CN101493495A - Semiconductor device testing and sorting machine - Google Patents
Semiconductor device testing and sorting machine Download PDFInfo
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- CN101493495A CN101493495A CNA2009100257185A CN200910025718A CN101493495A CN 101493495 A CN101493495 A CN 101493495A CN A2009100257185 A CNA2009100257185 A CN A2009100257185A CN 200910025718 A CN200910025718 A CN 200910025718A CN 101493495 A CN101493495 A CN 101493495A
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Abstract
The invention discloses a separator for testing semiconductor devices, belonging to the field of semiconductor device detection technique. The separator comprises a rotation workbench which is arranged at the upper end of a vertical shaft; the external circumference of the rotation workbench is uniformly provided with a plurality of liftable suction nozzles; the rotation workbench is sequentially provided with a separation platform, a first rotation positioning device, a detection head, an image camera, an auxiliary rotation disc, a second rotation positioning device, a blanking mechanism and a braiding mechanism which are arranged in clockwise direction or anticlockwise direction and corresponding to the positions of the suction nozzles; the separation platform is connected with the blanking mechanism; the first rotation positioning device and the second rotation positioning device respectively comprise a cavity which is adaptable for the device to be detected; the cavity is arranged below the suction nozzle at the corresponding working position; the circumference of the auxiliary rotation disc is uniformly provided with a plurality of concave cavities which can hold the device to be detected; and the side surface of the auxiliary rotation disc is provided with a marking laser head which is corresponding to the concave cavity. The separator leads a computer to control a plurality of detection devices to work cooperatively, can realize detection, marking, separating and braiding, and has compact structure and high efficiency.
Description
Technical field
The present invention relates to a kind of device of semiconducter device testing sorting.
Background technology
After the semiconductor devices manufacturing is finished, need detect it, mark, sorting, tape package, in the prior art, above-mentioned each course of work is independently to carry out, it is slow that it detects separation velocity, equipment is many and mix, production efficiency is low.
Summary of the invention
The purpose of this invention is to provide a kind of semiconductor device test separator, make detection, mark, sorting, the braid of semiconductor devices can on a machine, realize this apparatus structure compactness, detection efficiency height.
The object of the present invention is achieved like this: a kind of semiconductor device test separator, comprise horizontally disposed rotary table, rotary table is installed in the vertical shaft upper end, be evenly equipped with some liftable suction nozzles on the rotary table excircle, be furnished with successively clockwise or counterclockwise and the corresponding separating table in suction nozzle position around the rotary table, first rotary positioning apparatus, detection head, the image pickup head, secondary rotating disk, second rotary positioning apparatus, cutting agency and braid mechanism, described separating table is connected with feed mechanism, described first rotary positioning apparatus, second rotary positioning apparatus respectively comprise one with the suitable die cavity of detected device, die cavity is positioned at the suction nozzle below of corresponding station just; Secondary rotating disk periphery is evenly equipped with some cavitys that hold detected device, and secondary rotating disk side is provided with the mark laser head corresponding with cavity.
During this device work, semiconductor devices is from the feed mechanism material loading, enter separating table then, the semiconductor devices suction be about under the suction nozzle in the suction nozzle bottom, suction nozzle lifts then, rotary table turns to first rotary positioning apparatus top, suction nozzle is descending, semiconductor devices is pressed down enter in the die cavity, under the guide effect of die cavity, semiconductor devices rotates, make its position accurately be positioned at the position of setting, so that in detection subsequently, its pin can mate with detection head, after suction nozzle rises once more, rotary table rotates a station once more, the pin of detection head and semiconductor devices just over against, suction nozzle is descending, detection head touches pin, every performance index to semiconductor devices detect, detection head can have a plurality of, lay respectively on the different station, after a kind of parameter detecting finishes, transfer to the detection that next station carries out other parameters again, by detecting, can determine semiconductor devices whether qualified or its belong to any class quality, and give computing machine and preserve, after detection head detects, semiconductor devices is transferred to next station, the image pickup head can carry out outward appearance to it and detect, semiconductor devices is transferred to next station then, it is secondary rotating disk top, the suction nozzle release semiconductor devices of dying, make it enter into cavity, secondary dial rotation, make cavity over against the mark laser head, the mark laser head is stamped corresponding sign at semiconductor devices, detect underproof product for station before, suction nozzle also can not discharge semiconductor devices, enters next station and be with semiconductor devices to cross secondary rotating disk, and the semiconductor devices after the mark turns to corresponding station once more, can be held by suction nozzle once more, then it is transferred to the top of second rotary positioning apparatus, the reason same with first whirligig is after semiconductor devices is pressed down the location once more, transfer to the cutting agency blanking, cutting agency can be for a plurality of, and each occupies a station, and it is corresponding to the workpiece of different qualities, according to the result who detects, the semiconductor devices of the different detected parameters of computer-controllable system is in which cutting agency blanking; For specific semiconductor devices, cutting agency also can have only one, and it is exclusively used in defective blanking, and final qualified workpiece or the semiconductor devices that meets certain quality are sent to braid mechanism and carry out tape package.This device is realized detection, mark, sorting, braid by a plurality of pick-up unit collaborative works of computer control on a machine; This apparatus structure compactness, the multistation continuous working can obviously improve the detection efficiency of separation.
Description of drawings
Fig. 1 is a perspective view of the present invention.
Fig. 2 is the vertical view after removal rotary table and the nozzle portion in Fig. 1 semiconductor device test separator.
Wherein, 1 separating table, 2 feed mechanisms, 3 first rotary positioning apparatus, 4 detection heads, 5 secondary rotating disks, 6 image pickup heads, 7 mark laser heads, 8 cutting agencies, 9 rotary tables, 10 braid mechanisms, 11 suction nozzles, 12 cavitys, 13 second rotary positioning apparatus, 14 vertical shafts, 15 die cavitys.
Embodiment
As Fig. 1 and 2, be a kind of semiconductor device test separator, comprise horizontally disposed rotary table 9, rotary table 9 is installed in vertical shaft 14 upper ends, be evenly equipped with some liftable suction nozzles 11 on rotary table 9 excircles, be furnished with successively along clockwise direction and the corresponding separating table 1 in suction nozzle 11 positions around the rotary table 9, first rotary positioning apparatus 3, detection head 4, image pickup head 6, secondary rotating disk 5, second rotary positioning apparatus 13, cutting agency 8 and braid mechanism 10, described separating table 1 is connected with feed mechanism 2, described first rotary positioning apparatus 3, second rotary positioning apparatus 13 respectively comprise one with the suitable die cavity 15 of detected device, die cavity 15 is positioned at suction nozzle 11 belows of corresponding station just; Secondary rotating disk 5 peripheries are evenly equipped with some cavitys 12 that hold detected device, and secondary rotating disk 5 sides are provided with the mark laser head 7 corresponding with cavity 12.
During this device work, semiconductor devices is from feed mechanism 2 material loadings, enter separating table 1 then, suction nozzle is about to the semiconductor devices suction for 11 times in suction nozzle 11 bottoms, suction nozzle 11 lifts then, rotary table turns to first rotary positioning apparatus, 3 tops, suction nozzle 11 is descending, semiconductor devices is pressed down enter in the die cavity 15, under the guide effect of die cavity 15, semiconductor devices rotates, make its position accurately be positioned at the position of setting, so that in detection subsequently, its pin can mate with detection head 4, after suction nozzle 11 rises once more, rotary table rotates a station once more, the pin of detection head 4 and semiconductor devices just over against, suction nozzle 11 is descending, detection head 4 touches pin, every performance index to semiconductor devices detect, detection head 4 can have a plurality of, lay respectively on the different station, after a kind of parameter detecting finishes, transfer to the detection that next station carries out other parameters again, by detecting, can determine semiconductor devices whether qualified or its belong to any class quality, and give computing machine and preserve, after detection head 4 detects, semiconductor devices is transferred to next station, image pickup head 6 can carry out outward appearance to it and detect, semiconductor devices is transferred to next station again then, be secondary rotating disk 5 tops, the suction nozzle 11 release semiconductor devices of dying, make semiconductor devices enter into cavity 12, secondary rotating disk 5 rotates, make cavity 12 over against mark laser head 7, mark laser head 7 is stamped corresponding sign to semiconductor devices, detect underproof product for station before, suction nozzle 11 also can not discharge semiconductor devices, enter next station and be with semiconductor devices to cross secondary rotating disk 5, semiconductor devices after the mark turns to corresponding station once more, can be held by suction nozzle 11 once more, then it be transferred to the top of second rotary positioning apparatus 13, the reason same with first rotary positioning apparatus, after semiconductor devices is pressed down the location once more, suction nozzle picks up it, transfers to cutting agency 8 blankings, and cutting agency 8 can be for a plurality of, each occupies a station, it is corresponding to the workpiece of different qualities, and according to the result who detects, the semiconductor devices of the different detected parameters of computer-controllable system is in which cutting agency blanking; For specific semiconductor devices, cutting agency also can have only one, and it is exclusively used in defective blanking, and final qualified workpiece is sent to braid mechanism 10 and carries out tape package.In the present embodiment, cutting agency is two.
Claims (2)
1, a kind of semiconductor device test separator, it is characterized in that comprising horizontally disposed rotary table, rotary table is installed in the vertical shaft upper end, be evenly equipped with some liftable suction nozzles on the rotary table excircle, be furnished with successively clockwise or counterclockwise and the corresponding separating table in suction nozzle position around the rotary table, first rotary positioning apparatus, detection head, the image pickup head, secondary rotating disk, second rotary positioning apparatus, cutting agency and braid mechanism, described separating table is connected with feed mechanism, described first rotary positioning apparatus, second rotary positioning apparatus respectively comprise one with the suitable die cavity of detected device, die cavity is positioned at the suction nozzle below of corresponding station just; Secondary rotating disk periphery is evenly equipped with some cavitys that hold detected device, and secondary rotating disk side is provided with the mark laser head corresponding with cavity.
2, a kind of semiconductor device test separator according to claim 1 is characterized in that: described cutting agency is provided with two at least.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100257185A CN101493495A (en) | 2009-03-06 | 2009-03-06 | Semiconductor device testing and sorting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100257185A CN101493495A (en) | 2009-03-06 | 2009-03-06 | Semiconductor device testing and sorting machine |
Publications (1)
| Publication Number | Publication Date |
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| CN101493495A true CN101493495A (en) | 2009-07-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNA2009100257185A Pending CN101493495A (en) | 2009-03-06 | 2009-03-06 | Semiconductor device testing and sorting machine |
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| CN (1) | CN101493495A (en) |
Cited By (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101989535A (en) * | 2009-08-05 | 2011-03-23 | 深圳市远望工业自动化设备有限公司 | All-in-one machine of semiconductor device for testing, sorting, marking and braiding and one-stop processing method |
| CN102565655A (en) * | 2011-08-31 | 2012-07-11 | 深圳市创益科技发展有限公司 | Detection equipment of film solar cell and method thereof |
| CN102556651A (en) * | 2010-12-23 | 2012-07-11 | 江阴格朗瑞科技有限公司 | Stripe test sorting machine and conveying device thereof |
| CN102873993A (en) * | 2012-10-22 | 2013-01-16 | 江阴格朗瑞科技有限公司 | Turntable type testing, printing and braiding all in one machine |
| CN103512614A (en) * | 2013-09-13 | 2014-01-15 | 塑能科技（苏州）有限公司 | ABS box testing machine |
| CN103645403A (en) * | 2013-12-17 | 2014-03-19 | 成都先进功率半导体股份有限公司 | System and method for testing electronic components in semiconductor production |
| CN103675561A (en) * | 2013-12-31 | 2014-03-26 | 上海亨井联接件有限公司 | Automatic mouse testing device, cycle delivery mechanism and method thereof |
| CN103752527A (en) * | 2014-01-06 | 2014-04-30 | 歌尔声学股份有限公司 | Method for automatically identifying defective products of electronic products |
| CN103921969A (en) * | 2014-03-12 | 2014-07-16 | 何选民 | Integrated classifying and tape-loading equipment for chip components |
| CN104007379A (en) * | 2013-02-27 | 2014-08-27 | 英飞凌科技股份有限公司 | Turret handlers and methods of operations thereof |
| CN104773317A (en) * | 2014-01-10 | 2015-07-15 | 株式会社村田制作所 | Apparatus and method for manufacturing a series of taped electronic components |
| CN104801496A (en) * | 2014-01-23 | 2015-07-29 | 先进科技新加坡有限公司 | Test handler that picks up electronic devices for testing and an orientation-changing apparatus for use in a test handler |
| CN105436100A (en) * | 2015-12-25 | 2016-03-30 | 深圳市标谱半导体科技有限公司 | SMD LED light splitting and taping integrated machine |
| CN105644830A (en) * | 2016-04-01 | 2016-06-08 | 东莞市台工电子机械科技有限公司 | LED product disc-type automatic braider |
| CN105710049A (en) * | 2015-06-19 | 2016-06-29 | 保定来福汽车照明集团有限公司 | Automatic screening machine for bulbs |
| CN105750223A (en) * | 2016-05-06 | 2016-07-13 | 深圳市朝阳光科技有限公司 | Fully-automatic double-end implanted patch type LED spectrometer |
| CN107336529A (en) * | 2017-07-31 | 2017-11-10 | 深圳市深科达半导体科技有限公司 | Marking device |
| CN108100341A (en) * | 2018-01-12 | 2018-06-01 | 深圳市三联光智能设备股份有限公司 | Braid equipment and its turntable feed device |
| CN108427043A (en) * | 2017-02-13 | 2018-08-21 | 华邦电子股份有限公司 | Rotary type tower test equipment and its rotary type tower test method |
| CN108761301A (en) * | 2018-08-03 | 2018-11-06 | 天津必利优科技发展有限公司 | A kind of SMD crystal mechanism for testing |
| CN108961212A (en) * | 2018-05-29 | 2018-12-07 | 歌尔股份有限公司 | A kind of position finding and detection method of product, device and electronic equipment |
| CN109174701A (en) * | 2018-10-12 | 2019-01-11 | 江苏信息职业技术学院 | A kind of IC chip test sorting unit and its working method |
| CN109675836A (en) * | 2019-01-10 | 2019-04-26 | 深圳市诺泰自动化设备有限公司 | A kind of high speed test sorting unit |
| CN110026824A (en) * | 2019-05-20 | 2019-07-19 | 福州派利德电子科技有限公司 | IC chip test sorting machine marking device and control method |
| CN110371596A (en) * | 2019-06-18 | 2019-10-25 | 杭州长川科技股份有限公司 | Rotating disc type chip feeding device and chip charging method |
| CN113617691A (en) * | 2021-08-02 | 2021-11-09 | 深圳市诺泰芯装备有限公司 | Light sense component test sorting facilities |
| CN114653605A (en) * | 2022-03-23 | 2022-06-24 | 潍坊路加精工有限公司 | Accelerator handle final inspection equipment |
| CN117066139A (en) * | 2023-10-18 | 2023-11-17 | 四川辰宇微视科技有限公司 | Device and method for efficiently detecting concentricity of microchannel plate |
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Cited By (39)
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| CN101989535A (en) * | 2009-08-05 | 2011-03-23 | 深圳市远望工业自动化设备有限公司 | All-in-one machine of semiconductor device for testing, sorting, marking and braiding and one-stop processing method |
| CN101989535B (en) * | 2009-08-05 | 2013-09-18 | 深圳市远望工业自动化设备有限公司 | All-in-one machine of semiconductor device for testing, sorting, marking and braiding and one-stop processing method |
| CN102556651A (en) * | 2010-12-23 | 2012-07-11 | 江阴格朗瑞科技有限公司 | Stripe test sorting machine and conveying device thereof |
| CN102565655A (en) * | 2011-08-31 | 2012-07-11 | 深圳市创益科技发展有限公司 | Detection equipment of film solar cell and method thereof |
| CN102565655B (en) * | 2011-08-31 | 2015-08-19 | 深圳市创益科技发展有限公司 | The checkout equipment of thin-film solar cells and method |
| CN102873993A (en) * | 2012-10-22 | 2013-01-16 | 江阴格朗瑞科技有限公司 | Turntable type testing, printing and braiding all in one machine |
| US9594111B2 (en) | 2013-02-27 | 2017-03-14 | Infineon Technologies Ag | Turret handlers and methods of operations thereof |
| CN104007379A (en) * | 2013-02-27 | 2014-08-27 | 英飞凌科技股份有限公司 | Turret handlers and methods of operations thereof |
| CN104007379B (en) * | 2013-02-27 | 2017-06-20 | 英飞凌科技股份有限公司 | Turntable processor and its operating method |
| CN103512614A (en) * | 2013-09-13 | 2014-01-15 | 塑能科技（苏州）有限公司 | ABS box testing machine |
| CN103645403A (en) * | 2013-12-17 | 2014-03-19 | 成都先进功率半导体股份有限公司 | System and method for testing electronic components in semiconductor production |
| CN103675561A (en) * | 2013-12-31 | 2014-03-26 | 上海亨井联接件有限公司 | Automatic mouse testing device, cycle delivery mechanism and method thereof |
| CN103675561B (en) * | 2013-12-31 | 2016-05-11 | 上海亨井联接件有限公司 | Mouse full-automatic testing equipment |
| CN103752527A (en) * | 2014-01-06 | 2014-04-30 | 歌尔声学股份有限公司 | Method for automatically identifying defective products of electronic products |
| CN104773317A (en) * | 2014-01-10 | 2015-07-15 | 株式会社村田制作所 | Apparatus and method for manufacturing a series of taped electronic components |
| CN104801496B (en) * | 2014-01-23 | 2018-01-19 | 先进科技新加坡有限公司 | The testing, sorting machine and its orientation that pickup electronic device is tested change device |
| CN104801496A (en) * | 2014-01-23 | 2015-07-29 | 先进科技新加坡有限公司 | Test handler that picks up electronic devices for testing and an orientation-changing apparatus for use in a test handler |
| CN103921969B (en) * | 2014-03-12 | 2016-03-30 | 深圳市标谱半导体科技有限公司 | The classification of chip component and dress band integration apparatus |
| CN103921969A (en) * | 2014-03-12 | 2014-07-16 | 何选民 | Integrated classifying and tape-loading equipment for chip components |
| CN105710049A (en) * | 2015-06-19 | 2016-06-29 | 保定来福汽车照明集团有限公司 | Automatic screening machine for bulbs |
| CN105436100A (en) * | 2015-12-25 | 2016-03-30 | 深圳市标谱半导体科技有限公司 | SMD LED light splitting and taping integrated machine |
| CN105644830A (en) * | 2016-04-01 | 2016-06-08 | 东莞市台工电子机械科技有限公司 | LED product disc-type automatic braider |
| CN105750223A (en) * | 2016-05-06 | 2016-07-13 | 深圳市朝阳光科技有限公司 | Fully-automatic double-end implanted patch type LED spectrometer |
| CN108427043A (en) * | 2017-02-13 | 2018-08-21 | 华邦电子股份有限公司 | Rotary type tower test equipment and its rotary type tower test method |
| CN107336529A (en) * | 2017-07-31 | 2017-11-10 | 深圳市深科达半导体科技有限公司 | Marking device |
| CN108100341A (en) * | 2018-01-12 | 2018-06-01 | 深圳市三联光智能设备股份有限公司 | Braid equipment and its turntable feed device |
| CN108100341B (en) * | 2018-01-12 | 2023-07-21 | 深圳市三一联光智能设备股份有限公司 | Braiding equipment and turntable feeding device thereof |
| CN108961212B (en) * | 2018-05-29 | 2020-12-18 | 歌尔光学科技有限公司 | Product positioning detection method and device and electronic equipment |
| CN108961212A (en) * | 2018-05-29 | 2018-12-07 | 歌尔股份有限公司 | A kind of position finding and detection method of product, device and electronic equipment |
| CN108761301A (en) * | 2018-08-03 | 2018-11-06 | 天津必利优科技发展有限公司 | A kind of SMD crystal mechanism for testing |
| CN108761301B (en) * | 2018-08-03 | 2024-05-07 | 天津必利优科技发展有限公司 | SMD crystal testing mechanism |
| CN109174701A (en) * | 2018-10-12 | 2019-01-11 | 江苏信息职业技术学院 | A kind of IC chip test sorting unit and its working method |
| CN109675836A (en) * | 2019-01-10 | 2019-04-26 | 深圳市诺泰自动化设备有限公司 | A kind of high speed test sorting unit |
| CN110026824A (en) * | 2019-05-20 | 2019-07-19 | 福州派利德电子科技有限公司 | IC chip test sorting machine marking device and control method |
| CN110371596A (en) * | 2019-06-18 | 2019-10-25 | 杭州长川科技股份有限公司 | Rotating disc type chip feeding device and chip charging method |
| CN113617691A (en) * | 2021-08-02 | 2021-11-09 | 深圳市诺泰芯装备有限公司 | Light sense component test sorting facilities |
| CN114653605A (en) * | 2022-03-23 | 2022-06-24 | 潍坊路加精工有限公司 | Accelerator handle final inspection equipment |
| CN117066139A (en) * | 2023-10-18 | 2023-11-17 | 四川辰宇微视科技有限公司 | Device and method for efficiently detecting concentricity of microchannel plate |
| CN117066139B (en) * | 2023-10-18 | 2023-12-26 | 四川辰宇微视科技有限公司 | Device and method for efficiently detecting concentricity of microchannel plate |
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Application publication date: 20090729 |