CN2007800331888A
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English (en)
Chinese (zh)
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CN101512747A (zh
Inventor
平田贤辅
水野智夫
村山晋
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IHI Corp
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IHI Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Engineering (AREA)
  • Relays Between Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
CN2007800331888A 2006-09-11 2007-02-15 基板运送装置以及基板运送方法 Active CN101512747B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP246134/2006 2006-09-11
JP2006246134A JP5028919B2 (ja) 2006-09-11 2006-09-11 基板搬送装置及び基板搬送方法
PCT/JP2007/052670 WO2008032456A1 (fr) 2006-09-11 2007-02-15 Appareil de transfert de substrat et procédé de mise en oeuvre associé

Publications (2)

Publication Number Publication Date
CN101512747A CN101512747A (zh) 2009-08-19
CN101512747B true CN101512747B (zh) 2012-04-25

Family

ID=39183525

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800331888A Active CN101512747B (zh) 2006-09-11 2007-02-15 基板运送装置以及基板运送方法

Country Status (5)

Country Link
JP (1) JP5028919B2 (enExample)
KR (1) KR20090039792A (enExample)
CN (1) CN101512747B (enExample)
TW (1) TW200812889A (enExample)
WO (1) WO2008032456A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100978852B1 (ko) * 2008-06-12 2010-08-31 세메스 주식회사 기판 반송 장치 및 그 방법 그리고 그 장치를 갖는 기판제조 설비
CN103158899A (zh) * 2011-12-15 2013-06-19 苏州澳昆智能机器人技术有限公司 包装箱输送线的包装箱转弯定位机构
JP5915358B2 (ja) * 2012-04-26 2016-05-11 株式会社Ihi 搬送装置
JP6106988B2 (ja) * 2012-08-23 2017-04-05 株式会社Ihi 搬送装置
KR101610215B1 (ko) * 2012-04-26 2016-04-07 가부시키가이샤 아이에이치아이 반송 장치
CN104779189B (zh) * 2014-01-13 2017-09-01 上海和辉光电有限公司 切割后玻璃面板搬送装置与搬送方法
CN107316834A (zh) * 2017-07-31 2017-11-03 武汉华星光电半导体显示技术有限公司 基板传送装置
EP3514825B1 (en) * 2018-01-22 2023-11-29 Meyer Burger GmbH Wafer sorting
CN110282433A (zh) * 2019-06-14 2019-09-27 中国建材国际工程集团有限公司 一种基于中断的玻璃自动对准系统及方法
CN112536786B (zh) * 2020-11-17 2022-01-28 宁波金凤焊割机械制造有限公司 一种金属条板喷码划线系统

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4161273B2 (ja) * 2003-12-16 2008-10-08 株式会社ダイフク 搬送装置

Also Published As

Publication number Publication date
WO2008032456A1 (fr) 2008-03-20
CN101512747A (zh) 2009-08-19
TWI329607B (enExample) 2010-09-01
JP5028919B2 (ja) 2012-09-19
KR20090039792A (ko) 2009-04-22
TW200812889A (en) 2008-03-16
JP2008066675A (ja) 2008-03-21

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